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Precision IonPolishing SystemUser’s Guide

Gatan, Inc.

5933 Coronado LanePleasanton, CA 94588Tel (925) 463-0200FAX (925) 463-0204

November 1998

Revision 3

Part Number: 691.82001

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Preface

About this Guide

This Precision Ion Polishing System User’s Guide is written to provide proce-dure for the installation of the unit, instruction on basic operations of the unprocedures for routine maintenance and servicing, and specifics for troublshooting.

The Guide provides the following comments:

Warning : Used when failure to observe the instruction could result in per-sonal injury.

Caution: Used when failure to comply with the instruction could damage tequipment.

Note: Used to highlight advice directed at getting the best performancfrom the equipment.

Preview of this Guide

The Precision Ion Polishing System User’s Guide includes the following chap-ters:

Chapter 1, “General Description,” describes the various features of the unii.e., work chamber, vacuum system, gas-control system, and electrical sys

Chapter 2, “Installation,” provides instruction for installation of the unit.

Chapter 3, “Operation,” describes the features and provides instruction foroperation of the different components within the unit.

Chapter 4, “Specimen Preparation,” describes the different means of prepaing and mounting specimens for use in the PIPS.

Chapter 5, “Routine Maintenance and Servicing,” provides a maintenance schedule and instructions on performing the routine maintenance and servnecessary to properly care for the unit.

Chapter 6, “Troubleshooting,” provides a troubleshooting table of possible symptoms and their resolutions.

Chapter 7, “Parts,” provides lists of spares, consumables, O-rings, and fus

PIPS User’s Guide i

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Disclaimer

Gatan, Inc., makes no express or implied representations or warrantiesrespect to the contents or use of this manual, and specifically disclaimsimplied warranties of merchantability or fitness for a particular purpose.Gatan, Inc., further reserves the right to revise this manual and to makechanges to its contents at any time, without obligation to notify any persor entity of such revisions or changes.

Copyright and Trademarks

© Gatan, the Gatan logo is registered to Gatan, Inc.

The product names AutoFilter, BioScan, Clipring, DigiPEELS, DigiScanDigitalMicrograph, DigitalMontage, Duo Mill, DuoPost, Gatan LowDoseGIF, Hexlok, Hexring, HotHinge, MSC, PECS, PIPS, Toggle Tilt, and Whisperlok are trademarks belonging to Gatan, Inc.

Patents

The PIPS is protected by US Patents 4,272,682; 5,009,743; and 5,472Other patents are pending.

PIPS User’s Guide

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Support

Contacting Gatan Technical Support

Gatan, Inc. provides free technical support via voice, Fax, and electronic mTo reach Gatan technical support, call or Fax the facility nearest you or conby electronic mail:

• Gatan Inc., USA (West Coast)

Tel: (925) 463 0200Fax: (925) 463 0204

• Gatan Inc., USA (East Coast)

Tel (724) 776 5260Fax: (724) 776 3360

• Gatan GmbH, Germany

Tel: 089 352 374Fax: 089 359 1642

• Gatan, UK

Tel: 01536 743150Fax: 01536 743154

• Nippon Gatan, Japan

Tel: 0424 38 7230Fax: 0424 38 7228

• Singapore

Tel: 65 235 0995Fax: 65 235 8869

• Gatan Online

http://[email protected]@gatan.com

PIPS User’s Guide iii

i
v PIPS User’s Guide

PIPS User’s Guide

Table of Contents

Preface i

Support iii

List of Figures ix

List of Tables xi

1 General Description 1-1

1.1 Main work chamber 1-3

1.2 Vacuum system 1-5

1.3 Gas-control system 1-7

1.4 Electrical System 1-9

2 Installation 2-1

2.1 Site Requirements 2-1

2.2 Unpacking 2-2

2.3 Installation 2-2

2.3.1 Setup of the Diaphragm Pump 2-2

2.3.2 Connecting Argon Source 2-3

2.3.3 Microscope Setup 2-3

2.3.4 Microscope alignment 2-4

3 Operation 3-1

3.1 Start-Up Procedure 3-1

3.2 Specimen Loading and Unloading 3-2

3.3 Specimen Viewing 3-4

3.4 Shutter Control 3-5

3.5 Specimen Rotation 3-6

v

3.6 Ion-Gun Purging 3-6

3.7 Gun Gas-Flow Adjustment 3-7

3.8 Beam Alignment 3-8

3.9 Ion-Beam Modulation 3-11

3.10 End-Point Detection 3-13

3.10.1 Autoterminator 3-13

3.10.2 Installation and Checkout of the Autoterminator 3-15

3.11 Chemically-Assisted Ion-Beam Etching 3-15

3.11.1 Loading Chemical Capsule 3-16

3.11.2 Operation of the CAIBE 3-18

3.12 Auto Shutdown, Reset, and Manual Shutdown Procedures 3-19

3.13 Digital Process Timer 3-20

3.13.1 Setting time base 3-20

3.13.2 Timer Operation 3-22

3.14 Liquid-Nitrogen Trap 3-23

4 Specimen Preparation 4-1

4.1 Mechanical Pre-Thinning 4-1

4.2 Chemical Pre-Thinning 4-4

4.3 Specimen Mounting 4-4

4.3.1 Wax Mounting of Specimens 4-5

4.3.2 Specimen Removal 4-7

4.3.3 Molybdenum Specimen Post 4-7

4.3.4 DuoPosts 4-8

4.4 Cross Sections 4-10

4.4.1 Milling Rates 4-13

5 Routine Maintenance and Servicing 5-1

5.1 Cleaning the Viewing Port 5-1

5.2 Cleaning the Airlock Vacuum Seals 5-3

5.3 Cleaning Specimen-Mount Assembly 5-4

5.4 Cleaning the Cold-Cathode Gauge Tube 5-6

5.4.1 Gauge-Tube Power Supply 5-9

5.5 Cleaning the Shutter 5-9

5.6 Care of the Penning Ion Guns 5-10

5.6.1 Dry Cleaning the Penning Ion Guns 5-11

5.6.2 Wet Cleaning the Penning Ion Guns 5-14

5.7 Molecular Drag Pump Maintenance 5-18

5.8 Diaphragm Pump Maintenance 5-21

5.9 Argon Leak Detection 5-23

vi PIPS User’s Guide

5.10 Clean Work Chamber 5-25

5.11 Backing Pressure Calibration 5-26

5.12 Microscope-Lamp Replacement 5-30

5.13 Motor Drive Replacement 5-31

5.14 Activated-Carbon Filter 5-32

6 Troubleshooting 6-1

7 Parts 7-1

7.1 Spares and Consumables 7-1

7.2 List of O-Rings 7-3

7.3 List of Fuses 7-4

Index I-1

PIPS User’s Guide vii

viii PIPS User’s Guide

PIPS User’s Guide

List of Figures

Figure 1-1 PIPS, front view. 1-2

Figure 1-2 Work Chamber, top view. 1-4

Figure 1-3 Work Chamber, cross-sectional view. 1-4

Figure 1-4 Pumping Manifold, top view. 1-6

Figure 1-5 Vacuum system. 1-7

Figure 1-6 Gas-Control system. 1-8

Figure 2-1 Microscope front-to-back alignment. 2-5

Figure 2-2 Microscope left-to-right alignment. 2-6

Figure 3-1 Specimen mount in raised and working positions. 3-3

Figure 3-2 Shutter control and light shield. 3-5

Figure 3-3 Operating characteristics of the PIGs. 3-8

Figure 3-4 Beam profile and gas flow. 3-9

Figure 3-5 X and z-alignment drive screws. 3-10

Figure 3-6 Alignment ellipse observed in the beam. 3-10

Figure 3-7 Autoterminator sensor top and side view. 3-13

Figure 3-8 The Autoterminator. 3-14

Figure 3-9 CAIBE assembly. 3-16

Figure 3-10 Chemical capsule assembly. 3-17

Figure 3-11 Digital Process Timer. 3-21

Figure 4-1 Specimen disc geometry. 4-4

Figure 4-2 Mounting specimen. 4-5



ix

Figure 4-5 DuoPosts, glue type and clamp type. 4-8

Figure 4-6 Clamp-type post and Loading Fixture. 4-9

Figure 4-7 Cross-section specimen preparation. 4-11



Figure 5-1 Viewing port and O-rings. 5-2

Figure 5-2 Specimen mount removal. 5-4

Figure 5-3 Specimen-mount and window assemblies. 5-5

Figure 5-4 Cold-cathode gauge tube. 5-6

Figure 5-5 Shutter removal and cleaning. 5-9

Figure 5-6 Ion source and magnet assembly. 5-11

Figure 5-7 Removal of anode assembly and anode cup insulator. 5-12

Figure 5-8 Removing anode cup assembly/front polepiece. 5-13

Figure 5-9 Removal of MDP. 5-19

Figure 5-10 Replacement of oil cartridge. 5-20

Figure 5-11 Disassembly of diaphragm pump. 5-22

Figure 5-12 Argon leak-detection points. 5-25

Figure 5-13 VAC sensor PCB assembly. 5-26

Figure 5-14 MDP driver card assembly. 5-28

Figure 5-15 VAC sensor interconnects. 5-30

Figure 5-16 Microscope-lamp replacement. 5-31

Figure 5-17 Motor drive removal. 5-32

Figure 5-18 Activated-charcoal filter. 5-33

Figure 7-1 Test points, fuses and plugs on power distribution board. 7-5

x PIPS User’s Guide

PIPS User’s Guide

List of Tables

Table 3-1 Time bases. 3-21

Table 4-1 Polishing wheel diameter vs. dimple depth. 4-2

Table 4-2 Optimum initial specimen disc thickness. 4-3

Table 4-3 Typical milling rates. 4-13

Table 5-1 Maintenance operations. 5-1

Table 5-2 Leak-detection flow chart. 5-24

Table 5-3 Scenario 1. 5-27

Table 5-4 Scenario 2. 5-27

Table 7-1 List of O-rings. 7-3

Table 7-2 List of fuses. 7-4

xi

xii PIPS User’s Guide

PIPS User’s Guide

1 General Description

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The Model 691 Precision Ion Polishing System (PIPS™) is a completely secontained, compact, bench-top system designed to produce high-quality Tspecimens with exceptionally large, clean, electron-transparent areas. SeeFigure 1-1. The PIPS employs single-function manual controls for easy opetion.

Dual ion sources

Ion polishing is done by two variable-angle, miniature Penning ion guns (PIGThe operating angle of each gun, ± 10°, is independent of one another andhave the ability to accurately center the beam onto the specimen at any anwithin this range. The PIGs incorporate powerful rare-earth magnets and acapable of very high thinning rates. Each gun is mounted in a universal jointhat the x- and z-alignment drives can be used to center the beams on the men. These features make it possible to thin specimens at very low anglesreasonably short time.

Optimum gun design

The gun’s ion optics has virtually eliminated cathode-aperture erosion and,result, gun maintenance is reduced, specimen contamination from the ion is minimized, and gun consumables have been eliminated.

Stereo microscope

An optical stereo microscope is used to inspect the specimen in its workingposition at any time during the thinning process to achieve very precise coover the final stage of specimen thinning. This feature is especially importafor insulators and semi-conductors since these materials are transparent toand the interference-fringe technique can be used to control the final specithickness in the region of interest to an accuracy of about ±10 nm.

1-1

Figure 1-1 PIPS, front view.

ION GUN GAS FLOW CONTROLLEFT GUN RIGHT GUN

1

26 25 24 23 19 18 17 16 15 14

8

13

7

6

2 3

4

5

1. Left gun current2. Beam energy (keV)/

Backing pressure (Torr)3. Right gun current4. Left gun gas-flow control5. Left gun gas-valve switch6. Right gun gas-valve switch7. Right gun gas-flow control8. Chamber vacuum display9. MDP light

10. Backing-pressure light11. DP test button12. Time-out cycle reset button13. Main power switch

14. Beam-status light15. Ion-beam modulator switch16. Angle status light 17. Airlock vent light18. Airlock vent switch19. Ion gun voltage control20. Timer Start/Stop button21. Timer set buttons22. Time remaining display23. Rotation speed control24. Specimen Raise/Lower control25. Airlock evacuation switch26. Airlock vacuum light

9

10

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1-2 PIPS User’s Guide

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Compact vacuum system

Specimen contamination is reduced with an oil-free vacuum system consisof a molecular drag pump (MDP) backed by a 2-stage diaphragm pump (Dboth completely contained within the bench-top unit. Additionally, a liquid-nitrogen trap is available to further reduce contaminants and water vapor.

Versatile sample holders

The Gatan specimen post, for single-sided milling, and the DuoPost, for dosided milling, eliminate transfer of material onto the specimen by secondarsputtering from the specimen platform and provide excellent thermal contawith the specimen to prevent specimen overheating. Lastly, both specimen allow the specimen to have an unobstructed view of the ion beam and thuspolishing can be performed at angles approaching 0°.

Quick sample turnaround time

Quick specimen exchange (<30 sec) is achieved using a miniaturized versiGatan’s pneumatically controlled Whisperlok™. Specimen can be easily traferred and viewed at frequent intervals during the final moments of the thinnprocess.

1.1 Main Work Chamber

Figure 1-2 is a top view of the PIPS main Work Chamber. The figure showsright and left PIGs and the Faraday cups provided opposite each ion gun tosure the ion current. The Airlock cover is removed to reveal the main AirlocO-ring and a top view of the specimen mount.

Figure 1-3 is a cross-sectional view through the main Work Chamber of thePIPS. The Airlock cover is in place with the specimen in its working positionthe center of the Chamber.

Specimens are mounted on posts that plug into the specimen mount and cmilled on both surfaces with proper orientation of the PIGs. One of the PIGshown inclined at a positive angle (+10°) to the horizontal (beam incident totop surface of sample). By simply grasping the gun knob and rotating it, theangle can be reduced down through 0° continuing on to a negative angle (beam incident to the bottom surface of sample).

The Shutter is shown in its inserted position,which prevents sputtered matefrom depositing on the specimen Viewing Port.

PIPS User’s Guide 1-3

Main work chamber

Figure 1-2 Work Chamber, top view.

Figure 1-3 Work Chamber, cross-sectional view.

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20

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10

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1. Left Penning gun2. Faraday cup for right gun3. Faraday cup for left gun4. Work chamber5. Airlock o-ring

6. Right Penning gun7. Specimen mount8. Shutter guide (Optional CAIBE port)9. Specimen storage block

32

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Airlockcover

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1.2 Vacuum System

The PIPS has a compact, oil-free vacuum system consisting of a molecularpump (MDP) backed by a 2-stage diaphragm pump (DP). The vacuum systdesigned to hold vacuum when the power is turned off. The working vacuucan be reached very quickly when the power is resumed.

The pumping system

The MDP has an argon pumping speed of 60 L/sec. It is in series with a 2-sdiaphragm pump (DP) that maintains a backing pressure for the MDP of lethan 10 Torr and a chamber base pressure in the 10-6 Torr range. The pumping time from atmosphere to near the base pressure is typically less than 15 mThe console is cooled by a single fan mounted on the rear panel that direconto the MDP.

The Pumping Manifold

The Pumping Manifold contains the cold-cathode gauge tube and the MDPwhich is offset from the Work Chamber to minimize any possibility of debrisfalling into the pump (see Figure 1-4).

Pressure is monitored by the cold-cathode gauge tube, which will not turn unless the MDP is close to its normal running speed.

Airlock vacuum

The Airlock vacuum is controlled by two pneumatic solenoid valves, SV2 aSV3 (see Figure 1-5). SV2 evacuates the Airlock and closes automatically wthe Airlock is vented. SV3 vents the Airlock and can only be actuated whenAirlock switch on the front panel is in the OUT position.


Vacuum system

Figure 1-4 Pumping Manifold, top view.

1. Transmission-illuminator switch2. Reflection-illuminator switch3. Molecular drag pump manifold4. Cold-cathode gauge tube5. Autoterminator socket6. Manual Vent valve

(Vents complete system)

7. Multipurpose tool storage8. Reflection-illuminator power jack9. Shutter-control switch

10. Microscope pivoting slide

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4

6

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Figure 1-5 Vacuum system.

1.3 Gas-Control System

The Gas-Control system controls the argon gas supply to the ion guns, theWhisperlok piston, and the pneumatic Shutter. The System consists of a psure regulator, two normally open three-way solenoid valves, SV4 and SV5and two normally closed two-way solenoid valves, SV6 and SV7, mountedneedle valves.

Figure 1-6 shows the Gas-Control system and the hose-clamping points usquickly find the exact locations of a system gas leak. Refer to Section 5.9 for explanation of the fault-finding steps.

Gas supply to the guns

The PIPS requires a clean, high purity (99.998%) argon supply at 25 psi (1bar). The argon gas for the ion guns is regulated by a pressure regulator threduces the incoming gas supply from 25 psi down to about 1 psi (69 mbarTwo solenoid valves (SV6 and SV7) control the gas flow to the two guns. TO-rings form vacuum seals in the gun housing and the ionizing gas is fed i

Cold-cathodegaugetube

Airlock

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Manifold

Whisperlok

Airlockvacuumsensor

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Gasout

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Figure 1-6 Gas-Control system.

the guns between the O-rings. Solenoid valves SV6 and SV7 shut off the gsupply to each ion gun when the front panel Gas-Valve switches are opera

Note: Do not use the Gas-Flow controls (needle valves) to shut off gas to thguns. Use the Gas-Valve switches instead.

Gas supply to the Whisperlok

The Whisperlok assembly is controlled by a normally-open three-way solenvalve (SV4). When SV4 is energized, argon pressurizes the Whisperlok asbly and lowers the piston. When the power to SV4 is switched off, the gas sure is cut and the piston is raised. This means that in the event of a powefailure, the specimen will automatically be raised into the Airlock.

SV4Whisperlok

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SV5Shuttervalve

SV6Shutoffvalve

SV7Shutoffvalve

Needlevalve

Needlevalve

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Gas in25 psi

(1.72 bar)Clamp

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Gas supply to the pneumatic Shutter

The pneumatically-operated Shutter is designed to minimize sputtered matfrom depositing on the specimen Viewing Port and is controlled by the 3-wsolenoid valve, SV5. When the power to SV5 is switched off, the shutter piscylinder is vented and the Shutter is opened by the action of a coil spring mounted behind the Shutter piston. This means that in the event of a poweure the Shutter will automatically retract and allow the specimen to rise intoAirlock.

1.4 Electrical System

The total power consumption of the PIPS is relatively small and varies betw275 W at 60 Hz and 300 W at 50 Hz. The beam energy has been limited tokeV as the best compromise between maximizing the specimen thinning raand minimizing specimen radiation damage and heating effects.

The air flow

The cabinet interior is cooled by a single fan, mounted on the rear panel diing air onto the MDP. The air flow to the fan and the slots on the rear paneshould not be blocked since this may cause the MDP to overheat and shut dopossibly damaging other electrical components in the instrument.

The circuit

A main power transformer accepts a wide range of input voltages (100 VAC240 VAC) and outputs a range of lower AC voltages to a distribution boardlocated next to the transformer. The distribution board regulates and distribthe specific power sources required by the various electrical subassembliethe system, i.e., 117 VAC to the diaphragm pump; 18, 32 VAC (center tappand 90 VAC to the HV power supply; 28 VDC for the MDP; 24 VDC to the solenoid valves and LED indicator lamps; and 3.6 VAC for the chamber illunator.

The DC power supply

DC power supply for the cold-cathode gauge is mounted on the rear panelabove the fan and is activated when the MDP reaches 60% of the normal rning speed. The supply operates from 117 VAC, which is controlled by a remounted on the distribution board.

The HV power supply

The high voltage (HV) power supply provides the ionization voltage and theacceleration voltage for the ion guns. The two voltages are programmed w


Electrical System

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defined relationship to give the optimum beam parameters for each beam energy.

The HV supply has safety features built into it such that it will not operate unless the MDP is at its normal running speed, the specimen piston is lowethe process Timer is running, and the keV Set control is switched on.

The standard operating mode

Gatan recommends the PECS be left running continuously 24 hr a day, sedays a week. This will insure optimum performance of the vacuum system the ion guns and purge time will be minimized if not eliminated all together


PIPS User’s Guide

2 Installation

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Although the PIPS is a small, bench-top system, it is relatively heavy (38 kand should not be lifted by a single person. It can be lifted safely by two pewho are experienced in the techniques of lifting heavy objects. Alternativelproper laboratory lifting equipment should be used.

2.1 Site Requirements

The PIPS requires a sturdy bench top area approximately 1 m (39.3 in.) wid50 cm (19.6 in.) deep by 72 cm (28.3 in.) high, located near a power outlet asource of 99.998% purity argon (Grade 4.8). A molded power cord is suppwith the PIPS to fit the local standard power socket. If the power cord suppis not suitable, the plug should be replaced with a suitable one. Before coning the new plug, make sure the voltage requirement conforms to that specon the label on the rear panel of the PIPS. The wiring color codes should cform as shown:

Live Black or BrownNeutral White or BlueGround Green or Green/Yellow

A 3-m nylon tubing with compression fittings is supplied to connect the argregulator to the gas input of the PIPS, located on the rear panel of the consThe PIPS is air cooled and does not require connection to a water supply.

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2.2 Unpacking

Be sure to have the necessary personnel or use proper laboratory lifting eqment when unpacking the IBC.

To unpack the unit

1. Inspect the exterior and interior of the shipping box for damage.

Note or photograph any external visible damage.

Open the box and inspect for any internal damage. If any damage is obsethe Shipper should be informed immediately.

2. Remove the two accessory boxes.

Lift off the top layer of support foam and unfold the protective plastic cov

3. Lift the PIPS out of the box (see lifting precautions above).

4. Keep all packing material.

Replace all packing material into the shipping box and store in the eveninstrument must be returned for factory repair or maintenance.

5. Verify accessory items.

Inspect the contents of the accessory boxes against the items ordered those listed on the packing list.

If there are any discrepancies, inform your local Gatan Sales Office immately.

2.3 Installation

Place the PIPS on an appropriate work bench, close to a suitable power ouand a cylinder of compressed argon. Then proceed with the setup.

2.3.1 Setup of the Diaphragm Pump

There is a red locking screw that is used to secure the diaphragm pump (Dthe cabinet base during transit. This screw must be removed before starting the instrument.

Look on the left underside of the PIPS to reveal this screw. Once removedscrew should be stored into the nearby threaded hole (toward the front of tunit) so that it will be readily available in the event the instrument is returnefor factory service.


Installation

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Note: Securing the DP prior to shipping is very important. The pump has cosiderable degree of motion within the cabinet due to the flexible isolators uto control pump vibration. If not properly secured, considerable damage maresult to the pump and any components within close proximity to the pump

2.3.2 Connecting Argon Source

Be sure the argon supply is properly secured.

To connect the argon source

1. Adjust your argon tank regulator to 25 psi (1.72 bar).

2. Connect gas-supply hose.

Connect one end of the nylon gas-supply hose to the regulator on the cder bottle.

3. Purge the gas-supply hose.

Crack open the main valve on the cylinder to purge the gas-supply hos

4. Connect hose to the console.

With the argon flowing, connect the hose to the gas-inlet port on the reapanel of the PECS.

Do not over tighten the fitting as this may fracture the hose.

5. Check the pressure.

Turn off the main gas valve and check that the pressure reading on thepressure side of the regulator does not decrease over a 5-min period.

This will verify that the gas-inlet line is not leaking.

6. Turn on the main gas valve again to restore the argon supply.

2.3.3 Microscope Setup

The microscope needs to be mounted and centered.

To mount the microscope

1. Properly engage the microscope slide into the pivoting slide on the Manifold.

See Figure 1-4.


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2. Lower the microscope to its working position.

Rotate the focus knob CCW to lower the microscope to its working positwhere it can pivot to the left or right rest position.

3. Plug the microscope into the Reflection Illuminator power jack.

The jack is next to the Shutter Control switch on the right side of the supplate (see Figure 1-4).

4. Confirm the voltage source.

Check that the voltage shown on the serial number label on the rear paagrees with the voltage source to be used.

5. Plug the PIPS into the main power socket.

Do not load a specimen post just yet.

6. Rotate the microscope objective turret to the 2x position.

Adjust the focus knob to clearly view the hex shape at the top of the pis

2.3.4 Microscope Alignment

The microscope is shipped prealigned so the hex shape at the top of the pshould appear concentric with the microscope field-of-view. Keep in mind tfield-of-view is a true image such that if a gap exists between the post andfield-of-view at the 6 o-clock position, the microscope must be shifted towathe rear of the PIPS for centering.

Note: Alignment should be performed only when the PIPS is under vacuum the piston can be lowered into the Chamber.

If alignment is necessary, the tools required are a 1.5-mm and a 3.0-mm hwrench and the small spanner wrench all supplied in the accessory kit.

To setup for alignment

1. Insert a copper specimen post into the top of the piston to use as a tar-get.

See Section 3.2 for loading a specimen.

2. Turn on the Reflection Illuminator.

Toggle the Illuminator paddle switch toward the front of the instrument (Figure 1-4). This initiates a timed-interval mode that allows the lamp to remain on for about 3 min.


Installation

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3. Determine the direction the microscope must move to properly center the target.

Front-to-back alignment

1. Loosen sufficiently the two socket-head screws on the pivoting slide.

Use the 3.0-mm hex wrench to loosen the two screws. This will permit tmicroscope to slide back and forth with minimal side motion.

2. Center the specimen post; tighten the two screws.

Be sure the two socket-head screws are tight before proceeding.

Figure 2-1 Microscope front-to-back alignment.

Left-to-right alignment

1. Loosen the socket-set screw on the pivoting slide.

Use the 1.5-mm hex wrench to loosen the socket-set screw (facing the on the pivoting slide itself).

2. Position the microscope.

Look between the microscope slide and the pivoting slide to find a brascam (see Figure 2-2).

3-mm hexwrench

Adjustment screws,2 places


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Figure 2-2 Microscope left-to-right alignment.

Engage the spanner wrench in the cam and rotate left or right in small iments to position the microscope.

Rotate CW to move the microscope to the right. Rotate CCW to move tmicroscope to the left.

3. Once centered, tighten the set screw.

Cam

Set screwuse 1.5 mm hex wrench

Spannerwrench


PIPS User’s Guide

3 Operation

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ile

The PIPS is relatively simple to operate. The ability of the operator to obtaigood TEM specimens depends more on the quality of the starting specimedisks than on any other factor. Specimen-preparation times are relatively sif the starting disks are thin and well polished mechanically.

3.1 Start-Up Procedure

Turn on the power to the PIPS by depressing the upper portion of the mainPower switch (see Figure 1.1). The diaphragm (DP) and molecular drag pu(MDP) will start and the digital display on the left side of the front panel willlight up. The (amber) DP High indicator will come on and stay on until the backing pressure drops below 12 Torr. After approximately 15 min, the (greMDP indicator will light up showing the MDP has reached 60% running speWork Chamber pressure is read on the analog meter.

Once the chamber pressure is < 5 x 10-4 Torr, turn on the Gas-Valve switches for both guns. Rotate the Gas-Flow control knobs CW to the fully closed potion, then back them off 3 full turns. This process will purge the guns. For mdetail on gun purging, see Section 3.6. While waiting for the guns to purgecheck the following:

• The specimen mount is in the raised position.

Depress the upper part of the Airlock Control switch to raise the specimmount if it is in the lowered position.

• The Airlock cover is in place and the Airlock chamber is evacuated.

If the Vent LED is illuminated, this indicates the Airlock is vented. You need to evacuate the Airlock chamber by depressing the Vac button whrotating the Airlock cover to make sure the O-ring is well seated.

3-1

Specimen Loading and Unloading

ock

post. his-

t is

ck

en

post rs is

i-ec-

its ol-

.

• Periodically depress the DP Test button.

Do this to monitor the backing pressure (should be <10 Torr) as the Airlchamber is evacuated.

The pressure will be displayed on the Beam Energy digital display.

3.2 Specimen Loading and Unloading

Specimens are mounted either on a Gatan DuoPost or a regular specimenThe specimen post plugs into a specimen mount located at the top of the Wperlok piston. The following procedure assumes the piston/specimen mounin the Work Chamber.

To raise the specimen mount/piston

1. Depress the upper part of the Airlock Control switch.

This will raise the specimen mount/piston (see Figure 3-1b) into the Airloto facilitate specimen loading.

The piston will not rise immediately but waits for the specimen mount torotate to its reference or home position (See Section 3.9). The piston thrises and seals off the Work Chamber from the Airlock chamber.

2. Vent the Airlock chamber by holding down the Vent button.

Once vented, the Airlock’s cover can be removed and a new specimencan be inserted or an old one removed. A special pair of angled tweezesupplied to facilitate this operation.

Note: Be sure not to rotate the specimen mount when exchanging specmens. Any rotation of the mount will displace the home position of the spimen and will cause misalignment for modulated milling.

Note: When loading a specimen post, make sure it is properly seated inlowest position; the height of the post is critical if the ion beams are to pish at the center of the specimen.

To lower the specimen mount/piston

1. Replace the Airlock cover.

2. Depress the Vac button.

Rotate the Airlock cover to be sure the Airlock O-ring is properly seated


Specimen Loading and Unloading

Figure 3-1 Specimen mount in raised and working positions.

Airlockcover

Airlockchamber

Shutter

Specimenviewing port

Specimenpost

Specimenpost

Faradaycup

a. Specimen in working position

b. Specimen in raised position


Specimen Viewing

e DP

Air-

th the the ed (see es to cial

pport d the en is ded

3. Hold down the Vac button and depress the DP Test button.

Read the backing pressure on the Beam Energy digital display when thbutton is depressed.

4. Once the Airlock chamber pressure reaches the proper level, the Vac light will illuminate.

5. Depress the Airlock Control switch to lower the specimen mount/pis-ton. See Figure 3-1a.

Note: If the Airlock piston will not go down, check to see if:

• The Vent light is illuminated.

This indicates the Airlock is still at atmospheric pressure. Evacuate the lock.

• The Rotation Control is in the OFF position.

At OFF, the specimen is not allowed to rotate to home position (see Section 3.5). Click the knob one notch CW (from the OFF position).

3.3 Specimen Viewing

The PIPS has been designed so that the specimen is clearly visible both winaked eye or with the stereo microscope either raised (in the Airlock) or in lowered position (in the Work Chamber). The wide-angle view with the nakeye is necessary when aligning the PIGs using the Beam Alignment ScreenSection 3.8). The microscope is essential when one uses interference fringcontrol the final stages of the thinning process. The microscope is also cruwhen observing the final stages of polishing of specimens that do not showinterference fringes.

Illuminators

The Reflection and Transmission Illuminators used in conjunction with the microscope are controlled by corresponding paddle switches on the top suplate of the PIPS (see Figure 1-4). When the switch paddle is toggled towarfront of the instrument, the lamp will remain on for approximately 3 min. Whtoggled toward the rear, the lamp will remain on only as long as the paddleheld down. As such, the illuminators cannot be accidentally left on for extenperiods when not in use. See Figure 3-2.


Shutter Control

P

oper-er

so

of w the are

hut-

ati-se

so to

rol he rat-

the 0 r-

Figure 3-2 Shutter control and light shield.

3.4 Shutter Control

The Shutter protects the specimen Viewing Port from sputter deposits, ates automatically, and is keyed to the HV Timer. It closes when the Timis counting down and retracts when the Timer stops. The Shutter will alretract when the piston is raised (since this operation stops the Timer).

Shutter overrides

A (momentary) manual Shutter Control switch located on the right side the center support plate provides the necessary manual override to allospecimen or Beam Alignment Screen to be viewed when the ion beamson. When the switch paddle is toggled toward the front, it retracts the Ster to permit viewing during polishing. The Shutter will remain in the retracted position for approximately 120 sec after which it closes automcally. If the switch paddle is toggled toward the rear, the Shutter will cloimmediately.

The Illuminator paddle switches can override the Shutter Control switchthat if you wish to view the specimen while milling, toggle either switch open the Shutter.

The Autoterminator (Section 3.10.1) incorporates a special shutter-contfeature to minimize the amount of sputtered material accumulating on tViewing Port. When the Autoterminator is in place and the guns are opeing, the Shutter will open for about 1 sec every 120 sec for sampling of transmitted light intensity. This corresponds to a total sampling time of 3sec/h of gun operation. This sampling rate is maintained until the Autoteminator shows 10 on the digital display whereupon the sampling rate is

COMPACT CC GAUGE

Microscope rotated 90°from work position

Lightshield

Shutter-controlswitch

IPS User’s Guide 3-5

Specimen Rotation

ed

(see

vel

ed ton d in

put. unts -ion-e the PIPS

er .

automatically increased to about 1 sec every 16 sec with this rate maintainuntil termination.

3.5 Specimen Rotation

The specimen is rotated in a CCW direction by a variable-speed DC motor Figure 5-17). The rotation speed can be varied from zero (Off) through 6 rpmusing the Rotation Speed control on the front panel. The motor drives a begear mounted to the Whisperlok piston. The gear automatically disengageswhen the specimen is raised.

Mounted to the bevel gear, as part of the Ion Beam Modulator, is an encodplate enabling the piston’s rotational angle to be referenced so that the pisrotates to the home position each time the piston is raised. This is discussemore detail in Section 3.9.

3.6 Ion-Gun Purging

The PIGs are very efficient and operate with an extremely low gas throughHowever, even when the argon gas flow to the guns is turned off, small amoof outgassing from materials in the ion guns will produce significant ion currents (>5 µA). In extreme cases, outgassing will result in sudden bursts of ization that make the PIGs unstable in operation. To minimize this effect, thPIGs must be purged with dry argon. Typically, this is necessary whenevergun components have been exposed to a poor vacuum, i.e., whenever thehas been switched off for more than a few hours or the chamber has beenvented.

To purge the guns

• Switch on the left gun Gas-Valve switch.

Adjust the gas flow with the left gun Gas-Flow control.

Raise the chamber pressure to about 1 x 10-4 Torr.

• Repeat this procedure for the right gun.

Switch on both guns and purge for about 15 min if the guns have been undvacuum. Purge for 30-60 min if the system has been vented to atmosphere

In any case, purging should be continued until a gun current of <8 µA is obtained with an accelerating voltage of 5.0 keV and the Gas-Valve switchturned off to both guns.


Gun Gas-Flow Adjustment

n en

the

axi-

lue the

own it

3.7 Gun Gas-Flow Adjustment

The optimum operating gas flow must be obtained once the guns have beethoroughly purged. Adjust the flow one gun at a time and without a specimpost or Beam Alignment Screen in place.

Note: The post or the Screen will block the path between the ion guns and Faraday cups and will substantially reduce the ion current.

To adjust the gas flow

1. Turn off the Gas-Valve switch for the left gun and work only with the right gun.

2. Set the Rotate Speed control dial to 3 (rpm).

3. Be sure Beam Modulator is turned off.

4. Depress the Vac button to evacuate the Airlock chamber.

5. Toggle the Airlock Control button to LOWER.

Lowers the piston to its working position.

6. Set the HV Timer to 30 min and start it.

Scroll with the Up Arrow button to set the interval.

Depress the Start/Stop button to start the Timer.

7. Adjust the Ion Gun voltage control until the Beam Energy display indi-cates 5.0 keV.

8. Adjust the right gun gas flow.

Rotate the Gas-Flow knob both CW and CCW until the ion current is mmized.

9. Continue to increase the gas flow.

Rotate CCW until the current drops by ~10% to 15% of its maximum va(if peak current is 45 µA, focused current is 38–40 µA). This completes gas-flow adjustment of the right gun.

A typical curve relating operating chamber pressures to ion current is shin Figure 3-3. The operating range indicated has been chosen becausegives the most focused beam and the highest milling rate.

10. Repeat the procedure for the left gun.

Turn off the right gun Gas-Valve switch and repeat for the left gun.


Beam Alignment

l nets

lec-uns eam

een s-

ill

ioned t to

e

11. Be sure both gun Gas-Valve switches are turned back on when adjust-ment to both guns is completed.

Note: Variations of ±20% in the performance of the two ion guns are typicaand are caused by small differences in the properties of the rare-earth magused to enhance the gas-ionization rate.

Figure 3-3 Operating characteristics of the PIGs.

3.8 Beam Alignment

The ion beams produced by the PIGs contain both ions and fast neutrals. Etrostatic beam alignment does not work with the fast neutrals and the ion gin the PIPS must be aligned mechanically. This is done with the aid of the BAlignment Screen.

Note: Beam alignment is required only if the x- or z-alignment drives have baccidentally moved, or the guns have been removed for servicing. If one supects gun misalignment, a quick check with the Beam Alignment Screen wconfirm whether there is a problem.

This Screen plugs into the standard specimen mount and is precisely positat the standard specimen height. It consists of a 7-mm diameter fluorescenscreen with a 0.5-mm diameter hole at its center. After lowering the Screenits standard working position, the Light Shield is placed over the Airlock (Figure 3-2) and the guns turned on. The ion beams will be seen through thLight Shield port as two blue lines intersecting at 120° on the fluorescent screen.

Typical operatingrange

Gun

Cur

rent

(µA

)

Work Chamber Pressure (Torr)

10–6 10–5 10–4 10–3

Beam energy = 5 KeV

Fastions

Fastneutrals

0

20

40

60

10

30

50


Beam Alignment

at

gun ff.

To align a beam

1. Rotate both gun knobs to align the gun angles at 10° Top.

When properly aligned at 10°, there will be no need to realign the guns any other angle.

2. Turn off the Gas-Flow Switch for the left gun and work only with the right gun.

3. Turn on the Rotate Speed control and set it at Position 3 on the dial.

4. Evacuate the Airlock chamber and lower the piston to its working posi-tion.

5. Set the HV Timer to 30 min.

Scroll with the Up Arrow button to set the interval.

Depress the Start/Stop button to start the Timer.

6. Adjust the Ion Gun voltage control until the Beam Energy display indi-cates 5.0 keV.

7. Vary the Gas-Flow control (CW and CCW) and note the change in the beam profile.

While viewing the Alignment Screen, adjust the gas flow until the beam width is a minimum. If gas flow is increased too much, the pressure in thewill become too high to support a discharge and the ion beam will turn o

Figure 3-4 Beam profile and gas flow.

Low gas flowBeam alignmentscreen

0.5-mm diameterCenter hole

Beamprofile

High gas flow

10

0.5

1.0

1.5

2.0

2 3Gas Flow (turns)

Bea

m W

idth

(m

m)

4 5 6


Beam Alignment

just

than ime-hole

8. Adjust the z-alignment drive screw (vertical adjust).

While viewing the beam crossing the screen, use the tool provided to adthe z-alignment drive screw.

Note that a portion of the line crossing the screen has a higher intensitythe rest. The higher-intensity zone is elliptical in shape and several millters in length. Adjust the drive screw to center this zone over the center in the screen.

Figure 3-5 X and z-alignment drive screws.

Figure 3-6 Alignment ellipse observed in the beam.

Gun indicatorLED

Ion gunknob

Using tool, rotate 'X' or 'Z' for beam alignment

'Z''X'

M4 x 25 mm,2 places

Beam


Ion-Beam Modulation

reen.

to cisely both s the

ases es the r ion ue to

m for e ion ns,

alibra-

ate-rd-n(s) ze

path red ding

gle- can ±30°

9. Adjust the x-alignment drive screw (horizontal adjust).

Adjust the drive screw to center the beam over the center hole in the sc

10. Adjust the Gas-Flow control until the beam is slightly larger than the width of the center hole.

11. Switch off the Gas-Valve switch for the right gun and repeat the above steps for the left gun.

After completing this procedure for each gun, turn on the Gas-Valve switchboth guns and view both beams on the screen. If the two beams do not preintersect the screen center, the ‘x’ drive requires further adjustment. Once lines intersect at the screen center and they appear sharp and bright acrosscreen diameter, then beam alignment is complete.

Note that narrowing the beam (by increasing the gas flow to the gun) decrethe amount of the beam incident upon the Faraday cup and hence increasamount of the beam hitting the specimen. (The reverse is true for a smallecurrent.) Some flickering of the beams across the screen is normal and is delectrostatic charging and discharging of the screen, which is an insulatingmaterial.

Once the guns have been aligned, it should not be necessary to realign theseveral runs. When polishing the first specimen, it is recommended that thcurrent and the beam angle be noted. When polishing subsequent specimeadjust the parameters to these values to provide a good degree of beam ction.

3.9 Ion-Beam Modulation

Ion-beam modulation is used primarily for polishing cross-sectional TEM mrials that are “glued” together or have interfaces of materials of different haness. Beam modulation consists of fast on/off electronic switching of the guwith variable specimen-rotation speeds within polishing sector(s) to minimidifferential thinning rates of specimens. With this feature, the ion beam is turned off when the pedestal or the support arms of the DuoPost enters theof the ion beam. This effectively reduces specimen contamination of sputtematerial from these parts and extends the life of the post in addition to provihigher quality specimens. Beam modulation is controlled from the Ion-BeamModulator panel (see Figure 1-1).

Single-beam modulation

There are two different configurations for beam modulation on the PIPS: sinor dual-beam modulation. Single-beam modulation uses only one gun andbe enabled either for polishing a single sector subtending an angle of 60° (


Ion-Beam Modulation

ri-g time.

dou-ta-could ector

imen el 30°

osi-

fol-

.

sin-es.

nt n

gle

normal to the glue-line) or two opposing 60° sectors (double sector) with vaable rotation speed within the sector(s) of up to 6 rpm. Outside the polishinsector(s), the speed is fixed at 12 rpm to reduce total specimen-preparation

Dual-beam modulation

Dual-beam modulation activates both guns for increased milling rates and ble-sided milling. On particularly fragile specimens, it is preferable to simulneously work the top and bottom of the specimen to prevent stresses that break the specimen. This mode can operate with either single- or double-spolishing.

Home position

When loading a cross-sectional specimen, it is important to insert the specsuch that the cross-sectional interface (glue line) is parallel to the front pan(home position). This procedure ensures that the polishing sectors will be ±normal to the glue line during operation of the Beam Modulator. It is also important to note that the specimen will automatically rotate to this home ption before the piston will rise into the Airlock.

Ion-Beam Modulation panel

Indicators and toggle switch on the Ion-Beam Modulator panel function as lows:

• The Double/Off/Single toggle switch

This switch enables selection of single- or double-sector mode.

DOUBLE (up): the system is operating in the double-sector mode.

OFF (center): beam modulation is disabled and there is continues milling

SINGLE (down): the system is operating in the single-sector mode.

Note: In dual-beam modulation, two-gun operation can be converted to gle-gun operation by manually switching off one of the Gas-Valve switch

• The Angle Status LED

During milling, the LED will illuminate momentarily once per revolution whenever the specimen glue line is at home position (parallel to the fropanel). It will be illuminated continuously when the specimen is raised ithe Airlock for the specimen is in home position.

This LED will operate independent of the status of the three-position togswitch.


End-Point Detection

n(s)

h.

pe, nter- and red spec-

rials

ntal

to-o

ash.

• The Beam Status LED

This indicator shows the beam status, i.e., amber when the HV to the guis on and green when the HV is off.

This LED is independent of the status of the three-position toggle switc

3.10 End-Point Detection

The PIPS is equipped with a Reflection Illuminator, a stereo light microscoand a Transmission Illuminator. Employing the latter two, one can use the iference-fringes technique to monitor specimen thickness of semiconductorsinsulators to aid in end-point detection. With silicon, for example, each colofringe represents a thickness change of a few hundred Angstroms. When aimen ceases to produce new fringes, perforation is imminent.

3.10.1 Autoterminator

There is usually no warning prior to perforation in the case of opaque mateso the Autoterminator can be used to detect perforation. However, the HV Timer should be used during the early stages of thinning to prevent accideoverruns.

Figure 3-7 Autoterminator sensor top and side view.

Perforation detection

Light from the Transmission Illuminator enters a condensing lens in the Auterminator, through an optional optical filter, and is directed onto a sensor tproduce a digital readout. When the light intensity is high and the readout exceeds 99, the HV to the guns is switched off and the display will start to fl

0 0

Transmittedintensitydisplay

Sensitivitycontrol

Sensitivitycontrol

Aperture

Opticalfilter

Condenserlenses

RESET


End-Point Detection

ri-nsmit-.

e of

e the

me-ina-w

in ol n and le rside

vi-ake

Note: An optical filter is normally used when working with transparent mateals such as semiconductors and ceramics to reduce the amount of light trated. It should not be used with metal specimens or other opaque materials

Note: Contamination of the Viewing Port can be reduced by delaying the usthe Autoterminator until the last stages of the thinning process.

To remove the optical filter, unscrew the condenser lens mount and removfilter (see Figure 3-7).

Sensitivity

Operating at maximum sensitivity, the smallest hole the Autoterminator candetect in an opaque specimen is approximately 35 µm in diameter. This diater can be reduced by manually stopping the HV Timer before the Autotermtor display reaches 99 and visually checking the specimen to determine homuch more thinning is required.

The actual light level corresponding to a reading of 99 can be adjusted withcertain limits using the Sensitivity control on the Autoterminator. This contrenables the operator to select varying termination hole sizes in the specimealso to compensate for varying degrees of specimen transparency. The hoshould not be allowed to become too large because this may allow the undeof the specimen to become contaminated.

Note: Maximum sensitivity setting should be used for metals. Lower sensitities may be preferred for semiconductors and ceramics. For best results, msure the specimen Viewing Port is clean before using the Autoterminator.

Figure 3-8 The Autoterminator.

Microscope rotated 90°from work position

Autoterminator

Sensitivitycontrol

Autoterminatorsocket

Pumpingmanifold

COMPACT CC GAUGE


Chemically-Assisted Ion-Beam Etching

t r-d

y 120 al d -

ate

set

trip

cu-g

nal III–

The Autoterminator is mounted on the Airlock cover and plugs into a sockelocated to the right of the Pumping Manifold (see). The Autoterminator incoporates a special shutter-control feature to minimize the amount of sputterematerial accumulating on the Viewing Port. When the Autoterminator is in place and the guns are operating, the Shutter will open for about 1 sec eversec for sampling of the transmitted light intensity. This corresponds to a totsampling time of 30 sec/h of gun operation. This sampling rate is maintaineuntil the Autoterminator shows 10 on the digital display whereupon the sampling rate is automatically increased to about 1 sec every 16 sec with this rmaintained until termination.

3.10.2 Installation and Checkout of the Autoterminator

To install and check out the Autoterminator

1. The PIPS must be powered on, under vacuum, and with a specimen post (but no specimen) in place.

2. Set up the Autoterminator.

Place the Autoterminator onto the Airlock cover. Plug its cable into the socket by the Pumping Manifold.

3. Turn down the Sensitivity control to its minimum (full CCW ) position.

4. Reset the Autoterminator.

While holding down the Transmission Illuminator switch, depress the Rebutton on the Autoterminator. The display will read approximately 90.

5. Increase the Sensitivity by one graduation and again reset the Autoter-minator.

The display will begin flashing since the reading will have exceeded thepoint (100).

6. Checkout is complete.

3.11 Chemically-Assisted Ion-Beam Etching

The chemically-assisted ion-beam etching (CAIBE™) option permits a molelar beam of a reactive chemical to be directed at a specimen while it is beinsimultaneously milled with a conventional inert-gas ion beam. The CAIBE option is used for preparing specimens that are difficult to mill by conventioinert-gas milling techniques, e.g., materials such as indium containing TypeV compound semiconductors and metals like tungsten.



ci- stan-

cap-

u-ddi-

mber s

red lter

pera-

The CAIBE system consists of a jet assembly in close proximity to the spemen. It is mounted in the central port of the PIPS chamber and replaces thedard shutter guide. The system, entirely of corrosion-resistant materials, consists of only three components: the gas-flow control valve, the chemicalsule, and the jet body.

Chemical attack of the MDP during CAIBE operation is prevented by continous purging of the pump bearings with argon gas. Gas purging places an ational gas load on the pumping system and this raises the normal foreline pressure to about 8.0 Torr. However, this has no effect on the ultimate chapressure (mid 10-6 Torr). The gas purging is automatic as long as the PIPS iconnected to the argon supply.

Figure 3-9 CAIBE assembly.

3.11.1 Loading Chemical Capsule

If the CAIBE option is ordered with the PIPS, the activated-carbon filter is already installed and charged with activated carbon. If the CAIBE was ordeas a retrofit accessory, the instructions for installing the activated-carbon fiare supplied with the accessory and also detailed in Section 5.14.

The chemical capsule of the CAIBE must be charged by the user prior to otion. Please note the PIPS will operate even when the chemical capsule isempty.

Note: Viton O-rings lubricated with Fomblin vacuum grease are used in theCAIBE assembly.

Warning: Loading or unloading the capsule with chemical sources must bedone in a well-ventilated hood or glove box.

Gas-flowcontrolvalve Jet

body

Chemicaljet

Specimenpost

Chemicalcapsule



Vent

tan-

cap-

and

To load the chemical capsule

1. Turn off the gun Gas-Valve switches and vent the PIPS.

Turn off the power to the PIPS. Wait at least 10 min to allow the MDP tocome to a complete stop. Then vent the Work Chamber by opening the valve.

2. Grasp the CAIBE jet assembly and pull it straight out of the chamber.

It is mounted in the central port of the PIPS chamber and replaces the sdard shutter guide.

3. Vent the chemical capsule assembly

Turn the Gas-Flow control valve of the CAIBE assembly fully CCW.

4. Slowly rotate the capsule while carefully pulling it from the jet body.

The capsule is held in by an O-ring and is not threaded to the body.

5. Add the chemical source to the capsule.

Remove the capsule screen and add the solid chemical source until thesule is half full.

If iodine is used as the chemical source, the weight should be about 10 gthis amount would be sufficient for about 50 hr of continuous operation.

Figure 3-10 Chemical capsule assembly.

Chemical retainingscreen

Gas-flowcontrol valve

Chemicalcapsule

Lubricate with Fomblinvacuum grease

Remove anydust particlesfrom thesesurfaces



e

nd

for r to

res-

the

6. Replace the screen and clean off any particles stuck to the outside of thcapsule.

7. Insert the capsule back into the jet body.

Apply a very small amount of vacuum grease (Fomblin™) to the O-ring ainsert the capsule back into the jet body.

Close the Gas-Flow control (CW).

8. Insert the jet assembly into the chamber.

9. Start-up the PIPS.

10. Once the chamber pressure is roughly 10–4 Torr, open the CAIBE Gas-Flow Control valve slowly (CCW).

Allow the chamber vacuum to recover. The valve should be opened fullya few minutes to obtain a steady-state flow, which must be obtained priopolishing the specimen.

11. Close the CAIBE Gas-Flow Control valve (fully CW) and wait for pres-sure to stabilize at 10-6 Torr before operating the CAIBE.

3.11.2 Operation of the CAIBE

Before the CAIBE option can be used to polish a specimen, the chamber psure must be adjusted for that particular reactive species.

To optimize the Chamber

1. Before loading the specimen, turn off the Gas-Valve switches to both guns.

Allow the Work Chamber pressure to stabilize in the mid 10-6 Torr.

2. Load the specimen, but do not lower it into the Work Chamber.

3. Slowly open the CAIBE Gas-Flow Control valve to permit evacuation of the chemical capsule.

The valve must be opened slowly to allow both the diaphragm pump andMDP to recover.

4. Continue opening the valve until fully open and a steady-state reading is established.


Auto Shutdown, Reset, and Manual Shutdown Procedures

error, e ti-

rom

ed

ting

left um

5. Readjust the valve to obtain the optimum steady-state pressure particu-lar for your specimen.

One needs to ascertain the optimum steady-state pressure by trial and verified by periodic viewing of the prepared specimen in the TEM. If thepressure is too high, the specimen will become etched and if too low, thspecimen will be covered with milling artifacts. If you do not know the opmum pressure for your specimen, a good starting point is 3 x 10-5 Torr, par-ticular for InP.

To etch the sample

1. Lower the specimen into the Work Chamber.

2. Turn on the gun Gas-Valve switches and the Timer and begin polish-ing.

Polish the specimen for about 10 min on the dimpled side.

3. Turn off the gun Gas-Valve switches and the Timer.

Do not turn off the CAIBE gas flow.

4. Raise the specimen and invert it.

The specimen should be inverted to complete polishing at a low angle fthe non-dimpled side.

5. Terminate at perforation.

When specimen perforation occurs, the process Timer should be switchoff and immediately the CAIBE Gas-Flow Control valve closed.

The specimen can then be removed.

Caution: To minimize corrosion and pump maintenance, always turn off theCAIBE jet when not in use.

Note: Indium islands can be cleaned from a milled TEM specimen by repeathe CAIBE™ operation in the PIPS for just a few minutes.

3.12 Auto Shutdown, Reset, and Manual Shutdown Procedures

Main power to the PIPS (power consumption of less than 100 W) should beon at all times to provide for more efficient trouble-free operation. The vacuwill be continuously maintained resulting in a cleaner system with shorter pumpdowns and minimum purging requirements of the PIGs.


Digital Process Timer

o-t

s ed .

ut to for

t the

ll be , ress

the hen

ED cle.

table

Auto shutdown

If shutdown is desired when not in use, an auto shut-down feature is incorprated into the PIPS that shuts off all incoming electrical power after a presetime-out interval (typically 80 min) has elapsed. The shut-down Timer startand resets to the preset interval the moment the HV power supply is switchoff. The Timer is put on hold whenever the HV power supply is switched onAn audible alarm will sound for approximately 90 sec when the PIPS is aboshutdown. The PIPS will quickly regain its working vacuum when restartedthe Work Chamber is not vented when the power is off.

The Inhibit position will disable the auto shutdown feature and each PIPS is shipped with the interval set to Inhibit.

Reset and restart

You may reset the countdown cycle. While the audible alarm is sounding, depress the Power Reset switch on the right side of the front panel to resecountdown cycle and prevent the PIPS from shutting down.

Once the PIPS has shut down automatically, the main Power switch will stiin the On position as indicated by the green illuminator. To restart the PIPSdepress the lower portion of the Power switch to first turn it off and then depthe upper portion of the switch to turn it back on again.

Manual shutdown

To manually shut down the PIPS, turn off the power to the PIPS. If ventingsystem, wait at least 10 min to allow the MDP to come to a complete stop. Tslowly open the Work Chamber Vent valve.

3.13 Digital Process Timer

The process Timer is a countdown interval timer with a digital display, an Lto indicate status, and an audible alarm to indicate the end of the timing cy

3.13.1 Setting time base

Timing intervals from 0.1 sec to 23 hr 59 min can be set using 4 user-selecprogrammable time bases.



nds.

.

.

The instrument is shipped preset to time base Code 1: 59:59 Minutes:SecoYou can reset it to another time base.

Figure 3-11 Digital Process Timer.

To reset a time base

1. Turn off the Main power switch.

2. Depress the Down Arrow button while turning on the Main power switch.

Release the Down Arrow button once the display comes on.

3. Use the Up Arrow button to select the desired code.

A number from 0–3 will appear corresponding to the Codes in Table 3-1Use the Up Arrow button to select the desired code.

4. Turn off the Main power switch and wait 2 sec.

5. Turn on the Main power switch.

The Timer will now remain in the new time base unless reprogrammed.

Table 3-1 Time bases.

Code Time Base

0 000.1 - 999.9 Seconds

1 00:01 - 59:59 Minutes:Seconds

2 0001 - 9999 Seconds

3 00:01 - 23:59 Hours:Minutes

HIGH VOLTAGE TIMER

10:20

STOP

START

Time remainingdisplay

Start/Stopbutton

Up and DownArrow buttons



and l for and

cted.

.

val. e

.

e

wn

tim-

in

3.13.2 Timer Operation

Three buttons control the operation of the timer: the Up and Down buttons,the Start/Stop button. The first two allow you to set the desired time intervaetching or sputtering. The last controls several functions related to startingstopping the Timer.

Setting Time Intervals

You need to set the desired time interval once the time base has been sele

To set a time interval

• Use the Up and Down Arrow buttons to set the interval.

The longer each button is depressed, the faster the display will change

Using the Start/Stop Button

The Start/Stop button functions differently depending on whether or not theTimer is active.

To start the Timer when the Timer is not active

• Press the Start/Stop button.

This will cause the Timer to begin count down of the selected time interThe digital display will count the time down until it reaches 0 at which timthe audible alarm will sound and the initial preset time will again appear

To stop the Timer when the Timer is active


This will stop the Timer and turn off the flashing LED. The remaining timwill be displayed.

Should it be necessary to change the preset time, depress the Up or DoArrow button to set the new time.

Pressing the Start/Stop button again will activate the Timer to continue ing from that point at which it was stopped.

Resetting the Timer

You can reset the Timer to a preset interval or when it has been interruptedthe event of a power failure.


Liquid-Nitrogen Trap

red

por,

ot-nd

To reset the Timer when the Timer is not active


Pressing the Start/Stop button for more than 2 sec when the Timer is not active will reset the Timer to the preset time interval.

To reset the Timer after a power failure

• Power up the unit.

The Timer will remember the last time interval selected and, when poweup, will reset the time to the last 5 sec in that timing cycle.

3.14 Liquid-Nitrogen Trap

The liquid-nitrogen trap option is used to reduce contaminants and water vawhich is usually the major contaminant of the vacuum system.

To load the dewar

1. Turn off power to the PIPS.

Wait at least 10 min to allow the MDP to come to a complete stop. Thenvent the Work Chamber by opening the Vent valve.

2. Remove the Vent-Valve assembly completely from the Pumping Mani-fold.

Insert the dewar into the Manifold being careful not to pinch the O-ring.

3. Close the Vent valve on the dewar.

4. Restart the PIPS.

Wait till chamber pressure is down to around 10-4 Torr.

5. Fill the dewar.

Note: Do not overfill the dewar; the starting level should be just below the btom of the dewar neck. After about 10 min, boiling in the dewar will cease amore liquid nitrogen may be added. The dewar will last about 5 hr betweenrefills.


Liquid-Nitrogen Trap


PIPS User’s Guide

4 Specimen Preparation

-t rela-

e

ns-

acts ork.

s chani-

d, the tors, ical nd pre-

the

The importance of pre-thinning prior to ion polishing cannot be overemphasized. Pre-thinning is usually done by mechanical grinding and polishing buchemical polishing can sometimes be used to advantage. Ion polishing is atively slow process and pre-thinning can greatly reduce the time required tomake a TEM specimen. There is, however, a tendency to develop a surfacroughness during ion polishing and the shorter the ion-polishing time, the smoother the TEM specimen.

It is now possible to thin specimens mechanically all the way to electron traparency so that ion-polishing can be avoided altogether. Unfortunately, mechanically-thinned specimens are difficult to clean and usually show artifdue to mechanical damage that can make them unsuitable for most TEM wFor this reason, our recommended procedure is to mechanically pre-thin amuch as possible but not to less than about four times the depth of the mecally damaged layer.

The damage depth depends on many factors, i.e., the material being thinnepolishing compound used, and the polishing force applied. For semiconducceramics, and minerals, it appears that TEM specimens free from mechandamage can be obtained if mechanical pre-thinning is taken down to about5 µm. For metals, the pre-thinning thickness is generally greater than this ausually the optimum value must be determined on a trial and error basis bythinning to a smaller and smaller thickness until artifacts start to appear in TEM specimens.

4.1 Mechanical Pre-Thinning

Specimens are mechanically pre-thinned in many different ways.

4-1

Mechanical Pre-Thinning

thin t be . pol-

peci-ple ing.

eful entral (D), rox-

mple the .2

or the e m

Parallel grinding

Simple parallel grinding technique has the advantage that it produces largeareas but the resulting specimens are so weak mechanically that they musglued to a support ring or grid to avoid fracture during subsequent handlingSuch specimens then become contaminated by the support ring during ionishing.

Dimple grinding

The contamination problem can be avoided by mechanically pre-thinning smen discs using a dimple grinder. In this way, the thick rim around the dimprovides the mechanical strength required for subsequent specimen handl

Dimple diameter and depth

Since the beam angle for ion polishing may be very small, one must be carthat the rim around a dimpled specimen does not cast a shadow over the cregion. The relationship between the diameter of the dimple grinder wheel the diameter of the dimple (2r), and the dimple depth (d) is given by the appimation,

d = r2/D .

Typically, the width of the rim around a 3-mm diameter specimen is 0.4 mmand hence the dimple diameter, 2r, is 2.2 mm. In this case, the maximum didepth without forming a shadow at the center of the specimen under an ionbeam at 4° to the horizontal is 1.1 x tan 4° = 77 µm. The table below showsdimple depth for various diameters of polishing wheel (dimple diameter is 2mm).

The table indicates that a 10-mm diameter polishing wheel is not suitable fmaking PIPS specimens since the dimple depth is greater than 77 µm andcenter of the dimple will be shadowed. The 15-mm wheel would seem to bborderline but can produce good results in practice since the edge of the rigets milled away very quickly during the initial stages of polishing.

Table 4-1 Polishing wheel diameter vs. dimple depth.

Polishing wheel diameter(mm)

Dimple depth(µm)

10 121

15 80

20 60

25 48


Mechanical Pre-Thinning

c .2-mes

spec-pro-

ve a port

d by e

l-n a ina d of ., t

Optimum initial specimen disc thickness

Table 4-2 uses the above data to estimate the optimum initial specimen disthickness for specimens dimpled from one side. As a rule-of-thumb, for a 2mm dimple diameter, the initial disc thickness equals dimple depth plus 4 tithe thickness of the damaged layer.

Clearly, as the diameter of the wheel increases, the initial thickness of the imen disc should decrease. Large diameter wheels have the advantage of ducing large thin areas of specimen, but they also produce more fragile specimens. A good compromise is to use flat dimple grinder wheels that gilarger flat central area without reducing the strength of the surrounding suprim. Of course, if a flat wheel is used, the initial dimple depth should not begreater than approximately 77 µm; otherwise shadowing effects will occur.

Table 4-2 Optimum initial specimen disc thickness.

Specimen disc geometry

Figure 4-1 shows the recommended geometry of PIPS specimens producedimpling. Note that specimens are normally dimpled from one side only. Thflat side of the PIPS specimen is normally prepared using a disc grinder folowed by rough polishing with a dimple grinder using 3-µm diamond paste ofelt wheel and final polishing with 0.25-µm diamond paste or 0.05-µm alumsuspension. It has been found that cubic boron nitride (CBN) pastes insteadiamond paste can be successfully used for dimpling ductile materials, e.gmetals and alloys. This is due primarily to the fact that CBN particles do nobecome easily embedded in the materials being polished.

Polishing wheeldiameter

(mm)

Damage layerthickness

(µm)

Thickness at base of dimple

(µm)

Optimum initial disc thickness

(µm)

15 1 4 84

15 2 8 88

15 3 12 92

15 4 16 96

20 1 4 64

20 2 8 68

20 3 12 72

20 4 16 76

25 1 4 52

25 2 8 56

25 3 12 60

25 4 16 66


Chemical Pre-Thinning

ge

ion

tter e the pre-uced g is ntam-

it r in

red

Figure 4-1 Specimen disc geometry.

The PIPS does not use any specimen clamps and hence it will accept a larvariety of specimen shapes. Rectangular TEM tensile specimens can be mounted directly on a modified specimen post and dimpled in place prior topolishing.

4.2 Chemical Pre-Thinning

Pre-thinning of specimen discs is sometimes carried out by electrolytic or chemical jet polishing. Subsequent ion polishing is performed in order to becontrol the final thickness of the electron-transparent specimen or to reduceffects of differential chemical attack in multiphase specimens. Chemically thinned specimens have the advantage of being free from mechanically indartifacts and can be made extremely thin prior to ion polishing. Ion polishinalso useful for cleaning up electropolished specimens that have become coinated during storage or have areas that are a little too thick for satisfactoryTEM imaging or analysis.

4.3 Specimen Mounting

In the PIPS, specimens can simply rest on the specimen post or affixed to using low melting point wax. The specimen post used in the PIPS is similadesign to the single-sided specimen post used for low-angle polishing or CAIBE thinning in the Gatan DuoMill™. The specimen post plugs into the specimen-mount assembly located in the Airlock chamber and can be lowepneumatically to the working position for ion polishing.

4° Beamangle

<80 µmDimple depth 2.2-mm

diameter

3-mmdiameter

4° Beamangle

<60 µmDimple depth 2.2-mm

diameter

3-mmdiameter

20-mm diameterDimple wheel

15-mm diameterDimple wheel


Specimen Mounting

P

ax

oth e

Do n

ra-

.

4.3.1 Wax Mounting of Specimens

To mount specimens using wax

1. Prepare mounting wax on specimen post.

In a clean Petri dish, dissolve a small amount of mounting win an equal volume of acetone.

Figure 4-2 Mounting specimen.

Place the specimen post in the carrier provided and use a topick to place a thin layer of the diluted wax around the outsidedge of the post.

This operation is best performed under a stereo microscope.not allow any wax to flow into the central hole of the specimepost.

Evaporate the acetone in air or use a hot plate to form an ultthin layer of dry wax.

2. Position a specimen (dimpled side up) on the specimen post

Carefully center the specimen over the dry wax (Figure 4-3, Step 2).

Duopost

Wax/acetonemix

1 partwax

Petridish

1 partacetone

Carrier

Step 1


Specimen Mounting

the

sfer--

r 30


3. Bond the specimen to the specimen post.

Transfer the complete assembly to a hot plate to melt the wax and bondspecimen to the specimen post (see Figure 4-3, Step 3).

The final position of the specimen on the post can be set by quickly tranring the specimen post in the carrier from the hot plate to a stereo microscope while the wax is melted.

Place the complete assembly in acetone vapor for 10 sec and air dry fomin to bond the specimen.


Step 2

Specimen

Hotplate

Step 3

Step 4


Specimen Mounting

ion of ion

en

h

m to

s up

n are

nd its ns

ture uid-nce of

4. Transfer the specimen post to the PIPS.

Inspect the specimen under the microscope to make sure the center regthe specimen is clean; then transfer the specimen post to the PIPS for polishing. See Figure 4-4, Step 4.

4.3.2 Specimen Removal

When ion polishing is complete, or after the first (dimpled) side of the specimhas been polished, the specimen must be removed from the post.

To remove the specimen

1. The post with the specimen is transferred to a hot plate.

This will melt the wax to loosen the specimen.

2. Dissolve off the wax.

Place the post with specimen on a piece of lint-free tissue in a Petri discontaining clean acetone.

After a few minutes, the specimen will fall off the post onto the tissue.

3. Transfer to a second clean acetone bath.

Pick up the wet tissue with the specimen and post on it and transfer thea second dish of clean acetone.

4. Dry off excess acetone.

Transfer the wet tissue with specimen onto a clean, dry tissue that soakany excess acetone.

4.3.3 Molybdenum Specimen Post

For specimens mounted without wax, Gatan has the molybdenum specimepost with a raised rim within which the specimen is placed. However there heat transfer considerations with this post.

Heat transfer

It should be understood that when a specimen is under vacuum and simply“rests” on a support post, the rate of heat transfer between the specimen asurroundings is minimal. At high thinning rates, the ion beams from both gucan direct as much as 300 mW of power to the specimen and the temperarise in the specimen can be considerable. Cooling the specimen post to liqnitrogen temperatures has very little effect on the specimen temperature siheat flow is dominated by the large thermal resistance at the minute pointscontact between the specimen and its support.


Specimen Mounting

cally d ause sk of

rably. cally nd

ss am-

ax. en in plug d is he

-nter-post s par-

3.9).

iven

In order to improve heat flow, a specimen must either be clamped mechanito a support platform (as in the Gatan DuoMill) or attached to a single-sidepost using a thin layer of mounting wax. The latter method is preferred becthe heat-transfer rate is much greater due to increased contact area, low rispecimen damage, and lack of shadowing of the beam at low angles.

4.3.4 DuoPosts

The ion beams from the guns can increase specimen temperature consideIn order to improve heat flow, a specimen must either be clamped mechanior affixed using low melting point wax. The two new DuoPosts, glue type aclamp type, meet these criteria.

The specimens are either clamped in a 50-µm recess or affixed in the recewith a low melting point wax that provides the medium for transferring heatfrom the specimen to the support arms to reduce ion-beam induced heat dage.

Figure 4-5 DuoPosts, glue type and clamp type.

The glue-type DuoPost is used when the specimen can be secured with wThe clamp-type DuoPost employs spring loaded arms to secure the specimthe recess and is used if securing with wax is undesirable. Both DuoPosts into the specimen-mount assembly located in the top of the Whisperlok anlowered pneumatically to the working position for milling. Both posts allow tuse of the transmission illuminator and the Autoterminator.

An important aspect of the DuoPost is its use in conjunction with the BeamModulation feature of the PIPS. When mounting cross-sections, the main iface of the specimen should be aligned parallel to the support arms of the and the post then inserted into the specimen-mount assembly with the armallel to the front panel. This procedure ensures the polishing sectors will be± 30° normal to the interface when using the Beam Modulator (see Section

To mount your specimen on the glue-type DuoPost, follow the procedure gin Section 4.3.1. See Section 4.3.2 for removal of specimen.

Specimen Specimen

Gluetype

Clamptype


Specimen Mounting

st ed

cal icro-

ween

the

Clamp-type DuoPost

An optional Loading Fixture is available for use with the clamp-type DuoPoto facilitate specimen loading and unloading. Follow the procedure describhere for use with this Loading Fixture.

Note: Specimen thickness must be greater than 50 µm for proper mechaniclamping with this post. This procedure is best performed under a stereo mscope.

Figure 4-6 Clamp-type post and Loading Fixture.

To mount a specimen on a clamp-type DuoPost

1. Place the clamp-type DuoPost into the cutout for the post in the Load-ing Fixture.

2. Open up the gap in the clamp.

Rotate one of the knobs on the side of the fixture to open up the gap betthe upper and lower arms of the clamp of the post.

3. Place the specimen into the recess of the sliding tray.

4. Slide the tray forward.

This will locate the specimen in the center of the clamp. Carefully retracttray from between the arms.

Specimen

Knob

Slidingtray

Fixture


Cross Sections

ween ill

n be zers

ng ci-ill-ss-

ent long n-

e of

lass

Disc

r

5. Rotate the knob to close the gap and firmly clamp the specimen.

6. Inspect the specimen under the stereo microscope.

Ensure the center is clean and free of any debris.

To remove specimen from a clamp-type DuoPost

1. Transfer the specimen to the loading fixture and slide the empty tray beneath the specimen.

2. Open the gap in the clamp.

Rotate one of the knobs on the side of the fixture to open up the gap betthe upper and lower arms of the clamp of the post. This same motion wplace the specimen onto the tray.

3. Retract the tray and carefully lift the specimen from the tray.

If the Loading Fixture is not available, the regular specimen post carrier caused to support the post. Depress the center of the post with a pair of tweewhile gently removing the specimen.

4.4 Cross Sections

Ion-milled cross-sectioned TEM specimens are used extensively for studyithe microstructure of multilayered materials. Usually, the layers in such spemens have differing mass thicknesses requiring different milling rates. By ming at low angles, the PIPS can minimizes differential thinning effects of crosectional TEM specimens. However, milling at low angles alone is insufficito prevent the preferential thinning that occurs when the ion beams pass athe cross-section interface. This preferential thinning is reduced by using IoBeam Modulation (see Section 3.9).

The initial preparation of cross-sectional discs is greatly facilitated by the usa special kit developed by Gatan.

To prepare a cross-sectional specimen

1. Cut rectangular wafers.

The presliced specimen is glued face down with mounting wax onto a gslide.

The glass slide is secured to the specimen table of the Gatan UltrasonicCutter with mounting wax.

The disc cutter is fitted with a 4 x 5-mm cutting tool to cut out rectangulawafers. See Figure 4-7, Step 1.


Cross Sections

d as e of f the

one ure for used

oxy.

fol-

).

Figure 4-7 Cross-section specimen preparation.

2. Make the specimen stack.

A specimen stack is made consisting of six 4 x 5-mm wafers and stackeillustrated in Figure 4-7, Step 2. The wafers having the surface or interfacinterest should be located face to face in positions 3 and 4 in the middle ostack.

In many cases, the original specimen slice is only large enough to obtainor two wafers so the remaining four or five wafers are dummy ones of psilicon. One great advantage of using silicon for the dummy wafers (evencross sectioning other materials) is that their interference fringes can be to accurately gauge the specimen thickness at the 2–5 µm level during dimpling.

The dummy and specimen wafers are coated with a thin layer of G-1 ep

G-1 has characteristics that are similar to M-Bond 610 epoxy but offers thelowing advantages:

• Fast curing time (5–10 min at 130 °C).

• Ease of filling both thick and thin gaps between wafers.

• Long shelf life (1 yr without refrigeration).

• High temperature stability (heated in a TEM hot stage up to 1000 °C

Ultrasonicdisc cutterX–Y table

Rectangular cutting tool4 x 5 mm

Step 1Cut rectangular wafer from specimenslice using ultrasonic disc cutter.

Specimenslice

Slurryring

Glassslide

Teflonjaw

Specimen

Coat waferswith G1 epoxy

Dummywafers

Dummywafers

12

34

56

Step 2Coat wafers with a thin layer ofepoxy and load stack into mold.


Cross Sections

stack trong , the

2.3-

er tube ling, e

to a

oxi-ding

3. Pressure bond the specimen stack.

A spring-loaded vise is used to bond the specimen stack together and theis cured under pressure for 10 min at 130 °C on a hot plate to obtain a sbond with minimum glue thickness. When the curing process is completeassembly is cooled to room temperature.


4. Cut the cylindrical specimen stack.

The stack is glued into a slotted specimen mount with mounting wax. A mm diameter cutting tool is used to cut a cylinder from the middle of thestack.

5. Strengthen the cylindrical specimen stack.

The 2.3-mm cylinder is now glued with G-1 epoxy inside a 3-mm diametmetal reinforcing tube and cured for 10 min on a hot plate at 130 °C. The holds the fragile cross-sectioned structure together during grinding, dimpion milling (especially low-angle milling), and subsequent clamping in thTEM specimen holder. See Figure 4-9, Step 5.

6. Slice the specimen discs.

The metal reinforcing tube containing the specimen cylinders is sliced inseries of 250–400 µm thick discs with a thin blade diamond saw. See Figure 4-9, Step 6.

The sliced disc is then ground flat from both sides to a thickness of apprmately 80 µm using the Gatan Precision Disc Grinder and dimpled accorto the procedure described in Section 4.1.

Springclamp

Teflonjaw

Specimenstack

Specimenvise

Step 3Cure on hot plate for 10 minutes.

Cutting tool2.3-mm diameter

Specimenstack

Dummywafers

Centeringring

Step 4Cut cylinder from specimen stackusing ultrasonic disc cutter.


Cross Sections

at he

rials men

ed to cts.


Dimpling is generally performed on only one side of the specimen and thside of the disc is mechanically polished using felt polishing wheels on tdimple grinder as a micro-polishing device.

4.4.1 Milling Rates

Shown below are some typical milling rates at 4° obtained for various mateusing two ion guns operating at 5.0 keV, a gun current of 25 µA, and specirotation off.

It should be noted that in the PIPS, the PIGs have been deliberately detunavoid excessive sputtering that could produce undesirable specimen artifa

Table 4-3 Typical milling rates.

MaterialMilling Rate

(µm/hr/gun pair)

Copper 22

Silicon 24

Silicon carbide 16

Stainless steel 316 14

Tantalum 8

Teflonmold

Specimencylinder

Coat tube withG1 epoxy

Metaltube

Step 5Remove specimen cylinder from cutter andglue inside metal tube. Cure on hot plate.

Metaltube

Maininterface

Step 6Remove glued assembly from mold.Cut reinforced specimen discs.


Cross Sections


PIPS User’s Guide

5 Routine Maintenanceand Servicing

rou-

am-

t

The maintenance operations listed in Table 5-1 should be carried out on a tine basis.

Table 5-1 Maintenance operations.

Caution: Do not use acetone as a cleaning agent. It will cause irreparable dage to instrument parts.

5.1 Cleaning the Viewing Port

The Viewing Port should be cleaned on a weekly basis with regular use.

Note: This operation can be performed without requiring the PIPS to be shudown and vented.

Section Operation Frequency Symptom

5.1 Clean Viewing Port. Weekly Specimen viewing becomes difficult.

5.2 Clean Airlock vacuum seals. Monthly Piston will not fully rise into Airlock.

5.3 Clean Specimen-Mount assembly. Monthly Poor vacuum during specimen rotation.

5.4 Clean Cold-Cathode gauge tube. As required Erratic reading or no reading.

5.5 Clean Shutter. Every 3 months Sputtered material falling onto specimen.

5.6.1 Dry clean the PIGs. As required Gun shorted.

5.6.2 Wet clean the PIGs. Once a year Excessive sputtered material.

5.7 MDP maintenance. Once a year Required servicing.

5.8 Diaphragm Pump maintenance. Every 4000 hr Backing pressure above 12 Torr.

5.9 Argon leak detection As required Excessive argon usage.

5.10 Clean Work Chamber. Once a year Excessive flaking of sputtered material.

5-1

Cleaning the Viewing Port

eat

To clean the Viewing Port

1. Raise the sample and vent the Airlock chamber.

2. Lift off the Viewing Port capsule.

Figure 5-1 Viewing port and O-rings.

3. Check the capsule O-rings.

Clean them. If necessary, replace.

4. Clean the window.

Use a nonabrasive cleaner or a 2–4 µm diamond polishing compound. Replace the window if deposits are too difficult to remove.

5. Replace the window into the capsule O-rings.

6. Replace the Viewing Port capsule.

7. Evacuate Airlock chamber.

Depress the Vac button while pushing down on the window to properly sit.

Topcover

#044

Removaltool

#042

ViewingportWindow

#022#019

#012#044


Cleaning the Airlock Vacuum Seals

lar

ised ng.

y

into and

o

e

.

of

5.2 Cleaning the Airlock Vacuum Seals

The Airlock vacuum seals should be cleaned on a monthly basis with reguuse.

Note: This procedure is necessary when the piston cannot be completely rato its upper position due to buildup of sputtered material on the Airlock O-ri

To clean the Airlock seals

1. Shut down the power to the PIPS.


2. Lift off the Viewing Port.

Press the Airlock piston down into the Work Chamber if it hasn’t alreadlowered itself.

3. Remove top cover plate.

Using the pin end of the Specimen Mount Removal Tool, insert the pin one of the holes in the top cover plate, push gently and tilt the plate up out for removal (see Figure 5-1).

4. Remove the large O-ring (#044) from the top cover.

5. Remove the smaller O-ring (#012) from its groove in the cover.

Use a wooden toothpick to remove the O-ring. Never use a metal tool tremove an O-ring.

6. Clean the underside of the plate and the O-ring grooves with a grease solvent.

7. Clean and lubricate the O-rings on the chassis (#044, #042) with siliconvacuum grease and replace.

8. Replace the top cover plate, the Viewing Port, and close the Vent valve

9. Turn on the power and pump down the system.

Pump down to keep the system free of moisture and minimize oxidationsputtered materials around the guns.


Cleaning Specimen-Mount Assembly

e e a eci-ed embly tely

e

unt

5.3 Cleaning Specimen-Mount Assembly

Milling the bottom surface of specimens will sputter material directly onto thlower window of the specimen-mount assembly. This deposit will reduce thlight intensity transmitted by the Transmission Illuminator and may becomeproblem particularly when using the Autoterminator. For this reason, the spmen-mount and window assemblies can be removed to provide unobstructaccess for cleaning purposes. The O-ring seal on the specimen-mount assis a rotating seal that requires frequent cleaning and lubrication (approximaonce a month).

Note: Removal of the specimen mount can be performed without venting thPIPS.

Caution: Do not push down on the piston when removing the specimen moas this will immediately vent the main Work Chamber.

To clean the lower window of the specimen-mount assembly

1. Raise the piston into the Airlock chamber and vent Chamber.

2. Remove the Viewing Port and the specimen post, if any.

Figure 5-2 Specimen mount removal.

Removaltool

Specimen mountassembly

Manually restraingear here


Cleaning Specimen-Mount Assembly

P

pec-

w, lly ent

t of the

3. Remove the specimen mount.

Use the hex end of the Specimen Mount Removal Tool to remove the specimen mount. Rotate CCW to unscrew the simen mount from the piston (see Figure 5-2).

Note: If the specimen mount only rotates but does not unscreremove the left side cover from the PIPS cabinet and manuarestrain the large gear at the bottom of the Whisperlok to previt from rotating while the specimen mount is being unscrewed(see Figure 5-2).

4. Remove the specimen-mount assembly from the PIPS.

5. Clean and lubricate the specimen-mount assembly O-ring.

Figure 5-3 Specimen-mount and window assemblies.

6. Separate the window assembly from the specimen mount.

Gently pull the two pieces apart.

7. Clean top and bottom surfaces of the window assembly.

The top window surface may be cleaned with a small amoun2–4 µm diamond paste on a cotton swab. The under side ofwindow should only require cleaning with a tissue.

8. Clean and lubricate the O-ring in the window assembly.

Also clean its mating surface down inside the piston rod.

9. Insert the window assembly back onto the specimen mount.

Top windowsurface

Clean andlightly coatwith vacuumgrease

#005

Windowassembly

Undersideof window

Specimenrotationshaft

Specimenmount assembly

#008


Cleaning the Cold-Cathode Gauge Tube

men

s- If t

scale.

),

10. Screw the specimen-mount assembly back into the piston.

Hold the large gear at the bottom of the Whisperlok to prevent the specimount from rotating while it is being screwed back in (CW rotation).

11. Replace the side cover and pump down the Airlock chamber.

5.4 Cleaning the Cold-Cathode Gauge Tube

Contamination of the measuring chamber within the tube will affect the presure reading and generally produce an indication that the pressure is poor.contamination becomes severe, instability may occur resulting in shorts thamay cause the needle on the Penning meter to jump to the right end of the If this occurs, the gauge tube must be dismantled and cleaned.

Tools required: Hex wrenches (1.5 mm & 3.0 mm), open-end wrench (7.0 mmand locking-ring or snap-ring pliers.

To disassemble the gauge tube



2. Unplug the connector from the gauge tube.

Unscrew the retaining screw at the center of the connector.

Figure 5-4 Cold-cathode gauge tube.

COMPACT CC GAUGE

Magnetassembly

Poleinsert

Lockingring

Setscrew

Clamp

Hexscrew

Electronicmodule

20 mm

Socket-headscrews

Supportring

Igniter

Retainer

O-ring

Anode



mod-

the

be.

ue

t and

itor r

e

3. Remove the gauge tube.

Pull it straight out from the Manifold.

4. Remove the electronic module.

Use the 1.5-mm hex wrench to loosen the set screw on the side of the ule and slide it from the gauge tube (see Figure 5-4).

5. Remove the retainer.

Use the 3.0-mm hex wrench to remove the two socket-head screws at back of the tube and remove the retainer.

6. Carefully remove the anode, support ring, and Viton O-ring.

These parts can be individually cleaned or replaced if necessary.

Use compressed air to blow out loose particles from within the gauge tu

If the inside of the gauge tube must be cleaned with an abrasive, continwith Steps 7 and 8.

7. Separate the anode assembly from the magnet.

Use the 7.0-mm wrench to remove the hex-head screw from the magneslide off the anode assembly from the magnet.

8. Remove the locking ring and the pole insert from the front of the mea-suring chamber of the anode assembly.

To clean gauge tube parts

1. Clean the inside of the tube and the front pole insert. See Figure 5-4.

Use a “Scotchbrite” pad or polishing cloth (500 grain).

2. Rinse both parts with methanol.

Dry with compressed air or nitrogen gas.

3. Carefully clean the anode and ignitor with a polishing cloth.

The ignitor can be moved on the anode by sliding it up or down. The ignis fragile and can easily be damaged, use extreme care when moving ocleaning it.

Do not bend the anode pin or damage the ceramic part since it forms thvacuum seal.



e

de e

To reassemble gauge tube

1. Position the ignitor 20 mm from the end of the anode pin.

2. Insert the O-ring and support ring into the tube.

The sealing surface, O-ring, and ceramic part must be clean.

3. Carefully insert the anode and ignitor into the tube.

4. Replace the retainer and tighten the screws uniformly until the stop position is reached.

5. Slide the pole insert into the front of the tube and mount the snap ring against the pole insert.

Note: Visually check that the anode pin is centered within the hole of thpole insert.

6. Mount the magnet onto the anode assembly.

Lock it with the hex-head screw and clamp.

7. Carefully push on the electronics module until it stops.

8. Position the connector rotated 180º from the magnet retaining screw.

Secure the module snugly in place with the socket-set screw.

Caution: Do not tighten down hard on the set screw.

9. Replace the gauge tube into the manifold.

Locate the magnet retaining screw into the notch on the manifold.

10. Plug the connector into the gauge tube.

Secure the retaining screw.

11. Close the Vent valve, restart the PIPS, and pump down the system.

Caution: Do not allow the PIPS to run for more than 1 hr with the cold-cathogauge at pressures above 10-3 Torr since a glow discharge will occur in the tubcausing it to become contaminated.


Cleaning the Shutter

fan. It tion

-mu-

off aterial f the with

5.4.1 Gauge-Tube Power Supply

The gauge-tube power supply is mounted on the rear panel just above the operates from 117 VAC that is controlled by a relay mounted on the distribuboard and is activated when the MDP reaches its normal running speed.

5.5 Cleaning the Shutter

The pneumatically operated Shutter is designed to operate for an extendedperiod of time with only a minimal amount of maintenance. The Shutter prevents buildup of sputtered material on the viewing window and instead acculates material on its underside.

Over a period of time, the accumulated material may crack, peel, and flakeonto the specimen. Venting to atmosphere also may cause the sputtered mto lose adhesion and to peel and flake. For these reasons, the underside oShutter must be examined and cleaned periodically, every 3 months or so regular use.

Figure 5-5 Shutter removal and cleaning.

Shutter guideo-ring, #012

M3 x 8mmset screwFront

plate

Pistonrod#011

Shutter(in position)

Shutter(retracted)#005

Specimen

M2 x6 mm

Shutterguide


Care of the Penning Ion Guns

out. ning

y

aner r-

ing

ing and

To clean the Shutter

1. Raise the piston and vent the Airlock chamber.



3. Lift off the Viewing Port.

4. Press the Airlock piston down into the Work Chamber.

5. Remove the top cover plate with the Removal tool (see Figure 5-2).

6. Pull out the Shutter Guide.

Grasp the Shutter Guide at the front of the chamber and pull it straight There are two O-rings (#012) on the Guide that may need periodic clea(see Figure 5-5).

7. Rotate the Shutter manually 180° to view the underside.

8. Use a tissue saturated with freon or methanol and wipe off the under-side.

If the shutter is relatively clean, it may only require manual wiping.

9. Remove the Shutter for more thorough cleaning.

If a more thorough cleaning is required, the Shutter must be removed bunscrewing the M2 x 6 mm retaining screw (see Figure 5-5).

10. Clean the Shutter.

Sputter deposits on the Shutter should be removed with an abrasive cleafter which the Shutter should be cleaned with hot soapy water and thooughly dried before replacing in the chamber.

Caution: The Shutter will not operate if the blade is bent by improper handlduring cleaning.

5.6 Care of the Penning Ion Guns

Good care and maintenance of the PIGs are absolutely essential to obtaingood specimen thinning. There are two ways to clean the guns: dry methodwet method.



e, r thod e out

vers

h to un

5.6.1 Dry Cleaning the Penning Ion Guns

The dry method of cleaning involves wiping the parts with a clean dry tissuthen using dry nitrogen or clean compressed air to remove any dust, lint, ometallic whiskers that are the primary cause of shorts in the guns. This meis preferred because the cleaning time and the actual time the gun parts arof the vacuum is reduced to a minimum. Additionally, since no solvents areused, the required argon purging time for the guns after start-up is greatly reduced.

To remove the Gun



There is no need to unplug the HV cables nor remove any of the side cofrom the PIPS.

2. Remove the gun knob from the gun housing.

Rotate the gun knob to the 10° Top position. Use the 3.0-mm hex wrencremove the two screws from the gun knob and pull the knob from the ghousing (Figure 3-5).

Figure 5-6 Ion source and magnet assembly.

Ionsource

Moldedassembly

#020

Rearpolepiece

Magnetassembly



d

mbly. a x10

the o

dust

s to

3. Withdraw the ion source from the gun housing.

Use the 3.0-mm hex wrench to remove the single screw from the moldeconnector assembly. Slowly pull on the toggle stick to withdraw the ion source from the gun housing.

Note: From this point, use nylon gloves to handle all parts. Special attention must be paid to the cleanliness of all the parts, especially the magnet asseThe disassembly and subsequent assembly should be done with the aid ofstereo microscope.

To disassemble the Gun

1. Lift the magnet assembly off the rear polepiece.

Hold the ion source with one hand and grasp the magnet assembly withother hand. Lift the magnet assembly off the rear polepiece by tilting it tone side (see Figure 5-6).

Note: The rear polepiece can be cleaned directly on the HV connector (without disassembly) by dusting it off using dry nitrogen or clean compressed air. If any particles remain, use a tissue to remove them andagain with compressed air.

2. Remove the anode cup assembly from the magnet.

Lightly tap the assembly on its edge until enough of the anode protrudebe pulled out of the magnet.

Figure 5-7 Removal of anode assembly and anode cup insulator.

Frontpolepiece

Magnetassembly

Anode cupinsulator

Anode cup

Notch designatesNorth pole



e gnet.

to

isi-.6.2

th

of the ssue

3. Remove the anode cup insulator with the eraser end of a pencil.

4. Separate magnet from the front polepiece.

Holding the magnet in one hand, place the eraser end of a pencil into thmagnet and push against the front polepiece to separate it from the ma

Figure 5-8 Removing anode cup assembly/front polepiece.

Warning: The magnet is extremely powerful and requires careful handling prevent it from attracting metallic whiskers and from being attracted to anyother magnetic material that may shatter it.

To inspect and clean the Gun

1. Carefully examine the inside face of the front polepiece and the top of the anode cup.

Look for any small whiskers that may cause a short. If burn marks are vble on the front polepiece or the anode cup insulator, refer to Section 5on procedure to thoroughly clean the gun by the wet method.

2. Clean the anode cup.

Clean the anode cup by wiping with a clean dry tissue and dusting it widry nitrogen or clean compressed air.

Clean all the loose sputtered material on the inside surface and the face cup using an abrasive pad such as Scotchbrite. Wipe clean with a dry tiand dust with dry nitrogen or compressed air.

Frontpolepiece

Firmly holdmagnetassembly

Anode cupinsulator

Pencil

Push pencilagainst polepieceRemove anode

cup from anodecup insulator



omb-

thin .

ing

uide wo

r, uired. eth-an

the ignifi-ry to inside

3. Remove the O-ring (#020) from the ion source, if necessary.

Squeeze and push up from both sides with thumb and index finger to remove the O-ring from the ion source. Clean, apply vacuum grease (Flin), and replace (see Figure 5-6).

4. Dust inside the gun housing and the inside face of the front polepiece.

To reassemble the Gun

1. Insert the anode cup into the anode cup insulator (sliding fit).

2. Insert the anode assembly into the magnet assembly (loose sliding fit).

3. Carefully place the magnet assembly against the edge of the rear pole-piece.

Slowly lower the magnet assembly in place until the rear polepiece is withe magnet shield. The parts will be perfectly concentric to one another

4. Slip the ion source into the gun housing.

Pay particular attention that the O-ring is not damaged in the process.

Carefully align the white reference dot at the back of the gun to the matgroove machined into the outside diameter of the gun housing.

5. Insert the screw into the molded connector assembly and tighten.

This assembly should be aligned relatively square with the chamber. Gthe knob over the toggle stick until it is firmly in place and screw in the tretaining screws.

Repeat this procedure on the second gun if necessary.

5.6.2 Wet Cleaning the Penning Ion Guns

As stated earlier, the dry method of cleaning the guns is preferred. Howeveonce the guns have been used extensively, a more thorough cleaning is reqThe wet method of cleaning involves the use of solvents such as freon or manol with an abrasive material. A Scotchbrite pad or 600-grit emery paper cbe used to remove all sputtered material. Once complete and assembled, time required to pump down the chamber and to argon purge the guns is scantly longer when compared to the dry method of cleaning. If it is necessause this method, then this is a good time to also clean the Shutter and the of the Work Chamber to reduce overall down time.



of

h to un

the

d ion

the o

ust-use

the

udes

To remove the Gun



Since the HV cables are not unplugged, there is no need to remove anythe side covers from the PIPS.

2. Remove the gun knob from the gun housing.

Rotate the gun knob to the 10° Top position. Use the 3.0-mm hex wrencremove the two screws from the gun knob and pull the knob from the ghousing (see Figure 3-5).

3. Lift off the Viewing Port and the top cover plate from the chamber (see Figure 5-1).

Place one hand at the back of the gun and with the other hand push ongun housing from inside the chamber. Remove the gun.

To disassemble the Gun

1. Withdraw the ion source from the gun housing.

Use the 3.0-mm hex wrench to remove the single screw from the moldeconnector assembly then slowly pull on the toggle stick to withdraw the source from the gun housing (see Figure 5-6).

2. Lift the magnet assembly off the rear polepiece.

Hold the ion source with one hand and grasp the magnet assembly withother hand. Lift the magnet assembly off the rear polepiece by tilting it tone side (see Figure 5-6).

Note: The rear polepiece can be cleaned directly on the HV connector by ding it off with dry nitrogen or clean compressed air. If any particles remain, a tissue to remove them and dust again with the compressed air.

Special attention must be paid to the cleanliness of all the parts, especiallymagnet assembly.

3. Remove the anode cup assembly from the magnet.

Lightly tap the assembly on its edge until enough of the anode cup protrto be pulled out of the magnet.

4. Remove the anode cup insulator with the eraser end of a pencil.



e gnet.

to

it up rks

net stereo

y e

sur-

5. Separate magnet from the front polepiece.

Holding the magnet in one hand, place the eraser end of a pencil into thmagnet and push against the front polepiece to separate it from the ma

Warning: The magnet is extremely powerful and requires careful handling prevent it from attracting metallic whiskers and from being attracted to anyother magnetic material that may shatter it.

To inspect and clean the Gun

1. With a low-power microscope, carefully examine the inside face of the front polepiece and the top of the anode cup.

Look for black or burnt spots that would indicate a short.

Burn marks on the front polepiece may easily be removed using 600-gremery paper. Depending upon the severity, burn marks on the anode cinsulator may also be removed with 600-grit paper. However, if burn maare deep, replace the anode cup insulator.

Note: From this point, use nylon gloves to handle all clean parts. Special attention must be paid to the cleanliness of all the parts, especially the magassembly. The subsequent assembly should be done with the aid of a x10 microscope.

2. Clean the anode cup using freon or methanol.

Clean all the sputtered material on the inside surface of the cup using aScotchbrite pad.

3. Wipe off the magnet and the rear polepiece with freon or methanol.

4. Clean and lubricate the O-ring and the bearing surface on the outside of the ion-source assembly.

Dust parts off using clean compressed air or nitrogen gas to remove andust, lint or metallic whiskers that are the primary cause of shorting in thgun.

5. Clean the gun housing O-rings.

Remove the two O-rings from the gun housing and thoroughly clean allfaces with freon or methanol, including the O-ring grooves.

Replace O-rings, if necessary.

Dry off all surfaces and parts with compressed air or freon gas.



thin

r.

he

across bled

g

ing

To reassemble the Gun

1. Insert the anode cup into the anode cup insulator (see Figure 5-7).

2. Insert the anode assembly into the magnet.

Be sure the top of the anode is at the north face of the magnet.

3. Replace the front pole piece.

4. Carefully place the magnet assembly against the edge of the rear pole-piece.

Slowly lower the magnet assembly in place until the rear polepiece is withe magnet shield.

Properly assembled, the parts will be perfectly concentric to one anothe

5. Place a light film of vacuum grease around the inside surface (first onecentimeter) of the port for the ion source.

6. Slip the ion source into the gun housing.

Pay particular attention that the O-ring is not damaged in the process.

7. Align ion source in the housing.

Carefully align the white reference dot at the back of the ion source to tmating groove machined into the outside diameter of the gun housing.

8. Insert the screw into the molded connector assembly and tighten.

This assembly should be aligned squarely with the Chamber.

9. Test the gun before inserting into the Work Chamber.

Use an ohmmeter and test the gun to ensure that a short does not exist the HV contacts. A direct short usually indicates the gun was not assemproperly. A higher resistance short up to 2MΩ indicates the presence of small conductive whiskers within the gun. If this is the case, the cleaninsteps described above should be repeated.

10. Place a light film of vacuum grease around the Work Chamber gun-port.

11. Insert the complete assembly into the Work Chamber.

Align the reference mark on the diameter of the gun housing to the matmark on the Chamber.


Molecular Drag Pump Maintenance

ew

re

ted to ro-oval

hen

t for

12. Replace the gun knob in the gun housing.

Guide the gun knob over the toggle stick until it is firmly in place and scrin the two retaining screws.

Repeat this procedure on the second gun.

5.7 Molecular Drag Pump Maintenance

The MDP requires the oil cartridge to be changed at least once a year, (mooften if the PIPS is equipped with a CAIBE™ system). However, if a high-pitched squeal begins, the oil cartridge should be changed immediately.

The oil cartridge consists of a stack of felt discs saturated with oil and is replaced as a unit. Changing the cartridge requires the Chamber to be venatmosphere and the MDP to be completely removed from the PIPS. This pvides an opportunity to service other parts of the vacuum system. The remof the MDP is made easier if the HV power supply is first removed.

Changing the oil cartridge requires the following:

• Venting the Work Chamber.

• Removing the DP (to facilitate MDP removal) (see Section 5.8).

• Removing the HV power supply (to facilitate MDP removal).

• Removing the MDP.

To remove the HV power supply


Wait at least 10 minutes to allow the MDP to come to a complete stop. Tvent the chamber by opening the Vent valve.

2. Unplug the power cord from the power entry module (rear panel).

3. Remove both side covers from the cabinet.

4. Unplug the four gun leads from the HV supply.

5. Unplug the HV power supply cable from the Distribution board.

6. Remove the two Philips-head screws from the HV supply base then liftthe HV power supply out.

Note: The oil in the MDP is for lubrication of the bearings only, and does nocome in contact with the vacuum chamber hence eliminating any concern hydrocarbon contamination.



port

e

P and

To remove the MDP

1. Remove the control cable from the MDP.

Rotate the connector sleeve CCW and pull the cable straight out.

Figure 5-9 Removal of MDP.

2. Remove the SV2–SV3 solenoid-valve assembly.

Loosen and remove the KF clamp and centering ring from the exhaust in order to remove the SV2–SV3 solenoid-valve assembly.

3. Loosen the 4 MDP mounting screws on the support plate.

Use the 2-mm hex wrench to loosen the screws. These screws retain thflange clamps used to lock the MDP to the manifold.

Remove two of the screws and clamps completely; then support the MDfrom the underside with one hand while removing the other two screws clamps.

4. Lower the MDP and remove it from inside the cabinet.

Manifoldassembly

M3 X 25-mmsocket-head screw,4 places

691-0310 MDP flange clamp,4 places

MDPseal

MDP controlcable

Screen

MDP SV2, SV3Solenoidvalveassembly

KFclamp

O-ring



et.

r-

The oil cartridge can be replaced upon removal of the MDP from the cabin

To replace the oil cartridge

1. Cover the input of the pump with aluminum foil.

Place the pump foil-side-down on a clean table (pump is upside down).

2. Use a wide blade screwdriver and unscrew the cap at the bottom of thepump.

Figure 5-10 Replacement of oil cartridge.

3. Remove the existing cartridge.

Use a pair of tweezers to remove the cartridge. Properly dispose the catridge.

4. Clean the cover and the oil well from which the cartridge was removed.

5. Insert the new cartridge (already saturated with oil) and install the cap.

6. Remove the foil and remount the MDP.

7. Reconnect the MDP control cable and the valve assembly.

Wellarea

Foil

05577Oil cartridge

O-ring

Cap


Diaphragm Pump Maintenance

the fer to ace

-

ed by

8. Install the HV power supply, plugging in the supply cable, the four gun leads, and screwing in the mounting screws.

9. Install the DP.

5.8 Diaphragm Pump Maintenance

In order to service the diaphragm pump (DP), it must first be removed fromPIPS cabinet. Both diaphragms should be replaced after 4000 h of use (rehour counter on Distribution board). If either of them fails after 2000 h, replboth of them.

Note: It is important that the parts of the two diaphragm heads are not interchanged.

Note: If the PIPS is going to be shipped, the pump assembly must be securthe special locking screw mounted on the underside of the cabinet.

To remove the diaphragm pump



2. Unplug the power cord from the power entry module (rear panel).

3. Remove both side covers from the cabinet.

This will reveal the MDP and the DP assembly.

4. Unplug the electrical connector at the front of the DP.

5. Disconnect the vacuum hose running from the pump to the Tee fitting (mounted on the rear panel).

Unscrew and remove the knurled nut from the pump.

6. Retract the two slide-latch fasteners that hold the pump assembly in place (underside of pump).

7. Lift the assembly out.


Diaphragm Pump Maintenance

-pted

the

To replace diaphragm

Caution: The pump must be at room temperature before beginning the disassembly. Damage may occur to the head retaining screws if removal is attemwhile hot.

1. Allow the DP to cool to room temperature prior to disassembly.

2. Remove the four socket-head screws from either the left or the right pump head.

Use the 3.0-mm hex wrench to remove the four screws.

Figure 5-11 Disassembly of diaphragm pump.

3. Lift off the head exposing the two valves and sealing rings.

4. Remove the intermediate plate to expose the molded diaphragm.

5. Use a small screwdriver to carefully lift the rim of the diaphragm out of the retaining groove.

6. Grasp the diaphragm and slowly unscrew it from the piston rod.

Rotate CCW. Take care not to damage any washers that may be on thethreaded end.

7. Carefully remove the old diaphragm.

Transfer any washers from the threaded end of the old diaphragm ontonew one.

2111 2 2

Electricalconnector

Front facenumbers

Plasticseals

Screws,2 places

HeadSealing rings, 2 places

Valve plates, 2 places

Intermediate plate

Diaphragm

Washers

Slide-latchfastener


Argon Leak Detection

final

ing

fas-

r. If rve

a sig-

wn om pli-

Note: It is important the same washers be used, otherwise the required pressure will not be obtained.

8. Screw the new diaphragm into the piston.

9. Seat the rim of the diaphragm into the retaining groove.

10. Clean the inside curved surface of the intermediate plate.

Clean with alcohol and dust with compressed air.

11. Replace the intermediate plate.

Align the reference numbers facing toward the front.

12. Install the two new rubber valves and sealing rings.

13. Clean the bottom side of the top head.

Clean with alcohol and dust using compressed air.

14. Replace the top head and tighten the four screws.

Do not over tighten these screws. Repeat this procedure on the remainhead.

15. Replace the pump assembly.

Place it back over the latching studs in the PIPS base and lock the slideteners.

16. Reconnect the vacuum hose.

Tighten the knurled nut only finger tight.

17. Reconnect the electrical connector.

5.9 Argon Leak Detection

Typically, a bottle of argon gas will last approximately nine months to a yeaa leak is suspected, close off the main valve of the argon cylinder and obsethe high pressure gauge. If the pressure deteriorates within a few minutes,nificant leak is indicated.

Note: The leak-detection operation should be performed without shutting dothe PIPS, with the Whisperlok lowered, and all four side covers removed frthe cabinet. You will need the use of two clamping tools, e.g., needle-noseers, hemostat clamps, or Tygon-tubing clamps.


Argon Leak Detection

ose-5-2

Open the main valve on the argon cylinder and clamp off the hose at the hclamping points shown in Figure 5-12. Use the flow chart provided in Table to leak test the system.

Table 5-2 Leak-detection flow chart.

Clampingpoints

Pressure drops Probable leak area(s) Go To

Clamp #1 Yes

No

Between Clamp #1 and argon bottle.

In the rest of the system. Clamp #2

Clamp #2 Yes

No

In SV4 and/or subsequent lines.

In Regulator and/or SV5 and/or subsequent lines.

Clamp #3

Clamp #4

Clamp #3 Yes

No

In SV4.

In Work Chamber/Airlock.

Clamp #4 Yes

No

In Regulator and/or subsequent lines.

In SV5 and/or subsequent lines.

Clamp #5

Clamp #6

Clamp #5 Yes

No

In Regulator and/or SV7 and subsequent lines.

In SV6 and subsequent lines.

Clamp #8

Clamp #7

Clamp #6 Yes

No

In SV 5.

In SV7 and subsequent lines.

Clamp #7

Clamp #8

Clamp #7 Yes

No

In SV6 (leaking to atmosphere).

In SV6 (leaking to chamber).

With #7 clamped off, chamber pressure will improve.

Clamp #8 Yes

No

In Regulator.

In SV7 and subsequent lines. Clamp #9

Clamp #9 Yes

No

In SV7 (leaking to atmosphere).

In SV7 (leaking to chamber).

With #9 clamped off, chamber pressure will improve.


Clean Work Chamber

te-

Figure 5-12 Argon leak-detection points.

5.10 Clean Work Chamber

Clean the Work Chamber when you have vented the system for other mainnance to reduce overall down time.

To vent and clean the Work Chamber



SV4Whisperlok

piston

SV5Shuttervalve

SV6Shutoffvalve

SV7Shutoffvalve

Needlevalve

Needlevalve

Workchamber

Regulator1 psi

(69 mbar)Vent Vent

Gas in25 psi

(1.72 bar)Clamp

#1Clamp

#2Clamp

#4

Clamp#6

Clamp#5

Clamp#3

Clamp#8

Airlockvacuum

Clamp #7 Clamp #9


Backing Pressure Calibration

d -

es-agm en-l

2. Lift off the Viewing Port and the top cover plate from the Chamber. See Section 5.1.

3. Clean the Chamber.

There is no need to polish the chamber. Just remove flakes of sputterematerials with a simple vacuuming and/or wiping with a Kimwipe. Methanol can be used but it will increase pumpdown time.

4. Replace the top cover plate and the Viewing Port.

5. Power up the PIPS.

6. Periodically depress the DP Test button to monitor pump down.

The system will start evacuating. Monitor the pressure and wait for the green MDP indicator to come on.

5.11 Backing Pressure Calibration

The vacuum system uses an electronic circuit containing two solid-state prsure sensors, one to monitor the foreline pressure generated by the diaphrpump (DP) and the other to monitor the vacuum in the Airlock. These two ssors are mounted to a Vac/Sensor PCB assembly located on the rear panedirectly behind the DP.

Figure 5-13 VAC sensor PCB assembly.

AGND

VR1

VR2

VR4

LOADLOCK

+24V

+15VC13

+1

1

OF

FS

ET

2

CA

LIB

RA

TE

SE

T

'A'

'B'

'A'

'B'

FORELINEC18

VAC SENSOR ASSY 691-0047 REV:

VR3

P11

OFFSET1

ENABLE

MON1

MON2

–5VGATAN INC. MADE IN U.S.A.

1

Tubingconnection

VR3sensoradjust

VR4sensoradjust

Negative leadconnect point

Positiveleadconnectpoint



ply or

e he top

are

n, that

e DP

The foreline sensor is not critical to the operation of the instrument, but simprovides a means of confirming the operational status of the DP. This sensmay be monitored by depressing the DP Test switch on the right side of thfront panel and reading the actual pressure (Torr) under Beam Energy on tfront meter. This sensor is also connected to the DP High indicator on the right side of the front panel, which illuminates when the backing pressure exceeds 12 Torr. Should an occasion arise where the readings generated questionable, some trouble shooting or calibration of the circuit may be in order. Some typical scenarios are as follows:

Table 5-3 Scenario 1.

Table 5-4 Scenario 2.

Scenario 1

If the Chamber vacuum is not good (> 1 x 10–4 Torr), the MDP is not at its nor-mal running speed (green MDP illuminator off), the DP High illuminator is oand the digital display indicates a pressure above 12 Torr, the conclusion isthere could either be a vacuum leak in the system or the DP has failed.

To troubleshoot Scenario 1

1. Turn on the power to the unit.

Wait at least 2 or 3 min to allow pumps to stabilize.

2. Clamp off the hose between the Tee fitting on the rear panel and the MDP.

Use a hemostat or a tubing clamp to clamp off the hose. This isolates thfrom the rest of the vacuum system.

Symptom MDP Status Resolution

DP High indicator is illumi-nated and the digital display indicates a pressure above 12 Torr.

MDP not up to speed, monitor test point (TP) reads < 6.0 VDC and is steady. See Figure 5-14.

Possible vacuum leak or DP failure.

Symptom MDP Status Resolution

DP High indicator is illumi-nated and the digital display indicates a pressure above 12 Torr.

MDP at full speed, monitor TP reads 10 VDC. Chamber vac-

uum good (> 1 x 10–4 Torr). See Figure 5-14.

Check sensor calibration.



uum

igh,

nd ost

ro-

Figure 5-14 MDP driver card assembly.

• Should the DP High illuminator be extinguished and the digital display shows the backing pressure dropping to normal levels (< 7 Torr), a vacleak exists somewhere in the main system.

• Should the DP High illuminator stay on and the backing pressure stay hthe DP is likely to be at fault and must be inspected.

Scenario 2

If the work-chamber vacuum is good (<1 x 10–4 Torr), the MDP is at its normal running speed (green MDP illuminator on), the DP High illuminator is on, athe digital display is indicating a pressure above 12 Torr, the conclusion is mprobably the foreline sensor circuit is out of calibration. Run the following pcedure to trouble shoot.

The following items are necessary to perform this procedure: (1) vent-valveassembly; (2) a length of test tubing; and (3) a digital voltmeter.

N-00207

PFEIFFERBALZERS

Faultindicators

Normal runindicator

Test pointMDP speed0-10 VDC

030725 x 20 mm

3.15 amp fuse

Card serialnumber



y a ent

e 5-

t tub-the

i-

ntil

ould c-

Note: The test tubing must consist of two different sized tubing connected bfitting or inserted into each other since one end is to be connected to the Vvalve (smaller end) and the other to the Vac sensor (larger end).

To troubleshoot Scenario 2

1. The PIPS must be turned off and the Vent valve assembly must be in the manifold.

2. Clamp off the hose between the Tee fitting on the rear panel and the foreline sensor.

Use a hemostat or a hose clamp to clamp off the hose at the X in Figur15.

3. Attach the test tubing.

Detach the tubing from the sensor and connect the larger end of the tesing to the sensor and the smaller end of the test tubing to the fitting on Vent valve (see Figure 5-15).

4. Connect a digital voltmeter across MON 2 (see Figure 5-13) and groundon the PCB.

The voltage range for the meter will be from -8.5 mV to 7.60 VDC.

5. Start the instrument.

Allow the MDP to come up to normal operating speed (green MDP illumnator on) and chamber vacuum at 5 x 10–5 Torr or better.

6. Open the Vent valve.

Allow the tubing and sensor to equilibrate to chamber pressure.

7. Depress and hold down the DP Test switch.

The panel display reading should be 0.0; adjust VR3 (Offset 2) trim pot uthe digital voltmeter across MON 2 test point reads -8.5 mV (± 3 mV).

8. Close the Vent valve and remove the tubing from the vent-valve fitting.

Adjust VR4 (CAL) trim pot until the MON 2 TP voltage is 7.60 VDC (1%of local atmospheric pressure).

9. Reconnect the tubing to the vent-valve fitting and open the valve.

Depress and hold down the DP Test switch, the panel display reading shbe 0.0 and MON 2 test point -8.5 mV. Adjust VR3 (Offset 2) trim pot if neessary.


Microscope-Lamp Replacement

p.

ck-

uld

10. Close the Vent valve and remove the tubing from both the Vent valve and the sensor.

11. Connect the vacuum line back to the sensor and remove the hose clam

Calibration is complete, the DP High illuminator should be off and the baing pressure should read < 7 Torr.

Figure 5-15 VAC sensor interconnects.

5.12 Microscope-Lamp Replacement

The microscope lamp is powered at well below its maximum rating and shonot require frequent replacement.

To replace the lamp

• Pull off the reflector to expose the miniature incandescent lamp (see Figure 5-16).

Diaphragm pumpassembly

Airlock

Vent valveassembly

Vent valvefitting

TesttubingClamp

5-cm length of 5-mmdiameter tubing

Vac sensorPCB assembly


Motor Drive Replacement

• Pull out the lamp, plug in a replacement, and replace the reflector.

Figure 5-16 Microscope-lamp replacement.

5.13 Motor Drive Replacement

The specimen motor drive is located under the specimen chamber.

To remove the motor drive


Wait at least 10 minutes to allow the MDP to come to a complete stop.

2. Unplug the motor from the Whisperlok PC board.

3. Remove the four M2 socket head screws that hold the motor to the bracket (see Figure 5-17).

The motor has specific characteristics for the PIPS and should only be replaced with one of the same type.

04215Lamp

Lampreflector

Lampassembly

Microscope


Activated-Carbon Filter

led vels igh eft st

ent

Figure 5-17 Motor drive removal.

5.14 Activated-Carbon Filter

The CAIBE option is shipped with an activated-carbon chemical filter instalin the vacuum line between the DP and the MDP. The filter prevents high leof corrosive chemicals from entering the DP and the atmosphere. These hlevels are particularly present if the valve on the CAIBE jet is accidentally lopen over a period of several days. The activated carbon in the filter will laapproximately 75 hr of CAIBE operation.

To recharge the filter


Wait at least 10 minutes to allow the MDP to come to a complete stop. Vthe system.

2. Pull off the two vacuum hoses from the activated-carbon filter assem-bly.

Remove the two screws that hold the assembly to the rear panel (see Figure 5-18).

3. In a well ventilated area, empty the contaminated activated carbon.

Empty contents into a plastic storage bag and dispose of it as a hazardous waste material.

M2 x 8-mmsocket-head screw,4 places

Disconnect motordrive wires

Bevel gear forspecimen rotation

View from left side



s due d but

691 d d

Figure 5-18 Activated-charcoal filter.

4. Refill the canister with a new charge.

5. Reinstall the filter to the rear panel and start up the unit.

The pumpdown after recharging the filter may take as long as several hourto the amount of gas the activated carbon may hold. Do not become alarmeallow the unit to continue pumping.

Warning : If the CAIBE is operated with toxic gases, the exhaust hose (part 1035) should be attached to the exhaust nozzle of the diaphragm pump, fethrough the vent slots at the rear of the PIPS, and then into a well ventilatechemical hood.

Rearpanel

Screws,2 places

Activatedcarbonfilter

Inlinefilter

SV2

SV3MDP

ToDP


PIPS User’s Guide

6 Troubleshooting

r

*

Symptom Probable Cause Solution

MDP Ready, LED does not come on after 10 min.

MDP Ready, LED not on even after resetting.

MDP control board needs to be reset.Backing pressure high.

MDP not coming up to speed;No 28 VDC, F2 blown.

Turn power switch off for 10 sec then back on again.

System leak, check DP Test.Monitor MDP test voltage (see Figure 5-14).Check 28 VTP on Distribution PCB.

DP High LED remains on.

Backing pressure will not go below 19.9 Torr.

Backing pressure >12 Torr.

Manual Vent valve open.

Viewing port or window not seatedproperly.

Defective diaphragm in DP.

See Section 5.13.

Close Vent valve.

Press down on port and window while depressing Vac button.

See Section 5.8.

Specimen difficult to see in working position.

Sputtered material obscuring viewing window. Clean or replace viewing window. SeeSection 5.1

Specimen will not rise fully into the airlock.

Dry and coated airlock vacuum seal. Service vacuum seal.See Section 5.2.

Poor vacuum when specimen mount rotation is operated.

Dirty or dry O-ring in specimen mount assem-bly.

Clean and lubricate specimen O-ring. SeeSection 5.3.

Piston cannot be lowered into the chamber.

Argon supply interrupted or Rotation Control off.

Check argon pressure 25 psi (1.72 bar) omain valve closed.

Adjust control to Position 3.

Digital displays reading 199. HV power supply inoperative or F5 blown. Check 9 VDC supply. Replace F5.

6-1

r

Symptom Probable Cause Solution

Shutter will not close or closes only part way.

Argon supply interrupted or HV timer may be off.

Check argon pressure 25 psi (1.72 bar) omain valve closed.Switch HV timer on.

Excessive argon use. Argon leak. Check for leaks. See Section 5.12.

Cold-cathode gauge reading fluctuates. Gauge tube contaminated. Service/clean gauge tube.See Section 5.4.

Ion gun has no output, µA = 0, kV on, gas on, gun LED on.

Gun shorted, (anode cup to magnet). Clean gun. See Section 5.6.

Gun output is extremely erratic. Guns are not purged sufficiently. Purge guns. See Section 3.5.

Power switch illuminator on but PIPS is not running.

Power Reset button not activated after count-down cycle.

Depress Power switch off, then on to restart PIPS. See Section 3.11.


PIPS User’s Guide

7 Parts

7.1 Spares and Consumables

Main Assembly

03072 Fuse 5 x 20 mm 3.15A (x5)

03510 Fuse (F5) 5 x 20 mm Slo-Blo 0.5A (x5)

03602 Fuse (F1-F4), plug-in 3A microfuse (x5)

03667 Solenoid valve 2 way (SV3 airlock vent)

03668 Solenoid valve 3 way (SV2)

03718 Fuse 3AG Slo-Blo-3A (x5) 120V

03722 Fuse 3AG Slo-Blo 1.5A (x5) 220V

04562 MDP 064 O-ring seal

05577 MDP 064 oil cartridge

05588 MDP controller board TCP 035

08503 Dry DP consumable Kit

691.00470 Pressure sensor PC board

691.00500 Distribution board

Chamber Assembly

06224 Viewing port window (x2)

691.01040 Viewing port

691.01110 Shutter

691.01350 Sputter shield assembly

Cabinet Assembly

04847 Solenoid valve 3 way (SV4 or SV5 Shutter or Whisperlok)

05649 Argon pressure regulator

06066 Cabinet cooling fan

07194 Programmable timer

07616 Cold-cathode ignitor kit (compression ring, O-ring, 3x ignitors)

7-1

Spares and Consumables

691.02160 Digital display PCB

691.02300 Pressure test PC Board

Needle Valve Assembly

04822 Solenoid valve 2 way (SV6 or SV7 gun gas)

05908 Needle and orifice assembly

691.04000 Needle Valve Assembly

Microscope Assembly

04215 Lamp 2.7 volt T-1 size (x2)

HV Power Supply Assembly

691.06000 High voltage power supply

Whisperlok Assembly

691.08060 Motor drive assembly

691.08400 Specimen mount assembly

691.08460 Multi-purpose tool

691.08470 Beam alignment screen

691.08510 Rimmed specimen post (Mo)

691.08600 DuoPost, glue type, 3 mm

691.08601 DuoPost, clamping type, 3 mm

691.08630 Specimen post (copper) 5/Set

691.08700 Whisperlok PCB, six sensor

Penning Ion Gun Assembly

691.09030 Front polepiece

691.09040 Anode cup insulator

691.09050 Anode cup

691.09120 Contact pin

691.09131 Magnet assembly

691.09530 Potted PCB End cap assembly

691.09550 HV feedthrough assembly

691.09610 Rear polepiece

Accessories

08272 Paddle tip tweezers

623.01100 Mounting wax (3.5 x 32 mm) 12 rods

691.11000 Liquid nitrogen trap

691.14000 Light shield

691.14030 Precision point tweezers

691.14051 Specimen post storage block


List of O-Rings

691.14070 Specimen post carrier SS (x4)

691.14080 Complete O-ring kit

7.2 List of O-Rings

Table 7-1 List of O-rings.

Description Size Qty location

Main assembly 010 1 Diaphragm pump input hose.

Chamber assembly 005011012019022030042044

11311112

Shutter rod seal.Shutter rod piston.Airlock1, Shutter Guide 2.Airlock window.Airlock window retainer.Front plate.Chamber top.Airlock top plate or cover.

Manifold assembly 010012039123136

11111

Vent valve.Vent valve.Vent valve.Cold-cathode gauge tube.Chamber flange.

Needle valve assembly 012 2 Orifice.

Faraday cup assembly 015022

22

Current probe.Housing.

Whisperlock assembly 008031035135

1111

Specimen mount.Bellows housing.Cylinder body.Piston.

Penning ion gun assembly 020030

24

HV feedthrough.Housing.

Liquid nitrogen trap 008039

11

Vent valve.Body.

CAIBE assembly 006010012024032

11211

Valve vent.Valve vent.Jet body.Carbon filter.Chemical capsule.


List of Fuses

een kes of his vari-

C to nd

7.3 List of Fuses

The PIPS is protected by the fuses listed in the following table:

Table 7-2 List of fuses.

† 3 A if input voltage is 100-120 VAC† 1.5 A if input voltage is 220-240 VAC

The total power consumption of the PIPS is relatively small and varies betw100 W with guns off and 200 W with guns on. A main power transformer taa wide range of input voltages (100 VAC to 240 VAC) and outputs a rangelower AC voltages to a distribution board located next to the transformer. Tboard regulates and distributes the specific power sources required by theous electrical subassemblies in the system, e.g., 117 VAC to the diaphragmpump and the Penning board; 18 VAC, 32 VAC (center tapped), and 90 VAthe HV power supply, 28 VDC for the MDP, 24 VDC to the solenoid valves aLED indicator lamps, and 3.6 VAC for the specimen illuminators.

Location Protects Value

Corcom connector on rear panel

Main power transformer †

Power distribution board (F1)

+28 VDC to the pressure sensor board 3 A


+28 VDC to MDP board 3 A


117 VAC to diaphragm pump and Penning board 3 A


+24 VDC to solenoid valves and LEDs 3 A

Power distribution board (F5 90 VAC to high voltage power supply .0.5 A

MDP control board) MDP control ciruitry 3.15A


List of Fuses

Figure 7-1 Test points, fuses and plugs on power distribution board.

00319.85h

P1

Hour counter totalsvacuum systemoperating time

Jumperinstallation

point

16 9

8

1

16

1

12

1

6

18 10 11 1

2

4

6

36 30 25 19

32VAC

90VAC

P3

P4

P5

P2

VR3

VR21KV

F524VDC

VR1

Serialnumber

9VDC

F13A

F43A

F33A

F23A

28VDC

HVENB

0V

SN

P6

P10

–5VDC

INHIBIT

80

40


List of Fuses


PIPS User’s Guide

Index

AAirlock 5-3

cleaning 5-3

Argon source 2-3

connecting 2-3

leak detection 5-23

pressure regulation 2-3

Autoterminator 3-13

checkout 3-15

installation 3-15

optical filter 3-14

removal 3-14

sensitivity 3-14

BBeam alignment 3-8

beam profile 3-9

gas flow 3-9

x-alignment 3-11

z-alignment 3-10

CCAIBE 3-15

activated-carbon filter 5-32

assembly 3-16

loading chemical capsule 3-16

operation 3-18

Chemical pre-thinning 4-4Cold-cathode gauge tube

cleaning 5-6

location 1-5

power supply 5-9

DDiaphragm pump 2-2

diaphragm replacement 5-22

locking screw 2-2

maintenance 5-21

removal 5-21

setup 2-2

Digital Process Timer 3-20

operating 3-22

setting time base 3-20

EElectrical system 1-9

circuitry 1-9

cooling 1-9

DC power supply 1-9

HV power supply 1-9

list of fuses 7-4

power distribution board 7-5End-point detection

see Autoterminator

GGas-control system 1-7

gas supply to guns 1-7

gas supply to Shutter 1-9

gas supply to Whisperlok 1-8

I-1

I-2

HHV power supply

interconnect 3-20

IInstallation 2-2

site requirements 2-1

Introduction 1-1

Ion guns 1-3

anode cup assembly 5-12

beam alignment 3-8cleaning

dry 5-11

wet 5-14

configuration 1-1

Faraday cups 1-3

front polepiece 5-13

gas-flow adjustment 3-7

ion source 5-12

magnet assembly 5-12

purging 3-6

Ion-Beam Modulation 3-11

dual-beam modulation 3-12

home position 3-12

panel 3-12

polishing sector 3-11

rotation speed 3-12

single-beam modulation 3-11

LLiquid-nitrogen trap 3-23

List of o-rings 7-3Loading Fixture

see Specimen, loading fixture

MMaintenance

schedule 5-1

Mechanical pre-thinning 4-1

dimple depth 4-2

dimple diameter 4-2

dimple grinding 4-2

disc geometry 4-3

disc thickness 4-3

parallel grinding 4-2

polishing wheel diameter 4-2

Microscope 2-3

alignment 2-4

lamp replacement 5-30

setup 2-3

Molecular drag pump 1-5

maintenance 5-18

monitoring pressure of 1-5

oil cartridge 5-20

Motor drive replacement 5-31

SShutdown 3-19

auto 3-20

Inhibit 3-20

manual 3-20

Shutter 3-5

cleaning 5-9

control switch 3-5

Guide 5-10

override 3-5Site requirements

area 2-1see Installationwiring 2-1

Spares and consumables 7-1

Specimen 3-2

cross sections 4-10

disc thickness 4-3

illuminators 3-4

Reflection 3-4

Transmission 3-4

loading 3-2

loading fixture 4-9

milling rates 4-13

mount assembly 5-4

cleaning 5-4

mounting 4-4pre-thinning

chemical 4-4

mechanical 4-1

removal 4-7

rotation 3-6

unloading 3-2

viewing 3-4

wax mounting 4-5Specimen post

DuoPost 4-8

clamp type 4-9

glue type 4-8

PIPS User’s Guide

PIPS User’s Guide

Molybdenum 4-7

single-sided 4-4

Start-up 3-1

UUnpacking

see Installation

VVacuum system 1-5

Airlock vacuum 1-5

overview 1-5

Pumping Manifold 1-5

pumping speed 1-5

pumping system 1-5

vent 5-25

Viewing port 5-1

cleaning 5-1

o-rings 5-2

removing 5-2

WWhisperlok 1-3

Work Chamber 5-25

cleaning 5-26

evacuating 5-26

venting 5-25

I-3

I-4
PIPS User’s Guide

Gatan Product WarrantyGatan warrants that products manufactured by Gatan shall be free of defects in materials and workmanship for the warranty period, which com-mences at date of shipment. Gatan tests the performance of a unit as part of its final test procedure, prior to shipment from its factory. Gatan war-rants that the unit meets Gatan’s published specifications at time of shipment from its factory. All product warranties provide, for a period of one year after shipment to customer, parts (excluding all normal consumable, wear, and maintenance items) and labor. For Specimen Preparation Equipment and Specimen Holders, Gatan will correct any defects in the instrument either by repair in our facility or replacing the defective part, with the shipping party responsible for shipping costs. For products which attach to the column (Cameras, DigiScan, GIF, and PEELS), travel of up to 100 miles from a Gatan authorized repair center (Pleasanton, CA; Warrendale, PA; Munich, GmbH; and Corby, UK) is included. Travel expenses for service beyond 100 miles will be charged for.

Instruments, parts, and accessories not manufactured by Gatan will be warranted by Gatan for the specific items and periods in accordance with and provided by the warranty received by Gatan from the Original Equipment Manufacturer. All such accessory warranties extended by Gatan are limited in accordance with all the terms, conditions, and other provisions stated in this Original Equipment Manufacturer warranty. Gatan makes no warranty whatsoever concerning products or accessories not of its manufacture, except as noted above.

Customer Responsibilities

The customer bears the following responsibilities with regard to maintaining the warranty. The customer shall:

6. Perform the routine maintenance and cleaning procedures at the required intervals as specified in Gatan’s operating manuals. Failure to per-form specified maintenance will automatically void warranty.

7. Use Gatan replacement parts. Failure to use the specified replacement parts will automatically void warranty.8. Use Gatan or Gatan-approved consumables.9. Provide Gatan authorized service representatives access to the products during normal Gatan working hours during the coverage periods to

perform service.10. Provide adequate and safe working space around the products for servicing by Gatan authorized service representatives.11. Provide access to, and use of, all information and facilities determined necessary by Gatan to service and/or maintain the products. (Insofar as

these items may contain proprietary or classified information, the customer shall assume full responsibility for safe-guarding and protecting them from wrongful use.)

Repairs and Replacements

Gatan will, at its option, either repair or replace defective instruments or components with conforming goods. Repair or replacement of products or parts under warranty does not extend the original warranty period. With the exception of consumable and maintenance items, the replacement parts or products used on instruments out of warranty are themselves warranted to be free of defects in materials and workmanship for 90 days.

Any products, part, or assembly returned to Gatan for examination or repair shall have Gatan’s prior approval, with the customer requesting a Returned Goods Authorization (RGA) approval. This RGA and the associated RGA number may be obtained through Gatan Service or directly from Gatan’s Warrendale facility at 724-776-5260. If the item is not under warranty, to obtain an RGA, the customer must provide a Purchase Order (PO) for the repair. If the item is under warranty and the customer is requesting an expedited exchange, as may be the case for a printed cir-cuit board, a PO will be required. A credit against this PO will be issued by Gatan upon receipt of the item as returned in accordance with the RGA instructions. The returned item should be shipped prepaid by the customer with the RGA number clearly marked on the exterior of the shipping container and on the enclosed shipping documents. If the returned item is under warranty, return transportation will be prepaid by Gatan. If the returned item is not under warranty, return transportation will be charged to the customer.

Warranty Limitations

The warranty does not cover:

1. Parts and accessories which are expendable or consumable in the normal operation of the instrument.2. Any loss, damage, and/or instrument malfunction resulting from shipping or storage, accident (fire, flood, or similar catastrophes normally

covered by insurance), abuse, alteration, misuse, neglect, or breakage or abuse of parts by User.3. Operation other than in accordance with correct operational procedures and environmental and electrical specifications.4. Performance to specifications or safety of use (including X-ray emissions) if the unit is physically installed on, used in conjunction with, or

used as part of a third party's equipment and is not installed by a Gatan service engineer. 5. Performance to specifications or safety of use (including X-ray emissions) as a result of the use of Gatan's equipment with that of a third party

due to the third party's product design.6. Modification of, or tampering with, the system.7. Improper or inadequate care, maintenance, adjustment, or calibration by User.8. User-induced contamination or leaks.9. Any loss, damage, and/or instruments malfunction resulting from use of User-supplied software, hardware, interfaces, or consumables other

than those specified by Gatan.

Warranty Exclusions

In the course of normal use and maintenance, certain parts have finite lifetimes. For this reason, the consumables, wear, and maintenance parts as specified in Gatan's operating manuals carry a 90-day warranty unless otherwise specified.

Post Warranty Period Support and Product Obsolescence

After the expiration of the warranty period described above, Gatan will provide service support for Gatan manufactured products at Gatan’s service labor rates and parts pricing in effect at the time of the repair. Gatan will continue to provide billable service support for the products for a period of three years after discontinuance or design obsolescence by Gatan. After this three year period, service support will be offered at the sole discre-tion of Gatan.

Liability Limitations

This warranty is in lieu of and excludes all other expressed or implied warranties, including (but not limited to) warranties of merchantability of fitness for a particular purpose. Under no circumstances will Gatan Inc. or Gatan International be liable for any direct, indirect, special, inciden-tal or consequential damages (including lost profit) or loss of any kind, whether based on warranty, contract, tort, or any other legal theory. The limits of Gatan liability in any dispute shall be the price received from the purchaser for the specific equipment at issue. The laws of the state of Pennsylvania apply to all aspects of this warranty.

Gatan Distributors and Agents

ArgentinaCoasin S.A.Virrey Del Pino 40711430 Buenos Aires, Argentina 011-54-1-551-9361 552-3485/3185/5248011-54-1-555-3321

Electrargen S.R.L.Amenabar 653 Piso 9° Of. 271426 Buenos Aires, Argentina011-54-1-553-5376011-54-1-555-5376

AustraliaThomson Scientific Inst.216 Drummond StreetCarlton, VIC 3053, Australia011-61-3-9663-2738011-61-3-9663-3680

BrazilFugiwara Enterprises Rua Desembargador Guimaraes, 5305002-050 S. Paulo, SP, Brazil011-55-11-3675-3605011-55-11-3675-3603

CanadaSoquelec Limited5757 Cavendish Blvd., Suite 101Montreal, QuebecH4W 2W8, Canada1-514-482-64271-514-482-1929

Soquelec Ltd.P.O. Box 42056128 Queen Street SouthMississauga, OntarioL5M 4Z0, Canada1-905-569-66131-905-569-7171

DenmarkAx-LabStrandboulevarden 64DK-1200 Kobenhavn, Denmark011-045-3543-1881011-045-3543-0073

FranceEloise s.a.r.l.Paris Nord II33, Rue des Chardonnerets B.P. 6003995971 Roissy CDG Cedex, France011-33-1-4863-2000011-33-1-4163-2025

Fondis ElectronicQuarter de l’Europe4 rue Galilee78280 Guyancourt, France011-33-13452-1030011-33-13057-3325

GreeceN. Asteriadis S.A.12, Solomou str.,P.O.Box: 26 140GR-100 22 Athens, Greece011-301-38-40010 / 301-38-40031011-301-36-47059

HungaryAuro-Science Consulting Kft.1031 Budapest, Varosfal Koz 5.Budapest, Hungary011-36-1-173-0166011-36-1-242-1390011-36-1-242-1391

IndiaHarley InstrumentsPlot 4, Survey 47Poona-Satara Road, Poona 411 009, India011-91-212-435-962 011-91-212-477-843

Toshniwal Bros. (SR) Pvt. Ltd.#11, AECS Layout, 4th Main, 3rd CrossGeddalshalli, Sanjaynager 1 StageBangalore 560-094, India011-91-80-333-7983011-91-80 333-6757

IsraelEisenberg Brothers Ltd.13 Gush Etzion StreetGiv’at Shmuel 54030Israel011-972-3-532-1715011-972-3-532-5696 General Engineers Ltd.P O Box 557Herzliya 46105, Israel

Italy2M Strumenti SrlVia Pontano 900141 Roma, Italy011-39-68689-5319011-39-68689-5241

JapanEnomoto Analytical & Vacuum Instr. Co. Ltd.1593-2 Ishihata, Mizuho-MachiNishitama-gun, Tokyo 190-12, Japan011-81-425-56-3577011-81-425-57-1322

Nippon Tekno Co., Ltd. - JapanYoyogi-Annex Bldg 2F, 2-9, 1-ChomeYoyogi, Shibuya-ku, Tokyo 151, Japan011-813-3320-3311011-813-3320-3788

KoreaTech Kor Engineering Co, LtdRm 1003 Kumgang Bldg. 14-35Youido-Dong, Youngdungpo-KuSeoul, Korea011-82-2-784-4383 011-82-2-784-2770

KuwaitYusuf Ibrahim Alganin & Co. W.L.L.Medical & Scientific Equip. Dept.P.O.Box 43513005 Safat, Kuwait011-965-484-2322 / 011-965-564-0809011-965-484-4954 / 011-965-483-3612

MexicoIACSA de C.V.Insurgentes Sur #3807-3Tlalpan, CP 14269Mexico, D.F.Mexico011-525-666-4149011-525-666-4149

Instrumentos OPTO-electronicosLarga Distnacia No. 87Col. Ampliacion SinatelMexico DF 09470, Mexico011-525-672-2537011-525-672-2616

NorwayMicron ASBox 1133 Cort Adlers Gate 8N-1510 Moss, Norway011-47-6927-4690011-47-6927-1210

PakistanAIDL8/5th Fl. Office Tower Rimpa PlazaMA Jinnah Road Karachi-74400, Pakistan011-92-21-7729361011-92-21-7736582

Analytical Measuring SystemsF-8/1-5 KDA Scheme No. 1Main Tipu Sultan RoadKarachi 75350, Pakistan92-21-452-518592-21-452-5187

People’s Republic of ChinaNippon Tekno Co., Ltd. - ChinaNo. 871 Poly Plaza Off. Bldg No. 14 Dongzhimen NandajieBeijing,100027, PRC010-6595-8494010-6595-8493

Valtex - Beijing Rm 428 Da Bei Office Bldg. Bldg #1Nan Lang Jia Yuan, Chaoyang DistrictBeijing, 10002, PRC011-86-10-6507-3835011-86-10-6507-5265

PortugalLabometerEquipamento de Laboratorio, LDAR. Duque de Palmela 30-1 G/FP-1200 Lisboa, Portugal011-351-353-7284011-351-389-5709011-351-1352-5066

Republic of South Africa OEN Enterprises Ltd. (So Afr)P O Box 682991Bryanston 2021Johannesburg, South Africa011 27-11-789 -1167011 27-11 -792 6996

Gatan Distributors and Agents

Republic of South Africa Premier Technologies (PTY) Ltd. (So Afr.)12 Executive CityIndustrial Road, Kya SandRandburg 2162Republic of South Africa011-27-11-466-1313011 27-11-466-1410

SingaporeAntech Instruments Pte Ltd.Baleatier Estate Post OfficePO Box 451Singapore 913202, Singapore011-65-251-2788011-65-251-2755

Image Transforms Pte, Ltd (Hitachi Rep)65 Science Park DriveThe FlemingSingapore 118251, Singapore011-65-779-3735011-65-779-3748

SpainREGO & CIA , SA Aragoneses 13 28100 Alcobendas (Pol Ind)Madrid, Spain011-341-6630500011-341-6630545

SwedenAtema InstrumentGilbostraket 8S-192 68 Sollentuna, Sweden011-46-8-626-8365011-46-8-626-8355

SwitzerlandGloor Instruments AGHerr Fritz GloorBrauereistrasse 10CH-8610 Uster, Switzerland011-411-940-9955011-411-940-9914

Republic of ChinaScientech Corporation8F, No. 200, Keelung Road, Sec. 1Taipei, Taiwan, R.O.C.011-886-2-729-6879011-886-2-722-3409

ThailandBecthai Bangkok Equip & Chem Co Ltd308/1 Phaholyothin RoadBangkok 10400, Thailand011-662-615-2130-44011-662-271-4533-34

NetherlandsEDAX Int’l Analytical SystemsRingbaan Noord 103P.O. Box 4144NL-5004 JC Tilburg, The Netherlands011-31-13536-4000011-31-13535-6279

TurkeyTekserBagdat Cad No. 300/6Erenkoy, Istanbul, Turkey011-90-216-302-4116011-90-216-356-8677

VenezuelaFerrum CompaniaEdificio Ferrum Calle 2-A, Calle 3-B La Urbina, Caracas, Venezuela 70624011-58-2-2411010011-58-2-2410115

DECLARATION OF CONFORMITY(According to ISO/IEC GUIDE 22 and EN 45014)

Manufacturer’s Name: Gatan Inc.

Manufacturer’s Address: 5933 Coronado LanePleasanton, CA 94588 U.S.A.

DECLARES THAT THE PRODUCT

Product Name: Precision Ion Polishing System

Model Number: 691

Serial Numbers:

CONFORMS TO THE FOLLOWING EUROPEAN DIRECTIVES

Low Voltage Directive 73/23/EECEMC Directive 81/336/EECAs Modified by Directive 93/68/EEC

Supplementary Information:

Safety: EN 61010-1:1991/A2:1995

EMC: EN 55022:Class A/Class BEN 50082-1:1992EN 50081-1:1992

I, the undersigned, hereby declare that the equipment specified above conforms to the above Di-rectives and Standards.

Place: Pleasanton, CA Signature:

Date: November 1998 Full Name:Robert Buchanan

Position: President and CEO

precision ion polishing system user’s guidephome.postech.ac.kr/user/aemn/download/pips3.pdfpips...

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