Specification Sheet phenom XL

phenom XL

PHENOM XL All-in-one imaging and analysis system

LARGEST SAMPLE SIZE IN ITS CLASS Motorized scan of samples up to 100 mm x 100 mm

FULLY INTEGRATED EDS Elemental analysis is as easy as imaging, with fully integrated EDS

THROUGHPUT AND SPEED Fastest loading cycle in the world

SECONDARY ELECTRON DETECTOR Detection of low-energy electrons for topographical and surface information

NEVER LOST NAVIGATION Permanent optical overview for swift navigation to any region on the sample

DeSktop Sem for Large SampLeS

Specification Sheet

aLL-in-one SyStem

PHENOM XLThe Phenom XL features a newly designed chamber including a compact motorized stage that allows analysis of samples of up to 100 mm x 100 mm. In spite of this much larger sample size, a proprietary loading shuttle keeps the vent/load cycle to a minimum, which in practice enables a throughput that is a few factors higher than any comparable SEM system. The user interface is based on the proven ease-of-use technology already applied in the successful Phenom Pro and ProX desktop SEM. The interface enables both existing and new users to quickly become familiar with the system without much training.

The standard detector in the Phenom XL is a four-segment BackScatter Detector (BSD) that yields sharp images and provides chemical contrast information. The Phenom XL can be equipped with two optional detector systems. The first one is a fully integrated EDS system for elemental analysis. The second option is a Secondary Electron Detector (SED) that enables surface sensitive imaging. The ProSuite software application platform is also available for the Phenom XL. With the ProSuite software, and applications such as ParticleMetric, PoroMetric, FiberMetric and 3D Roughness Reconstruction the user can further analyze samples.

IMAGING SPECIFICATIONS Imaging moDeS

Light optical Magnification range: 3 - 16x

Electron optical Magnification range: 80 - 100,000x

Digital zoom max. 12x

IllumInatIon detector

Light optical Bright field / dark field modes

Electron optical Long-lifetime thermionic source (CeB6)

Multiple beam currents

Acceleration Voltages Default: 5 kV, 10 kV and 15 kV

Advanced mode: adjustable range between

4,8 kV and 15 kV imaging and analysis

mode Secondary Electron Detector

Resolution ≤ 20 nm

Detector

Standard BackScatter Detector

Optional Secondary Electron Detector

DigitaL image Detection

Light optical Proprietary high-resolution color

navigation camera, single shot

Electron optical High-sensitivity BackScatter Detector

(compositional and topographical modes)

image formatS JPEG, TIFF, BMP

image reSoLution 456 x 456, 684 x 684, 1024 x 1024 optionS and 2048 x 2048 pixels

Data Storage USB flash drive; Network or ProSuite PC

SampLe Stage Computer-controlled motorized X and Y

SampLe Size Max. 100 mm x 100 mm (up to 36 x 12 mm

pin stubs)

SampLe height Max. 65 mm

Scan area 50 mm x 50 mm

100 mm x 100 mm (optional)

SampLe LoaDing time

Optical < 5 s

From optical to SEM < 60 s

The Phenom XL Scanning Electron Microscope (SEM) pushes the boundaries of compact desktop SEM performance. It features the proven ease-of-use and fast time-to-image of any Phenom system. It is also equipped with a chamber that allows analysis of large samples up to 100 mm x 100 mm. A proprietary venting/loading mechanism ensures the fastest vent/load cycle in the world, providing the highest throughput. A newly developed compact motorized stage enables the user to scan the full sample area, and yet the Phenom XL is a desktop SEM that needs little space and no extra facilities. Ease-of-use is given an extra boost in the Phenom XL with a single-shot optical navigation camera that allows the user to move to any spot on the sample with just a single click – within seconds.

phenom XL

fuLLy integrateD eDS SoLution

STEP-BY-STEP DATA COLLECTION The dedicated software package Element Identification (EID) is used to control the fully integrated EDS detector. Analysis has become as easy as imaging, since there is no need to switch between external software packages or computers. The CeB6 electron source in the Phenom is used to generate the highest X-ray count rate in its market segment, allowing fast results. The EID software package allows the user to identify nearly all materials in the periodic table, starting from Boron (5) and ranging up to Americium (95).

It is a perfect analysis tool for a wide range of samples and applications.Projects can be stored locally or on the network, where they can be analyzed at a later stage or offline.The EID software package runs smart algorithms with advanced peak analysis to optimize the auto-identification functionality, while still allowing for manual adjustments by the user at any time in the analysis process.The intuitive step-by-step process within the software helps the user to collect all X-ray results in an organized and structured way.

EDS SPECIFICATIONS Detector type Silicon Drift Detector (SDD)

Thermoelectrically cooled (LN2 free)

Detector active Area 25 mm2

X-ray window Ultra-thin Silicon Nitride (Si3N4) window

allowing detection of elements B to Am

Energy resolution ≤ 137 eV @ Mn Kα Processing capabilities Multi-channel analyzer with 2048 channels

at 10 eV/ch

Max. input count rate 300,000 cps

Hardware integration Fully embedded

Software Integrated in Phenom ProSuite

Integrated column and stage control

Auto-peak ID

Iterative strip peak deconvolution

Confidence of analysis indicator

Export functions: CSV, JPG, TIFF, ELID, EMSA

report DOCX format

SYSTEM SPECIFICATIONSDimenSionS & weight

Imaging module 316(w) x 587(d) x 625(h) mm, 75 kg

Diaphragm vacuum pump 145(w) x 220(d) x 213(h) mm, 4.5 kg

Power supply 156(w) x 300(d) x 74(h) mm, 3 kg

Monitor 375(w) x 203(d) x 395(h) mm, 7.9 kg

ProSuite Standard ProSuite System including:

19” monitor with PC and network router

mounted

375(w) x 250(d) x 395(h) mm, 9 kg

REQUIREMENTSambient conDitionS

Temperature 15°C ~ 30°C (59°F ~ 86°F)

Humidity < 80% RH

Power Single phase AC 110 - 240 Volt, 50/60 Hz,

300 W (max.)

recommenDeD tabLe Size 150 x 75 cm, load rating of ≥ 100 kg

Elemental analysis can be added by EDS technology already proven on the Phenom ProX. Energy Dispersive Spectroscopy (EDS) allows users to analyze the chemical composition of their samples. Detailed chemical composition can be obtained from a micro volume via a spot analysis. Elemental distribution can be visualized with the elemental mapping option. An optional Secondary Electron Detector (SED) is available for applications that require surface and topography sensitive imaging.

Phenom-World B.V., Dillenburgstraat 9E, 5652 AM Eindhoven, The Netherlands, www.phenom-world.com ©2015 Specifications and prices are subject to change without notice. All rights reserved. Reproduction, copying, usage, modifying, hiring, renting, public performance, transmission and/or broadcasting in whole or in part is prohibited without the written consent of Phenom-World BV. Find your Phenom-World contact information at www.phenom-world.com

upgraDe optionS

ELEMENTAL MAPPING & LINE SCANThe Elemental Mapping functionality visualizes the distribution of elements throughout the sample. The selected elements can be mapped at a user-specified pixel resolution and acquisition time. The real time mapping algorithm shows live build-up of the selected elements. For a user, it is simply click-and-go to work with the Elemental Mapping and Line Scan functionality of the Phenom desktop SEM.The Line Scan functionality shows the quantified element distribution in a line plot. This is especially useful for coatings, paints and other applications with multiple layers.All results of both the Elemental Mapping and Line Scan functionality can be easily exported by using an automated report template.

SECONDARY ELECTRON DETECTOR The standard detector in the Phenom XL is a four-segment BackScatter Detector (BSD) that yields sharp images and provides chemical contrast information.A Secondary Electron Detector (SED) is optionally available on the Phenom XL. The SED collects low-energy electrons from the top surface layer of the sample. It is therefore the perfect choice to reveal detailed sample surface information.The SED can be of great use for applications where topography and morphology are important. This is often the case when studying microstructures, nanostructures or particles.

ELEMENTAL MAPPING & LINE SCAN SPECIFICATIONSeLementaL mapping

Element selection 10 individual user-specified maps, plus

backscatter image and mix-image

backScatter image anD miX-image Selected area Any size, rectangular

Mapping resolution range 16 x 16 - 512 x 512 pixels

Pixel dwell time range 10 - 250 ms

Line Scan

Line Scan resolution range 16 – 512 pixels

Points dwell time range 50 – 250 ms

Total number of lines 12

report DOCX format

SED SPECIFICATIONSDetector type Everhart Thornley

SS-0

2201

5-v1

-PX

L