Precise, flexible, efficient – automation solutions for the semiconductor industry

Wafer Handling

Wafer Stages

High rigidity, no overshoot, no backlash: Rexroth wafer handling solutions are designed for perfect balance between high-dynamic servo drives, high-rigidity linear subsystems and pneumatic actuators. What this means to you is less unproductive time combined with

The wafer stages program supports high-precision motion control in the nanometer range for wafer alignment, positioning and testing, as used in inspection and quality control. The NYCe 4000 motion control system guarantees high precision at 1–5 nm resolution as well as

standardized handling thoughout your front-end operations. Pre-defined algorithms on the motion control systems prevent vibration. Higher-order motion profiles and spline functions produce smoother motion sequences.

slow uniform motion ≥50 nm/s. Special servo motors and ironless linear and torque motors enhance dynamic performance. High-preci-sion linear guides eliminate vibration. By adding a pneumatic subsys-tem, we can put together a complete automation package.

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Linear Motion System

Back End

An external non-contact motion system moves the wafers through the process chambers: The Rexroth LMS Linear Motion System features a simplified design which offers extremely high flexibility.

Coils mounted outside the chamber provide drive power for magnetic

Rexroth’s modular high-speed, high-precision solutions handle work pieces with no overshoot at the end position, seamlessly integrating all types of sensors and actuators. Our back end program covers the entire process flow from dicing and die bonding to pick-and-place.

carriers having no need for seals. All of the components are mounted outside the chamber increasing the availability to the machine. The technology is suited for virtually all load factors, precision levels, and motion profiles. The system offers great flexibility allowing individual carriers to move forwards and backwards at different speeds.

Rexroth supports the entire range of motors: servo, 2-phase stepper, voice coil, and piezo. The power ratings range from several W to kW.

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Bosch Rexroth

The Original Aluminum Modular Profile System

Strong profiles � Guaranteed performance data � Fully machined, corrosion resistant surfaces � Reusability

Industry-best connection technology � Easier to assemble � Easier to reconfigure � Greater flexibility

“Quick & Easy” � 30 different machining options for each profile � 500,000 combination options � Easy, fast configuration with planning software

Clean Room Profile System

Eliminates particulate- trapping surfaces, mini-mizes out gassing and enhances airflow with thoughtfully engineered components

Manual Production System – Workstations, Material Flow, Material Supply

EcoShape – The Tubular Framing System

Implement applications almost anywhere in record time with only 14 standard components

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has the components you need

� Available in sizes from 7 mm to 125 mm rails and runner blocks

� 4 carriage types, 6 accuracy classes � Corrosion resistant plating options � Different preload options � Interchangeable rails and runner blocks � Rail seal mounting hole cover strip

Ball Rail Systems

� Full line of standard and mini rails and runner blocks

Precision Ball Screws

� Full line ranging from 8 mm to 60 mm

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� Different ball nut solutions to choose from � Full range of bearings, pillow block units, and ball nut housings

� Lead accuracy from T5 (0.023/300mm) to T9 (0.130/30mm)

� Preload and non-preload solutions available � Corrosion resistant designs with our TDC (Thin Dense Chrome) plating

� Customized or standard end machining possibility

Lead P1 2 2.5 5 10 12 16 20 25 32 40 64

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to build your motion control system

Integrated Motion Control and Drives

� High bandwidth control loops

� Powerful tuning and visualization software

� Open architecture

Industrial PCs and HMIs

� Broad range for control, operation and visualization

� Reliable system technology

MSM motors � Torque up to 7.1 Nm � Speed up to 5,000 rpm � Multi-turn absolute encoder

Linear Motors

Ironless core � Force up to 1,700 N � Velocity up to 1,400 m/min � No cogging forces � High acceleration and dynamics

� Simple integration thanks to various mounting planes

MSK motors � Torques up to 495 Nm � Speed up to 9,000 rpm � Encoder systems for a wide and diverse range of applications

Iron core motors � Force of up to 21,500 N � Velocity up to 600m/min � Compact dimensions � Heat dissipation mini-mized by thermal encap-sulation

Smart Compact Drives

� 100 W – 3.5 kW � Ethernet-based communi-cations

� Multi-encoder interface � Safety on board � Drive-integrated motion-control (IEC 61131-3)

PLC and Motion Control

� Scalable hardware platform � Runtime system with motion, robot and logic controls

� Extensive software librar-ies in conformity with IEC 61131-3 and PLCopen

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Servo Motors: 100 Watt –3.5 kWatt and higher

all from one source

Actuator Compact Module

Dimensions W x H (mm)

Maximum Length (mm)

Ball Screw

CKK 9–70 70 x 32 650CKK 12–90 90 x 40 750CKK 15–110 110 x 50 1500CKK 20–145 145 x 65 1800CKK 20–200 200 x 100 2200 (5500)

Toothed Belt

CKK 9–70 70 x 32 650CKK 12–90 90 x 40 5500CKK 15–110 110 x 50 5500CKK 20–145 145 x 65 5500CKK 20–200 200 x 100 10000

Linear Motor

CKL 90 90 x 56 5500CKL 110 110 x 66 5500CKL 145 145 x 85 5500CKL 200 200 x 127 5500

Linear Systems – Compact Modules

� Belt driven � Ball screw driven � Linear motor driven

Linear Systems – Precision Modules

� High load capacity, precision and rigidity

� Extremely high posi- tioning accuracy and repeatability

Cartesian Systems – Easy Handling

BasicMechanical and pneumatic components, grippers, rotary modules, motors, sensors, single- and multi-axis linear systems

ComfortBasic + pre-parameterized servo drives and the com-missioning assistant

AdvancedComfort + pre-configured, scalable controls

Customized Systems

One responsibilityFor design, manufacturing and quality

Global standardsFor design, manufacturing and quality

Saving cost � Simplify final assembly � Simplify supply chain � Simplify quality control � Simplify supplier man-agement

� Simplify service � Reduce inventory

Precision Module Dimensions W x H (mm)

Maximum Length (mm)

PSK 40 40 x 20 350PSK 50 50 x 26 600PSK 60 60 x 33 940PSK 90 86 x 46 940

Mechanics + Drives + Controls

= Easy Handling

More than 20,000 wafer lifts produced in the U.S.

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RA 08042/06.12© Bosch Rexroth Corporation 2012 Subject to revisionsPrinted in the United States

Bosch Rexroth CorporationCorporate Headquarters 14001 South Lakes DriveCharlotte, NC 28273Telephone (800) 438-5983Facsimile (704) 583-0523 www.boschrexroth-us.com

Find your local contact person here:www.boschrexroth-us.com/addresses