pi 2009 about pi: innovation, precision, iso 9001, applications...email: [email protected]...

About PI Innovation as a Tradition

Nanopositioning

Nanometrology

Micropositioning

Piezo • Nano • Positioning

Applications

Semiconductor Technology

Pages A-16 / A-17

Microscopy/Imaging

Page A-18

Biotechnology

Life Science

Page A-19

Medical Design

Medical Technology

Page A-20 / A-21

Metrology / Laser-Systems

Optical Inspection / Tribology

Page A-22

Nanotechnology

Nanofabrication

Nanoautomation®

Page A-23

Photonics

Telecommunications

Integrated Optics

Pages A-24

Precision Machining

(Metal, Optics, Laser Cutting,

Diamond Turning)

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Astronomy

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Products Page References to the 2009 Hardbound PI Catalog

Linear Actuators & Motors

PiezoWalk® Actuators, p. 1-3

PILine® Ultrasonic Motors, p. 1-23

DC Servo & Stepper Actuators, p. 1-39

Piezo Actuators & Components, p. 1-61Guided / Preloaded, p. 1-68 • UnpackagedStack Actuators, p. 1-82 • Patches/Benders/Tubes/Shears ..., p. 1-94

Nanopositioning / Piezoelectrics

Piezo Flexure Stages / High-Speed ScanningSystems, p. 2-3

Linear, p. 2-14 • Vertical & Tip/Tilt, p. 2-242- and 3-Axis, p. 2-50 • 6-Axis, p. 2-76

Fast Steering Mirrors / Active Optics, p. 2-81

Piezo Drivers / Servo Controllers, p. 2-99Single-Channel, p. 2-108 • Multi-Channel,p. 2-126 • Modular Electronics, p. 2-140Accessories, p. 2-168

Piezoelectrics in Positioning, p. 2-171

Nanometrology

Capacitive Sensors / Signal Conditioners, p. 3-3

Nanometrology Fundamentals, p. 3-17

Micropositioning

Hexapod 6-Axis Systems / Parallel Kinematics, p. 4-3Physik Instrumente (PI) GmbH &

Linear Stages, p. 4-19 Co. KG is the owner of the follo-

Translation, p. 4-22 • Vertical, p. 4-58 wing company names and trade-marks: PI®, PIC®, PICMA®, PIFOC®,

Multi-Axis, p. 4-64 PILine®, NEXLINE®, NEXACT®,PiezoWalk®, NanoCube®,

Rotary & Tilt Stages, p. 4-69 NanoAutomation®.

Accessories, p. 4-89The following designations are

Servo & Stepper Motor Controllers, p. 4-109 protected company names or

Single-Channel, p. 4-112 • Hybrid, p. 4-118 registered trademarks of thirdparties: Microsoft, Windows,

Multi-Channel, p. 4-120 LabVIEW, National Instruments,InputShaping, Linux, MATLAB,

Micropositioning Fundamentals, p. 4-127 Visual Basic, Delphi, Python,μManager, Epics, MetaMorph.

http://www.physikinstrumente.com/en/pdf_extra/2009_PI_Catalog_Motion_Control_Nano-Positioning-Piezo-Systems_Actuator-Motor_C.pdf

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Dear Customers,

Annual growth rates indouble figures, a furtherexpansion of our produc-tion capacity and the devel-opment of new, globallyunique drive technologies:This sums up the last fewyears at PI.

We owe the success of ourbusiness to you.

Your loyalty, your trust,your suggestions and theapplication problems youhave asked us to solvehave confirmed PI’s role asthe leading supplier ofpiezo-based drives andpositioning systems oper-ating with nanometer accu-racy.

Our current catalog illus-trates some of our prod-ucts and capabilities. Wewant to fill you with enthu-siasm for our technology.At PI, we not only strive tosupply products but also tobe your partner in the oftendifficult quest for techno-logical leadership andcommercial success.

Long-term business rela-tionships, reliability, andopen and friendly com-

munication with customers and suppliers form an important mainstayfor PI–more important than short-term gain.

We are aware of our responsibility towards our customers and take thisresponsibility very seriously. This is why we continuously invest in thehighest quality equipment and qualified personnel. We will continue toextend our leading-edge position as a supplier of high-quality productsat the highest technological level.

Find your inspiration–our staff will be delighted to be of service to you.

Kind regards

Dr. Karl SpannerPresident

Our “Inspirations 2009” catalog offers allthis (and more), and it impressively mirrorsthe growth that PI has experienced in therecent years.In detail, the product groups were re-organized into 4 major sections “LinearDrives, Nanopositioning Systems, Nano-metrology Sensors and MicropositioningSystems” to reflect the need of our cus-tomers.Additional sub-sections and the use of acolored index system simplify the productsearch. The product selection guides ineach sub-section contain referencing data,scaled down product illustrations, andcross-references to other related sections.

If you cannot find what you are looking foror have any questions, just call or emailyour local PI representative, or use ourextensive online search utility. We willwork with you to find the optimumsolution – based on catalog product or acustom design optimized for yourapplication.

For up-to-date information on the latestproducts software updates, user manuals,contact information and a growing list ofour world wide subsidiaries andrepresentatives, visit our website atwww.pi.ws.

Birgit Schulze,Stefan Vorndran,Steffen ArnoldMarketing

About this Catalog

� 200 product families, 30 % of them new� More than 1,000 products on over

500 pages� Comprehensive, consistent data-, for a

better comparison between products� More than 1,000 drawings, images,

measurement graphs and technicaldiagrams

� Comprehensive, detailed selectionguides and application overviews

� The well-established PI piezo tutorialwith background information farexceeding standard productdescriptions: a reference work on thebasics of piezo technology and preci-sion positioning.

Thank You!


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PI Worldwide

ITALY

Physik Instrumente (PI) S. r. l.Via G. Marconi, 28I-20091 Bresso (MI)Tel: +39 (02) 665 011 01Fax: +39 (02) 665 014 56Email: [email protected]://www.pionline.it

FRANCE

PI France S.A.S.32 rue DelizyF-93694 Pantin CedexTel: +33 (1) 57 14 07 10Fax: +33 (1) 41 71 18 98Email: [email protected]://www.pifrance.fr

CHINA

Physik Instrumente(PI Shanghai) Co., Ltd.Building No. 7-301Longdong Avenue 3000201203 Shanghai, ChinaTel: +86 (21) 687 900 08Fax: +86 (21) 687 900 98Email: [email protected]://www.pi-china.cn

DISTRIBUTORS

ISRAEL

GOA-Tech Ltd.10 Zarchin Street (Corex Bldg.)Raanana 43662Tel: +972 (9) 743 08 40Cell: +972 -50-52 93 75Fax: +972 (9) 743 06 48Email: [email protected]://www.goa-tech.co.il

BENELUX

Applied LaserTechnology BVDe Dintel 2NL-5684 PS BestTel: +31 (499) 375 375Fax: +31 (499) 375 373Email: [email protected]://www.alt.nl

SPAIN

BFI Optilas, S.A.c/ Anabel Segura 7 BajoE-28108 Alcobendas MadridTel: +34 (91) 453.11.60 ext 248Fax: +34 (91) 662.68.37Email: [email protected]://www.bfioptilas.es

HEADQUARTERS

GERMANY

Physik Instrumente (PI)GmbH & Co. KGAuf der Römerstr. 1D-76228 Karlsruhe/PalmbachTel: +49 (721) 4846-0Fax: +49 (721) 4846-100Email: [email protected]://www.pi.ws

GERMANY

PI Ceramic GmbHLindenstr.D-07589 LederhoseTel: +49 (36604) 882-0Fax: +49 (36604) 882-25Email: [email protected]://www.piceramic.de

BRANCH OFFICES

USA (East) & CANADA

PI (Physik Instrumente) L.P.16 Albert St.Auburn, MA 01501Tel: +1 (508) 832 3456Fax: +1 (508) 832 0506Email: [email protected]://www.pi-usa.us

USA (West) & MEXICO

PI (Physik Instrumente) L.P.5420 Trabuco Rd., Suite 100Irvine, CA 92620Tel: +1 (949) 679 9191Fax: +1 (949) 679 9292Email: [email protected]://www.pi-usa.us

JAPAN

PI Japan Co., Ltd.Akebono-cho 2-38-5Tachikawa-shiJ-Tokyo 190Tel: +81 (42) 526 7300Fax: +81 (42) 526 7301Email: [email protected]://www.pi-japan.jp

JAPAN

PI Japan Co., Ltd.Hanahara Dai-ni Building, #7034-11-27 Nishinakajima,Yodogawa-ku, Osaka-shiJ-Osaka 532Tel: +81 (6) 6304 5605Fax: +81 (6) 6304 5606Email: [email protected]://www.pi-japan.jp

UK & IrelandPI (Physik Instrumente) Ltd.Lambda House, Batford MillGB-Harpenden, HertfordshireAL5 5BZTel: +44 (1582) 711 650Fax: +44 (1582) 712 084Email: [email protected]://www.physikinstrumente.co.uk

SWITZERLAND

DynEOs AGDynamic & Electro-Optical SolutionsVogelsangstr. 13CH-8307 EffretikonTel: +41 (052) 355 12 40Fax: +41 (052) 355 12 44Email: [email protected]://www.dyneos.ch

SWEDEN / NORWAY / DENMARK

Parameter AB(P.O.B. 27186)Sehlstedtsgatan 9S-11528 StockholmTel: +46 (8) 555 110 00Fax: +46 (8) 555 110 01Email: [email protected]://www.parameter.se

INDIA

Deepti Marketing Services#299, “Cheluva” 1st Floor8th Main, 4th CrossPadmanabhanagarBangalore – 560 070.Tel: +91 (80) 26690601 / 32713974Fax: +91 (80) 26690559 / 26660809Email: [email protected]/

[email protected]://www.deepms.com

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TAIWAN

Superbin Company Ltd.3F, No. 339, Sec. 2Ho Ping E. Rd.Taipei, TaiwanTaiwan R.O.C.Tel: +886 (2) 27 01 36 26Fax: +886 (2) 27 01 35 31Email: [email protected]

AUSTRALIA & NEW ZEALAND

Warsash Scientific Pty Ltd7 The Watertower1 Marian St, Redfern,NSW 2016 AustraliaTel: +61 (2) 9319 0122Fax: +61 (2) 9318 2192Email: [email protected]://www.warsash.com.au

FINLAND

Oy OptoparameterTekniikantie 4 D02150 EspooTel: +358 (9) 4355 500Fax: +358 (9) 4355 5011Email: [email protected]://www.parameter.se

RUSSIA/CIS

Eurotek GeneralGubkina Ulitse 14, Office 89117312 Moscow, RussiaTel : +7 (095) 129 8892Fax: +7 (095) 748 1120Email: [email protected]

ARGENTINA

ELIOVAC SAR. Saenz Peña 1735 – Dto. BB1636FHW – OlivosBuenos AiresTel: +54-11-4711-7171Fax: +54-11-4711-7272Email: [email protected]://www.eliovac.com.ar

BRAZIL

RS do Brasil Com.Av. Brig. Faria Lima 2413 16and01451-001 - Sao Paulo - SP - BrazilTel: +55 (11) 3031 0610Fax: +55 (11) 3097 0009Email: [email protected]://www.rsdobrasil.com.br

KOREA

Woojoo Hi-Tech Corp.Sinkwang Bldg.160-8 Karak 2-DongSongpa-KuROK-Seoul 138-162Tel: +82 (2) 449 55 00Fax: +82 (2) 449 55 23Email: [email protected]://www.woojoohitech.com

SOUTH EAST ASIA: ID/MY/PH/SG/TH

Cairnhill Metrology Pte Ltd.#07-05/06 Petro Centre5 Jalan Kilang Barat159349 SingaporeTel: (+65) 6890 0041Fax: (+65) 6567 5940Email: [email protected]://www.cairnhill.com

TURKEY

Tet MakinaBagdat cad. Cihan Apt. No: 95Kat: 3 Daire: 534725 Kiziltoprak IstanbulTel: +90 (216) 418 91 11Fax: +90 (216) 345 26 96Email: [email protected]://www.tetmakina.com

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Moving the NanoworldNanoAutomation®: Precision Positioning for Science and Industry

PI is market and technologicalleader for precision position-ing systems with accuracieswell under one nanometer.Nanometer-range motion con-trol is the key to worlds wheremillions of transistors fit onone square millimeter, wheremolecules are manipulated,where thousands of “virtualslices” are made in the obser-vation of living cells, or whereoptical fiber bundles no largerthan a human hair are alignedin six degrees of freedom.

Worlds We Call NanoWorlds

Continuous innovation andreinvestment of profits overthe decades has allowed PI toattain its present marketstatus. This status is alsobased on long-term customerrelationships and on the free-dom to transform ideas intoreality.

Over 30 Years Experience

When PI introduced piezo-electric nanopositioning tech-nology more than 30 yearsago, typical customers wereresearch labs and universitiesworking on laser cavity tuning,Fabry-Perot interferometersand filters. Few foresaw that

whole industrial sectors likesemiconductor manufacturingor biotechnology would be-come dependent on progressin nanopositioning. Today, noteven the precision machiningindustry can do withoutnanometer-level positioningsystems.

Key Technologies In-House

PI follows a vertical integrationstrategy designed to developand maintain all key technolo-gies in-house. We superviseeach and every step fromdesign to delivery in thefollowing areas: software,precision mechanics, digitaland analog control electronics,sub-nanometer capacitiveposition sensors, piezo ceram-ics and piezo actuators. Thisassures the highest quality andreduces cost.

Future Technology Solutions

Today PI delivers micro- andnanopositioning solutions for allimportant high-tech markets:

� Semiconductor Technology

� Optical Metrology, Microscopy

� Biotechnology and Medical Devices

� Precision Automation and Handling

� Precision Machining

� Data Storage

� Photonics, Fiber Optics, Telecom

� Nano Technology

� Microsystems Technology

� Aerospace Engineering

� Astronomy

PI reception desk:Our employees lookforward to your visit

PI headquarters in Karlsruhe

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PI—World Market Player

As a privately run companywith a healthy growth rate,over 500 employees and aflexible, vertically integratedorganization, PI can meet themost diverse requirementsin the area of innovativeprecision positioning andsupply customers anywhere inthe world with outstandingproducts.

International Service

and Sales Network

PI has established subsidiariesfor sales and service in themost important local marketsall over the world and main-tains nanometrology test labson three continents. In additionto PI’s main R&D and manu-facturing centers in Europe,PI Shanghai and PI USA pro-vide development and manu-facturing capabilities to meetthe specific demands of localmarkets faster. In addition tothe branch offices, PI hasdistributors in many otherindustrial countries. A networkof highly qualified personnelaround the world assuressuccessful, long-term relation-ships with customers.

Quality and Brand Policy

We measure the quality andreliability of our productsagainst the strictest of stan-dards. ISO 9001 certification,which also emphasizes pointslike customer expectations andsatisfaction, has been accord-ed in 1994, making PI the firstmanufacturer of nanoposition-ing technology following thisstandard. PI's Integrated Mana-gement System (IMS) includesalso Environmental Protection

The PI GroupHigh Quality and Strong Brands on a Global Scale

PI-USA headquarters in Massachusetts

PI Japan Co., Ltd.TokyoOsaka

PIKarlsruhe, Germany

1970

PI CeramicLederhose, Germany

PI S.r.I.Milan

PI-WerkRosenheim, Germany

PI ShanghaiShanghai

PI(Physik Instrumente) L.P.

Irvine, CAAuburn, MA

PI(Physik Instrumente) Ltd.

Harpenden

PI France S.A.S.Pantin Cedex

and Job Safety (according to ISO14001:2004 and OHSAS 18001:1999).This system assures legal conformity ofall procedures as well as continuousoptimization of the processes at all PIlocations.

PI brands and colors are well knownthroughout the high-tech world. PIFOC®

is almost used as a synonym for objec-tive positioners in general and PICMA®

stands for the highest reliability in piezoactuator products.

PI stands for quality and precision –worldwide.

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PI CeramicLeading in Piezo Technology

PI Ceramic also develops andproduces all piezo ceramicdrive systems employed in PI’sprecision positioning systems.This makes PI the only supplierof nanopositioning equipmentin the world to manufacture itsown piezo ceramic drives. Thiscapability allows the flexibilityto provide custom engineeredpiezo ceramic components. Italso allows PI to offer the mostreliable piezo stages in theworld, based upon the award-winning PICMA® actuator tech-nology and to develop innova-

tive drive solutions such asPILine® ultrasonic ceramicmotors and NEXLINE® high-force ceramic motors.

In the tradition of the formerKeramische Werke Hermsdorf(KWH, until 1990), the PICeramic staff embodies knowl-edge and expertise in the fieldof piezo and ceramic technolo-gy. Since 1992, PI Ceramic hasbeen developing and produc-ing piezo ceramics, worldwideknown as PIC: PI piezoCeramics.

PI Ceramic—a PI Subsidiary—is a world-class supplier of high-performance piezoelectric

actuator and transducer components and subassemblies.

High-Tech manufacturing: Vacuum coating (sputtering)of piezo ceramics

Ceramic high-force piezo motor module

PI Ceramic Strengths

� State-of-the-Art Piezo Assemblies,Transducers and Subsystems

� Design & Manufacture of KeyComponents for Capital Equipment& Research

� Custom and Standard Solutions

� Short Delivery Through HighlyFlexible Processing

� All Key Technologies and EquipmentIn-House

� ISO 9001-2000, ISO 14001 andOHSAS 18001 Certified

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Experience and InnovationProduct Development for Faster Time-To-Market

The heart of PI is the R&Ddepartment, where physicistsand engineers work on tech-nologies which will fulfilltomorrow's stringent require-ments for our customers.

With a large percentage of PI'sOEM business based on cus-tom-designed products, thewide ranging know-how, longexperience and initiative of thedevelopers is crucial to suc-cess. Another important factor

is time-to-market, the fastavailability of prototypes forevaluation, which are close tothe serial product.

PI R&D engineers employstate-of-the-art FEA (finite ele-ment analysis) simulation toolsand CAD software to developnew electronics and mechan-ics systems. This assures func-tionality, precision and per-formance before the first pro-totype is ever built.

CAD Software (custom 6-DOF Hexapod shown on screen)

Photonics Circleof ExcellenceAward—one of anumber of inter-national distinc-tions received byPI for productinnovation

Wall of Fame: More than 100 patented and patent pending technologies related to

nanopositioning, motion control and piezoelectric drive systems.

FEA stress simulation showing wire-EDM-cut flexure joint of a tip/tiltmirror system for astronomical telescopes

Flexibility Through Modern

Organization: Fractals, Kanban,

Demand Flow Technology

The PI Production Departmentis divided into several autarkicfractals. Each fractal is virtuallya company within the compa-ny, responsible for all proce-dures from procurement andproduction planning to qualitytesting. Parts replenishment is,to a large extent, handled byKanban, a parts movementsystem making heavy use ofvisual signals in place of docu-ments. Small parts are nolonger ordered or tracked inter-nally at all, but rather suppliedby an outside service provider(outsourced C-part manage-ment). All other aspects of pro-duction and procurement aresubject to a Demand FlowTechnology system.

Environmental Protection and

Quality

The Integrated ManagementSystem (IMS) of PI and PICeramic includes not only theISO 9001 Quality Managementbut also Environmental Pro-tection and Job Safety (accord-ing to ISO 14001 and OHSAS

18001). This system assureslegal conformity of all proce-dures as well as continuousoptimization of the processesat all PI locations. Moreover,the quality of the products andservices is a decisive factor forcompetitiveness and successof PI. Business partners can besure that PI delivers high quali-ty products, something whichnot only certified customershave come to appreciate.

Good is Not Good Enough

We want our customers to beexcited about the quality of ourproducts and services. Animportant tool in this quest isKaizen, a Japanese philosophyof involving the entire enter-prise in a strategy of analysisand continuous improvementof all procedures.

Periodic workshops bring theKaizen ethos to all PI employ-ees, helping with goals likemaking production more effi-cient, eliminating unnecessaryprocessing loops, or instituting"just in time" parts manage-ment. In this way the companycan assimilate new develop-ments more rapidly and make

important resources availablewhere needed. Delivery timesand costs are reduced andquality improved.

Advantages for OEM

Customers

With a wide range of sophisti-cated test and manufacturingequipment, PI can react quicklyto product and developmentdemands, including those ofhighly complex custom sys-tems and subassemblies. PI'shigh level of vertical integra-tion means that all develop-ment and production process-

es, from conception to the finalproduct, are within the reach ofthe comprehensive qualitymanagement program.

Production under ControlManufacturing Fractals for high Efficiency and Quality

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Measurement technologies and

equipment employed by PI:

� Nanometrology labs withmultiple thermal, acousticand seismic isolation forreproducible measure-ments in the sub-nano-meter range

� Laser interferometers witha large variety of specialoptics for 1-D to 6-Dmeasurements

� Laser scanning vibrome-ters for vibration meas-urements

� Capacitive position meas-uring systems with sub-nanometer resolution

� Surface analysis interfer-ometers for sub-nanome-ter flatness measurement

� Electronic autocollimators

� Computer-controlledenvironmental chambers

� Spectrum analyzers

� Coordinate measurementmachines (CMM)

� Special microscopes

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Working together to findsolutions creates bonds thatwithstand the test of time. Andfinding solutions is utmost inthe minds at PI, where cus-tomer service begins with thefirst exploratory talks andcontinues well after delivery ofthe products.

Sales Engineers Worthy of the

Name

When our customers want tosolve complex problems, theyneed detailed technical advice.Often the process involvesvisits at the site of your appli-cation and at PI's research,testing and manufacturingfacility, where you and ourSales Engineers can take thetime necessary to fully clarifyall the issues involved. All ofPI's Sales Engineers havedegrees in physics or engineer-ing and up to 20 years experi-ence in optics, micro- andnanopositioning technology. Ifnecessary, R&D or ApplicationsEngineers can be brought in—even in the first phase of thediscussions—to help define acourse of action leading to acomprehensive solution.

After-Sale Service

The Sales Engineers are alsoavailable after the sale is made.They can advise you when thesystem is to be expanded,answer technical questions,and help with recalibration orrefurbishment.

International Support

PI branch offices and distribu-tors assure global supportfrom many countries in theworld. This fact can also beused to advantage by compa-nies which themselves operateworldwide.

Consulting and Customer ServiceFrom Customer to Partner

Service, sales, and application support team at PI’s HQ in Karlsruhe

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To assure that the subassem-blies used satisfy PI's qualityrequirements, PI fabricates allcomponents itself, developsthe ultra-high-resolution sen-sors and controllers, and pro-grams both control algorithmsand operating software. InLederhose (Thuringia) at PICeramic, piezoelectric drivesare developed, optimized andmanufactured. With PIC, PI isthe only positioning systemmanufacturer worldwide whichdevelops its own piezoelectricactuators to meet marketrequirements. The resultingflexibility is an important rea-son for the technological lead-ership enjoyed by PI and itscustomers.

Capacitive Sensors for

Nanometrology

Special sensors can fulfill therequirements of many applica-tions for dynamics, linearityand stability better than thatprovided by standard straingauges. Non-contact capacitivesensors measure positionwithout drift and provide

linearity to 0,01% of the meas-urement range. The highresolution of up to 0.0005 %allows detection and compen-sation of the smallest positionerrors. PI uses capacitivesensors developed in-house,making it possible to adapt thesensor geometries to the spaceavailable. Placing the sensorsas close as possible to themoving platform, PI providesdirect metrology systems—systems in which motion isdetected where it is used.PI capacitive sensors are alsooffered as stand-alone prod-ucts for nanometrology appli-cations.

Control of Positioning

Systems

The characteristics of drivesand sensors are made usableby the drive and control elec-tronics. PI has designed allelectronics to match themechanics optimally. Electro-nic amplifiers for piezoelectricactuators must provide lownoise and drift. Fast rise timesmake possible sub-millisecond

response times and optimizedcontrol algorithms minimizesettling times. Digital con-trollers include advanced algo-rithms to improve the systemperformance: coordinate trans-formation matrices matched tothe mechanical geometriesallow for commanding com-plex systems in Cartesian coor-dinates; filters support servo-control by suppressing reso-nant vibrations; pre-shaping ofcontrol signals minimizes tra-jectory deviation during dyna-mic scans. All functions areeasily accessible through fastand modern interfaces andcomprehensive user softwareand software drivers.

Flexibility Through Competent

Partners

High quality requires qualifiedpartners. Over the years PI hasthus qualified a number ofhighly specialized supplierswith whom we now work aspartners—partners whose con-ception of quality is every bitas high as our own.

Thinking in SystemsAll in One Hand—All from One Hand

E-710 6-axis Digital Piezo Controller with 6-DOF piezo nanopositioning stage

All PI nanopositioning systemscome with extensive systemperformance documentation

Drive, sensors, mechanics and controlelectronics with software—componentsof PI’s positioning systems

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Communication between PI components is based upon a universal command set (GCS – General Command Set). It decouples hardware and software, and is used for all driveprinciples.


Operating Positioning Systems Effectively & Conveniently

The high quality of positioningsystems is made apparent indaily operation by PI software.Starting with simple commis-sioning, through convenientoperation with a graphicalinterface, to quick and simpleintegration in customized pro-grams with high performance,PI software covers all aspectsimportant to an application.

Universal Command Set

Simplifies Commissioning

and Programming

For uniform operation of nanoand micropositioning systems,the universal PI GeneralCommand Set (GCS) is used.GCS operation is independentof the controller or drive princi-ple used, so that several posi-tioning systems can be con-trolled together, or new sys-tems can be introduced with aminimum of programmingeffort. With GCS the develop-ment of custom applicationprograms is simplified and lessprone to errors, because thecommands for all supported

PI Software

devices are identical in syntaxand function. Through the useof the GCS command set withits convenient functions, theorientation phase and applica-tion development process is

All about software in the internet—a server offers download of manuals and softwareCD mirrors

significantly accelerated. TheGCS commands are availableat the controller terminal, inmacros and in the form of auniversal driver set forLabVIEW (VIs), Windows

Supported Operating Systems

Microsoft Windows Vista

Microsoft Windows XP

Microsoft Windows 2000

Linux

Software Updates Online

PI supports users with freeupdates, detailed online helpand well structured manualswhich ease initiation of theinexperienced but still answerthe detailed questions of theprofessional.

PiezoWalk® Drives

Parallel KinematicNanopositioners

QuickScan VoiceCoilScanners

Parallel KinematicPiezoWalk® Systems

Piezo Nanopositioners

PILine® Ultrasonic Drivers

Micropositioners

Hexapods

dynamic link libraries (DLL) andLinux libraries. This facilitatesthe development of custommacros, as well as integrationwith programming languageslike LabVIEW, C++ or MATLAB.

GCS

Simple Commissioning and

Optimization of System

Dynamics

The commissioning of PI posi-tioning systems is quick andeasy with the NanoCaptureTM

and PIMikroMove™ host soft-ware. Controller and stages areselected and activated with afew clicks. Then the system canbe used directly. Running thesystem from the NanoCapture™or PIMikroMove™ host softwaregraphical interface requires noprogramming knowledge, eitherfor commissioning or directoperation.

Furthermore the system behav-ior is displayed graphically ineasy-to-understand diagramsand allows fast and easy opti-mization of the operating para-meters such as P-I-D terms,notch filter frequencies andslew rate limit.

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Step response of a position-controlled micropositioning stage with optimized and non-opti-mized dynamic parameters

Optimizing System Performance for Digital Piezo Controllers

NanoCapture™ Software

NanoCapture™ provides basicand highly advanced functionsfor operating digital piezoservo-controllers. With itsgraphical interface, Nano-Capture™ enables convenientsystem optimization and candisplay settling behavior, reso-nance frequency, Bode plots,etc. If the nanopositioning sys-tem is equipped with directlymeasuring position sensors,these features are availablew/o additional instrumentation.

Comprehensive System

Optimization

The functions described aboveare especially useful when themechanical properties of thesystem calibrated at the factoryare changed, e. g. by applying ahigher load.

� NanoCapture™ Application Software Offers Simple Interface

� Enables Optimization of All Servo Parameters

� Displays Response Behavior & Resonant Frequency, Creates

Bode Plots

� Function Generator for Complex Waveforms

Convenient operation of piezosystems and optimization of motion parameters,shown here: the display of operating limits in a Bode plot

In such a case, the adjustmentof parameters like control-loopamplification (P-I parameters),notch filter frequency or thezero-point of the integratedsensors, can optimize responsebehavior and system stability.In addition, NanoCapture™supports numerous controllerspecific properties, like forinstance the Wave Generator,which offers synchronizedoperation of multiple axes withmathematically defined curves,or with arbitrarily costomizedfunctions.

A-13


Simple Operation of Positioning Systems

PI positioning systems can becontrolled with PIMikroMoveTM

in a clear and simple manner;all connected controllers andaxes are accessed via the samegraphical interface.

PIMikroMove™ supports quickcommissioning of controllersand positioners, comprehen-sive system optimization aswell as the programming ofmacros.

All Axes in One View

With PIMikroMove™ all axesconnected can be controlledfrom one program instance.This, independent of which PIcontroller is connected towhich axis. For example, it ispossible to have two axes in anXY application connected totwo different controllers, butstill command them withPIMikroMove™ from the samewindow.

PIMikroMove™ Software

� Operation of PI Motor, Piezo, Piezomotor, Hexapod & Hybrid

Controllers

� Optimizing all Servo Parameters

� Macros for Recurring Tasks and Automation

� Profile Generator, Joystick control etc.

� 1D/2D Scan and AutoFind

Optimal System Behavior

PIMikroMove™ also allows theuser to optimize the systembehavior through convenientservo tuning. This possibility isespecially helpful if themechanical properties of a sys-tem are changed, for exampleby applying a different load.The system response and sta-bility can then be optimizedwith the convenient parametertuning tool. For recurring tasks,different sets of optimizedparameters can be saved asstage profiles and then activat-ed as needed in custom-pro-grammed applications.

Macros Ease Recurring Tasks

PIMikroMove™ considerablysimplifies the creation ofmacros for recurring tasks.Execution of a macro, consist-ing of a previously stored list ofGCS commands, can be com-

manded over the interface or, ifsupported by the controller, runautomatically on power-up,with or without a host PC con-nected.

Controllers without their ownmacro facility, like the C-843,can be commanded by hostmacros which PIMikroMove™edits and stores in the host PC.Host macro execution can betriggered with digital I/O linesand support multiple axes con-nected to different controllers.With the position pad, two ormore independent axes can bemoved by a mouse or joystickas an XY stage, also in vectormoves.

1D/2DScan and AutoFind

Scan 1D/2D can measure aninput source while moving upto two axes. Moved axes andinput source need not be con-trolled by the same controller.The input source to be meas-ured can be an analog input, anaxis position or a raw positionsensor value. The measureddata is visualized and can besaved to a file on the host PC.AutoFind tries to find the max-imum of an intensity signal by

A uniform interface for all axes

All axes and the position pad can be displayed in one window

modifying the position of twoaxes.

FFT, Profile Generator,

Data Recorder

PIMikroMove™ also supportscontroller-specific features.

Data recorder: record variousmotion and system parame-ters, run FFT (fast Fourier trans-formation) on the data as wellas export it to programs likeMicrosoft Excel (CSV format).

Profile Generator: synchronizemotion of several axes alongmulti-order, mathematicallydefined curves or customizedarbitrary functions.

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Quick Integration in LabVIEW

The integration and control ofPI positioning systems underLabVIEW is greatly simplifiedby the provision of comprehen-sive LabVIEW libraries. TheLabVIEW drivers support allcontrollers from PI, independ-ent of the type of connectedstage or controller interface.Thus it is possible to operatepiezo, DC motor, piezomotor,hybrid and hexapod controllers

Programming

Quick access to the full functionality

with one driver together in oneapplication.

Full Support for

NI DAQ Boards

The same LabVIEW programs(virtual instruments, VIs) thatare available for PI digital con-trollers (e.g. set and read volt-ages and positions, velocity,etc.) can be used in conjunctionwith a National Instruments

DAQ (data acquisition) board tooperate positioning systemsbased on analog PI controllers.Furthermore, the patentedHyperBitTM technology is avail-able under LabVIEW for thesesystems. HyperBitTM allowsattaining position resolutionmany times better than the res-olution of the DAQ board used.

Quick and Easy System Setup

For commissioning a position-ing system, the specialConfiguration Setup VI is exe-cuted once. This VI gathers allnecessary system informationfor LabVIEW, including:

� Communication parameters� Connected controller(s)� Types & configurations of

the connected stages/axesand performs all necessaryinitialisation steps.

Integrate & Customize

Configuration Setup Vis

With its connectors, the Con-figuration Setup VI can be cus-tomized completely to meet theapplication requirements; it is

implemented as an initializa-tion VI directly in the LabVIEWapplication. After it has beenrun, all command VIs and high-level routines of the system canbe used. Controller upgrades orchanges usually require theexchange of the ConfigurationSetup VI only. The open sourcecode of many VIs offers addi-tional flexibility in the case ofmodification needs.

Using Powerful GUI Programs

Directly

Beside the command VIs, high-level VIs can be included direct-ly. A comprehensive selectionof GUI programs is provided,such as a terminal application,interface selection routine,wave generator samples, 1Dand 2D scan and align func-tions, joystick control, etc.

A PI positioning system is initialized with C++ and with Matlab using DLL calls

Flexible Integration in Text-Based Programming Languages

The operation of PI positioningsystems from customer appli-cations running underMicrosoft Windows or Linux iseased with Dynamic LinkLibraries (DLLs) and samplecode.

Maximum flexibility

The drivers which are providedsupport all current program-ming languages (see inset) andall positioning systems from PI.Since the drivers are based onthe uniform PI GCS commandset (see p. A-11), GCS function-ality can be included directly inexternal programs. In additionto direct GCS commands, thedriver sets also make more

complex functionalities—withtheir own graphical inter-faces—available to externalprograms. It is thus possible,for example, to use a DLL func-tion call to include the WaveEditor or Profile Generator,complete with operatordialogs, in an external pro-gram.

Languages Supported by PI

MATLABVisual Basic, Delphi

C, C++, PythonμManagerEpicsMetaMorphLabVIEWAll programming languages thatsupport loading of DLLs

A-15


PI—Innovation is a Tradition

In the course of the last fourdecades, PI has become theleading manufacturer of nano-positioning technology.

In the 70s, as space explorationand laser technology stimulat-ed optics research, PI intro-duced piezo actuators whichgave scientists the highestpositioning precision thenavailable.

In the 80s, as the developmentof the microcomputer led tothe first semi-conductor boomand ongoing miniaturization ofelectronic structures, PI intro-duced nanopositioning sys-tems tailor-made for the tasksinvolved.

The fall of the Berlin Wallmarked the end of the ColdWar and made the 90s theopening of a new era of bound-

less communications. For PIalso, this meant the opening ofnew horizons with the foundingof the PI Ceramic subsidiary inthe former East Germany. Amain focus in technology wasPhotonics, where precisionpositioning of optical fibers andfiber-arrays boomed.

The turn of the century broughtglobal progress in nanotech-nology, which finds its firstcommercialisation in semicon-ductor manufacturing andinspection, and biotechnolo-gy—all fields where “smaller”and “more precise” are keys tosuccess.

PI also offers the appropriatesolutions for tasks in theseareas with ever faster andmore precise nanometer posi-tioning, stabilization and auto-mation.

70s

� First commerciallyavailable piezoelectrictranslators

� First piezo translators withpreloading, for industrialapplications

80s

� First commerciallyavailable closed-looppiezo actuators

� First nanopositioningsystems with flexureguidance and piezo drive

� First fiber positioning sys-tems with hybrid drives

� First preloaded actuatorswith monolithic low-volt-age piezos

� Computer controllednanopositioning systems

� First closed-loop image-stabilization platforms

90s

� First high-level dynamicsnanofocusing system withfrictionless guidance

� First two-plate capacitivesensors and controllerwith integrated lineariza-tion for subnanometeraccuracy

� First piezo nanoposition-ing systems with parallelmetrology and parallelkinematics

� First piezo-driven toolservo

� PI becomes first nanoposi-tioning systems suppliermanufacturing its ownpiezoceramics

� First Hexapod 6 DOFpositioning system withsubmicron resolution

� First fully automatic fiberalignment system withhigh-resolution Piezo-Walk® linear motor

� First piezo nanoposition-ing stage with active6D guidance

� First automated 6D fiberalignment system withfully virtualized center ofrotation

� First piezo controller withInputShaping® vibrationsuppression

� First digital piezo con-troller with fiber opticinterface

2000 +

� First multi-layer piezoactuators with ceramicencapsulation for longerlifetime and zero-out-gassing for vacuumoperation: PICMA®

� First piezomotor miniaturedrives in mass productionfor manipulation of smallopto-mechanical compo-nents

� Patented PILine® compactultrasonic piezomotorsand –drives to replaceclassical motor-spindleconfigurations

� Patented PiezoWalk® high-resolution, high-load-piezolinear stepping drives:NEXLINE®, NEXACT®

� First digital 6-axis piezocontroller with coordinatetransformation

� First piezo controllerwith Dynamic DigitalLinearization (improveslinearity by up to 1000times)

� First high-level dynamics,two-axis scanning mirrorwith closed-loop piezodrive and 100 mrad beamdeflection range

� Fastest closed-loop XYnanopositioning stageswith large aperture forscanning microscopy

� Scanning stages with<1 nm guiding accuracyin multiple axes

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Application PI Solution Typical PI Products*

N-214 N-215 NEXLINE® Linear Motor / Actuator, p. 1-10P-587 6-Axis Precision Piezo Stage, p. 2-76P-561·PIMars™ XYZ Piezo System, p. 2-72P-721 PIFOC® Objective Piezo Nanopositioner, p. 2-26

Piezo Linear Motors,Multiaxis-PiezoNanopositioning StagesPiezo ActuatorsPIFOC® Nanofocusing Devices

NanoimprintCD TestingMask and Wafer AlignmentObjective Precision PositioningLithography

Wafer InspectionNanometrology

See Examples on p. A-22

InterferometryClosed-Loop Piezo Actuators andFlexure-Guided Systems

P-725 PIFOC® Long-Travel Objective Scanner, p. 2-28P-753 LISA Linear Actuator & Stage, p. 2-16P-752 High Precision Nanopositioner, p. 2-18P-620.1 – P-629.1 PIHera® Piezo Linear Stage, p. 2-22

Wire Bonding Piezo Bender Actuators PL112 · PL140 PICMA® Bender Actuators, p. 1-94

Sub-nm Measurements(Nanometrology)

D-015 · D-050 · D-100 Capacitive Sensors, p. 3-14D-510 PISeca™ Single Probe Capacitive Sensors, p. 3-8

Single and Dual Probe CapacitivePosition Sensors

M-824 Compact 6-Axis-Positioning System, p. 4-10M-850 Hexapod 6-Axis Positioning System, p. 4-6F-206.S HexAlign™ 6 Axis-Hexapod, p. 4-12N-515 Non Magnetic Piezo Hexapod, p. 1-17

Optics Testing / 6-Axis AlignmentHexapod 6D Parallel-KinematicsMicropositioning Systems

Semiconductor Technology

Applications

Moore's Law keeps com-pressing IC line widths and fea-ture-sizes. In order to keep up,nanopositioning mechanismsand precision motion controlsystems embedded in front-end production and metrologytools must provide 10 to 1000xhigher precision than featuresize. Vibrations, position errorsand drift need to be controlled

to <0.1 nm (atom diameter).Conventional positioning sys-tems do not provide therequired stability and preci-sion.

PI offers a wide variety of piezobased solutions from long-lifePZT ceramics for vibration can-cellation to the ultra-high-performance NEXLINE® long-

travel nanopositioning piezomotors.

Other precision motion pro-ducts include piezo tilt plat-forms for fast beam stabiliza-tion / correction, piezo flexurestages for nanometrologyapplications, nanoalignmentsystems for mask alignment,and the new hybrid long-travel

nanopositioning translationstages for linear and verticalpositioning.

PI's capacitive nanometrologysensors measure motion downto the sub-nanometer rangewith very high bandwidth.

*Other standard or custom solutions from PI could be even more suitable for your application. Talk to a PI Applications Engineer or visit www.pi.ws.

A-17



P-620.1 · P-629.1 PIHera® Piezo Linear Stage, p. 2-22P-601 PiezoMove™ Z-Actuator, p. 1-68P-587 6-Axis Precision Piezo Stage, p. 2-76N-214 NEXLINE® Piezo Motor Actuator, p. 1-10P-225, P-235 PICA™ Ultra-High-Force Piezo StackActuators, p. 1-80

Lever-Amplified Piezo ActuatorsPiezo Flexure Stages with up to 6 AxesPiezoWalk® Linear Motors/Actuators

Nanoalignment Systems with LongTravel Ranges

Beam Scanning and StabilizationOptical Path Correction

Fast Piezo Steering Mirror SystemsS-334 Miniature Piezo Tip/Tilt-Mirror, p. 2-90S-330 High-Dynamics Piezo Tip/Tilt-Mirror, p. 2-88

Active Vibration Cancellation Piezo Stack Actuators and Ceramics

P-225, P-235 PICA™ Power Piezo Actuators, p. 1-80P-010.xxP · P-056.xxP PICA™ Power Actuator, p. 1-88P-876 DuraAct Patch Transducers, p. 1-96

High-ResolutionMicroscopy

See Examples p. A-18

Vertical Wafer Positioning

M-714 Nanometer-Precision Linear Stage, p. 4-62P-541.Z Piezo Z and Z/Tip/Tilt Stages, p. 2-44P-518, P-528, P-558 Piezo Z/Tip/Tilt Stage, p. 2-46P-587 6-Axis Precision Piezo Stage, p. 2-76N-510 NEXLINE® Z/Tip/Tilt Stages, p. 1-17

Piezo Z-Tip/Tilt StagesCustom Tripod Stages with PiezoLinear MotorsPiezoWalk® Drives and Actuators

N-214 N-215 NEXLINE® Linear Motor / Actuator, p. 1-10M-674 PILine® RodDrive Piezo Linear Drive, p. 1-30M-511 Heavy-Duty Micropositioning Stage, p. 4-44M-038 Precision Rotation Stage, p. 4-80M-060 Precision Rotation Stage, p. 4-76

Long-Range Placement andPositioning

Motorized Translation StagesMotorized Rotation StagesPILine® Ultrasonic MotorsNEXLINE® PiezoWalk® Motors


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Microscopy/Imaging

Applications

Piezo positioning & scanningstages are fundamental toolsfor high-resolution micro-scopy. The rapid response andsub-atomic resolution allowscientists to create higher-qual-ity images faster.

PI provides a large variety offast objective lens positioners

(Z-motors), as well as samplescanners for deconvolutionand 3D imaging (Z-stack acqui-sition) and fast focusingstages.

PIFOC® piezo-actuated Z-scan-ners typically achieve 10 timeshigher focusing speed & preci-sion than motorized drives.

Controllers come with a high-bandwidth analog interface forextremely fast response andcompatibility with all majorimage acquisition packages.

Optical trapping experimentsrely on the high resolution andstability of closed-loop piezoflexure stages and steering

mirrors. The latest generationof digital controllers can pro-vide significant advantages intracking applications.


P-737 Piezo Z-Stage, p. 2-34P-721 PIFOC® Nanofocussing Z-Drive, p. 2-26P-725 PIFOC® Long Travel Nanofocussing Z-Drive, p. 2-28P-541.Z Piezo Z-Stage, p. 2-44

Piezo Specimen Z-Stages &Piezo Objective Scanners

Confocal Microscopy, FocusingZ-Stack Image Acquistion

Scanning Microscopy,Optical Trapping (Tweezers),SNOM, AFM,E-Beam

Fast XYZ Nanopositioning SystemsPiezo Nanopositioning StagesShear ActuatorsPicoCube® ScannerScanner TubesPiezo Beam Steering Mirrors

P-517 · P-527 Multi-Axis Piezo Scanner, p. 2-70P-111 · P-151 PICA™ Shear Actuators, p. 1-98PT-120 PT Piezo Tube Actuators, p. 1-100P-363 PicoCube™ XY(Z) Piezo Scanner, p. 2-66S-323 High-Resolution, High Dynamics Mirror withCapacitive Sensors, p. 2-96

ScreeningLong Range Scanning

Voice-Coil ScanningStages/PositionersStages with Linear Piezomotors

V-106 QuickScan™ High-Dynamics Scanner, p. 4-48M-686 PILine® XY-Linear Motor Stage, p. 4-64M-664 PILine® Linear Motor Stage, p. 4-30

Image ProcessingResolution Enhancement, CCD DitheringPixel Sub-Stepping / MultiplicationBiometry

Fast and Cost-Effective scanners

P-713 XY Piezo Scanner, p. 2-56PL112 Benders, p. 1-94S-325 Piezo Z / Tip/Tilt Platform, p. 2-92S-330 High-Resolution, High Dynamics Mirror, p. 2-88

Laser Beam Steering, Stabilization

S-330 High-Resolution, High Dynamics Mirror, p. 2-88S-323 High-Resolution, High Dynamics Mirror withCapacitive Sensors, p. 2-96S-334, Long Range Steering Mirror, p. 2-90

Tip/Tilt Mirrors (Active Optics)

M-686 PILine® XY-Linear Motor Stage, p. 4-64M-663 PILine® Linear Motor Stage, p. 4-28M-014 Linear Slide with Aperture, p. 4-54M-501 Precision Vertical Stage, p. 4-60

Sample PositioningXY-Stages

Stages with Linear Piezomotors orDC Motors

Sample Positioning(Very High Resolution)

Digital Controllers forHigh Speed Tracking

Piezo Actuators

Digital Controllers with OptionalInputShaping® Technology

P-840 • P-841 Preloaded Piezo Actuators, p. 1-74

E-712 Modular Digital Piezo Controller, p. 2-140E-753 Digital Piezo Controller, p. 2-108


A-19



M-110 Compact Micro-Translation Stage, p. 4-22M-230 Precision Linear Actuator, p. 1-46F-130 Compact XYZ Fiber Aligner, p. 4-66P-882 PICMA® Multilayer Piezo Stack Actuators, p. 1-82

Micro-Translation StagesLinear ActuatorsMicromanipulatorsFast Piezo Actuators

Flow CytometryCell SortingElectrophysiology, Patch ClampIntra-Cell Metrology

Optical TrappingCell TrackingOptical TweezersMolecular Stretching

Piezo Nanopositioning andScanning Stages

P-541 Piezo XY-Stage, p. 2-44P-527 Multi-Axis Piezo Scanner, p. 2-70P-733 XY(Z) Piezo-Nanopositioning Stage, p. 2-62P-363 PicoCube™ XY(Z) Piezo Scanner, p. 2-66

Confocal MicroscopyFocusingZ-Stack Image Acquistion

Z-StagesPiezo Specimen Z-Stages & PiezoObjective Scanners

P-541.Z Piezo Z and Z/Tip/Tilt Stages, p. 2-44P-721, P-725, P-726 PIFOC® Piezo Flexure ObjectiveScanners, p. 2-26 ffP-737 PIFOC® Specimen-Focusing Z Stage, p. 2-34

Laser Beam Steering, Stabilization Tip/Tilt Mirrors (Active Optics)S-334 Miniature Piezo Tip/Tilt-Mirror, p. 2-90S-330 High-Dynamics Piezo Tip/Tilt-Mirror, p. 2-88

Cell Penetration

P-601 PiezoMove™ Z-Actuator, p. 1-68PT120 PT Piezo Tube Actuators, p. 1-100P-611 Piezo Nanopositioner, p. 2-50M-674K High-Precision Z Actuator p. 1-35N-380 NEXACT® Linear Actuator, Piezo Stepper, p. 1-14

PiezoWalk® Linear Motor ActuatorsNanopositionersPiezo Linear Scanners

M-674 PILine® RodDrive Piezo Linear Drive, p. 1-30P-653 PILine® Miniature Linear Motor / Slide, p. 1-32P-601 PiezoMove™ Z-Actuator, p. 1-68PL112 PICMA® Bender Actuators, p. 1-94See www.piceramic.com

MicrodosingDispensingNano/Microliter Pumps

Piezo Linear MotorActuators & StagesPiezo ActuatorsPiezoelectric Components

ScreeningFast PositioningBio-Handling

Image ProcessingResolution Enhancement, CCD DitheringPixel Multiplication, Biometry

Voice-Coil ScannersMicropositioning StagesPiezo Linear MotorsHexapod 6D Micropositioning System

Fast and Cost-Effective scanners

V-106 QuickScan™ High-Dynamics Scanner, p. 4-48P-725 PIFOC® Piezo Flexure Objective Scanner, p. 2-28M-674 PILine® RodDrive Piezo Linear Drive, p. 1-30M-824 Compact 6-Axis-Positioning System, p. 4-10M-511 Heavy-Duty Micropositioning Stage, p. 4-46

P-713 XY Piezo Scanner, p. 2-56PL112 PICMA® Bender Actuators, p. 1-94S-325 Piezo Z / Tip/Tilt Platform, p. 2-92S-330 High-Dynamics Piezo Tip/Tilt-Mirror, p. 2-88

Biotechnology, Life Science

Applications

Recent advances in biotech-nology and related scienceshave increased the needfor high-speed, high pre-cision positioning systems.Please read on for a few exam-ples.

PI piezo actuators can be usedto precisely focus a micro-scope objective in millisec-onds, and they can also help tosort cells rapidly. Drug screen-ing applications demand nano-liter dispensing capabilities,

yet another application wherethe speed and precision andextreme lifetime of PI piezoactuators excel.

The scanning optical micro-scope–one of the cutting-edge

tools for DNA research–is notfeasible without piezo posi-tioning systems. PI's hexapod6-axis robots provide the preci-sion and flexibility to supportsurgeons in their craft.


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Medical Design, Medical Technology

Applications


S-334 Long Range Piezo Tip/Tilt-Mirror, p. 2-90

S-330 High Dynamics Steering Mirror, p. 2-88Beam Steering Tip/Tilt Mirrors(Active Optics)

OphthalmologyDermatologyLaser Beam Steering, Stabilization

Flow CytometryCell SortingElectrophysiology, Patch ClampIntra-Cell Metrology

Micro-Translation StagesLinear ActuatorsMicromanipulatorsFast Piezo ActuatorsPiezoWalk® Drives and Actuators

M-110 Compact Micro-Translation Stage, p. 4-22M-230 Servo Motor Actuator, p. 1-46F-130 Compact XYZ Fiber Aligner, p. 4-66P-882 PICMA® Multilayer Piezo Stack Actuators, p. 1-82N-310 NEXACT® OEM Miniature Linear Motor/Actuator, p. 1-12

Cell PenetrationMicrodosing

NanopositionersPiezo ScannersPiezoWalk® Drives and Actuators

P-601 PiezoMove™ Z-Actuator, p. 1-68P-611 Piezo Nanopositioner, p. 2-50 ffM-674 PILine® RodDrive Piezo Linear Drive, p. 1-30N-310 NEXACT® OEM Miniature Linear Motor/Actuator, p. 1-12N-380 PiezoWalk® Nanopositioning Linear Motor Actuator, p. 1-14

ScreeningFast Positioning

Voice-Coil ScannersMicropositioning StagesPiezo Linear Stages

V-106 QuickScan™ High-Dynamics Scanner, p. 4-48P-725 PIFOC® Piezo Flexure Objective Scanners, p. 2-28M-686 PILine® XY-Linear Motor Stage, p. 4-64M-664 PILine® Linear Motor Stage, p. 4-30

Microscopy See Examples p. A-18

M-824 Compact 6-Axis-Positioning System, p. 4-10M-850 Hexapod 6-Axis Positioning System, p. 4-6M-850K 6-Axis Positioning System for Large Loads, p. 4-15M-511 Heavy-Duty Micropositioning Stage, p. 4-44

Hexapod 6D Micropositioning SystemsTranslation Stages

Surgical RobotsAdjustment of examinationtables for treatment

Image ProcessingResolution EnhancementOCT

Fast X and XY-ScannersPiezo ActuatorsTip/Tilt Mirrors

P-713 XY Piezo Scanner, p. 2-56PL112 · PL140 PICMA® Bender Actuators, p. 1-94P-882 PICMA® Multilayer Piezo Stack Actuators, p. p. 1-82S-334 Miniature Piezo Tip/Tilt-Mirror, p. 2-90

Recent advances in medicaldesign and related life scienceshave increased the need forhigh-speed, high precisionpositioning systems. Pleaseread on for a few examples.

PI piezo actuators are high-speed, non-magnetic devices

great advantages in MRI & OCTapplications. They can alsohelp to sort cells rapidly. Drugscreening applications demandnanoliter dispensing capabili-ties, yet another applicationwhere the speed, precision andextreme lifetime of PI piezoactuators excel. Piezo beam

steering systems can be usedto direct laser beams extreme-ly fast and precisely. The scan-ning optical microscope — oneof the cutting-edge tools forDNA research — is not feasiblewithout piezo positioning sys-tems. PI's Hexapod 6-axisrobots provide the precision

and flexibility to support sur-geons in their craft.


A-21


M-037 Compact Precision Rotation Stage, p. 4-78M-038 Precision Rotation Stage, p. 4-80M-060 Precision Rotation Stage, p. 4-76

Grating Rotation Rotation Stages


HandlingCompact Drive UnitsNon-Magnetic Actuators

Piezo Linear DrivesPiezoWalk®

Piezo Actuators

P-653 Sub-Miniature Linear Motor, p. 1-32M-664 PILine® Linear Motor Stage, p. 4-30N-310 NEXACT® OEM Linear Motor, p. 1-12

NanodosingUltrasonic OscillationsNanoliter Pumps

Piezoceramic Components,Flexure-Guided Actuators

P-601 PiezoMove™ Z-Actuator, p. 1-68See p. 1-94 ff. and www.piceramic.com

Force and Motion Sensors See p. 1-94 ff and www.piceramic.comPiezoceramic Components

P-601 PiezoMove™ Z-Actuator, p. 1-68P-611 Piezo Nanopositioner, p. 2-50 ffP-725 PIFOC® Piezo Flexure Objective Scanners, p. 2-28 ffN-310 NEXACT® OEM Miniature Linear Motor, p. 1-12N-380 PiezoWalk® Nanopositioning Linear Actuator, p. 1-14

OCT, WLIDiagnostics,DermatologyOphthalmology

Piezo ActuatorsPiezo Linear Motor DrivesPiezoWalk® Drives and Actuators

Confocal MicroscopyFocusingZ-Stack Image Acquistion

Z-StagesObjective Z-Scanners

Optical TrappingCell TrackingOptical TweezersMolecular Stretching

Piezo Nanopositioning andScanning Stages


P-541 Piezo XY-Stage, p. 2-60P-527 Multi-Axis Piezo Scanner, p. 2-70P-733 XY(Z) Piezo-Nanopositioning Stage, p. 2-62P-363 PicoCube™ XY(Z) Piezo Scanner, p. 2-66

P-541.Z Piezo Z and Z/Tip/Tilt Stages, p. 2-44P-721, P-725, P-726 PIFOC® Piezo Flexure Objective Scanners, p. 2-26 ffP-737 PIFOC® Specimen-Focusing Z Stage, p. 2-34

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Metrology / Laser Systems / Optical Inspection / Tribology

Applications


P-721 PIFOC® Piezo Flexure Objective Scanner, p. 2-26P-587 6-Axis Precision Piezo Stage, p. 2-76P-734 Low Bow XY Scanning Stage, p. 2-64S-303 Piezo Phase Shifter, p. 2-96P-622.Z PIHera® Precision Z-Stage, p. 2-40

PIFOC® Objective NanofocusingSystemsPiezo Scanning StagesZ-Axis Piezo Phase Shifters

Scanning InterferometryWhite-Light Interferometry

Precision Linear Positioning Stages forSurface Analysis, Optical Inspection,Laser Positioning Systems

Microscopy Stages with Piezo OptionHybrid Long-Range NanopositioningStagesLong Travel Piezo Flexure Stages

M-714 Nanometer-Precision Hybrid Linear Stage, p. 4-62M-511 Heavy-Duty Micropositioning Stage, p. 4-44M-014 Linear Slide with Aperture, p. 4-54P-629 Flexure Stage with 1.8 mm Travel, p. 2-22

Long Range Surface Scanning Voice-Coil Scanning Stages/Positioners V-106 QuickScan™ High-Dynamics Scanner, p. 4-48

Nanomaterials TestingNanotribologyNanothicknessMeasurementsNanoindentationContacting Surface Profilometer

Piezo ActuatorsX, XY and XYZ Piezo StagesCapacitiveSensorsPiezo Motor Stages

D-015 · D-050 · D-100 Capacitive Sensors, p. 3-14P-840 Preloaded Piezo Actuators, p. 1-74P-734 XY Piezo Scanner, p. 2-64P-753 LISA Linear Actuator & Stage, p. 2-16M-663 Ultrasonic Piezo Linear Motor Stage, p. 4-28


PI precision positioning stagesand actuators have been usedin many noncontacting opticalinspection and contactingnanometrology applications.They provide sub-nanometerprecision and extremely uni-

form motion with flatness andstraightness in the nanometerand sub-nanometer range forthe latest technology break-throughs. Sophisticated digitalcontrol algorithms canimprove scanning linearity by

several orders of magnitudewhile reducing runout errors tosubatomic tolerances. PI'scapacitive nanometrology sen-sors measure motion down tothe sub-nanometer range withvery high bandwidth.

PI piezo-driven actuators andnanopositioning sensors arealso ideal components for thedesign of nano-indentation /micro-indentation mechanismsand nanotribology / nanofric-tion experiments

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Nanotechnology, Nanofabrication, NanoAutomation®

Applications

Piezo positioning systems arefundamental tools for nano-technology applications. Theirextreme precision and speedmakes them vital componentsin applications such as nano-imprint, nanoassembly, ultra-

high density data storage andnanofabrication.

In addition to extremely fastmechanics, PI also designsadvanced digital piezo con-trollers that provide very high

bandwidth and eliminatedynamic nonlinearity for vastlyimproved tracking accuracy.Active trajectory control elimi-nates off-axis errors andInputShaping® cancels self-generated vibration, for the

fastest possible settlingspeeds.

The combination of advancedmechanical design and high-throughput control technologyis called NanoAutomation®.


P-733.3DD XY(Z) Piezo-Nanopositioning Stage, p. 2-62P-587 6-Axis Precision Piezo Stage, p. 2-76P-620.1 - P-629.1 PIHera® Piezo Linear Stage, p. 2-22P-840 Preloaded Piezo Actuators, p. 1-74N-380 PiezoWalk® Nanopositioning Linear Motor Actuator, p. 1-14

Multi-Axis Nanopositioning SystemsPIHera® Stages ScannerPreloaded Piezo ActuatorsPiezoWalk® Nanopositioning Drives

Nanoimprint, NanoassemblyNanofabrication, NanojoiningNanomechanicsNanomaterials Testing

Ultra-Precision Linear Motors& Actuators

Motorized Precision Linear ActuatorsPiezoWalk® Linear Motor Actuators,Ultrasonic Ceramic High-Speed Motors

N-310 NEXACT® OEM Miniature Linear Motor/Actuator, p. 1-12P-653 Sub-Miniature Piezo Ceramic Linear Motor p. 1-32M-674 PILine® RodDrive Piezo Linear Drive, p. 1-30M-230 Servo Motor Actuator, p. 1-46P-661 Ultrasonic Linear Motor for OEMs, p. 1-28

NanodosingMicrodispensingNanoliter ControlFast Valve Control

Tube ActuatorsDisk ActuatorsLever Amplified ActuatorsBender ActuatorsPiezoelectric Components

PT120 Piezo Tubes, p. 1-100P-601 PiezoMove™ Z-Actuator, p. 1-68PL112 · PL140 PICMA® Bender Actuators, p. 1-94See www.piceramic.com

Microassembly and Handling Systems Hexapod 6D Micropositioning Robots

M-840 HexaLight™ 6-Axis Positioning System, p. 4-8M-824 Compact 6-Axis-Positioning System, p. 4-10M-850 Hexapod 6-Axis Positioning System, p. 4-6F-206.S HexAlign™ 6 Axis-Hexapod, p. 4-12

Precision Positioning of Components(Linear and Rotation)

M-110 Compact Micro-Translation Stage, p. 4-22M-663 PILine® Linear Motor Stage, p. 4-28M-511.HD Hybrid Ultra-Precision, MicropositioningStage, p. 4-46M-060 · M-061 · M-062 Precision Rotation Stage, p. 4-76

Miniature StagesRotation Stages

N-380 PiezoWalk® Nanopositioning Linear Motor Actuator, p. 1-14M-230 Precision Linear Actuator, p. 1-46M-235 Heavy-Duty Precision Linear Actuator, p. 1-50P-661 PILine® Piezo Linear Drive, p. 1-28M-674 PILine® RodDrive Piezo Linear Drive, p. 1-30

Precision Actuation

Motorized Precision Linear ActuatorsPiezoWalk® Linear Motor Drives andActuators

MicrogrippersManipulators

Microembossing

Piezo Bender ActuatorsPiezoWalk® DrivesPILine® Drives

Heavy-Duty Piezo Translators

PL112 · PL140 PICMA® Bender Actuators, p. 1-94P-885 PICMA® Multilayer Piezo Stack Actuators, p. 1-82P-653 PILine® Miniature Linear Motor / Slide, p. 1-32N-310 NEXACT® OEM Miniature Linear Motor/Actuator, p. 1-12

P-225 PICA™ Power PIezo Stack Actuators, p. 1-80P-007 PICA™ Stack Actuator p. 1-86


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Photonics, Telecommunications, Integrated Optics

Applications


P-653 Sub-Miniature Piezo Ceramic Linear Motor for MicroLens Positioning / Cell Phone Autofocus & Zoom p. 1-32P-725 PIFOC® Piezo Nanofocussing Device, p. 2-28P-661 High Speed Piezo Ceramic Linear Motorfor OEMs, p. 1-28

PIFOC® Piezo Z-ScannersHigh Speed Piezo Ceramic LinearMotors

Autofocusing

NanophotonicsLaser DepositionQuantum Computing

Multi-Axis Nanopositioning SystemsHexapod 6D Systems

P-587 6-Axis Precision Piezo Stage, p. 2-76P-563 PIMars™ XYZ Piezo System, p. 2-72P-615 NanoCube® XYZ Piezo System, p. 2-68M-824 Compact 6-Axis-Positioning System, p. 4-10

Photonics PackagingMEMS Positioning/AlignmentFiber AlignmentFiber Optic Test Systems

6D Hexapod Alignment Systems,Ultra-Compact, X, XY and / XYZ TranslationStages with Piezo Option3D Piezo-Driven Nanopositioning Systems

Fast Voice-Coil Scanners/Positioners

F-206.S HexAlign™ 6 Axis-Hexapod, p. 4-12M-110 Compact Micro-Translation Stage, p. 4-22M-105.3P Linear Slide, p. 4-50F-130 Compact XYZ Fiber Aligner, p. 4-66P-611 Piezo Nanopositioner, p. 2-20V-106 QuickScan™ High-Dynamics Scanner, p. 4-48

Fiber Splicer, Fiber Alignment,Fiber Optic Switches

Piezo Bender ActuatorsPiezo Actuators for Positioning TasksMiniature PZT Actuators

P-810 Piezo Actuators, p. 4-14PL112 · PL140 PICMA® Bender Actuators, p. 1-94

Fiber Stretching/Modulation PT120 PT Piezo Tube Actuators, p. 1-100Tube Actuators for Fiber Stretching,Compressing, Modulating

PI offers a great variety of inno-vative solutions for testingand fabrication of MEMs andphotonics devices. Productsrange from automated 6D align-ment systems for industrialautomation to simple devices

for laboratory test setups. Piezodrives make possible rapidscanning with sub-millisecondresponse.

Applications include automatedphotonic alignment of collimat-

ed fibers or arrays, test systemsfor MEMS and multi-channelwaveguides. Miniature piezolinear motors provide highspeed with very low power con-sumption, ideal in cell phoneautofocussing applications.

The following table includes buta few examples of the systemsolutions that PI has developedfor the photonics market.

Translation StagesRotation Stages

Fiber Optic Alignment

Laser Beam SwitchingOptical SwitchesFree Space Communications

Fast Tip/Tilt Mirrors for OpticalBeam Switching

Fabry-Perot FiltersLaser Tuning

Optics Nanopositioning SystemsSpecial PiezoceramicsMiniature PZT Actuators

Writing Fiber Bragg GratingsPiezo Nanoscanning StagesPiezo Actuators


F-130 Miniature XYZ Alignment System, p. 4-66M-122 High Precision Miniature Translation Stage , p. 4-24M-037 Compact Precision Rotation Stage, p. 4-78M-126 High-Resolution Translation Stage, p. 4-38M-235 Heavy-Duty Precision Linear Actuator, p. 1-50

S-334 Miniature Piezo Tip/Tilt-Mirror, p. 2-90S-330 Piezo Tip/Tilt-Platform, p. 2-88

PL022 PICMA® Bender Actuators, p. 1-92S-316 Piezo Z / Tip / Tilt Scanner, p. 2-94See also www.piceramic.com

P-753 LISA Linear Actuator & Stage, p. 2-16P-752 High Precision Nanopositioning Stage, p. 2-18P-885 PICMA® Multilayer Piezo Stack Actuators, p. 1-82

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Precision Machining (Metal, Optics, Laser Cutting, Diamond Turning)

Applications

PI introduced the first line ofpiezoelectric actuators morethan 35 years ago. The technol-ogy's unique features such as:responsiveness; stiffness; lifetime and infinite resolution,have opened many marketssince then, from semiconduc-tor testing to precision machin-ing. Typical piezoelectric fasttool servos for precisionmachining are equipped withspecial waterproof casings

which also provide themechanical interface to thetooling machine and the toolservo.

Integrated metrology systemsfeature resolution in the nano-meter and sub-nanometerrange for closed-loop opera-tion with digital or analogmotion controllers. Flexureguiding mechanisms andmotion amplifiers provide long

traveling ranges and protectthe piezo ceramics from off-axis forces.

PI piezo actuator systems areused throughout the world,often in applications that run24 hours a day, seven days aweek. They improve the manu-facturing precision of optics,crank shafts, bearings, cylin-ders, pistons, etc. in crucialprocesses such as diamond

turning, milling, grinding, out-of-round boring or wear-com-pensation of tools.

Custom-manufactured high-performance piezoceramic actu-ators provide lifetimes of bil-lions of cycles. Power amplifierswith energy recovery and2000 W peak power are avail-able for high-dynamics applica-tions.


P-225 Preloaded High Force Piezo Actuators, p. 1-78Fast Piezo Driven Tool Servos, ask PI [email protected]

Heavy-Duty Piezo Actuators andAmplifiers, Custom PiezoelectricFast Tool ServosPrecision Piezo Stages for GrindingPiezo Actuators for Fast Tool Tip Control

Non-Circular TurningBoringGrindingPolishing of Optics, Bearings, Pistons,Shafts...

Aspheric Optics Manufacturing(Contact Lenses)Diamond Turning

Piezo Actuators and AmplifiersPiezo Stage Nano-PositionersCustom Piezo Stages

P-212, P-216 PICA™ Power PIezo Stack Actuators, p. 1-78P-750 Piezo Nanopositioning System, p. 2-24P-625 PIHera® Piezo Linear Stage, p. 2-22M-238 High-Load Linear Actuator, p. 1-52

Focus/Beam Control for LaserWelding/Cutting

Piezo ActuatorsPiezo Steering Mirrors / OpticsCustom High-Speed Actuators

S-334 Miniature Piezo Tip/Tilt-Mirror, p. 2-90S-330 Piezo Tip/Tilt-Platform, p. 2-88P-842 · P-845 Preloaded Piezo Actuators, p. 1-76P-885 PICMA® Multilayer Piezo Stack Actuators, p. 1-82

Active Vibration Control

Heavy-Duty PiezoActuators and ControllerFsCustom Stages

P-885 PICMA® Multilayer Piezo Stack Actuators, p. 1-82P-056 PICA™ Stack Actuator, p. 1-88P-212 Preloaded PICA™ Power Piezo Actuators, p. 1-78P-876 DuraAct™ Piezo Patch Transducers, p. 1-96


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P-752 High-Precision Nanopositioning Stage, p. 2-18P-772 Miniature Nanopositioning System, p. 2-24P-628 PIHera® Piezo Linear Stage, p. 2-74

High-Level DynamicsNanopositioning StagesUltra-Fast Nanoautomation®

Controller

Read/Write Head Testing

High-Speed TrackingTrack Following Servos

Digital Controllers with OptionalInputShaping® Technology

E-712 Modular Digital Piezo Controller, p. 2-14E-753 Digital Piezo Controller, p. 2-16

Nanomagnetic TestingThermal Annealing

Multi-Axis Nanopositioning SystemsP-733.2DD XY(Z) Piezo-Nanopositioning Stage, p. 2-62P-563 PIMars™ XYZ Piezo System, p. 2-72P-587 6-Axis Precision Piezo Stage, p. 2-76

Laser Beam Focusing /AlignmentBeam Stabilization (DVDMastering)

PIFOC® Nanofocusing SystemsPIHera Nanopositioning StagesActive opticsFast Voice-Coil Drives

P-725 PIFOC® Long-Travel Objective Scanner, p. 2-28P-628 PIHera® Piezo Linear Stage, p. 2-74S-334 Long Range Steering Mirror p. 2-90V-106 QuickScan™ High-Dynamics Scanner, p. 4-48


Data Storage Technology

Applications

Piezo positioning systems arefundamental tools for test &metrology systems in ultra-high-density data storageapplications, nanoimprint, na-

noassembly, and nanofabrica-tion. Their extreme precisionand speed makes them vitalcomponents in the quest tofollow Moore's law.

PI has taken nanopositioningto the next level by combiningadvanced mechanical designsand high-throughput controltechnology to provide nano-

meter precision in millisec-onds. This is called NanoAuto-mation®.

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M-824 Compact 6-Axis-Positioning System, p. 4-10M-850 Hexapod 6-Axis Positioning System, p. 4-6N-515 Non Magnetic Piezo Hexapod, p. 1-17

Hexapod 6D Micropositioning SystemsMicrowave AntennaPrecision Alignment

Fast Laser Beam Steering/Alignment Piezo Steering MirrorsS-334 Miniature Piezo Tip/Tilt-Mirror, p. 2-90Custom High-Bandwidth Piezo Steering platforms forlarge mirrors, p. 2-88

Resolution EnhancementImage StabilizationPixel Multiplication

Piezo Scanning StagesActive Optics

P-713 · P-714 XY Piezo Scanner, p. 2-56P-733.2 · P-733.3 XY(Z) Piezo-Nanopositioning Stage, p. 2-62S-325 Piezo Z / Tip/Tilt Platform, p. 2-92S-334 Miniature Piezo Tip/Tilt-Mirror, p. 2-90

Precision Linear Actuators

DC-Mike & Stepper-MikeNEXLINE® Piezo Linear Motors

N-111, NEXLINE® Miniature Linear Motor / Actuator, p. 1-8M-238 High Load Servo Motor Actuator, p. 1-52

Beamline ExperimentsAngular AlignmentSample Positioning

M-824 Compact 6-Axis-Positioning System, p. 4-10N-214 NEXLINE® Linear Motor / Actuator, p.1-10N-515 Non Magnetic Piezo Hexapod, p. 1-17

Nonmagnetic NEXLINE®

Piezo Linear MotorsHexapod 6D Micropositioning Systems

P-235 Preloaded High Force Piezo Stack Actuators, p. 1-78P-056 PICA™ Stack Actuator Stacks p. 1-88

Cavity Tuning High Force Piezo Ceramic Actuators

Aeronautics, Image Processing, Cryogenic & Vacuum Environments

Applications

PI piezo actuators and piezomotors provide very highforces and require little tono power in quasistaticapplications. They can alsowork in a vacuum and atvery low temperatures—condi-

tions found in space applica-tions.

PI hexapods have been used inmicrowave antenna alignmentapplications to significantlyreduce the alignment time

while improving the antennaperformance.

During the last 15 years PI hasdesigned several large-aper-ture high-speed tip/tilt systemsfor image stabilization.

Piezoelectrically-driven activemirrors can improve theeffective resolution up to1000% by correcting for theseimage shifts in real time,especially during long integra-tions with weak light sources.


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Astronomy, Adaptive Optics

Applications


Custom High-Bandwidth Piezo Steering Platforms forLarge Mirrors, ask PI ([email protected])S-330, Piezo Steering Mirror, p. 2-88

Piezo Tip/Tilt mirrorsHigh Speed Beam Steeringand Stabilization

Low Bandwidth Aligment of ActiveMirrors in Astronomical Telescopes

Large Custom Piezo Steering Mirrorsfor Fast Correction of TurbulenceHexapod 6D Micropositioning Systems

M-850K Weatherproof Hexapod, p. 4-14M-850 Hexapod 6-Axis Positionie, p. 4-6M-850K Ultra-High-Load Hexapod p. 4-15

Segmented Mirror Positioningwith Linear Actuators

NEXLINE® High-Force, Long TravelPiezo Linear Motor ActuatorsDC-Mike & Stepper-Mike

N-214, Ultra-High Load Linear Actuator, p. 1-10N-111, High Load Linear Actuator, p. 1-8M-235 Heavy Duty Linear Actuator, p. 1-50M-238 High Load Linear Actuator, p. 1-52

Laser Cavity Tuning/Stabilization Piezo Actuators, Phase ShiftersS-310 - S-316 Piezo Z / Tip / Tilt Scanner, p. 2-94S-303 Piezo Phase Shifter, p. 2-96


Resolution in large earthboundtelescopes is limited by vibra-tions and atmospheric turbu-lence. To overcome these limi-tations, PI has designed anddelivered many large-aperturehigh-speed tip/tilt systems for

active secondary and tertiarymirror stabilization. Piezo-electrically-driven active mir-rors can improve the effectiveresolution up to 1000 % bycorrecting for these imageshifts in real time, especially

during long integrations withweak light sources.

PI's hexapod 6-axis microposi-tioning systems are key com-ponents for the precise align-ment of active mirrors.

PI precision linear actuatorsprovide superior performanceand lifetime and have beensuccessfully employed in largesegmented mirror telescopessuch as SALT.


Products / Page References to the 2009 Hardbound PI Catalog

Linear Actuators & Motors

PiezoWalk® Actuators, p. 1-3

PILine® Ultrasonic Motors, p. 1-23

DC Servo & Stepper Actuators, p. 1-39

Piezo Actuators & Components, p. 1-61Guided / Preloaded, p. 1-68 • UnpackagedStack Actuators, p. 1-82 • Patches/Benders/Tubes/Shears ..., p. 1-94

Nanopositioning / Piezoelectrics

Piezo Flexure Stages / High-Speed ScanningSystems, p. 2-3

Linear, p. 2-14 • Vertical & Tip/Tilt, p. 2-242- and 3-Axis, p. 2-50 • 6-Axis, p. 2-76

Fast Steering Mirrors / Active Optics, p. 2-81

Piezo Drivers / Servo Controllers, p. 2-99Single-Channel, p. 2-108 • Multi-Channel,p. 2-126 • Modular Electronics, p. 2-140Accessories, p. 2-168

Piezoelectrics in Positioning, p. 2-171

Nanometrology

Capacitive Sensors / Signal Conditioners, p. 3-3

Nanometrology Fundamentals, p. 3-17

Micropositioning

Hexapod 6-Axis Systems / Parallel Kinematics, p. 4-3Physik Instrumente (PI) GmbH &

Linear Stages, p. 4-19 Co. KG is the owner of the follo-

Translation, p. 4-22 • Vertical, p. 4-58 wing company names and trade-marks: PI®, PIC®, PICMA®, PIFOC®,

Multi-Axis, p. 4-64 PILine®, NEXLINE®, NEXACT®,PiezoWalk®, NanoCube®,

Rotary & Tilt Stages, p. 4-69 NanoAutomation®.

Accessories, p. 4-89The following designations are

Servo & Stepper Motor Controllers, p. 4-109 protected company names or

Single-Channel, p. 4-112 • Hybrid, p. 4-118 registered trademarks of thirdparties: Microsoft, Windows,

Multi-Channel, p. 4-120 LabVIEW, National Instruments,InputShaping, Linux, MATLAB,

Micropositioning Fundamentals, p. 4-127 Visual Basic, Delphi, Python,μManager, Epics, MetaMorph.


HeadquartersGERMANY

Physik Instrumente (PI)GmbH & Co. KGAuf der Römerstr. 176228 Karlsruhe/PalmbachTel: +49 (721) 4846-0Fax: +49 (721) [email protected] · www.pi.ws

SubsidiariesUSA (East) & CANADA

PI (Physik Instrumente) L.P.16 Albert St.Auburn, MA 01501Tel: +1 (508) 832 3456Fax: +1 (508) 832 [email protected]

PI (Physik Instrumente) L.P.5420 Trabuco Rd., Suite 100Irvine, CA 92620Tel: +1 (949) 679 9191Fax: +1 (949) 679 [email protected]

JAPAN

PI Japan Co., Ltd.Akebono-cho 2-38-5Tachikawa-shiTokyo 190Tel: +81 (42) 526 7300Fax: +81 (42) 526 [email protected]

PI Japan Co., Ltd.Hanahara Dai-ni-Building, #7034-11-27 Nishinakajima,Yodogawa-ku, Osaka-shiOsaka 532Tel: +81 (6) 6304 5605Fax: +81 (6) 6304 [email protected]

CHINA

Physik Instrumente(PI Shanghai) Co., Ltd.Building No. 7-301Longdong Avenue 3000201203 Shanghai, ChinaTel: +86 (21) 687 900 08Fax: +86 (21) 687 900 [email protected]

FRANCE

PI France S.A.S.32 rue Delizy93694 Pantin CedexTel: +33 (1) 57 14 07 10Fax: +33 (1) 41 71 18 [email protected]

UK & IRELAND

PI (Physik Instrumente) Ltd.Lambda HouseBatford MillHarpenden, HertfordshireAL5 5BZTel: +44 (1582) 711 650Fax: +44 (1582) 712 [email protected]

ITALY

Physik Instrumente (PI) S.r.l.Via G. Marconi, 2820091 Bresso (MI)Tel: +39 (02) 665 011 01Fax: +39 (02) 665 014 [email protected]

PI Ceramic GmbHLindenstr.07589 LederhoseTel: +49 (36604) 882-0Fax: +49 (36604) [email protected]

USA (West) & MEXICO


pi 2009 about pi: innovation, precision, iso 9001, applications...email: [email protected]...

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