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1 Copyright 2001 - Digital Metrology Solutions, Inc. Dimensional & Dimensional & Surface Metrology Surface Metrology Mark C. Malburg

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Page 1: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

1 Copyright 2001 - Digital Metrology Solutions, Inc.

Dimensional & Dimensional & Surface MetrologySurface Metrology

Mark C. Malburg

Page 2: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

2 Copyright 2001 - Digital Metrology Solutions, Inc.

Dimensional and Surface Dimensional and Surface MetrologyMetrology

•• Where We AreWhere We Are— Historical Overview— Information Overload — Instrument Overlaps

•• Customer Concerns Customer Concerns •• Where We Should be GoingWhere We Should be Going

— Understanding of Functionality— Underlying Standards Providing Tools— Uncertainty as a Connection to Reality

•• Case StudiesCase Studies•• RecommendationsRecommendations

Page 3: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

3 Copyright 2001 - Digital Metrology Solutions, Inc.

Where We AreWhere We Are

A Brief Historical OverviewA Brief Historical Overview

Page 4: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

4 Copyright 2001 - Digital Metrology Solutions, Inc.

Historical Metrology ThinkingHistorical Metrology Thinking

•• The historical approach to “size”The historical approach to “size”

mm x10

12

34

56

70

80

60

Page 5: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

5 Copyright 2001 - Digital Metrology Solutions, Inc.

Modern Metrology ThinkingModern Metrology Thinking

•• Some modern approaches to “size”Some modern approaches to “size”

Page 6: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

6 Copyright 2001 - Digital Metrology Solutions, Inc.

Historical Metrology ThinkingHistorical Metrology Thinking

•• Historical Surface Roughness AssessmentHistorical Surface Roughness Assessment

Page 7: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

7 Copyright 2001 - Digital Metrology Solutions, Inc.

Modern Metrology ThinkingModern Metrology Thinking

•• Modern Surface Texture AnalysisModern Surface Texture Analysis

Page 8: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

8 Copyright 2001 - Digital Metrology Solutions, Inc.

Historical Developments and Historical Developments and the State of Metrologythe State of Metrology

•• Historically metrology instrumentation Historically metrology instrumentation provided a “number”provided a “number”— This “number” was often influenced by the

operator’s skill.•Alignment, scale-reading, force, etc.

•• Today’s metrology instrumentation is Today’s metrology instrumentation is capable of proving many “numbers”capable of proving many “numbers”— These “numbers” are often influenced by

several configurable parameters and controls.•Data density, filtering, algorithms, etc.

Page 9: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

9 Copyright 2001 - Digital Metrology Solutions, Inc.

Where We AreWhere We Are

Information OverloadInformation Overload

Page 10: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

10 Copyright 2001 - Digital Metrology Solutions, Inc.

Information OverloadInformation Overload

•• Today’s metrology instrumentation is Today’s metrology instrumentation is providing more and more analytical providing more and more analytical capabilities.capabilities.— See also:

Whitehouse D.J., 1982, The Parameter Rash - Is There a Cure?”, Wear, 83, 75

Page 11: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

11 Copyright 2001 - Digital Metrology Solutions, Inc.

Increased Data Processing in a Increased Data Processing in a Simple ContextSimple Context

Taylor Hobson Form Talysurf SeriesTaylor Hobson Form Talysurf SeriesDOS Software rev 6.0DOS Software rev 6.0

— 71 Parameters— 3 Filter Types— 9 Roughness Cutoffs— Up to 3 Bandwidths at each cutoff

And this is for a “simple” stylus instrument!And this is for a “simple” stylus instrument!

Page 12: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

12 Copyright 2001 - Digital Metrology Solutions, Inc.

Information OverloadInformation Overload

•• These additional capabilities are not These additional capabilities are not necessarily a “bad” thing.necessarily a “bad” thing.— However, this introduces a new culture

requiring additional training and interpretation.

Page 13: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

13 Copyright 2001 - Digital Metrology Solutions, Inc.

Information OverloadInformation Overload

“The phenomenon of information overload is “The phenomenon of information overload is in its infancy. If according to some in its infancy. If according to some estimates, the amount of information estimates, the amount of information doubles every eighteen months, then by doubles every eighteen months, then by 2015 there will be 1,000 bits of data for 2015 there will be 1,000 bits of data for every fact in existence.every fact in existence.

Page 14: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

14 Copyright 2001 - Digital Metrology Solutions, Inc.

Information OverloadInformation Overload

“But we will not necessarily be better “But we will not necessarily be better informed. Meaningful facts informed. Meaningful facts —— those that those that have reliable and relevant information have reliable and relevant information —— will will become our most valuable resource.”become our most valuable resource.”

- Richard Worzel

Flying with Fast Company

American Way — February 1, 2000

Page 15: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

15 Copyright 2001 - Digital Metrology Solutions, Inc.

Where We AreWhere We Are

The Overlap of InstrumentationThe Overlap of Instrumentation

Page 16: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

16 Copyright 2001 - Digital Metrology Solutions, Inc.

The Evolution of MeasurementThe Evolution of Measurement((in one really busy slidein one really busy slide))

Micro-burrs &Torn Material

Roughness Straightness Dimension(Size & Position)

Microscopy(Visual Assessment)

Sharp-Stylus(Roughness)Instruments

Special PurposeInstruments

Surface Plate(layout) Instruments& Gauges

λ

Micro-burrs &Torn Material

Roughness Straightness Dimension(Size & Position)

Microscopy(Visual & DigitalAssessment)

Stylus & Optical(Roughness)Instruments

Waviness

Roundness &CylindricityInstruments

CoordinateMeasuringMachines(CMM's)

λSurface Plate(layout) Instruments& Gauges

Page 17: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

17 Copyright 2001 - Digital Metrology Solutions, Inc.

Instrument OverlapsInstrument Overlaps

•• StraightnessStraightness

0.010

Page 18: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

18 Copyright 2001 - Digital Metrology Solutions, Inc.

Instrument OverlapsInstrument Overlaps

•• Who is right?Who is right?

0.010

Page 19: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

19 Copyright 2001 - Digital Metrology Solutions, Inc.

Instrument OverlapsInstrument Overlaps10

1

100

10

1

100

10

1

0.1

0.010.1 1 10 100 1 10 100 1 10 100 1000

mm

µmnm

nm µm mm

Am

plitu

de

Wavelength

STM

Talystep

Form Talysurf(Mark I)

Quality Today, April 1990

Page 20: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

20 Copyright 2001 - Digital Metrology Solutions, Inc.

Instrument OverlapsInstrument Overlaps

•• The overlap in surface metrology The overlap in surface metrology instrumentation produces problems as well instrumentation produces problems as well as opportunities.as opportunities.

Page 21: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

21 Copyright 2001 - Digital Metrology Solutions, Inc.

Instrument OverlapsInstrument Overlaps

CostsCosts

• Increased time spent dealing with correlation.

• Customer/Supplier Disputes

BenefitsBenefits

• Allows for a broader selection of instruments.

• Provides for competition between technologies.

• Provides a means for comparison.

Page 22: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

22 Copyright 2001 - Digital Metrology Solutions, Inc.

Customer ConcernsCustomer Concerns

Why does this stuff matter, anyway?Why does this stuff matter, anyway?

Page 23: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

23 Copyright 2001 - Digital Metrology Solutions, Inc.

What has value?What has value?

•• Numerical results that relate to the Numerical results that relate to the performanceperformance of a component.of a component.— Product functionality

•• Numerical results that relate to Numerical results that relate to processprocesscontrols.controls.— Process control

•• Numerical results that are Numerical results that are reproduciblereproducible..— Commerce enabling

Page 24: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

24 Copyright 2001 - Digital Metrology Solutions, Inc.

The Value of MeasurementThe Value of Measurement

Customers don’t generally want better Customers don’t generally want better metrology for the sake of metrology…metrology for the sake of metrology…

…customers want better information in …customers want better information in order to make their products better.order to make their products better.

Metrology is a means to an end.Metrology is a means to an end.

Page 25: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

25 Copyright 2001 - Digital Metrology Solutions, Inc.

Where We Should be GoingWhere We Should be Going

An understanding of functionalityAn understanding of functionality

Page 26: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

26 Copyright 2001 - Digital Metrology Solutions, Inc.

FunctionalityFunctionality

“A picture may be worth a thousand words, “A picture may be worth a thousand words, but I’m an engineer, not a poet but I’m an engineer, not a poet —— give me a give me a number.”number.”

-- Chris BrownChris Brown

ASME B46 Subcommittee ASME B46 Subcommittee

on Fractal Analysis of Surface Textureon Fractal Analysis of Surface Texture

Page 27: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

27 Copyright 2001 - Digital Metrology Solutions, Inc.

Does this help functionality?Does this help functionality?

Page 28: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

28 Copyright 2001 - Digital Metrology Solutions, Inc.

Tolerance ReductionsTolerance Reductions

•• In many cases, reducing of tolerances is In many cases, reducing of tolerances is necessary in order to enhance or ensure necessary in order to enhance or ensure performance levels.performance levels.

•• However, there are many cases where However, there are many cases where tolerance reductions may not be the ideal tolerance reductions may not be the ideal approach.approach.

First Principle in Tolerance Reduction:First Principle in Tolerance Reduction:

Be sure that you are measuring the right thing!Be sure that you are measuring the right thing!

Page 29: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

29 Copyright 2001 - Digital Metrology Solutions, Inc.

Tolerance ReductionTolerance Reduction

•• A major automotive manufacturer was A major automotive manufacturer was dealing with camshaft failures.dealing with camshaft failures.— All dimensional attributes met the specifications.

— Roughness values met the specifications.

•• As the first step to improvement, the As the first step to improvement, the roughness tolerance was lowered.roughness tolerance was lowered.— The failure rate increased.

Page 30: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

30 Copyright 2001 - Digital Metrology Solutions, Inc.

Tolerance ReductionTolerance Reduction

•• Given these results, it was decided to Given these results, it was decided to further reduce the roughness in an effort to further reduce the roughness in an effort to get “past the sensitive area”.get “past the sensitive area”.— Failure rates increased further.

•• Additional analysis determined that the Additional analysis determined that the cause of failure was an underlying waviness.cause of failure was an underlying waviness.— Reduction in roughness exposed more of the

damaging effects of waviness.

Page 31: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

31 Copyright 2001 - Digital Metrology Solutions, Inc.

Tolerance ReductionTolerance Reduction

•• Be careful what you wish for. Making things Be careful what you wish for. Making things smoother may not make them better!smoother may not make them better!

Localized Contact Areas

Page 32: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

32 Copyright 2001 - Digital Metrology Solutions, Inc.

Two Approaches to Establishing Two Approaches to Establishing Functional CorrelationFunctional Correlation

•• “Mathematical”“Mathematical” CorrelationCorrelation—— Correlating a parameter or set of parameters Correlating a parameter or set of parameters

to a functionality via statistical methods.to a functionality via statistical methods.

•• “Physical”“Physical” CorrelationCorrelation—— Developing a model of functionality and a Developing a model of functionality and a

description of this functionality in terms of description of this functionality in terms of measured parameters.measured parameters.

Page 33: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

33 Copyright 2001 - Digital Metrology Solutions, Inc.

Two Approaches to Establishing Two Approaches to Establishing Functional CorrelationFunctional Correlation

•• Example: Plateau HoningExample: Plateau Honing

Page 34: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

34 Copyright 2001 - Digital Metrology Solutions, Inc.

Mathematical CorrelationMathematical Correlation

•• Plateau Honing Plateau Honing —— A set of parameters where evaluated in the A set of parameters where evaluated in the

comparison of “good” components to “bad” comparison of “good” components to “bad” components.components.

—— A mathematical relationship was developed A mathematical relationship was developed based on tolerance limits for 5 different based on tolerance limits for 5 different parameters and 2 ratios of the these parameters and 2 ratios of the these parameters.parameters.

Page 35: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

35 Copyright 2001 - Digital Metrology Solutions, Inc.

Physical CorrelationPhysical Correlation

•• Plateau HoningPlateau Honing—— The underlying functionalities were explored:The underlying functionalities were explored:

•Smooth running surface.•Deep grooves for oil retention/debris collection.•Controlled contact area.

—— The underlying process controls were The underlying process controls were explored:explored:•Rough honing•Fine honing•Placement of the fine honing within the base

texture.

Page 36: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

36 Copyright 2001 - Digital Metrology Solutions, Inc.

Physical CorrelationPhysical Correlation

•• Model of Plateau HoningModel of Plateau Honing— The combination of two random processes.

Valley-making Process

Plateau Process

Combination of Processes

Page 37: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

37 Copyright 2001 - Digital Metrology Solutions, Inc.

Physical CorrelationPhysical Correlation

•• Application of mathematics to the model.Application of mathematics to the model.— Normal probability analysis.

Page 38: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

38 Copyright 2001 - Digital Metrology Solutions, Inc.

Physical CorrelationPhysical Correlation

•• Development of parameters for the model.Development of parameters for the model.

RpqRpq: : Plateau RMS RoughnessPlateau RMS Roughness

RvqRvq:: Valley RMS RoughnessValley RMS Roughness

RmqRmq:: Material Ratio at Plateau to Valley TransitionMaterial Ratio at Plateau to Valley Transition

Page 39: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

39 Copyright 2001 - Digital Metrology Solutions, Inc.

Functional CorrelationFunctional Correlation

•• Sometimes Sometimes “mathematical”“mathematical” correlation is the correlation is the only available option in developing a only available option in developing a specification.specification.— No underlying mechanism can be established.— This can cause significant problems in the

development of manufacturing processes.

•• ““PhysicalPhysical” correlation is preferred.” correlation is preferred.— However, the underlying model is often very

difficult to generate.

Page 40: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

40 Copyright 2001 - Digital Metrology Solutions, Inc.

Where We Should be GoingWhere We Should be Going

National and International Standards National and International Standards providing “Toolboxes”providing “Toolboxes”

Page 41: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

41 Copyright 2001 - Digital Metrology Solutions, Inc.

National & International National & International Surface Texture StandardsSurface Texture Standards

•• There is a difference in philosophy between There is a difference in philosophy between international (ISO) and national (ASME) international (ISO) and national (ASME) standards regarding surface texture:standards regarding surface texture:—— American Standards tend to attempt to American Standards tend to attempt to

describe common practice.describe common practice.

—— International Standards tend to attempt to International Standards tend to attempt to define an arbitrator method.define an arbitrator method.

Page 42: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

42 Copyright 2001 - Digital Metrology Solutions, Inc.

Standards Reflecting PracticeStandards Reflecting Practice

AdvantagesAdvantages

•• Provides a description Provides a description of many new and of many new and historical methods.historical methods.

•• Tend to be more Tend to be more tutorial in nature.tutorial in nature.

•• Recognizes other Recognizes other methods.methods.

DisadvantagesDisadvantages

•• Very difficult to Very difficult to ascertain the ascertain the “correct” “correct” measurement measurement method.method.

•• Difficult to apply in Difficult to apply in arbitration.arbitration.

Page 43: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

43 Copyright 2001 - Digital Metrology Solutions, Inc.

Standards Defining an Standards Defining an ArbitratorArbitrator

AdvantagesAdvantages

•• Provides a clear Provides a clear description of the description of the “correct” method.“correct” method.

•• Useful in disputes or Useful in disputes or arbitration.arbitration.

•• A “safety net” A “safety net” —— Unless otherwise Unless otherwise

specified.specified.

DisadvantagesDisadvantages

•• Not generally as Not generally as tutorial in nature.tutorial in nature.

•• Older instrumentation Older instrumentation tends to be ignored.tends to be ignored.

Page 44: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

44 Copyright 2001 - Digital Metrology Solutions, Inc.

How Full is the Toolbox?How Full is the Toolbox?

ISO/TC 213 Geometrical Product Specification (GPS)ISO/TC 213 Geometrical Product Specification (GPS)—— Chains of StandardsChains of Standards

Page 45: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

45 Copyright 2001 - Digital Metrology Solutions, Inc.

Chains of StandardsChains of Standards

•• These “chain links” define the arbitrator for These “chain links” define the arbitrator for specification and measurement.specification and measurement.—— Typically they define a single approach with the Typically they define a single approach with the

clause: clause:

“Unless otherwise specified…”“Unless otherwise specified…”

NOTE: This default approach may not be the NOTE: This default approach may not be the best approach for all applications!best approach for all applications!

Page 46: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

46 Copyright 2001 - Digital Metrology Solutions, Inc.

Good News!Good News!

•• Surface metrology standardization efforts Surface metrology standardization efforts are beginning to provide alternative are beginning to provide alternative methods for measurement and analysis.methods for measurement and analysis.—— Filtering and Extraction MethodsFiltering and Extraction Methods

—— Parameters and Analysis ApproachesParameters and Analysis Approaches

Page 47: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

47 Copyright 2001 - Digital Metrology Solutions, Inc.

Filtering and Extraction Filtering and Extraction MethodsMethods

•• Convolution FiltersConvolution Filters

Weighted, Moving Average

Waviness ProfileRaw Data

Page 48: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

48 Copyright 2001 - Digital Metrology Solutions, Inc.

Filtering and Extraction Filtering and Extraction MethodsMethods

•• Morphological FiltersMorphological Filters—— Based on various “structuring elements”.Based on various “structuring elements”.

Page 49: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

49 Copyright 2001 - Digital Metrology Solutions, Inc.

Filtering and Extraction Filtering and Extraction MethodsMethods

•• SplineSpline--based filtersbased filters

Page 50: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

50 Copyright 2001 - Digital Metrology Solutions, Inc.

Filtering and Extraction Filtering and Extraction MethodsMethods

•• Wavelets and Alternating Sequence FiltersWavelets and Alternating Sequence Filters—— MultiMulti--resolution analysisresolution analysis

Page 51: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

51 Copyright 2001 - Digital Metrology Solutions, Inc.

Filtering and Extraction Filtering and Extraction MethodsMethods

•• Robust FiltersRobust Filters—— Spline and Regression basedSpline and Regression based

Page 52: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

52 Copyright 2001 - Digital Metrology Solutions, Inc.

Parameters and Analysis Parameters and Analysis ApproachesApproaches

•• Evaluation of Surface Texture Using Fractal Evaluation of Surface Texture Using Fractal GeometryGeometry

Page 53: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

53 Copyright 2001 - Digital Metrology Solutions, Inc.

One Size Fits All.. One Size Fits All.. (not necessarily)(not necessarily)

•• These and future “tools” are providing These and future “tools” are providing users with many of techniques which can be users with many of techniques which can be applied to address a specific measurement applied to address a specific measurement of functionality issue.of functionality issue.— Various combinations of filtering and

parameterization can be developed to address specific needs.

Page 54: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

54 Copyright 2001 - Digital Metrology Solutions, Inc.

Where We Should be GoingWhere We Should be Going

Uncertainty as a Connection to RealityUncertainty as a Connection to Reality

Page 55: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

55 Copyright 2001 - Digital Metrology Solutions, Inc.

Measurement UncertaintyMeasurement Uncertainty

•• Dealing with Measurement Uncertainty is a Dealing with Measurement Uncertainty is a tremendous hurdle for many metrology users.tremendous hurdle for many metrology users.

•• Measurement Measurement Uncertainty doesn’t Uncertainty doesn’t necessarily mean that you necessarily mean that you are wrong. are wrong. —— It means that you are It means that you are

smart enough to know smart enough to know your limits!!!your limits!!!

Page 56: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

56 Copyright 2001 - Digital Metrology Solutions, Inc.

Measurement UncertaintyMeasurement Uncertainty

•• Uncertainty analysis can be a very beneficial Uncertainty analysis can be a very beneficial exercise.exercise.—— Helps to further refine the definition of the Helps to further refine the definition of the

“measurand”.“measurand”.—— Developing an understanding of significant Developing an understanding of significant

instrument variables.instrument variables.—— Establishing correlation limits between Establishing correlation limits between

instrumentation methods.instrumentation methods.—— Determining the “effective tolerance zone” and Determining the “effective tolerance zone” and

potential instrument influences.potential instrument influences.

Page 57: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

57 Copyright 2001 - Digital Metrology Solutions, Inc.

Case StudiesCase Studies

Working in the overlap between Working in the overlap between dimensional and surface metrologydimensional and surface metrology

Page 58: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

58 Copyright 2001 - Digital Metrology Solutions, Inc.

Working in the overlap…Working in the overlap…

•• Scale is irrelevantScale is irrelevant—— For example: step heights occur in inches as For example: step heights occur in inches as

well as angstroms.well as angstroms.

Page 59: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

59 Copyright 2001 - Digital Metrology Solutions, Inc.

Working in the overlap…Working in the overlap…

•• Extraction is essentialExtraction is essential

Initial LeastSquares Fit

Suppressionof Geometry

Outlier Removaland Filtering

Re-applicationof Geometry

Analysis of the Feature

Page 60: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

60 Copyright 2001 - Digital Metrology Solutions, Inc.

Working in the overlap…Working in the overlap…

•• Size and shape and wavelength content can Size and shape and wavelength content can be interrelatedbe interrelated

Page 61: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

61 Copyright 2001 - Digital Metrology Solutions, Inc.

Case Study #1Case Study #1A “Simple” CornerA “Simple” Corner

•• A certain corner should be “sharp” and “smooth” A certain corner should be “sharp” and “smooth” in a sealing application.in a sealing application.—— Limits were established for maximum blend radius and Limits were established for maximum blend radius and

maximum roughness.maximum roughness.

—— Tolerances were such that a stylus based profiling Tolerances were such that a stylus based profiling instrument was required.instrument was required.

r

Page 62: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

62 Copyright 2001 - Digital Metrology Solutions, Inc.

The CornerThe Corner

•• Issues:Issues:—— The measurement of a calculated radius is not The measurement of a calculated radius is not

reliablereliable•Very small arc segment•Local flats cause infinite radius

—— A zoneA zone--based approach is difficult.based approach is difficult.•Tolerance zone is not constant•Tolerance goes to zero at tangencies

—— Roughness around a corner Roughness around a corner is not well definedis not well defined r

Page 63: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

63 Copyright 2001 - Digital Metrology Solutions, Inc.

Dealing With the CornerDealing With the Corner

•• The angle was determined based on The angle was determined based on least least squares fittingsquares fitting of two lines.of two lines.

•• Based on the intersection, a Based on the intersection, a mathematical mathematical zonezone was established based on the was established based on the maximum allowed blend radius.maximum allowed blend radius.— This zone was bounded to avoid tangencies.— A “percentage consumed” value was reported.

• The corner was “unrolled” based on a convex hull to arrive at a roughness profile.

Page 64: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

64 Copyright 2001 - Digital Metrology Solutions, Inc.

Dealing with the CornerDealing with the Corner

Page 65: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

65 Copyright 2001 - Digital Metrology Solutions, Inc.

Case Study #2Case Study #2A “Complex” CrownA “Complex” Crown

•• A roller geometry is designed such that the A roller geometry is designed such that the pressure distribution is relatively uniform with no pressure distribution is relatively uniform with no significant edge loading.significant edge loading.—— The geometry is such that the edges are “rolledThe geometry is such that the edges are “rolled--off” off”

based on a lookup table.based on a lookup table.

—— The tolerance zone increases near the edges.The tolerance zone increases near the edges.

—— The overall length of the roller has a relatively loose The overall length of the roller has a relatively loose tolerance.tolerance.

—— Local concavities cannot be present.Local concavities cannot be present.

Page 66: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

66 Copyright 2001 - Digital Metrology Solutions, Inc.

Dealing with the CrownDealing with the Crown

•• Issues:Issues:—— The nominal profile is based on a lookThe nominal profile is based on a look--up table.up table.

•This table is based on finite element analysis of the contact pattern.

—— The lookThe look--up table position moves axially based up table position moves axially based on the roller width.on the roller width.•The roller width can “dilate” and “contract”.

—— Local concavities are not readily exploited by Local concavities are not readily exploited by standard parameters.standard parameters.

—— A nonA non--uniform tolerance zoneuniform tolerance zone•Small deviations near the edges can be tolerated,

while similar deviations near the center cannot.

Page 67: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

67 Copyright 2001 - Digital Metrology Solutions, Inc.

Dealing with the CrownDealing with the Crown

•• A A longlong--pass Gaussian filterpass Gaussian filter was applied to the data was applied to the data to reduce roughness effects in the profile analysis.to reduce roughness effects in the profile analysis.

•• A A 44--dimensional least squares fitdimensional least squares fit was applied to was applied to compare the measured profile to the nominal compare the measured profile to the nominal (dilated or contracted) geometry.(dilated or contracted) geometry.

•• A A convex hullconvex hull was applied to exploit local was applied to exploit local concavities.concavities.

•• A A “percentage consumed” approach“percentage consumed” approach was was developed to accommodate the variable tolerance developed to accommodate the variable tolerance widths along the profile.widths along the profile.

Page 68: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

68 Copyright 2001 - Digital Metrology Solutions, Inc.

Dealing with the CrownDealing with the Crown

Page 69: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

69 Copyright 2001 - Digital Metrology Solutions, Inc.

Where do we go from here?Where do we go from here?

A few ideas…A few ideas…

Page 70: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

70 Copyright 2001 - Digital Metrology Solutions, Inc.

RecommendationsRecommendations

•• Continue to develop “customizable” Continue to develop “customizable” metrology technology as the analytical tools metrology technology as the analytical tools are going to continue to evolve.are going to continue to evolve.— Recognize the distinction between

“data acquisition” and “data analysis”

•• Continue to “grow” the toolboxContinue to “grow” the toolbox— Through the sharing and standardizing of

methods

Page 71: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

71 Copyright 2001 - Digital Metrology Solutions, Inc.

RecommendationsRecommendations

•• Train, Educate, Teach, Instruct, Mentor, Train, Educate, Teach, Instruct, Mentor, Tutor, Coach, School, Inform, GuideTutor, Coach, School, Inform, Guide— Today’s engineering community is becoming

more aware of metrology, but very few understand metrology.

— Metrology doesn’t sell and apply itself. It requires educated customers.

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72 Copyright 2001 - Digital Metrology Solutions, Inc.

RecommendationsRecommendations

•• Strive to provide “information” rather than Strive to provide “information” rather than just “data”.just “data”.— Consider the questions behind the

measurement:•Is this part in tolerance?

•How well with this part perform?

•What do I need to change in the process?

Page 73: Mark C. Malburg Surface Metrology metrology standardization efforts are beginning to provide alternative methods for measurement and analysis

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RecommendationsRecommendations

•• Continue to emphasize the importance of Continue to emphasize the importance of measurement uncertaintymeasurement uncertainty— This may be difficult at first, but significant

benefits can be achieved.

•• Continue to interact (openly) in forums such Continue to interact (openly) in forums such as this!as this!— Recognizing a balance between competition

and collaboration.