point-of-use purifiers protection from operator error

MonoTorr P-O-U Brochure 00 5/31/00 11:11 AM

MonoTorr P-O-U Brochure - SAES Pure Gas, Inc. - Graphics by Erick 1/00

www.saesgetters.com

SAES Pure Gas, Inc.San Luis Obispo, CaliforniaThe Technology of Pure Gas

Point-Of-Use Purifiers

EUROPESAES Getters S.p.A.Group Headquarters (Italy)Tel.: +39 02 93178 1Fax: +39 02 93178320

SAES Getters Deutschland GmbHTel: +49 221 944 0750Fax: +49 221 944 0754

SAES Getters G.B., Ltd.Tel: +44 118 956 6856Fax: +44 118 950 4074

SAES Getters France S.a.r.l.Tel: +33 1 482 48696Fax: +33 1 482 41052

SAES Getters S.p.A.,Moscow Representative OfficeTel.: +7 095 207 9743Fax: +7 095 208 0198

An ISO 9001 Registered Company

© SAES Pure Gas, Inc.Printed in U.S.A. All rights reserved.MonoTorr and InsiTorr are registered trademarks of SAES Pure Gas, Inc.VCR is a registered trademark of Cajon Co.

00PG01

U.S.ASAES Pure Gas, Inc.Pure Gas Technologies Headquarters4175 Santa Fe RoadSan Luis Obispo, CA 93401, USATel.: +1 805 541 9299Fax: +1 805 541 9399

Trace AnalyticalAnalytical Technologies HeadquartersTel.: +1 650 364 6895Fax: +1 650 364 6897www.traceanalytical.com

ASIASAES Getters Japan Co., Ltd.Tel: +81 3 5420 0435Fax: +81 3 5420 0439

SAES Getters Singapore PTE, Ltd.Tel: +65 534 0757Fax: +65 534 0307

SAES Getters Singapore,Taiwan BranchTel: +886 35 62 4650Fax: +886 35 62 4656

SAES Getters KoreaTel: +82 2 3404 2400Fax: +82 2 3452 4511

SAES Getters S.p.A.,Shanghai Representative OfficeTel: +86 21 627 51177Fax: +86 21 624 58900

MonoTorr Phase I 3000 MonoTorr Phase II 3000 & 15000

System Features and Specifications Matrix

N R H

350 400 400

150 150 120

125/< 260 (3000) 125/< 260 (3000) 125/< 260 (3000)187/< 600 (15000) 187/< 600 (15000) 187/< 600 (15000)

<10 <10 <15

STANDARD STANDARD STANDARD



N/A N/A N/A

STANDARD STANDARD N/A



PNEUMATIC PNEUMATIC PNEUMATIC

Products and ServicesPoint-Of-Use Purifiers Certification and Analytical Services Analytical Systems

House Gas and Area Purifiers InsiTorr™ FastPump Analytical Instruments

Gas Product Code N R

Additional Specifications and Features

Operating Temperature (°C) 350 400

Pressure Rating (psig) 150 150

Heater Power Consumption 50 50(watts) Nominal/Maximum < 260 < 260

Pressure Drop (psi) <10 <10

0.003 µm Metal Filter STANDARD STANDARD

Bypass Assembly OPTIONAL OPTIONAL

Surface MountableN/A N/AEnclosure(w/ Cooling Fan)

Surface Mounting Plate STANDARD STANDARD

Life Status Sensor (LSS) N/A N/A

1/4" VCR© Fittings STANDARD STANDARD(MCG Fittings Optional)

10 µ Ra Piping Surface Finish STANDARD STANDARD

1/4" SS Diaphragm Valves MANUAL MANUAL

Gas Type Key: N = Nitrogen R = Rare Gas (Ar, He, etc.) H = Hydrogen

*All MonoTorr purifiers are CE compliant

Designs For All ApplicationsTwo basic designs are available. The Phase I 3000

provides the essential requirements for nitrogen andrare gases at flows up to 5 slpm.

Phase II purifiers are available for rare gases,nitrogen and hydrogen. These purifiers provide addedsafety, automation and life status monitoring (raregases and nitrogen only) in a sturdy surface-mountableenclosure. The Phase II 3000 is designed for maximumflows of 50 slpm (rare and nitrogen gases), and 30slpm for hydrogen. The maximum flow of the PhaseII 15000 is 75 slpm (rare and nitrogen gases) and 50slpm for hydrogen. Refer to the system features matrixon back panel for additional information.

Protection From Operator ErrorIt is vital to protect any purifier from prolonged

exposure to air. MonoTorr purifiers can offer thatprotection. The Phase II design includes a sensor tocontinuously monitor and isolate the purifier cartridgein the event of an upstream air leak.

Life Status SensorThe patented life status sensor (LSS), developed

by SAES Pure Gas, provides early warning forimpending breakthrough of impurities (see fig.4).The technique measures resistivity change occurringin the getter alloy as impurities are diffused into thebulk of the purification media.

Phase I Phase II

Pure Gas Technologies

MonoTorr P-O-U Brochure 00 5/31/00 11:11 AM



Figure 5

MonoTorr Phase I 3000with Optional Bypass

MonoTorr Phase II 3000 and 15000Rare Gas and Nitrogen

Note: Getter lifetime is dependent on purifier size, inletimpurities and average flow rate. Consult the factory forlifetime calculations. Specifications subject to changewithout notice.

Phase II15000

Phase II3000

InletImpurity

0 - 20slpm

20 - 50slpm

InletImpurity

0 - 30slpm

30 - 75slpm

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 10 ppb

< 10 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 10 ppb

< 10 ppb

NITROGENPerformance Guarantee

RARE GASAr, He, Xe, Ne, Kr and Rn

Performance Guarantee

InletImpurity

0 - 20slpm

20 - 50slpm

InletImpurity

0 - 30slpm

30 - 75slpm

O2

H2O

CO

CO2

N2

H2

CH4

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 10 ppb

< 10 ppb

< 10 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 10 ppb

< 10 ppb

< 10 ppb

Phase II15000

Phase II3000

HYDROGENPerformance Guarantee

Gas Product Impurities Removed

Argon - Ar MT-R H2O, O2, H2, CO, CO2, N2,Helium - He THC and particlesOther Rare Gases

Nitrogen - N2 MT-N H2O, O2, H2, CO, CO2,THC and particles

Hydrogen - H2 MT-H H2O, O2, CO, CO2, N2

and particles

O2

H2O

CO

CO2

N2

H2

CH4

O2

H2O

CO

CO2

H2

CH4

O2

H2O

CO

CO2

H2

CH4

Life Status SensorU.S. Patent #5,172,066

Figure 4 - MonoTorr Phase II Control Panel

VALVES

BYPASS

PURIFIER

ALARMS

PNEUMATICS

POWER

TEMPERATURE

LIFE STATUS

GOOD

MARGINAL

CHANGE

HEATER

STANDBY

OPERATING

TEMPERATURE

HIGH

SET

LOW

HEATERON/OFF

VALVECONTROL

LED CHECK

ACKNOWLEDGE

The Need for PurificationResearch has shown that gas purification can ensure

consistent and repeatable process performance forsemiconductor device manufacturing.

Purification isolates critical process areas from housegas distribution systems and protects against gas purityupsets and cross-contamination. As manufacturingprocesses grow more demanding, gas system impuritiesmust be reduced below one part per billion.

The Getter Technology ApproachSince 1950, SAES Getters has developed evaporable

and nonevaporable getter technologies for ultrahigh-vacuum applications. Nonevaporable getter materials,based on zirconium and its alloys, can also be used inultrahigh purification capable of sub-ppb performance.

Getter materials irreversibly trap gaseous impuritymolecules. Gaseous impurities are captured on the surface.When heated, the impurities diffuse into the bulk of thegetter. Unlike ambient technologies that rely on surfaceadsorption only, getter technology utilizes the entirevolume of material. This results in superior capacities andlonger lifetimes for all impurities.

MonoTorr gas purification products were developedspecifically for sub-ppb performance. These getter-basedpurifiers are preconditioned (activated) at our factory toallow immediate use. Its all-metal technology ensuresthat no impurities are added.

High Purity ManufacturingMonoTorr purifiers are engineered for high-purity

applications. All piping system wetted surface areas areelectropolished 316L stainless steel construction with10µ-inch Ra surface finish or less.

Welding and assembly are performed in our Class 100cleanroom. Stainless steel diaphragm valves and a 0.003µm stainless steel particle filter are standard on allMonoTorr products.

APIMS Measures PerformanceAtmospheric pressure ionization mass spectrometry

(APIMS) demonstrates capabilities of the MonoTorrapproach to purification. Upstream impurities fluctuatingin the low-ppm range are quickly controlled to ppt levels(see figs. 1 and 2 below).

Phase II Controller FeaturesLife Status - Indicates the life status of the purifier.Good is normal, Marginal indicates approachingdepletion and Change includes audible alarm to notifythe operator that end-point is approaching andreplacement will soon be required (available for raregases and nitrogen only).

Heater - Indicates status of heater.

Temperature - Displays heater mode while maintaininggetter material at preset operating temperature.

Valves - Indicates status of purifier as controlled bypneumatic valves.

Alarms - Pneumatic alarm caused by loss of adequatepressure for valves. Power alarm indicates thatextended power failure has caused purifier to go intoStandby condition. Temperature alarm indicates a highor low temperature condition in the purifier cartridge.The high temperature alarm could be caused by highimpurity levels (air) in the gas stream. Alarm causesthe purifier to go to Bypass mode. Additional errorcodes provide alarms for exhaust fan, heater or solidstate relay failure.

Heater On/Off - Activates heater only when noalarms exist.

Valve Control - Positions valves to Purifier or Bypassmode.

LED Check - Assures proper functioning of all LEDsand alarm buzzer.

Acknowledge - Silence audible alarm and restoresoperation if certain alarm conditions have beencorrected.

Reprinted from Solid State Technology © Penn Well Publishing Company

Figure 1 - Argon Figure 2 - Nitrogen

Figure 3 - Side View Cutaway of MonoTorr Phase I 3000

Gases Purified and Impurities Removed

1.0

0.9

0.8

0.7

0.6

0.5

0.4

0.3

0.2

.01

00 10 20 30 40 50 60 70 80 90 100

Cur

rent

(10

- 11 A

)

Atomic Weight

CH4+

H2O+ O2+

CO+, N2+

Ar+(38)

CO2+

Ar36 (Ar40)+

Ar+(36) Ar+

(40)

Ar40(Ar40)+

1.0

0.9

0.8

0.7

0.6

0.5

0.4

0.3

0.2

.01

00 10 20 30 40 50 60 70 80 90 100

Cur

rent

(10

- 11 A

)

Atomic Weight

H2O+

O2+ CO2

+ N5+

N2+ N3

+ N4+

Utilities Required

Line Power:120/220 VAC

Pneumatic ValveActuation

(Phase II only):Nitrogen or clean dryair at 90 - 100 psig,

filtered to 10 µm

INSTALLED POWER:

MODEL 3000 15000120 VAC 300W/2.5 Amps 600W/5 Amps220 VAC 330W/1.5 Amps 660W/3 Amps

Impurity Levels

60 ppt

296 ppt

80 ppt

80 ppt

H2O

O2

CO2

CH4

Impurity Levels

130 ppt

447 ppt

123 ppt

H2O

O2

CO2

INSTALLED POWER:

120 VAC 300W/2.5 Amps220 VAC 330W/1.5 Amps

Diaphragm valves (included)

Efficient insulation for lowpower consumption

Dual thermocouples for safety

Compact heater

All wetted surfaceselectropolished 316Lsurface finish

Compact package coolsoutlet gas

Custom controller with completesafety features:

• Audible alarm• Dual “K” thermocouples• High differential over

temperature alarm• All solid state design

0.003 micron all stainless steelparticle filter

InletImpurity

0 - 20slpm

20 - 30slpm

InletImpurity

0 - 30slpm

30 - 50slpm

O2

H2O

CO

CO2

N2

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 10 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 10 ppb

Phase II15000

Phase II3000

O2

H2O

CO

CO2

N2

32.5(825.5)

INLET

OUTLET

25.0(635.0)

.266ø MOUNTING HOLES4X PLACES

23.0(584.2)

1.0(25.4)

0.5(12.7)

9.0 (228.6)

10.0 (254.0)

DIMENSIONSIN INCHES

(mm)

34.0(863.6)

4.0(101.6)

33.38(847.9)

6.0 (152.4)

8.0 (203.2)

DIMENSIONSIN INCHES

(mm)

5.0(127.0)

2.75(69.8)

8.25(209.5)

INLET OUTLET

OUTPUT INTERFACE PORT

POWER SWITCH

POWER INLET

Ø.312 (7.9) MOUNTINGHOLES 4 PLCS.

PNEUMATIC SUPPLY1⁄4" NPT FEMALECONNECTOR

Ø1.0 (25.4)THRU 2 PLCS.

2" (50.8) PLENUM

MonoTorr P-O-U Brochure 00 5/31/00 11:11 AM Page 2



Figure 5

MonoTorr Phase I 3000with Optional Bypass

MonoTorr Phase II 3000 and 15000Rare Gas and Nitrogen

Note: Getter lifetime is dependent on purifier size, inletimpurities and average flow rate. Consult the factory forlifetime calculations. Specifications subject to changewithout notice.

Phase II15000

Phase II3000

InletImpurity

0 - 20slpm

20 - 50slpm

InletImpurity

0 - 30slpm

30 - 75slpm

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 10 ppb

< 10 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 10 ppb

< 10 ppb

NITROGENPerformance Guarantee

RARE GASAr, He, Xe, Ne, Kr and Rn

Performance Guarantee

InletImpurity

0 - 20slpm

20 - 50slpm

InletImpurity

0 - 30slpm

30 - 75slpm

O2

H2O

CO

CO2

N2

H2

CH4

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 10 ppb

< 10 ppb

< 10 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 10 ppb

< 10 ppb

< 10 ppb

Phase II15000

Phase II3000

HYDROGENPerformance Guarantee

Gas Product Impurities Removed

Argon - Ar MT-R H2O, O2, H2, CO, CO2, N2,Helium - He THC and particlesOther Rare Gases

Nitrogen - N2 MT-N H2O, O2, H2, CO, CO2,THC and particles

Hydrogen - H2 MT-H H2O, O2, CO, CO2, N2

and particles

O2

H2O

CO

CO2

N2

H2

CH4

O2

H2O

CO

CO2

H2

CH4

O2

H2O

CO

CO2

H2

CH4

Life Status SensorU.S. Patent #5,172,066

Figure 4 - MonoTorr Phase II Control Panel

VALVES

BYPASS

PURIFIER

ALARMS

PNEUMATICS

POWER

TEMPERATURE

LIFE STATUS

GOOD

MARGINAL

CHANGE

HEATER

STANDBY

OPERATING

TEMPERATURE

HIGH

SET

LOW

HEATERON/OFF

VALVECONTROL

LED CHECK

ACKNOWLEDGE

The Need for PurificationResearch has shown that gas purification can ensure

consistent and repeatable process performance forsemiconductor device manufacturing.

Purification isolates critical process areas from housegas distribution systems and protects against gas purityupsets and cross-contamination. As manufacturingprocesses grow more demanding, gas system impuritiesmust be reduced below one part per billion.

The Getter Technology ApproachSince 1950, SAES Getters has developed evaporable

and nonevaporable getter technologies for ultrahigh-vacuum applications. Nonevaporable getter materials,based on zirconium and its alloys, can also be used inultrahigh purification capable of sub-ppb performance.

Getter materials irreversibly trap gaseous impuritymolecules. Gaseous impurities are captured on the surface.When heated, the impurities diffuse into the bulk of thegetter. Unlike ambient technologies that rely on surfaceadsorption only, getter technology utilizes the entirevolume of material. This results in superior capacities andlonger lifetimes for all impurities.

MonoTorr gas purification products were developedspecifically for sub-ppb performance. These getter-basedpurifiers are preconditioned (activated) at our factory toallow immediate use. Its all-metal technology ensuresthat no impurities are added.

High Purity ManufacturingMonoTorr purifiers are engineered for high-purity

applications. All piping system wetted surface areas areelectropolished 316L stainless steel construction with10µ-inch Ra surface finish or less.

Welding and assembly are performed in our Class 100cleanroom. Stainless steel diaphragm valves and a 0.003µm stainless steel particle filter are standard on allMonoTorr products.

APIMS Measures PerformanceAtmospheric pressure ionization mass spectrometry

(APIMS) demonstrates capabilities of the MonoTorrapproach to purification. Upstream impurities fluctuatingin the low-ppm range are quickly controlled to ppt levels(see figs. 1 and 2 below).

Phase II Controller FeaturesLife Status - Indicates the life status of the purifier.Good is normal, Marginal indicates approachingdepletion and Change includes audible alarm to notifythe operator that end-point is approaching andreplacement will soon be required (available for raregases and nitrogen only).

Heater - Indicates status of heater.

Temperature - Displays heater mode while maintaininggetter material at preset operating temperature.

Valves - Indicates status of purifier as controlled bypneumatic valves.

Alarms - Pneumatic alarm caused by loss of adequatepressure for valves. Power alarm indicates thatextended power failure has caused purifier to go intoStandby condition. Temperature alarm indicates a highor low temperature condition in the purifier cartridge.The high temperature alarm could be caused by highimpurity levels (air) in the gas stream. Alarm causesthe purifier to go to Bypass mode. Additional errorcodes provide alarms for exhaust fan, heater or solidstate relay failure.

Heater On/Off - Activates heater only when noalarms exist.

Valve Control - Positions valves to Purifier or Bypassmode.

LED Check - Assures proper functioning of all LEDsand alarm buzzer.

Acknowledge - Silence audible alarm and restoresoperation if certain alarm conditions have beencorrected.

Reprinted from Solid State Technology © Penn Well Publishing Company

Figure 1 - Argon Figure 2 - Nitrogen

Figure 3 - Side View Cutaway of MonoTorr Phase I 3000

Gases Purified and Impurities Removed

1.0

0.9

0.8

0.7

0.6

0.5

0.4

0.3

0.2

.01

00 10 20 30 40 50 60 70 80 90 100

Cur

rent

(10

- 11 A

)

Atomic Weight

CH4+

H2O+ O2+

CO+, N2+

Ar+(38)

CO2+

Ar36 (Ar40)+

Ar+(36) Ar+

(40)

Ar40(Ar40)+

1.0

0.9

0.8

0.7

0.6

0.5

0.4

0.3

0.2

.01

00 10 20 30 40 50 60 70 80 90 100

Cur

rent

(10

- 11 A

)

Atomic Weight

H2O+

O2+ CO2

+ N5+

N2+ N3

+ N4+

Utilities Required

Line Power:120/220 VAC

Pneumatic ValveActuation

(Phase II only):Nitrogen or clean dryair at 90 - 100 psig,

filtered to 10 µm

INSTALLED POWER:

MODEL 3000 15000120 VAC 300W/2.5 Amps 600W/5 Amps220 VAC 330W/1.5 Amps 660W/3 Amps

Impurity Levels

60 ppt

296 ppt

80 ppt

80 ppt

H2O

O2

CO2

CH4

Impurity Levels

130 ppt

447 ppt

123 ppt

H2O

O2

CO2

INSTALLED POWER:

120 VAC 300W/2.5 Amps220 VAC 330W/1.5 Amps

Diaphragm valves (included)

Efficient insulation for lowpower consumption

Dual thermocouples for safety

Compact heater

All wetted surfaceselectropolished 316Lsurface finish

Compact package coolsoutlet gas

Custom controller with completesafety features:

• Audible alarm• Dual “K” thermocouples• High differential over

temperature alarm• All solid state design

0.003 micron all stainless steelparticle filter

InletImpurity

0 - 20slpm

20 - 30slpm

InletImpurity

0 - 30slpm

30 - 50slpm

O2

H2O

CO

CO2

N2

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 10 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 1 ppb

< 10 ppb

Phase II15000

Phase II3000

O2

H2O

CO

CO2

N2

32.5(825.5)

INLET

OUTLET

25.0(635.0)

.266ø MOUNTING HOLES4X PLACES

23.0(584.2)

1.0(25.4)

0.5(12.7)

9.0 (228.6)

10.0 (254.0)

DIMENSIONSIN INCHES

(mm)

34.0(863.6)

4.0(101.6)

33.38(847.9)

6.0 (152.4)

8.0 (203.2)

DIMENSIONSIN INCHES

(mm)

5.0(127.0)

2.75(69.8)

8.25(209.5)

INLET OUTLET

OUTPUT INTERFACE PORT

POWER SWITCH

POWER INLET

Ø.312 (7.9) MOUNTINGHOLES 4 PLCS.

PNEUMATIC SUPPLY1⁄4" NPT FEMALECONNECTOR

Ø1.0 (25.4)THRU 2 PLCS.

2" (50.8) PLENUM

MonoTorr P-O-U Brochure 00 5/31/00 11:11 AM Page 1


www.saesgetters.com

SAES Pure Gas, Inc.San Luis Obispo, CaliforniaThe Technology of Pure Gas


EUROPESAES Getters S.p.A.Group Headquarters (Italy)Tel.: +39 02 93178 1Fax: +39 02 93178320

SAES Getters Deutschland GmbHTel: +49 221 944 0750Fax: +49 221 944 0754

SAES Getters G.B., Ltd.Tel: +44 118 956 6856Fax: +44 118 950 4074

SAES Getters France S.a.r.l.Tel: +33 1 482 48696Fax: +33 1 482 41052

SAES Getters S.p.A.,Moscow Representative OfficeTel.: +7 095 207 9743Fax: +7 095 208 0198

An ISO 9001 Registered Company

© SAES Pure Gas, Inc.Printed in U.S.A. All rights reserved.MonoTorr and InsiTorr are registered trademarks of SAES Pure Gas, Inc.VCR is a registered trademark of Cajon Co.

00PG01

U.S.ASAES Pure Gas, Inc.Pure Gas Technologies Headquarters4175 Santa Fe RoadSan Luis Obispo, CA 93401, USATel.: +1 805 541 9299Fax: +1 805 541 9399

Trace AnalyticalAnalytical Technologies HeadquartersTel.: +1 650 364 6895Fax: +1 650 364 6897www.traceanalytical.com

ASIASAES Getters Japan Co., Ltd.Tel: +81 3 5420 0435Fax: +81 3 5420 0439

SAES Getters Singapore PTE, Ltd.Tel: +65 534 0757Fax: +65 534 0307

SAES Getters Singapore,Taiwan BranchTel: +886 35 62 4650Fax: +886 35 62 4656

SAES Getters KoreaTel: +82 2 3404 2400Fax: +82 2 3452 4511

SAES Getters S.p.A.,Shanghai Representative OfficeTel: +86 21 627 51177Fax: +86 21 624 58900

MonoTorr Phase I 3000 MonoTorr Phase II 3000 & 15000

System Features and Specifications Matrix

N R H

350 400 400

150 150 120

125/< 260 (3000) 125/< 260 (3000) 125/< 260 (3000)187/< 600 (15000) 187/< 600 (15000) 187/< 600 (15000)

<10 <10 <15




N/A N/A N/A

STANDARD STANDARD N/A



PNEUMATIC PNEUMATIC PNEUMATIC

Products and ServicesPoint-Of-Use Purifiers Certification and Analytical Services Analytical Systems

House Gas and Area Purifiers InsiTorr™ FastPump Analytical Instruments

Gas Product Code N R

Additional Specifications and Features

Operating Temperature (°C) 350 400

Pressure Rating (psig) 150 150

Heater Power Consumption 50 50(watts) Nominal/Maximum < 260 < 260

Pressure Drop (psi) <10 <10

0.003 µm Metal Filter STANDARD STANDARD

Bypass Assembly OPTIONAL OPTIONAL

Surface MountableN/A N/AEnclosure(w/ Cooling Fan)

Surface Mounting Plate STANDARD STANDARD

Life Status Sensor (LSS) N/A N/A

1/4" VCR© Fittings STANDARD STANDARD(MCG Fittings Optional)

10 µ Ra Piping Surface Finish STANDARD STANDARD

1/4" SS Diaphragm Valves MANUAL MANUAL

Gas Type Key: N = Nitrogen R = Rare Gas (Ar, He, etc.) H = Hydrogen

*All MonoTorr purifiers are CE compliant

Designs For All ApplicationsTwo basic designs are available. The Phase I 3000

provides the essential requirements for nitrogen andrare gases at flows up to 5 slpm.

Phase II purifiers are available for rare gases,nitrogen and hydrogen. These purifiers provide addedsafety, automation and life status monitoring (raregases and nitrogen only) in a sturdy surface-mountableenclosure. The Phase II 3000 is designed for maximumflows of 50 slpm (rare and nitrogen gases), and 30slpm for hydrogen. The maximum flow of the PhaseII 15000 is 75 slpm (rare and nitrogen gases) and 50slpm for hydrogen. Refer to the system features matrixon back panel for additional information.

Protection From Operator ErrorIt is vital to protect any purifier from prolonged

exposure to air. MonoTorr purifiers can offer thatprotection. The Phase II design includes a sensor tocontinuously monitor and isolate the purifier cartridgein the event of an upstream air leak.

Life Status SensorThe patented life status sensor (LSS), developed

by SAES Pure Gas, provides early warning forimpending breakthrough of impurities (see fig.4).The technique measures resistivity change occurringin the getter alloy as impurities are diffused into thebulk of the purification media.

Phase I Phase II

Pure Gas Technologies

point-of-use purifiers protection from operator error

Documents