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2017

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1 FEBRUARY 2017

MICRO TECHNOLOGIESTHE LEADING EUROPEAN MEETING ON MICRO- AND NANOSCALE SYSTEMS, TECHNOLOGIES, AND APPLICATIONS.

Conferences: 8–10 May 2017Hotel Alimara, Barcelona, Spain

www.spie.org.MTprogrammeme

SPIE Microtechnologies 2017 • www.spie.org/MTprogramme • Program current as of 2/1/2017II

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MICRO TECHNOLOGIES THE LEADING EUROPEAN MEETING ON MICRO- AND NANOSCALE SYSTEMS, TECHNOLOGIES, AND APPLICATIONS.

Conferences: 8–10 May 2017 Hotel Alimara, Barcelona, Spain

Three Days Many Opportunities

CUTTING-EDGE RESEARCH

WORLD-CLASS SPEAKERS

TRAINING AND EDUCATION

FOCUSED TECHNICAL TOPICS

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CONNECTING MINDS. ADVANCING LIGHT.

2017

Tel: +1 360 676 3290 • [email protected] • #SPIEmicrotech 1

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Hotel Alimara, Barcelona, Spain

Conferences: 8–10 May 2017

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PROGRAM CURRENT AS OF: 1 FEBRUARY 2017

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SPIE Europe Ltd., a subsidiary of SPIE, is a not-for-profit UK-registered company serving SPIE constituents throughout Europe as an advocate and liaison to political and industry associations within the European optics and photonics community. In addition to providing membership services, SPIE Europe Ltd. organises and manages internationally recognised conferences, education programmes, and technical exhibitions featuring emerging technologies in optics and photonics.

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SPIE Microtechnologies 2017 • www.spie.org/MTprogramme • Program current as of 2/1/20172

10246 Smart Sensors, Actuators, and MEMS VIII (Fonseca, Prunnila, Peiner) . . .3

10247 Bio-MEMS and Medical Microdevices III (van den Driesche, Giouroudi, Delgado-Restituto) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6

10248 Nanotechnology VIII (Tiginyanu, Adelung, Sarua) . . . . . . . . . . . . . . . . . . . .7

10249 Integrated Photonics: Materials, Devices, and Applications IV (Fédéli, Vivien) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8

Conferences: Hear 150 presentations on the latest advances in digital pathology; tomography; image processing;

observer performance; image-registration, -informatics, and -segmentation; computer-aided diagnosis; and ultrasound.

Plan to attend SPIE Micro Technologies—where the latest information is presented.

4 Conferences

Plenary Sessions p. 4Don’t miss these world-class speakers discussing the latest directions and most promising breakthroughs.

Special Events p. 5Join your colleagues at these relaxed events, including the Welcome Reception and Interactive Poster Session.

DAILY SCHEDULE . . . . . . . . . . . . . . . . . . . . . . . . . . . page 6

PROCEEDINGS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .page 15

GENERAL INFORMATION . . . . . . . . . . . . . . . . pages 16–17

Registration · Author/Presenter Information · Policies · Food and Beverage · Onsite Services · Parking and Car Rental

SPIE POLICIES . . . . . . . . . . . . . . . . . . . . . . . . . . pages 18–19

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EXECUTIVE ORGANISING COMMITTEE

Rainer Adelung, Christian-Albrechts-Univ. zu Kiel (Germany)

Alessandro Bertacchini, Univ. degli Studi di Modena e Reggio Emilia (Italy)

Manuel Delgado-Restituto, Instituto de Microelectrónica de Sevilla (Spain)

Jean-Marc Fédéli, CEA-LETI (France)

Luis Fonseca, Ctr. Nacional de Microelectrónica (Spain)

Ioanna Giouroudi, DWI an der RWTH Aachen e.V. (Austria)

Erwin Peiner, Technische Univ. Braunschweig (Germany)

Mika Prunnila, VTT Technical Research Ctr. of Finland Ltd. (Finland)

Andrei Sarua, Univ. of Bristol (United Kingdom)

Plan to ParticipateJoin us and review the latest research at the 8th SPIE Microtechnologies. Meet colleagues from academia and industrial research groups in Barcelona, the capital of Catalonia (Spain), and plan to participate and share your latest ideas in technological fields essential for shaping of the new millennium.

Four exciting conferences in the field of microtechnologies have been linked together. Take advantage of the synergies created by engineers, scientists, researchers, and managers working on various aspects of microtechnologies. The symposium presents a unique opportunity to hear about the latest advances in microtechnologies for smart sensors, energy harvesting and smart power, reconfigurable hardware, network on a chip, nano fabrication and self-assembly, hybrid nanosystems, biomedical applications and bioinspired systems, microfluidics and lab on a chip, silicon and nano photonics, quantum communication, and many other cutting-edge R&D results.

Exchange new ideas, address your shared concerns, and get access to information not yet published in these topical areas. Your paper is permanently archived in the SPIE Digital Library, where it will be available to others in the international scientific community who seek to learn, make discoveries, and innovate.

We welcome you to feel at home in Barcelona, Spain, attend the meeting, and join your colleagues and friends for the most stimulating scientific symposium.

SYMPOSIUM CHAIR

Ulrich Schmid Technische Univ. Wien (Austria)

SYMPOSIUM CO-CHAIRS

Jacopo Iannacci Findazione Bruno Kessler (Italy)

José Luis Sánchez-Rojas Aldavero Univ. de Castilla-La Mancha (Spain)

LOCAL CO-CHAIR

Carles Cané Ctr. Nacional de Microelectronica (Spain)

Ion M. Tiginyanu, Academy of Sciences of Moldova (Moldova)

Sander van den Driesche, Univ. Bremen (Germany)

Laurent Vivien, Institut d’Électronique Fondamentale (France)


PLENARY PRESENTATIONS

TUESDAY 9 MAY 9:00 TO 10:00

9:00:Welcome and IntroductionsUlrich Schmid, Technische Univ. Wien (Austria)

MONDAY 8 MAY 8:50 TO 10:00

8:50:Opening Remarks

WEDNESDAY 10 MAY 9:00 TO 10:00

9:00:Welcome and IntroductionsUlrich Schmid, Technische Univ. Wien (Austria)Ulrich Schmid,

Technische Univ. Wien (Austria)

8:55:Welcome

Carles Cané, Ctr. Nacional de Microelectronica (Spain)

9:00 to 10:00

Smart Integrated Microsystems: The Energy Efficiency Challenge

Luca Benini, Univ. degli Studi di Bologna (Italy)

Abstract: The “internet of everything” envi-sions trillions of connected objects loaded with high-bandwidth sensors requiring massive amounts of local signal processing, fusion, pattern extraction and classification. From the computational viewpoint, the challenge is for-midable and can be addressed only by pushing computing fabrics toward massive parallelism and brain-like energy efficiency levels. CMOS technology can still take us a long way toward this goal, but technology scaling is losing steam. Energy efficiency improvement will increasingly hinge on architecture, circuits, design tech-niques such as heterogeneous 3D integration, mixed-signal preprocessing, event-based ap-proximate computing and non-Von-Neumann architectures for scalable acceleration.

Biography: Luca Benini holds the chair of Digital Circuits and Systems at ETHZ and is Full Pro-fessor at the Universita di Bologna. Dr. Benini received a Ph.D. degree in electrical engineering from Stanford University in 1997 and his research interests are in energy-efficient system design for embedded and high-performance comput-ing. He is also active in the area of energy-effi-cient smart sensors and ultra-low power VLSI design. Dr. Benini has published more than 700 papers in peer-reviewed international journals and conferences, four books, and several book chapters. He is a Fellow of the IEEE, the ACM, is a member of the Academia Europaea, and is the recipient of the 2016 IEEE CAS Van Valkenburg award.

9:05:

MEMS Microphone Innovations Towards High Signal to Noise Ratios

Alfons Dehé, Infineon Technologies AG

(Germany)

Abstract: After decades of re-search and more than ten years of successful production in very high

volumes Silicon MEMS microphones are mature and unbeatable in form factor and robustness. Audio applications such as video, noise cancel-lation and speech recognition are key differen-tiators in smart phones. Microphones with low self-noise enable those functions. Backplate-free microphones enter the signal to noise ratios above 70dB(A). This talk will describe state of the art MEMS technology of Infineon Technologies. An outlook on future technologies such as the comb sensor microphone will be given.

Biography: Alfons Dehé is a Senior Principal on MEMS devices at Infineon Technologies. He ob-tained a diploma on solid state physics from the RWTH Aachen University in 1992. At the Techni-cal University of Darmstadt he finished his PhD in 1997 focusing on compound semiconductor micromachined sensors and actuators for ther-mal, optical and radio frequency applications. Since 1998 he is with the Infineon Technologies AG where he held different positions in the radio frequency and sensors department. He has start-ed Silicon microphone development and turned it into successful volume production. Today he is leading the MEMS innovation targeting mobile applications. He is the author and co-author of more than 90 papers and holds more than 30 patent families.

9:05:

Graphene Technologies for Bioelectronics and Neuroprosthetics

Jose A. Garrido, Institut Català de Nanociència i Nanotecnologia (ICN2) (Spain)

Abstract: Establishing a reliable bidirectional communication in-terface between the nervous

system and electronic devices is crucial for exploiting the full potential of neural prosthe-ses. Despite recent advancements, current microelectrode technologies evidence important shortcomings, e.g. challenging high density integration, low signal-to-noise ratio, poor long-term stability, etc. Thus, efforts to explore novel materials are essential for the development of next-generation neural prostheses. Graphene and graphene-based materials possess a rather exclusive set of physicochemical properties hold-ing great potential for biomedical applications, in particular neural prostheses. In this presenta-tion, I will provide an overview on fundamentals and applications of several graphene-based technologies and devices aiming at developing an efficient bidirectional communication with electrogenic cells and nerve tissue. The main goal of this talk is to discuss pros and cons of graphene technologies for bioelectronics and neuroprosthetics, and at the same time to iden-tify the main challenges ahead.

Biography: Jose A. Garrido is an ICREA Research Professor at the Catalan Institute of Nanosci-ences and Nanotechnology (ICN2), and head of the Advanced Electronic Materials and Devices group. He received a master and PhD degree in Telecommunication Engineering from the Tech-nical University of Madrid, in 1996 and 2000, respectively. From 2001 to 2004, he worked as a postdoc at the Walter Schottky Institute, Tech-nische Universität München, where he obtained his habilitation in experimental physics in 2010. From 2011 to 2015, Jose A. Garrido held a lecturer (privatdozent) position at the department of physics of the Technische Universität München. Currently, Jose A. Garrido is Deputy of the WP Biomedical Technologies of the EU Graphene Flagship.

Don’t miss these world-class speakers discussing the latest directions and most promising breakthroughs.


SPECIAL EVENTS

Welcome ReceptionMonday 8 May 2017 • 19:00 to 20:30Join your colleagues for a networking event with light refreshments. Please remember to wear your conference registration badge.

Interactive Poster SessionTuesday 9 May 2017 • 14:30 to 16:30

SETUP

Authors are encouraged to display their posters beginning at 10:00 on Monday for extended viewing. Each poster author will have a 1m x 1m (39 inches x 39 inches) area in which to display their poster presentation.

INTERACTIVE POSTER SESSION

Tuesday . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14:30 to 16:30 Conference attendees are invited to attend the Poster Session on Tuesday afternoon. Come view posters, enjoy light refreshments, ask questions, and network with colleagues in your field. Attendees are required to wear their conference registration badges to the poster session.

Authors of poster papers will be present to answer questions concerning their papers. Posters not removed at the end of the interactive poster session will be considered unwanted and will be discarded.

Join your colleagues at these relaxed events, including the Welcome Reception and Interactive Poster Session.

• FREE • OPEN TO ALL CONFERENCE ATTENDEES


TIME

Conference 10246Smart Sensors, Actuators,

and MEMS VIII

Conference 10247 Bio-MEMS and Medical

Microdevices III

Conference 10248 Nanotechnology VIII

Conference 10249 Integrated Photonics:

Materials, Devices, and Applications IV

MONDAY 8 MAY8:50 to 10:00 MONDAY PLENARY PRESENTATION: Smart Integrated Microsystems: The Energy Efficiency Challenge (Luca Benini)

10:30 SESSION 1 Modeling and Simulation I Session Chair: Michele Pozzi

SESSION 1 Nanoplatelets, Nanotubes, and Nanowires Session Chair: Ion M. Tiginyanu

13:40 SESSION 2 Modeling and Simulation II Session Chair: Jacopo Iannacci

13:35 SESSION 2 Luminescence and Light-emitting Devices Session Chair: Rainer Adelung

15:30 SESSION 3 Chemical and Biochemical Sensors I Session Chair: Mika Prunnila

SESSION 3 Multifunctional Applications and Sensors Session Chair: Andrei Sarua

16:30 SESSION 4 Chemical and Biochemical Sensors II Session Chair: Jürgen Wöllenstein

19:00 WELCOME RECEPTION

TUESDAY 9 MAY9:00 to 10:00 TUESDAY PLENARY PRESENTATION: MEMS Microphone Innovations Towards High Signal to Noise Ratios (Alfons Dehé)

10:30 SESSION 5 Physical Sensors I Session Chair: Robert J. Lad

SESSION 4 Thin Films and Photovoltaics Session Chair: Teresa Monteiro

SESSION 1 Biophotonics Session Chair: Dan-Xia Xu

13:10 SESSION 6 Physical Sensors II Session Chair: Sören Fricke

13:15 SESSION 5 Material Nanostructuring and Microfabrication Session Chair: Hidenori Mimura

13:15 SESSION 2 Photonic Devices Session Chair: Jean-Marc Fédéli

14:30 POSTER SESSION

16:30 SESSION 7 Materials and Processes Session Chair: Erwin Peiner

SESSION 6 Synthesis Session Chair: Carlo Ricci

SESSION 3 Optical Sensing I Session Chair: Régis Orobtchouk

WEDNESDAY 10 MAY9:00 to 10:00 WEDNESAY PLENARY PRESENTATION: Graphene Technologies for Bioelectronics and Neuroprosthetics (Jose A. Garrido)

10:30 SESSION 8 Energy Devices I Session Chair: Gemma García Mandayo

SESSION 1 Biomedical Sensors and Microfluidics I Session Chair: Sander van den Driesche

SESSION 4 Quantum Photonics Session Chair: Laurent Vivien

13:40 SESSION 9 Energy Devices II Session Chair: Nathan M. Jackson

13:20 SESSION 2 Biomedical Sensors and Microfluidics II Session Chair: Ioanna Giouroudi

13:15 SESSION 5 Optical Sensing II Session Chair: Laurent Vivien

15:30 SESSION 10 Interfacing and System Integration Session Chair: Luis Fonseca

SESSION 3 Biomedical Sensors and Microfluidics III Session Chair: Manuel Delgado-Restituto

DAILY SCHEDULE


CONFERENCE 10246Monday–Wednesday 8–10 May 2017 • Proceedings of SPIE Vol. 10246

Smart Sensors, Actuators, and MEMS VIIIConference Chair: Luis Fonseca, Ctr. Nacional de Microelectrónica, CSIC (Spain)

Conference Co-Chairs: Mika Prunnila, VTT Technical Research Ctr. of Finland Ltd. (Finland); Erwin Peiner, Technische Univ. Braunschweig (Germany)

Programme Committee: Francisco J. Arregui, Univ. Pública de Navarra (Spain); Joan Bausells, Ctr. Nacional de Microelectrónica, CSIC (Spain); Achim Bittner, Hahn-Schickard (Germany); Christian Bolzmacher, Commissariat à l’Énergie Atomique (France); Lionel Buchaillot, IEMN, Univ. Lille 1 (France); Viorel Dragoi, EV Group (Austria); Isabelle Dufour, IMS, Univ. Bordeaux 1 (France); Sören Fricke, Robert Bosch GmbH (Germany); Gerald Gerlach, Technische Univ. Dresden (Germany); Jorge Hernando García, Univ. de Castilla-La Mancha (Germany); Martin Hoffmann, Technische Univ. Ilmenau (Germany); Carmen Horrillo-Guemes, ITEFI, CSIC (Spain); Jacopo Iannacci, Fondazione Bruno Kessler (Italy); Enrique Iborra, Univ. Politécnica de Madrid (Spain); Nathan M. Jackson, Tyndall National Institute (Ireland); Konrad Kapser, Infineon Technologies AG (Germany); Robert J. Lad, Univ. of Maine (United States); Jeong-Bong Lee, The Univ. of Texas at Dallas (United States); Elie Lefeuvre, Univ. Paris-Sud 11 (France); Gemma Garcia Mandayo, CEIT-IK4 (Spain); Fernando Martinez, IKERLAN, IK4 (Spain); Dean P. Neikirk, The Univ. of Texas at Austin (United States); Patrick Pons, Lab. d’Analyse et d’Architecture des Systèmes, CNRS (France); Michele Pozzi, Newcastle Univ. (United Kingdom); Gabriele Schrag, Technische Univ. München (Germany); Andreas Schütze, Univ. des Saarlandes (Germany); Ashwin Seshia, Univ. Cambridge (United Kingdom); Pietro Siciliano, Istituto per la Microelettronica e Microsistemi (Italy), Consiglio Nazionale delle Ricerche {Italy); Gabriel Vanko, Slovak Academy of Sciences (Slovakia); Jürgen Wöllenstein, Fraunhofer-Institut für Physikalische Messtechnik (Germany)

MONDAY 8 MAY

MONDAY PLENARY SESSION . . . . . . . . MON 8:40 TO 10:00

8:40: Opening Remarks, Ulrich Schmid, Technische Univ. Wien (Austria)

8:50: Welcome, Carles Cané, Ctr. Nacional de Microelectronica (Spain)

9:00: Smart integrated microsystems: the energy efficiency challenge (Plenary Presentation), Luca Benini, Univ. degli Studi di Bologna (Italy)

SESSION 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . MON 10:30 TO 12:10

Modeling and Simulation ISession Chair: Michele Pozzi, Newcastle Univ. (United Kingdom)

Multiscale numerical study on ferroelectric nonlinear response of PZT thin films, Hiroki Wakabayashi, Osaka Institute of Technology (Japan) and Tokai Univ. (Japan); Yasutomo Uetsuji, Osaka Institute of Technology (Japan); Kazuyoshi Tsuchiya, Tokai Univ. (Japan) . . . . . . . . . . . . . . . . . . . . . . . . [10246-1]

Fluid-structure interaction modelling of the roof tile-shaped modes in piezoelectric plate microresonators, Víctor Ruiz-Díez, Javier Toledo Serrano, Jorge Hernando-García, Univ. de Castilla-La Mancha (Spain); Georg Pfusterschmied, Ulrich Schmid, Technische Univ. Wien (Austria); José Luis Sánchez-Rojas Aldavero, Univ. de Castilla-La Mancha (Spain) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-2]

Optimization of a Piezo-fiber scanning architecture, Ramin Khayatzadeh, Fehmi Civitci, Onur Ferhanoglu, Istanbul Technical Univ. (Turkey) . . . . . [10246-3]

Optimal design of a microgripper-type actuator, David Ruiz, Alex Díaz, Univ. de Castilla-La Mancha (Spain); Ole Sigmund, Technical Univ. of Denmark (Denmark); José Carlos Bellido, Alberto Donoso, José Luis Sánchez-Rojas Aldavero, Univ. de Castilla-La Mancha (Spain) . . . . . . . . . . . . . . . . . . . . [10246-4]

Topologically optimised flexure hinge based XY stage, Adil Han Orta, Bogazici University (Turkey); Evren Samur, Cetin Yilmaz, Bogaziçi Univ. (Turkey) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-5]

Lunch Break . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Mon 12:10 to 13:40

SESSION 2 . . . . . . . . . . . . . . . . . . . . . . . . . . . MON 13:40 TO 15:00

Modeling and Simulation IISession Chair: Jacopo Iannacci, Fondazione Bruno Kessler (Italy)

Modelling high signal to noise ratio in a novel silicon MEMS microphone with comb readout, Johannes Manz, Technische Univ. München (Germany); Alfons Dehé, Infineon Technologies AG (Germany); Gabriele Schrag, Technische Univ. München (Germany) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-6]

Multiphysical simulation of a surface acoustic wave gyro sensing element, Alexander S. Kukaev, Dmitry P. Lukyanov, Sergey Y. Shevchenko, Saint Petersburg Electrotechnical Univ. “LETI” (Russian Federation) . . . . . . . [10246-7]

A 3D FE model of a cellular polypropylene: exploring mechanical properties, Pavlos Sgardelis, Michele Pozzi, Newcastle Univ. (United Kingdom) . . . [10246-8]

Efficient fluid transport by a bionically inspired micro-flapper: fluidic investigations using fully coupled finite element simulation, Gabriele Schrag, Regine Behlert, Gerhard Wachutka, Technische Univ. München (Germany) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-9]

SESSION 3 . . . . . . . . . . . . . . . . . . . . . . . . . . . .MON 15:30 TO 16:30

Chemical and Biochemical Sensors ISession Chair: Mika Prunnila,

VTT Technical Research Ctr. of Finland Ltd. (Finland)

Development of a lab-on-chip electrochemical immunosensor array for detection of Polycyclic Aromatic Hydrocarbons (PAH) in the environmental, Shifa Jameel A. Felemban, Patricia Vazquez, Tyndall National Institute (Ireland); Eric Moore, Tyndall National Institute (Ireland) and Univ. College Cork (Ireland) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-10]

Gravimetric humidity sensor based on ZnO nanorods covered piezoresistive Si microcantilever, Jiushuai Xu, Maik Bertke, Alaaeldin Gad, Hao Zhou, Hutomo Suryo Wasisto, Erwin Peiner, Technische Univ. Braunschweig (Germany) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-11]

MEMS-based multi-array hydrogen sulfide detection employing a phase transition, Benedikt Bierer, Cem Dinc, Haitao Gao, Univ. of Freiburg (Germany); Jürgen Wöllenstein, Univ. of Freiburg (Germany) and Fraunhofer-Institut für Physikalische Messtechnik (Germany); Stefan Palzer, Univ. of Freiburg (Germany) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-12]

SESSION 4 . . . . . . . . . . . . . . . . . . . . . . . . . . . .MON 16:30 TO 17:50

Chemical and Biochemical Sensors IISession Chair: Jürgen Wöllenstein, Fraunhofer-Institut für

Physikalische Messtechnik (Germany)

Direct measurement for organic solvents diffusion using ultra-sensitive optical resonator, Amir R. Ali, Catherine Elias, The German Univ. in Cairo (Egypt) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-13]

Inkjet-printed dissolved oxygen and pH sensors on flexible plastic substrates, Ana Moya, Miguel Zea, Instituto de Microelectrónica de Barcelona (Spain); Enrico Sowade, Technische Univ. Chemnitz (Germany); Rosa Villa, Eloi Ramon, Instituto de Microelectrónica de Barcelona (Spain); Reinhard R. Baumann, Technische Univ. Chemnitz (Germany); Gemma Gabriel, Instituto de Microelectrónica de Barcelona (Spain) . . . . . . . . . . . . . . . . . . . . . . . . . [10246-14]

Wax microfluidics light-addressable valve with multiple actuation, Maria Diaz-Gonzalez, Gerard Boix, Cesar Fernandez-Sanchez, Antonio Baldi, Instituto de Microelectrónica de Barcelona (Spain) and Consejo Superior de Investigaciones Científicas (Spain) . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-15]

Development of biosensors for non-invasive measurements of heart failure biomarkers in saliva, Albert Alcacer, Angelos Streklas, Ctr. Nacional de Microelectrónica (Spain) and Consejo Superior de Investigaciones Científicas (Spain); Abdoullatif Baraket, Nadia Zine, Abdelhamid Errachid, Univ. Claude Bernard Lyon 1 (France); Joan Bausells, Ctr. Nacional de Microelectrónica (Spain) and Consejo Superior de Investigaciones Científicas (Spain) . . [10246-16]


TUESDAY 9 MAYTUESDAY PLENARY SESSION . . . . . . . . TUE 9:00 TO 10:00

9:00: Welcome and Introductions: Ulrich Schmid, Technische Univ. Wien (Austria)

9:05: MEMS microphone innovations towards high signal to noise ratios (Plenary Presentation), Alfons Dehé, Infineon Technologies AG (Germany)

SESSION 5 . . . . . . . . . . . . . . . . . . . . . . . . . . . . .TUE 10:30 TO 11:50

Physical Sensors ISession Chair: Robert J. Lad, The Univ. of Maine (United States)

MEMS direction finding acoustic sensor, Gamani Karunasiri, Fabio Alves, Naval Postgraduate School (United States) . . . . . . . . . . . . . . . . . . . . . [10246-17]

A multi-functional MEMS-SPM for quantitative characterisation of nano-objects, Zhi Li, Sai Gao, Uwe Brand, Physikalisch-Technische Bundesanstalt (Germany) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-18]

Asymmetric resonance response analysis of a thermally excited silicon microcantilever for mass-sensitive nanoparticle detection, Maik Bertke, Gerry Hamdana, Wenze Wu, Markus Marks, Hutomo Suryo Wasisto, Erwin Peiner, Technische Univ. Braunschweig (Germany) . . . . . . . . . . . . . . . [10246-19]

Thermoelectric bolometers based on ultra-thin highly doped silicon membranes, Aapo Varpula, Andrey V. Timofeev, Andrey Shchepetov, Kestutis Grigoras, Jouni Ahopelto, Mika Prunnila, VTT Technical Research Ctr. of Finland Ltd. (Finland) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-20]

Lunch Break . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Tue 11:50 to 13:10

SESSION 6 . . . . . . . . . . . . . . . . . . . . . . . . . . . . .TUE 13:10 TO 14:30

Physical Sensors IISession Chair: Sören Fricke,

Ctr. Suisse d’Electronique et de Microtechnique SA (Switzerland)

Highly tensioned SiN Membrane with low recoil losses for quantum optics, Antonio L. Borrielli, Istituto dei Materiali per l’Elettronica ed il Magnetismo (Italy); Enrico Serra, Trento Institute for Fundamental Physics and Applications (Italy); Michele Bonaldi, Istituto dei Materiali per l’Elettronica ed il Magnetismo (Italy); Lorenzo Marconi, Istituto Nazionale di Ottica (Italy); Francesco Marin, Univ. degli Studi di Firenze (Italy); Bruno Morana, Technische Univ. Delft (Netherlands); Antonio Pontin, Univ. degli Studi di Firenze (Italy); Francesco Marino, Istituto Nazionale di Ottica (Italy); Gregory Pandraud, Technische Univ. Delft (Netherlands); Giovanni A. Prodi, Univ. degli Studi di Trento (Italy); Pasqualina M. Sarro, Technische Univ. Delft (Netherlands) . . . . . . . . . . . . . . . . . . . . . [10246-21]

Oscillator circuit for monitoring the gas damping effect of piezoelectric microresonators, Javier Toledo Serrano, Victor Ruiz-Díez, Univ. de Castilla-La Mancha (Spain); Patrick Schwarz, Helmut Seidel, Univ. des Saarlandes (Germany); José Luis Sánchez-Rojas Aldavero, Univ. de Castilla-La Mancha (Spain) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-22]

Comparative assessment of PVDF and PVDF-TrFE piezoelectric polymers for flexible actuators applications, Graciela Gutiérrez-Sánchez, Jorge Hernando-García, Óscar Dura, Marco Antonio López de la Torre, José Luis Sánchez-Rojas Aldavero, Univ. de Castilla-La Mancha (Spain) . . . . . . [10246-23]

Thin film system with integrated load and temperature sensors for the technical application in deep drawing process, Saskia N. Biehl, Fraunhofer-Institut für Schicht- und Oberflächentechnik (Germany) . . . . . . . . . . . . [10246-24]

POSTER SESSION . . . . . . . . . . . . . . . . . . . . . . TUE 14:30 TO 16:30Conference attendees are invited to attend the Poster Session on Tuesday afternoon. Come view posters, enjoy light refreshments, ask questions, and network with colleagues in your field. Authors of poster papers will be present to answer questions concerning their papers. Attendees are required to wear their conference badges to the poster session.

Anti-collision RFID system using passive SAW tags, Alexander Sorokin, Alexander P. Shepeta, Saint-Petersburg State Univ. of Aerospace Instrumentation (Russian Federation) . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-40]

Mini- and microgenerators applicable in the MEMS technology, Pavel J. Fiala, Zoltán Szabó, Petr Marcon, Zdenek Roubal, Brno Univ. of Technology (Czech Republic) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-41]

Design and development of microfluidic pH sensor created using RF sputtering technique, Ganesh Kumar Mani, Asuka Saito, Kazuyoshi Tsuchiya, Yutaka Yasoda, Tokai Univ. (Japan) . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-42]

Modelling the microstructure of surface by applying BRDF function, Kamil Plachta, Wroclaw Univ. of Science and Technology (Poland) . . [10246-43]

Actuation control of PiezoMEMS a biomimetic jellyfish robot, Alvaro Alejandre, Oskar Z. Olszewski, Nathan M. Jackson, Tyndall National Institute (Ireland) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-44]

Stream cipher with a MEMS-based seed generator, Miguel Garcia-Bosque, Adrian Perez, Carlos Sánchez-Azqueta, Santiago Celma Pueyo, Univ. de Zaragoza (Spain) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-45]

Analyses of electromagnetic and piezoelectric systems for efficient vibration energy harvesting, Zdenek Hadas, Jan Smilek, Ondrej Rubes, Brno Univ. of Technology (Czech Republic) . . . . . . . . . . . . . . . . . . . . . . . . . [10246-46]

Gold/polypyrrole nanorods for gas sensing application, Milena Setka, Jana Drbohlavová, Brno Univ. of Technology (Czech Republic); Eduard Llobet Sr., Univ. Rovira i Virgili (Spain) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-47]

Four-segment Piezo-based micropump, Rakesh K. Haldkar II, Tanuja Sheorey, Vijay K. Gupta, PDPM Indian Institute of Information Technology, Design & Manufacturing Jabalpur (India) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-48]

Computational model and simulation for the whispering gallery modes inside micro-optical cavity, Amir R. Ali, The German Univ. in Cairo (Egypt) and Southern Methodist Univ. (United States); Abanoub Erian, The German Univ. in Cairo (Egypt); Kirelloss Shokry, The German Univ. in Cairo (Egypt) and Univ. Twente (Netherlands) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-49]

Thermal analysis of magnetic trapping with alternating magnetic fields, Vania Silverio, Raju Kumar, INESC MN (Portugal); Miguel Amaral, João Gaspar, International Iberian Nanotechnology Lab. (Portugal); Susana Cardoso, INESC MN (Portugal); Paulo P. Freitas, INESC MN (Portugal) and International Iberian Nanotechnology Lab. (Portugal) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-50]

Influence of binding material of PZT coating on microresonator’s electrical and mechanical properties, Giedrius Janušas, Alfredas Brunius, Elingas Cekas, Asta Guobiene, Arvydas Palevicius, Kaunas Univ. of Technology (Lithuania) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-51]

Colorimetric sensor for bad odor detection using automated color correction, Katrin Schmitt, Karina Tarantik, Carolin Pannek, Fraunhofer-Institut für Physikalische Messtechnik (Germany); Ismael Benito-Altamirano, Olga Casals, Cristian Fabrega, Albert Romano-Rodriguez, Univ. de Barcelona (Spain); Jürgen Wöllenstein, Univ. of Freiburg (Germany) and Fraunhofer-Institut für Physikalische Messtechnik (Germany); J. Daniel Prades, Univ. de Barcelona (Spain) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-52]

Temperature simulation at ZnO surface processed by laser interference lithography, Laura Parellada-Monreal, Miguel Martínez-Calderon, Irene Castro-Hurtado, Ainara Rodríguez, Santiago M. Olaizola, Mikel Gómez-Aranzadi, Isabel Ayerdi, Enrique Castaño, Gemma García Mandayo, CEIT-IK4 (Spain) . [10246-53]

Metal wafer bonding for microelectronics and MEMS devices, Bernhard Rebhan, Viorel Dragoi, EV Group (Austria) . . . . . . . . . . . . . . . . . . . . . . [10246-54]

Characterization of oscillator circuits for monitoring the density-viscosity of liquids by means of piezoelectric MEMS microresonators, Javier Toledo Serrano, Victor Ruiz-Díez, Univ. de Castilla-La Mancha (Spain); Georg Pfusterschmied, Ulrich Schmid, Technische Univ. Wien (Austria); José Luis Sánchez-Rojas Aldavero, Univ. de Castilla-La Mancha (Spain) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-55]

Radio link design framework for WSN deployment and performance prediction, Sergio Saponara, Filippo Giannetti, Univ. di Pisa (Italy) . . . [10246-56]

User centered integration of Internet of Things devices, Roberto Manione, Media on Line (Italy) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-57]

SESSION 7 . . . . . . . . . . . . . . . . . . . . . . . . . . . . TUE 16:30 TO 17:50

Materials and ProcessesSession Chair: Erwin Peiner,

Technische Univ. Braunschweig (Germany)

Low-cost nanomechanical surfaces stress based sensors fabricated by hybrid materials, Pedro Fernando Escudero Villa, Jose Yeste Lozano, Rosa Villa, Mar Alvarez, Instituto de Microelectrónica de Barcelona (Spain) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-25]

Micro- and nanostructured membranes used in AlGaN/GaN: MEMS and pressure sensors for microfluidic applications in bioengineering and monitoring, Johann Zehetner, Stephan Kasemann, FH Vorarlberg (Austria); Gabriel Vanko, Jaroslav Dzuba, Tibor Lalinský, Institute of Electrical Engineering SAS (Slovakia); Sylvia Nürnberger, Medizinische Univ. Wien (Austria) . [10246-26]

Zirconium diboride thin films for use in high temperature sensors and MEMS devices, Robert J. Lad, David M. Stewart, George P. Bernhardt, The Univ. of Maine (United States) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-27]

FT-IR analysis of high temperature annealing effects in a SiC:H thin films, Tobias Frischmuth, Michael Schneider, Technische Univ. Wien (Austria); Thomas Grille, Infineon Technologies Austria AG (Austria); Ulrich Schmid, Technische Univ. Wien (Austria) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-28]

CONFERENCE 10246


WEDNESDAY 10 MAYWEDNESDAY PLENARY SESSION . . . WED 9:00 TO 10:009:00: Welcome and Introductions: Ulrich Schmid, Technische Univ. Wien

(Austria)

9:05: Graphene technologies for bioelectronics and neuroprosthetics (Plenary Presentation), Jose A. Garrido, Institut Català de Nanociència i Nanotecnologia (ICN2) (Spain)

SESSION 8 . . . . . . . . . . . . . . . . . . . . . . . . . . . .WED 10:30 TO 12:10

Energy Devices ISession Chair: Gemma García Mandayo, CEIT-IK4 (Spain)

Micro solid oxide fuel cells: a new generation of micro-power sources for portable applications (Invited Paper), Albert Tarancón, Institut de Recerca en Energia de Catalunya (Spain) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-29]

Alkaline fuel cell with nitride membrane, Shen-Huei Sun, Institut für Mikroelektronik Stuttgart (Germany); Moritz Pilaski, Jens Wartmann, ZBT GmbH (Germany); Florian Letzkus, Institut für Mikroelektronik Stuttgart (Germany); Benedikt Funke, Georg Dura, Angelika Heinzel, ZBT GmbH (Germany) [10246-30]

Parameter identification from frequency response of MEMS energy harvesters, Binh D. Truong, Phu C. Le, Einar Halvorsen, Univ. College of Southeast Norway (Norway) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-31]

Powering a leadless pacemaker using a PiezoMEMS energy harvester, Nathan M. Jackson, Cian O’Murchu, Alan Mathewson, Oskar Z. Olszewski, Tyndall National Institute (Ireland) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-32]

Lunch Break . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Wed 12:10 to 13:40

SESSION 9 . . . . . . . . . . . . . . . . . . . . . . . . . . . WED 13:40 TO 15:00

Energy Devices IISession Chair: Nathan M. Jackson, Tyndall National Institute (Ireland)

Designing, modelling, and testing of vibration energy harvester with nonlinear stiffness, Ondrej Rubes, Zdenek Hadas, Brno Univ. of Technology (Czech Republic) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-33]

Comparison of methods for static charge energy harvesting on aircrafts, Michail E. Kiziroglou, Alexander Technological Educational Institute of Thessaloniki (Greece); Thomas Becker, Airbus Group Innovations (Germany); Eric M. Yeatman, Imperial College London (United Kingdom); James W. Evans, Paul K. Wright, Univ. of California, Berkeley (United States) . . . . . . . . [10246-34]

Improved thermal and electrical design for an all-Si thermoelectric micropower source, Inci Donmez, Marc Salleras, Carlos A. Calaza Cabanas, Institut de Microelectrònica de Barcelona (Spain); Gerard Gadea, Alex Morata, Albert Tarancón, Institut de Recerca en Energia de Catalunya (Spain); Luis Fonseca, Institut de Microelectrònica de Barcelona (Spain) . . . . . . . . . [10246-35]

Integrated TiN coated porous silicon supercapacitor with increased capacitance per foot print, Kestutis Grigoras, Leif Grönberg, Jouni Ahopelto, Mika Prunnila, VTT Technical Research Ctr. of Finland Ltd. (Finland) . [10246-36]

SESSION 10 . . . . . . . . . . . . . . . . . . . . . . . . . . WED 15:30 TO 16:30

Interfacing and System IntegrationSession Chair: Luis Fonseca, Ctr. Nacional de Microelectrónica (Spain)

A programmable differential capacitance to voltage converter for MEMS accelerometers, Guillermo Royo, Univ. de Zaragoza (Spain); Cecilia Gimeno Gazca, Univ. Catholique de Louvain (Belgium); Carlos Sánchez-Azqueta, Concepción Aldea, Santiago Celma Pueyo, Univ. de Zaragoza (Spain) [10246-37]

Robust design of an inkjet-printed capacitive sensor for position tracking of a MOEMS-mirror in a Michelson interferometer setup, Lisa-Marie Faller, Hubert Zangl, Alpen-Adria-Univ. Klagenfurt (Austria) . . . . . . . . . . . . . . [10246-38]

Universal and inductorless DC/DC converter for multi-output power supplies in sensor and actuator networks, Sergio Saponara, Gabriele Ciarpi, Univ. di Pisa (Italy) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10246-39]

CONFERENCE 10246


CONFERENCE 10247Tuesday–Wednesday 9–10 May 2017 • Proceedings of SPIE Vol. 10247

Bio-MEMS and Medical Microdevices IIIConference Chair: Sander van den Driesche, Univ. Bremen (Germany)

Conference Co-Chairs: Ioanna Giouroudi, Technische Univ. Wien (Austria); Manuel Delgado-Restituto, Instituto de Microelectrónica de Sevilla (Spain)

Programme Committee: Artur Dybko, Warsaw Univ. of Technology (Poland); Michael Kraft, Univ. de Liège (Belgium); Laura Maria Lechuga, Ctr. d’ Investigacions en Nanociència i Nanotecnologia (Spain); Konstantinos Misiakos, National Ctr. for Scientific Research Demokritos (Greece); Niclas Roxhed, Royal Institute of Technology (Sweden); Ramón Ruiz-Merino, Univ. Politécnica de Cartagena (Spain); Josep Samitier Martí, Univ. de Barcelona (Spain); Uwe Schnakenberg, RWTH Aachen (Germany); Winnie E. Svendsen, Technical Univ. of Denmark (Denmark); Angeliki Tserepi, National Ctr. for Scientific Research Demokritos (Greece); Thomas Velten, Fraunhofer-Institut für Biomedizinische Technik (Germany); Sabeth Verpoorte, Univ. of Groningen (Netherlands); Fernando Vidal-Verdú, Univ. de Málaga (Spain); Jean-Louis Viovy, Institut Curie (France)

TUESDAY 9 MAYPOSTER SESSION . . . . . . . . . . . . . . . . . . . . . . TUE 14:30 TO 16:30Conference attendees are invited to attend the Poster Session on Tuesday afternoon. Come view posters, enjoy light refreshments, ask questions, and network with colleagues in your field. Authors of poster papers will be present to answer questions concerning their papers. Attendees are required to wear their conference badges to the poster session.

Microfluidic systems for monitoring of cardiac (h9c2) cell proliferation, Anna Kobuszewska, Pawel Cwik, Elzbieta Jastrzebska, Zbigniew Brzózka, Michal Chudy, Warsaw Univ. of Technology (Poland); Philippe Renaud, Ecole Polytechnique Fédérale de Lausanne (Switzerland); Artur Dybko, Warsaw Univ. of Technology (Poland) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10247-11]

Simulation of the novel compact structure of an interferometric biosensor based on multimode interference waveguides, Moisi Xhoxhi, Univ. Politeknik i Tiranes (Albania); Alma Dudia, Aurel Ymeti, Nanoalmyona B.V. (Netherlands) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10247-15]

Design of an embedded sensor system for measuring laser scattering on blood cells, Christodoulos Iosifidis, Alexander Technological Educational Institute of Thessaloniki (Greece); Korina Katsaliaki, International Hellenic Univ. (Greece); Peter Kollensperger, Norwegian Univ. of Science and Technology (Norway); Michail E. Kiziroglou, Imperial College London (United Kingdom) and Alexander Technological Educational Institute of Thessaloniki (Greece) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10247-16]

Travelling-wave dielectrophoresis allowing flexible microchannel design for suspended cell handling, Sander van den Driesche, Frank Bunge, Sebastian Tepner, Marcus Kotitschke, Michael J. Vellekoop, Univ. Bremen (Germany) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10247-17]


(Austria)


SESSION 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . .WED 10:30 TO 11:50

Biomedical Sensors and Microfluidics ISession Chair: Sander van den Driesche, Univ. Bremen (Germany)

Multilayered tissues model for wave propagation loss assessment in cochlear implants, Maria-Alexandra Paun, Catherine Dehollain, Ecole Polytechnique Fédérale de Lausanne (Switzerland) . . . . . . . . . . . . . . . . [10247-1]

Integration of a capacitive pressure sensing system into the outer catheter wall for coronary artery FFR measurements, Frank Stam, Tyndall National Institute (Ireland); Feng Gao, Anu Karkkainen, VTT Technical Research Ctr. of Finland Ltd. (Finland); Sebastian Pintal, Brendan Marrinan, Creganna Medical (Ireland) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10247-2]

A novel, scalable microfluidic device for switching of microparticles using dielectrophoresis (DEP), Waqas Waheed, Anas Alazzam, Khalifa Univ. of Science, Technology and Research (United Arab Emirates); Bobby Mathew, United Arab Emirates Univ. (United Arab Emirates); Eiyad Abu-Nada, Khalifa Univ. of Science, Technology and Research (United Arab Emirates) . . . [10247-3]

Microfluidic platform for detection and quantification of magnetic markers, Georgios Kokkinis, Technische Univ. Wien (Austria); Susana Cardoso, INESC MN (Portugal); Ioanna Giouroudi, Technische Univ. Wien (Austria) . . . . [10247-4]


SESSION 2 . . . . . . . . . . . . . . . . . . . . . . . . . . . WED 13:20 TO 15:00

Biomedical Sensors and Microfluidics IISession Chair: Ioanna Giouroudi, Technische Univ. Wien (Austria)

Easy-to-use microfluidic chip for long-term cultivation of mammalian cells in 3D cell cultures, Frank Bunge, Sander van den Driesche, Michael J. Vellekoop, Univ. Bremen (Germany) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10247-5]

Ink-jet printed selective microfluidic bio-sensor using CNTs functionalised by cytochrome P450 enzyme, Raimund Leitner, CTR Carinthian Tech Research AG (Austria) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10247-6]

A miniaturised bioanalytical system for rapid quantitative label-free detection of multiple analytes in a single run, Panagiota Petrou, Michailia Angelopoulou, Varvara Pagkali, Alexandros Salapatas, Eleni Makarona, Ioannis Raptis, Sotirios E. Kakabakos, National Ctr. for Scientific Research Demokritos (Greece); Athanasios Botsialas, ThetaMetrisis S.A. (Greece); Gerhard Jobst, Jobst Technologies GmbH (Germany); Konstantinos Misiakos, National Ctr. for Scientific Research Demokritos (Greece) . . . . . . . . . . . . . . . . . . . . . . . . [10247-7]

Real-time phase correlation based integrated system for seizure detection, Manuel Delgado-Restituto, James B. Romaine, Ángel Rodríguez-Vázquez, Instituto de Microelectrónica de Sevilla (Spain) . . . . . . . . . . . . . . . . . . . [10247-8]

Bio-optical sensor for brain activity measurement based on whispering gallery modes, Amir R. Ali, Yasmin M. Massoud, The German Univ. in Cairo (Egypt) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10247-9]

SESSION 3 . . . . . . . . . . . . . . . . . . . . . . . . . . . WED 15:30 TO 16:50

Biomedical Sensors and Microfluidics IIISession Chair: Manuel Delgado-Restituto, Instituto de

Microelectrónica de Sevilla (Spain)

Dark field imaging system for size characterization of magnetic micromarkers, Anna Malec, Technische Univ. Wien (Austria); Christoph Haiden, Technische Univ. Wien (Austria) and Austrian Ctr. of Competence for Tribology (Austria); Georgios Kokkinis, Franz Keplinger, Ioanna Giouroudi, Technische Univ Wien (Austria) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10247-10]

Infrared spectroscopy as a screening technique for colitis, A. G. U. Perera, Jitto Titus, Hemendra Ghimire, Emilie Viennois, Didier Merlin, Georgia State Univ. (United States) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10247-12]

Nano-photonic and -plasmonic characteristics of DNA complexes with intercalators, silver nanoparticles, and atoms, Vasil Bregadze, Iv. Javakhishvili Tbilisi State Univ. (Georgia); Zaza G. Melikishvili, Georgian Technical Univ. (Georgia); Tamar G. Giorgadze, Iv. Javakhishvili Tbilisi State Univ. (Georgia); Irine Khutsishvili, Iv. Javakhishvili Tbilisi State Univ. (Georgia) and Ilia State Univ. (Georgia); Temur Khuskivadze, Iv. Javakhishvili Tbilisi State Univ. (Georgia) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10247-13]

Micro-resonator-based electric field sensors with long duration of sensitivity , Amir R. Ali, The German Univ. in Cairo (Egypt) and Southern Methodist Univ. (United States). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10247-14]


CONFERENCE 10248Monday–Tuesday 8–9 May 2017 • Proceedings of SPIE Vol. 10248

Nanotechnology VIIIConference Chair: Ion M. Tiginyanu, Academy of Sciences of Moldova (Moldova)

Conference Co-Chairs: Rainer Adelung, Christian-Albrechts-Univ. zu Kiel (Germany); Andrei Sarua, Univ. of Bristol (United Kingdom)

Programme Committee: Necmi Biyikli, Bilkent Univ. (Turkey); Robert K. Feidenhans’l, Univ. of Copenhagen (Denmark); Jochen Feldmann, Ludwig-Maximilians-Univ. München (Germany); Nicolas Grandjean, Ecole Polytechnique Fédérale de Lausanne (Switzerland); Bianchi Méndez, Univ. Complutense de Madrid (Spain); Arben Merkoçi, Institut Català de Nanotecnologia (Spain); Hidenori Mimura, Shizuoka Univ. (Japan); Teresa Monteiro, Univ. de Aveiro (Portugal); Carlo Ricci, Univ. degli Studi di Cagliari (Italy); Ionel-Valentin Vlad, The Romanian Academy (Romania); Vladimir A. Yuryev, A. M. Prokhorov General Physics Institute (Russian Federation); Anvar A. Zakhidov, The Univ. of Texas at Dallas (United States); Anatoly V. Zayats, King’s College London (United Kingdom)

MONDAY 8 MAY

MONDAY PLENARY SESSION . . . . . . . . MON 8:40 TO 10:00

8:40: Opening Remarks, Ulrich Schmid, Technische Univ. Wien (Austria)

8:50: Welcome, Carles Cané, Ctr. Nacional de Microelectronica (Spain)

9:00: Smart integrated microsystems: the energy efficiency challenge (Plenary Presentation), Luca Benini, Univ. degli Studi di Bologna (Italy)

SESSION 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . MON 10:30 TO 12:10

Nanoplatelets, Nanotubes, and NanowiresSession Chair: Ion M. Tiginyanu,

Academy of Sciences of Moldova (Moldova)

Metal halide perovskite nano-platelets (Invited Paper), Jochen Feldmann, Ludwig-Maximilians-Univ. München (Germany) . . . . . . . . . . . . . . . . . . . [10248-1]

Tailoring the shape of oxide complex nanostructures, Bianchi Méndez, Manuel Alonso-Orts, Alejandro Sanz, Univ. Complutense de Madrid (Spain); Iñaki Lopez, Univ. Complutense de Madrid (Spain) and Istituto Nazionale di Ottica (Italy); Emilio Nogales Díaz, Pedro Hidalgo, Javier Piqueras, Univ. Complutense de Madrid (Spain) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-2]

Fabrication and optical properties of InGaN/GaN nanotube for cavity based laser, Emmanuel D. Le Boulbar, Univ of Bath (United Kingdom); Pierre-Marie Coulon, University of Bath (United Kingdom); Modestos Athanasiou, The Univ. of Sheffield (United Kingdom); Jon Pugh, Univ. of Bristol (United Kingdom); Gunnar Kusch, Univ. of Strathclyde (United Kingdom); Andrei Sarua, University of Bristol (United Kingdom); Rob W Martin, University of Strathclyde (United Kingdom); Martin J. Cryan, Univ. of Bristol (United Kingdom); Tao Wang, University of Sheffield (United Kingdom); Duncan W.E. Allsopp, Philip A Shields, Univ of Bath (United Kingdom) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-3]

Eu-implanted AlxGa1-xN nanowires for solid state light emission, Nabiha Ben Sedrine, Jose Cardoso, Adriana Alves, Univ. de Aveiro (Portugal); D. Nd. Faye, Instituto Superior Técnico (Portugal); Matthias Belloeil, Bruno Daudin, Univ. Grenoble Alpes (France); Marco B. Peres, Katharina Lorenz, Instituto Superior Técnico (Portugal); Maria Rosario Correia, Teresa Monteiro, Univ. de Aveiro (Portugal) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-4]

Large-area fabrication of silicon nanostructures by templated nanoparticle arrays, Gerry Hamdana, Maik Bertke, Technische Univ. Braunschweig (Germany); Tobias Südkamp, Hartmut Bracht, Westfälische Wilhelms-Univ. Münster (Germany); Erwin Peiner, Technische Univ. Braunschweig (Germany) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-5]

Lunch Break . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Mon 12:10 to 13:35

SESSION 2 . . . . . . . . . . . . . . . . . . . . . . . . . . . .MON 13:35 TO 15:00

Luminescence and Light-emitting DevicesSession Chair: Rainer Adelung,

Christian-Albrechts-Univ. zu Kiel (Germany)

Dynamics and emission characteristics of semiconductor nanowire lasers (Invited Paper), Carsten Ronning, Friedrich-Schiller-Univ. Jena (Germany) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-6]

Cathodoluminescence study of InGaN/GaN core-shell nanorod structures for optimising next generation LED devices, Christopher G. Bryce, Univ. of Strathclyde (United Kingdom); Emmanuel D. Le Boulbar, Univ. of Bath (United Kingdom); Paul R. Edwards, Univ. of Strathclyde (United Kingdom); Philip A. Shields, Duncan W. E. Allsopp, Univ. of Bath (United Kingdom); Robert W. Martin, Univ. of Strathclyde (United Kingdom) . . . . . . . . . . . . . . . . . . . . [10248-7]

New nanosized hybrid phosphors for lighting applications, Pier Carlo Ricci, Marek Scholz, Daniele Chiriu, Carlo Maria Carbonaro, Carla Cannas, Claudio Cara, Univ. degli Studi di Cagliari (Italy) . . . . . . . . . . . . . . . . . . . . . . . . . [10248-8]

Characterisation of the structural and luminescence properties of microstructured and nanostructured nitride materials in the scanning electron microscope, Carol Trager-Cowan, G. Naresh-Kumar, M. Nouf-Allehiani, Jochen Bruckbauer, Gunnar Kusch, Paul R. Edwards, Catherine Brasser, Elena Pascal, Stefano Vespucci, Simon Kraeusel, Ben Hourahine, Robert W. Martin, Univ. of Strathclyde (United Kingdom); Yun Zhang, Modestos Athanasiou, Yipin Gong, Jie Bai, Kun Xing, Xiang Yu, Benbo Xu, Zhi Li, Yaonan Hou, Rick M. Smith, Tao Wang, The Univ. of Sheffield (United Kingdom); Emmanuel L. Boulbar, Univ. of Bath (United Kingdom); Juraj Priesol, Slovenska Technicka Univ. (Slovakia); Duncan W. E. Allsopp, Philip A. Shields, Univ. of Bath (United Kingdom); Frank Mehnke, Tim Wernicke, Christian Kuhn, Johannes Enslin, Technische Univ. Berlin (Germany); Michael Kneissel, Technische Univ. Berlin (Germany) and Ferdinand-Braun-Institut (Germany); Arne Knauer, Viola Kueller, Markus Weyers, Ferdinand-Braun-Institut (Germany); Aimo Winkelmann, Bruker Nano GmbH (Germany); Arantxa Vilalta-Clemente, Angus J. Wilkinson, Univ. of Oxford (United Kingdom) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-9]

SESSION 3 . . . . . . . . . . . . . . . . . . . . . . . . . . . .MON 15:30 TO 17:30

Multifunctional Applications and SensorsSession Chair: Andrei Sarua, Univ. of Bristol (United Kingdom)

Flame based growth of ZnO nano- and microstructures for advanced optical, multifunctional devices, and biomedical applications, Yogendra K. Mishra, Jorit Gröttrup, Daria Smazna, Iris Hölken, Mathias Hoppe, Sindushree Sindushree, Sören Kaps, Christian-Albrechts-Univ. zu Kiel (Germany); Oleg Lupan, Technical Univ. of Moldova (Moldova); Jan Seidel, The Univ. of New South Wales (Australia); Teresa Monteiro, Univ. de Aveiro (Portugal); Ion M. Tiginyanu, Technical Univ. of Moldova (Moldova); Lorenz Kienle, Christian-Albrechts-Univ. zu Kiel (Germany); Carsten Ronning, Friedrich-Schiller-Univ. Jena (Germany); Karl Schulte, Bodo Fiedler, Technische Univ. Hamburg-Harburg (Germany); Rainer Adelung, Christian-Albrechts-Univ. zu Kiel (Germany) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-10]

GaP nanowire photocathode with integrated methanol sensor, Jozef Novák, Agáta Laurencíková, Stanislav Hasenohrl, Peter Elias, Institute of Electrical Engineering SAS (Slovakia) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-11]

Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to ethanol, Ondrej Chmela, Brno Univ. of Technology (Czech Republic); Jakub Sadílek, CEITEC- Central European Institute of Technology (Czech Republic); Jordi Samà, Univ. de Barcelona (Spain); Stella Vallejos, Brno Univ. of Technology (Czech Republic); Albert Romano-Rodriguez, Univ. de Barcelona (Spain); Jaromír Hubálek, Brno Univ. of Technology (Czech Republic) . . . . . . . . . . . . . . . . . . . . . [10248-12]

Microfield emitters: characteristics and applications, Hidenori Mimura, Tomoaki Masuzawa, Yoichiro Neo, Shizuoka Univ. (Japan) . . . . . . . . . [10248-13]

Field emission properties of ring-shaped Si ridges with DLC coating, Christian Prommesberger, Christoph Langer, Robert Lawrowski, Mirgen Mecani, Rupert Schreiner, Ostbayerische Technische Hochschule Regensburg (Germany); Juncong She, Yifeng Huang, Sun Yat-Sen Univ. (China) . . [10248-14]

Li-ion battery performance of silicon microwire array anodes under extreme conditions, Sandra Hansen, Jürgen Carstensen, Christian-Albrechts-Univ. zu Kiel (Germany); Enrique Quiroga-Gonzalez, Benemérita Univ. Autónoma de Puebla (Mexico) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-15]

Plasmonic enhanced SnO2 gas sensor with segregated silver nanodots, Peter Gaiduk, Stanislav Prokopyev, Belarusian State Univ. (Belarus) . [10248-16]

Nano and microcrystallites of KSbOSiO4 in glass matrix as a source of internal strain and fatal corrosion of historic turquoise glass, Tatyana V. Yuryeva, Irina F. Kadikova, GosNIIR (Russian Federation); Ekaterina A. Morozova, GosNIIR (Russian Federation) and N.S. Kurnakov Institute of General and Inorganic Chemistry (Russian Federation); Ilya B. Afanasyev, The Russian Federal Ctr. of Forensic Science of the Ministry of Justice (Russian Federation); Irina A. Balakhnina, Nikolay N. Brandt, GosNIIR (Russian Federation) and M.V. Lomonosov Moscow SU (Russian Federation); Vladimir A. Yuryev, A. M. Prokhorov General Physics Institute of the Russian Academy of Sciences (Russian Federation) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-17]





SESSION 4 . . . . . . . . . . . . . . . . . . . . . . . . . . . . .TUE 10:30 TO 11:55

Thin Films and PhotovoltaicsSession Chair: Teresa Monteiro, Univ. de Aveiro (Portugal)

Carbon nanotube transparent charge collectors for hybrid perovskite photovoltaics (Invited Paper), Anvar A. Zakhidov, Univ of Texas Dallas (United States); Ross Haroldson, The Univ. of Texas at Dallas (United States); Danila Saranin, National Univ. of Science and Technology “MISiS” (Russian Federation); Patricia Martinez, The Univ. of Texas at Dallas (United States); Artur Ishteev, National Univ. of Science and Technology “MISiS” (Russian Federation) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-18]

Preparation and characterizations of ZnS thin films by the chemical bath deposition method with the self-catalyst growth process, Shizutoshi Ando, Taisuke Iwashita, Tokyo Univ. of Science (Japan) . . . . . . . . . . . . . . . . [10248-19]

Silicon-germanium and platinum silicide nanostructures for silicon-based photonics, Mikhail S. Storozhevykh, Vladimir P. Dubkov, Larisa V. Arapkina, Kirill V. Chizh, Sergey A. Mironov, Valery A. Chapnin, Vladimir A. Yuryev, A. M. Prokhorov General Physics Institute of the Russian Academy of Sciences (Russian Federation) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-20]

Homogeneous, fluorescent thin films as long-term stable microscopy reference layers, Martina Brülisauer, Emine Cagin, Dietmar Bertsch, Klaus Dietrich, Stefan Lüthi, NTB Interstaatliche Hochschule für Technik Buchs (Switzerland); Ulrich Stärker, Volpi AG (Switzerland); André Bernard, NTB Interstaatliche Hochschule für Technik Buchs (Switzerland) . . . . . . . . [10248-21]


SESSION 5 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . TUE 13:15 TO 14:30

Material Nanostructuring and Microfabrication

Session Chair: Hidenori Mimura, Shizuoka Univ. (Japan)

Displacement Talbot lithography: an alternative technique to fabricate nanostructured metamaterials, Emmanuel D. Le Boulbar, Philip A. Shields, Univ. of Bath (United Kingdom) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-22]

Multilayer porous structures on MOCVD-grown GaN for the fabrication of Bragg reflectors, Tudor Braniste, Technical Univ. of Moldova (Moldova); Joachim Ciers, Ecole Polytechnique Fédérale de Lausanne (Switzerland); Eduard Monaico, Technical Univ. of Moldova (Moldova); Denis Martin, Ecole Polytechnique Fédérale de Lausanne (Switzerland); Jean-François Carlin, Ecole Polytechnique Fédérale de Lausanne (Switzerland) and Academy of Sciences of Moldova (Moldova); Veaceslav V. Ursaki, Academy of Sciences of Moldova (Moldova); Vladimir V. Sergentu, Institute of Applied Physics (Moldova); Nicolas Grandjean, Ecole Polytechnique Fédérale de Lausanne (Switzerland); Ion M. Tiginyanu, Academy of Sciences of Moldova (Moldova) . . . . . . . . . . . [10248-23]

Self-nanostructuring in SiGeSn alloy layers induced by laser melting and fast recrystallization, Peter Gaiduk, Belarusian State Univ. (Belarus) [10248-24]

Nano scale doping in CdTe for radiation detector, Toru Aoki, Shizuoka Univ (Japan); Kateryna S. Zelenska, Taras Shevchenko National Univ. of Kyiv (Ukraine); Volodymyr Gnatyuk, V.E.Lashkaryov Instite of Semiconductor Physics (Ukraine); Akifumi Koike, ANSeeN Inc. (Japan) . . . . . . . . . . . . . . . . . . . [10248-25]

Interlocked by nanoscale sculpturing: pure aluminum copper contacts, Melike Gerngross-Baytekin, Mark Daniel Gerngross, Jürgen Carstensen, Rainer Adelung, Christian-Albrechts-Univ. zu Kiel (Germany) . . . . . . . [10248-26]


Two-electron states and time exchange control in quantum dash systems, Davit Baghdasaryan, Russian-Armenian (Slavonic) Univ. (Armenia) . . . [10248-31]

An electrochemical ceruloplasmin nanoaptasensor using a glassy carbon electrode modified by diazonium-functionalised multiwalled carbon nanotubes, Tayyebeh Madrakian, Esmaeel Haghshenas, Abbas Afkhami, Haidar Saify Nabiabad, Bu-Ali Sina Univ. (Iran, Islamic Republic of) . . . . . . . . [10248-32]

Resonant tunneling transport in ZnxBe1-xSe/ZnSe/ZnyBe1-ySe asymmetric quantum structures, Vadim P. Sirkeli, Oktay Yilmazoglu, Shihab Al-Daffaie, Ion Oprea, Technische Univ. Darmstadt (Germany); Duu Sheng Ong, Multimedia Univ. (Malaysia); Franko Küppers, Hans-Ludwig Hartnagel, Technische Univ. Darmstadt (Germany) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-34]

Targeted attack of cancer cells by probes of transferrin and porphyrin, Anna G. Gyulkhandanyan, Institute of Biochemistry (Armenia); Robert K. Ghazaryan, Yerevan State Medical Univ. (Armenia); Anna A. Zakoyana, Institute of Biochemistry (Armenia); Marina A. Sheyranyan, Yerevan State Univ. (Armenia); Aram G. Gyulkhandanyan, Guevork A. Kevorkian, Grigor V. Gyulkhandanyana, Institute of Biochemistry (Armenia) . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-35]

Ultrafast laser patterning of graphene, Ivan Bobrinetskiy, Aleksei V. Emelianov, National Research Univ. of Electronic Technology (Russian Federation); Nerea Otero, Pablo M. Romero, AIMEN - Asociación de Investigación Metalúrgica del Noroeste (Spain) . . . . . . . . . . . . . . . . . . [10248-36]

A low Curie temperature Fe-Cr-Nb-B ferrofluid for biomedical applications, Ecaterina Radu, Camelia-Mihaela Danceanu, George Stoian, Nicoleta Lupu, Horia Chiriac, National Institute of Research & Development for Technical Physics (Romania) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-37]

Design and fabrication of a novel impedimetric sensor for sensitive determination of Tecfidera, Abbas Afkhami, Pegah Hashemi, Bu-Ali Sina Univ. (Iran, Islamic Republic of); Hasan Bagheri, Baqiyatallah Univ. of Medical Sciences (Iran, Islamic Republic of); Salimeh Amidi, Shahid Beheshti Univ. of Medical Sciences (Iran, Islamic Republic of); Tayyebeh Madrakian, Bu-Ali Sina Univ. (Iran, Islamic Republic of); Bardia Jamali, Tehran Univ. of Medical Sciences (Iran, Islamic Republic of) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-38]

Endothelial cell proliferation under exposure to GaN nanoparticles, Fiodor Tudor Braniste, Ion Tiginyanu, Technical Univ of Moldova (Moldova); Tibor Horvath, Medizinische Hochschule Hannover (Germany); Simion Raevschi, State University of Moldova (Moldova); Serghei Cebotari, Marco Lux, Axel Haverich, Andres Hilfiker, Medizinische Hochschule Hannover (Germany) . . . . . [10248-39]

SESSION 6 . . . . . . . . . . . . . . . . . . . . . . . . . . . . TUE 16:30 TO 17:30

SynthesisSession Chair: Carlo Ricci, Univ. degli Studi di Cagliari (Italy)

Silver nanoparticles fabricated via green synthesis using plant leaf extracts, Rebecca E. Mfon, Natasa Vasiljevic, Andrei Sarua, Univ. of Bristol (United Kingdom) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-27]

Production of silver nanoparticles by the diatom Phaeodactylum tricornutum, Asher Wishkerman, Ruppin Academic Ctr. (Israel); Shoshana Malis Arad, Ben-Gurion Univ. of the Negev (Israel) . . . . . . . . . . . . . . . . . . . . [10248-28]

Growth scheme for entanglement ready quantum dots at telecom wavelength, Joanna Skiba-Szymanska, Richard M. Stevenson, Christiana Varana, Martin Felle, Jan Huwer, Tina Müller, Toshiba Research Europe Ltd. (United Kingdom); Peter Spencer, Univ. of Cambridge (United Kingdom); Ian Farrer, Andrey B. Krysa, The Univ. of Sheffield (United Kingdom); Lucy Goff, David A. Ritchie, Univ. of Cambridge (United Kingdom); Jon Heffernan, The Univ. of Sheffield (United Kingdom); Andrew J. Shields, Toshiba Research Europe Ltd. (United Kingdom) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10248-29]

3D flexible ZnO networks: synthesis and their multifunctional applications, Daria Smazna, Christian-Albrechts-Univ. zu Kiel (Germany) . . . . . . . . [10248-30]


(Austria)


CONFERENCE 10248


CONFERENCE 10249Tuesday–Wednesday 9–10 May 2017 • Proceedings of SPIE Vol. 10249

Integrated Photonics: Materials, Devices, and Applications IVConference Chair: Jean-Marc Fédéli, CEA-LETI (France)

Conference Co-Chair: Laurent Vivien, Institut d’Électronique Fondamentale (France)

Programme Committee: Pavel Cheben, National Research Council Canada (Canada); Norbert Grote, Fraunhofer-Institut für Nachrichtentechnik Heinrich-Hertz-Institut (Germany); Giovanni Isella, Lab. for Epitaxial Nanostructures on Silicon and Spintronics (Italy); Laura Maria Lechuga, CIN2 (Spain); Andrea I. Melloni, Politecnico di Milano (Italy); Iñigo Molina-Fernandez, Univ. de Málaga (Spain); Régis Orobtchouk, Institut National des Sciences Appliquées de Lyon (France); Richard V. Penty, Univ. of Cambridge (United Kingdom); Lorenzo Pavesi, Univ. degli Studi di Trento (Italy); Günther Roelkens, Univ. Gent (Belgium); Kazumi Wada, The Univ. of Tokyo (Japan); Dan-Xia Xu, National Research Council Canada (Canada)




SESSION 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .TUE 10:30 TO 11:45

BiophotonicsSession Chair: Dan-Xia Xu,

National Research Council Canada (Canada)

Co-integrating plasmonics with Si3N4 photonics towards a generic CMOS-compatible PIC platform for high-sensitivity multi-channel biosensors: the H2020 PlasmoFab project approach (Invited Paper), Dimitris M. Tsiokos, George Dabos, Dimitra Ketzaki, Aristotle Univ. of Thessaloniki (Greece); Jean-Claude Weeber, Laurent Markey, Alain Dereux, Lab. Interdisciplinaire Carnot de Bourgogne (France); Anna Lena Giesecke, Caroline Porschatis, Bartos Chmielak, Thorsten Wahlbrink, AMO GmbH (Germany); Karl Rochracher, ams AG (Austria); Nikos Pleros, Aristotle Univ. of Thessaloniki (Greece) . . . . . . . . . . . . . . [10249-1]

Polymer ring resonator based devices prepared by DLW, Daniel Jandura, Dušan Pudiš, Peter Gašo, Matej Goraus, Univ. of Žilina (Slovakia) . . . . [10249-2]

Silicon photonics sub-wavelength structures for communications and sensing, Robert Halir, Juan Manuel Luque-González, Gonzalo Wangüemert-Pérez, Alejandro Ortega-Moñux, Univ de Malaga (Spain); Dan-Xia Xu, Jens H. Schmid, Pavel Cheben, National Research Councial (Canada); Íñigo Molina-Fernández, Univ de Malaga (Spain) . . . . . . . . . . . . . . . . . . [10249-3]

Silicon photonic sensor arrays with complex microfluidics for compact automated biosensing, Markus Knoerzer, Crispin Szydzik, Pabudi Weerathunge, Phuong Tang, Samira Schaefer, Guanghui Ren, Sara Baratchi, Khashayar Khoshmanesh, Rajesh Ramanathan, Vipul Bansal, Arnan Mitchell, RMIT Univ. (Australia) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-4]


SESSION 2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . TUE 13:15 TO 14:30

Photonic DevicesSession Chair: Jean-Marc Fédéli, CEA-LETI (France)

Phase array antennas with silicon photonics (Invited Paper), Jérôme Bourderionnet, Thales Research & Technology (France) . . . . . . . . . . . . [10249-5]

Robust integration schemes for junction-based modulators in a 200mm CMOS compatible silicon photonic platform, Bertrand Szelag, Alexis Abraham, Stéphane Brision, Paul Gindre, Benjamin Blampey, André Myko, Segolene Olivier, Christophe Kopp, CEA-LETI (France) . . [10249-6]

Strain-induced Pockels effect in silicon waveguides, Mathias Berciano, Pedro Damas, Guillaume Marcaud, Xavier Le-Roux, Ctr. for Nanosciences and Nanotechnologies, Univ. Paris-Sud 11 (France); Paul Crozat, Ctr. for Nanosciences and Nanotechnologies, Univ. Paris-Sud 11 (France); Carlos Alonso-Ramos, Daniel Benedikovic, Delphine Marris-Morini, Eric Cassan, Laurent Vivien, Ctr. for Nanosciences and Nanotechnologies, Univ. Paris-Sud 11 (France) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-7]

Enhanced optical properties of GeSn photonic components by strain relaxation, Laurent Milord, CEA-LETI (France); Alban Gassenq, CEA-INAC (France); Joris Aubin, CEA-LETI (France); Kevin Guilloy, Samuel Tardif, Nicolas Pauc, CEA-INAC (France); Johan Rothman, Alexei Tchelnokov, Jean-Michel Hartmann, CEA-LETI (France); Vincent Calvo, CEA-INAC (France); Vincent Reboud, CEA-LETI (France) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-8]


Equalizing Si photodetectors fabricated in standard CMOS processes, Erick Guerrero Rodriguez, Javier Aguirre, Carlos Sánchez-Azqueta, Univ. de Zaragoza (Spain); Cecilia Gimeno, Univ. Catholique de Louvain (Belgium); Santiago Celma Pueyo, Univ. de Zaragoza (Spain) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-23]

The increase in the starting torque of PMSM motor by applying of FOC method, Kamil Plachta, Wroclaw Univ. of Science and Technology (Poland) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-24]

Infrared wire-grid polarizer with sol-gel zirconia grating, Itsunari Yamada, Yoshiro Ishihara, Univ. of Shiga Prefecture (Japan) . . . . . . . . . . . . . . . [10249-25]

Diffusion doped p-i-n/p-n diodes for scalable silicon photonics devices, Riddhi Nandi, Sreevatsa R. Kurudi, Bijoy K. Das, Indian Institute of Technology Madras (India) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-26]

Development of a fast steering mirror of 160mm diameter, Byoung-Uk Nam, Hakin Gimm, Jung-gon Kim, Gwang tae Kim, Byung-un Kim, Agency for Defense Development (Korea, Republic of). . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-27]

Polymer based 2D and 3D photonic crystals in the surface of photodiodes and LEDs, Dušan Pudiš, Matej Goraus, Univ. of Žilina (Slovakia); Marek Tlaczala, Wroclaw Univ. of Science and Technology (Poland); Lubos Šušlik, Univ. of Žilina (Slovakia); Wojciech A. Dawidowski, Wroclaw Univ. of Science and Technology (Poland); Peter Gašo, Univ. of Žilina (Slovakia); Jaroslav Kováč, Slovenska Technicka Univ. (Slovakia); Beata Sciana, Wroclaw Univ. of Technology (Poland); Jana Durisova, Ivana Lettrichova, Univ. of Žilina (Slovakia); Jaroslav Kováč, Slovenska Technicka Univ. (Slovakia); Iwona Zborowska-Lindert, Wroclaw Univ. of Science and Technology (Poland) . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-28]

1D and 2D Fresnel structure in LED surface, Ivana Lettrichova, Dušan Pudiš, Peter Gašo, Univ. of Žilina (Slovakia); Agáta Laurencíková, Institute of Electrical Engineering SAS (Slovakia); Lubos Šušlik, Daniel Jandura, Jana Durisova, Univ. of Žilina (Slovakia); Jozef Novak, Slovak Academy of Sciences (Slovakia) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-29]

Photonics integrated circuit based on 1x2 multimode-interferometer-Fabry-Perot laser diode, Hua Yang, Mingqi Yang, Alison Perrott, Zhengkai Jia, Tyndall National Institute (Ireland); Frank Hudson Peters, Tyndall National Institute (Ireland) and Univ. College Cork (Ireland) . . . . . . . . . . . . . . . . [10249-30]

SESSION 3 . . . . . . . . . . . . . . . . . . . . . . . . . . . . .TUE 16:30 TO 17:45

Optical Sensing ISession Chair: Régis Orobtchouk,

Institut National des Sciences Appliquées de Lyon (France)

Mid- and near-IR silicon waveguides for sensing applications (Invited Paper), Carlos A. Alonso-Ramos, Xavier Le Roux, Daniel Benedikovic, Vladyslav Vakarin, Elena Durán-Valdeiglesias, Diego Pérez-Galacho, Eric Cassan, Delphine Marris-Morini, Universite Paris Sud, Paris Saclay C2N (France); Pavel Cheben, National Research Council (Canada); Laurent Vivien, Universite Paris Sud, Paris Saclay C2N (France) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-9]

High sensitivity liquid sensing by optimized slot photonic crystal ring resonator, Reyhaneh Jannesary, Johannes Kepler Univ. Linz (Austria); Thomas Grille, Ursula Hedenig, Infineon Technologies Austria AG (Austria); Bernhard Jakoby, Johannes Kepler Univ. Linz (Austria) . . . . . . . . . . . . [10249-10]

3D photonic devices in PDMS for sensing prepared by 3D laser lithography, Peter Gašo, Daniel Jandura, Dušan Pudiš, Univ. of Žilina (Slovakia) . . [10249-11]


Temperature behavior of air-suspended polymer surface grating couplers, Christoph Prokop, Hochschule Karlsruhe Technik und Wirtschaft (Germany); Bert Laegel, Sandra Wolff, Technische Univ. Kaiserslautern (Germany); Arnan Mitchell, RMIT Univ. (Australia); Christian Karnutsch, Hochschule Karlsruhe Technik und Wirtschaft (Germany) . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-12]


(Austria)


SESSION 4 . . . . . . . . . . . . . . . . . . . . . . . . . . . . WED 10:30 TO 11:45

Quantum PhotonicsSession Chair: Laurent Vivien,

Ctr. de Nanosciences et de Nanotechnologies (France)

Squeezed light quantum sensing with Heisenberg scaling (Invited Paper), Clemens Schäfermeier, Timur Iskhakov, Technische Univ. Delft (Denmark); U. Busk-Hoff, Tobias Gehring, Ulrik Lund Andersen, Technical Univ. of Denmark (Denmark) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-13]

Optical signal processing and tracking of whispering gallery modes in real time for sensing applications, Amir R. Ali, The German Univ. in Cairo (Egypt) and Southern Methodist Univ. (United States); Amr N. Afifi, The German Univ. in Cairo (Egypt) and Sapienza Univ. di Roma (Italy); Hazem Taha, The German Univ. in Cairo (Egypt) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-14]

Noninvasive monitoring and control in silicon photonics (Invited Paper), Francesco Morichetti, Politecnico di Milano (Italy) . . . . . . . . . . . . . . . . [10249-15]


SESSION 5 . . . . . . . . . . . . . . . . . . . . . . . . . . . . .WED 13:15 TO 15:15

Optical Sensing IISession Chair: Laurent Vivien,

Ctr. de Nanosciences et de Nanotechnologies (France)

Integrated photonics for infrared spectroscopic sensing (Invited Paper), Derek Kita, Zhaohong Han, Peter Su, Anu Agarwal, Massachusetts Institute of Technology (United States); Anupama Yadav, Kathleen Richardson, University of Central Florida (United States); Lionel C Kimerling, Hongtao Lin, Tian Gu, Juejun Hu, Massachusetts Institute of Technology (United States) . . . . . . . . . [10249-16]

Characterising the geometrical tolerances of optimised vertical-cavity thermal emitter stack configurations for the mid-infrared via Monte Carlo testing, Gerald Pühringer, Bernhard Jakoby, Johannes Kepler Univ. Linz (Austria) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-17]

N-type Induced junction black silicon photodiode for UV detection, Mikko A. Juntunen, Juha Heinonen, Ville Vähänissi, Päivikki Repo, Hele I. Savin, Aalto Univ. (Finland). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-18]

Millimeter wave photonic emitter using antenna-integrated UTC photodiode on Si lens, Muhsin Ali, Univ. Carlos III de Madrid (Spain); Longfei Shen, Technische Univ. Eindhoven (Netherlands); Robinson C. Guzmán Martínez, Mu-Chieh Lo, Alejandro Rivera, Univ. Carlos III de Madrid (Spain); Jos J. G. M. van der Tol, Technische Univ. Eindhoven (Netherlands); Luis Enrique García Muñoz, Guillermo Carpintero, Univ. Carlos III de Madrid (Spain) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-19]

Design and fabrication of broadband long wavelength resonator-quantum well infrared photodetectors, Jason N. Sun, Kwong-Kit Choi, Kimberley A. Olver, Richard X. Fu, U.S. Army Research Lab. (United States) . . . . . . [10249-20]

Tunable multiple peak modulation in multi-cavity-coupled graphene-based waveguide system, Jicheng Wang, Xiaosai Wang, Hongyan Shao, Jiangnan Univ. (China) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . [10249-21]

A graphene-based electrically controllable directional coupler, Sangin Kim, Tran Quyet Tran, Ajou Univ. (Korea, Republic of) . . . . . . . . . . . . . . . . . [10249-22]

CONFERENCE 10249

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PROCEEDINGS

Proceedings.Paid conference registration includes online Proceedings of SPIE. In the tables below you will find product order numbers to use on the registration form.

Available as part of registration:Online Proceedings Collection—access to multiple related proceedings volumes via the SPIE Digital Library. Available as papers are published.

Accessing Online ProceedingsTo access your proceedings:

• Go to http://spiedigitallibrary.org and sign in. If you do not have an SPIE account, create one using the email address you used to register for the conference.

• Click the My Account link at the top of the page, then find the My Conference Proceedings tab, which will show your available proceedings volumes.

You can also access this content via your organization’s SPIE Digital Library account.

For assistance, contact SPIE:Email: [email protected] (North America): +1 888 902 0894Phone (Rest of World): +1 360 685 5580

10246 Smart Sensors, Actuators, and MEMS VIII $90.00Luis Fonseca

10247 Bio-MEMS and Medical Microdevices III $45.00Sander van den Driesche

10248 Nanotechnology VIII $67.50Ion Tiginyanu, Andrei Sarua

10249 Integrated Photonics: Materials, Devices, and $60.00 Applications IV

Jean-Marc Fédéli

Product Order Number

Print Volume

Volume Title/Volume Editors Meeting Attendees

Proceedings Volumes

DLC655 SPIE Microtechnologies 2017 $175.00Volumes #: 10246, 10247, 10248, 10249

Online Proceedings Collections

Print conference proceedings volumes are also available; see pricing below.

Product Order Number

Collection Title/Included Volumes(See next page for volume titles and editors) Meeting

Attendees

Price for separate purchase

Price for separate purchase


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https://www.barcelona-tourist-guide.com/en/airport/ barcelona-airport.html

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https://www.barcelona-tourist-guide.com/en/airport/ barcelona-airport-transport.html

PUBLIC TRANSPORTION: • Underground Take the green line #3 (direction to “Trinitat Nova”),

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• Bus Get off at the stop called 236 -Arquitecte Moragues-Francesc Manrique

https://www.barcelona-tourist-guide.com/en/transport/ transport-in-barcelona.html

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