precision ceramics for the high-vacuummicrocertec.com/pdf/microcertec-high_vacuum-2015.pdf ·...

1
MICROCERTEC S.A.S PAE de LAMIRAULT-COLLEGIEN - 22, rue de Lamirault - 77090 COLLEGIEN - FRANCE Tél : +33 (0) 1 60 06 66 73 - Fax : +33 (0) 1 60 05 32 51 [email protected] - www.microcertec.com Advanced Ceramics for High-Tech Industries PRECISION CERAMICS FOR THE HIGH-VACUUM Applications Mass spectrometers Surface analysis Vacuum measurement Magnetic Sensors Particle accelerators 3D Interconnect Devices High-precision 3D ceramic carriers : alumina or aluminium nitride Thin-film PVD metallization Line width and insulation 60 μm minimum Fully wrap-over metallized patterns Ceramic-to-metal & Glass-to-metal feedthroughs Alumina / glass insulators Kovar, stainless steel, molybdenum... High voltage & high-current compliant Leak tested to 10- 10 mbar/l/sec Structural parts & Electrical Insulators Alumina, sapphire, zirconia, SiC Quartz, glass, Macor™ High-precision custom-made components Clean-room compatible

Upload: others

Post on 05-Jun-2020

6 views

Category:

Documents


0 download

TRANSCRIPT

MICROCERTEC S.A.SPAE de LAMIRAULT-COLLEGIEN - 22, rue de Lamirault - 77090 COLLEGIEN - FRANCE

Tél : +33 (0) 1 60 06 66 73 - Fax : +33 (0) 1 60 05 32 [email protected] - www.microcertec.com

Advanced Ceramics forHigh-Tech Industries

PRECISION CERAMICS FOR THE HIGH-VACUUM

Applications• Mass spectrometers• Surface analysis• Vacuum measurement• Magnetic Sensors • Particle accelerators

3D Interconnect Devices• High-precision 3D ceramic carriers : alumina or aluminium nitride

• Thin-film PVD metallization • Line width and insulation 60 µm minimum• Fully wrap-over metallized patterns

Ceramic-to-metal &Glass-to-metal feedthroughs• Alumina / glass insulators• Kovar, stainless steel, molybdenum...• High voltage & high-current compliant• Leak tested to 10-10 mbar/l/sec

Structural parts & Electrical Insulators • Alumina, sapphire, zirconia, SiC• Quartz, glass, Macor™• High-precision custom-made components• Clean-room compatible

16_32567_fiche_High_vaccum_microcertec.qxp_Mise en page 1 25/03/2016 17:15 Page1