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Predict ® Service Program by ZEISS Customized support program for your individual needs Product Information Interactive PDF INTERNET-LINK Version 1.0

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Predict® Service Program by ZEISSCustomized support program for your individual needs

Product Information

Interactive PDF

INTERNET-LINK

Version 1.0

2

ZEISS Predict Service ProgramSupport whenever needed

At ZEISS customer care goes beyond warranty. We are committed to sustainyour long-term operations with excellent front-line service based on comprehensiveand flexible support packages. That‘s what ZEISS Predict is all about.

Main Facts

The ZEISS Predict program levers the extensive

knowledge that we have gained over many

years from our worldwide installed base to help

customers improve productivity and reduce costs.

Excellent support and cost effective tool perfor-

mances maximise the return on investment that

you rightly expect after the purchase of capital

equipment.

With a highly skilled and resourced infrastructure

in all major international markets, ZEISS is able

to offer solutions that can target ultimate tool

performance, high uptime, overall effectiveness,

cost of ownership, or indeed all in combination.

The ZEISS Predict program helps you to protect

your investment in leading tools.

We understand very well that our tools sit in your

critical path of mask manufacture, often being

“one of a kind” systems. For this reason ZEISS has

developed concise and beneficial maintenance

plans within the ZEISS Predict program framework

in order to minimise unplanned events.

Together with our three key spares hubs in Europe

(Germany), Asia (Taiwan) and USA (San Francisco),

ZEISS Predict provides the highest assurance for

seamless manufacturing.

Our expertise for your ultimate tool

performance

Predict® Service

Program by ZEISS

Customized support

program for your

individual needs

› Main Facts

› Predict® Program Levels

› Additional

service offerings

› ZEISS

Predict® Program LevelsFull Flexibility by individual Service Programs customized to your needs

The program can include weekly, monthly, quarterly, half annually and annually services, as defined in the maintenance schedule.

Your needs

Our solutions

Sustain tool stability

Technician on-site labor

Predict® | basic

Labor & PM contract [annual based]

Predict® | advanced

Labor & PM contract [multiple year based]

Predict® | proficient

PM contract including PM labour plus high risk parts coverage multiple years based

Predict® | premium

Labor & PM & parts coverage contract [multiple year based]

Predict® | premium plus

Labor & PM & parts coverage contract [multiple year based] + individual options

PM Parts & consumables Multiple year PM parts Unpredictable failing parts

Cover wear & tear in time Minimize /control risks

3

Predict® Service

Program by ZEISS

Customized support

program for your

individual needs

› Main Facts

› Predict® Program

Levels

› Additional

service offerings

› ZEISS

Predict® Program LevelsChoose your Service Program to achieve optimum performance

Predict® | basic

With ZEISS Predict | basic we ensure timely access

to spares and support priority along with high tool

performance and availability at the lowest cost.

Predict® | basic covers all required wearing parts

and labor hours to perform our proactive annual

maintenance program on an annually basis.

Predict® | advanced

Choosing ZEISS Predict | advanced enables you

to reduce the risk of service costs by covering

proactive exchange and extend warranty of

components and parts with an guaranteed MTBF

and high uptime of ≤ 3 years. Predict® | advanced

includes our basic package plus it covers all service

costs to perform proactive parts exchange of

defined parts identified as having lifetimes of up

to 3 years (annually plus multi annually PM parts

exchange).

Predict® | proficient

With ZEISS Predict | proficient

we provide a product for our

customers owning tools that

have been in operation for five

years or more. The Predict® | proficient concept is

a step beyond Predict® | basic and can include all

labor in addition to so-called “risk” parts that have

been identified during any product generation’s

time in the field. In this way you benefit from the

best balance of tool availability and affordabillity

for more mature systems.

Predict® | premium

If you are looking for a fixed cost of ownership

and no risk solution along with high uptime, we

are pleased to offer you ZEISS Predict | premium.

Take complete control of the cost by including

labor costs, travel costs and costs for spare parts

in your Predict® | premium service agreement.

We make your service outlay entirely predictable.

Your budget is not affected by unforeseen costs:

maximum performance and availability are

factored into a single superior protection plan.

This contract is available for all our systems.

Predict® | premium plus

As a holder of a ZEISS Predict | premium plus

you will always benefit from priority treatment.

We are providing fastest possible on site

engineering response and spare parts delivery.

This includes engineers and consignment stock

dedicated at your facility and is offered in

addition to the Predict® | premium package.

4

Predict® Service

Program by ZEISS

Customized support

program for your

individual needs

› Main Facts

› Predict® Program

Levels

› Additional

service offerings

› ZEISS

Predict® Program LevelsFull Flexibility by individual Service Programs customized to your needs

High uptime, MTBF

Priority escalation

Priority parts delivery

Matching to original spec.

Optimized local parts stock

CIP of hardware and software updates

< 4h response time

< 2h response time

Covering high risk parts failure

Covering all tool down events

Majority of parts delivery < 24h

Majority of parts delivery < 4h

Predict® | basic

x

x

x

x

x

x

Predict® | advanced

x

x

x

x

x

x

x

Predict® | proficient

x

x

x

x

x

x

x

x

Predict® | premium

x

x

x

x

x

x

x

x

x

x

Predict® | premium plus

x

x

x

x

x

x

N/A

x

x

x

x

5

Predict® Service

Program by ZEISS

Customized support

program for your

individual needs

› Main Facts

› Predict® Program

Levels

› Additional

service offerings

› ZEISS

6

Additional service offeringsChoose your Service Program to achieve optimum performance

Upgrades Business

Some of our photomask systems are developed to

have additional capabilities, often with an upgrade

path to maximise their application space and

usage in the market. Such options or upgrades can

address both technical capability and productivity

of our equipment.

Refurbishment

Refurbishing is ideal for equipment in the field

which is used for many years and across many

technologies. Combining high skill levels with

state of the art testing and support can ensure

that every tool conforms to original specifications,

meets all relevant safety standards and includes

the latest licenced system software.

Relocation

Due to the dynamic marketplace and longevity

of ZEISS equipment, you might find yourself in

the situation were you require the relocation of

your systems. Whether this be within a single

cleanroom, or right around the globe – you can be

confident that ZEISS has the infrastructure to make

this happen. Right from a simple installation, up to

refurbishment with a commitment to the original

specification.

Consulting

As an integral part of Predict® we offer consulting

services that can act not only on the tool, but

also at the fab level. Using the extensive industry

knowledge of our specialists we have the ability

to uncover solutions that are not always visible

to single organisations. Such can include specific

maintenance activities or process optimization for

tools.

Spares

For those customers who demand additional peace

of mind ZEISS is able to tailor spares packages on

all product lines that can be made available and

shipped to the field. Customers who enter into

the Predict® program can benefit from preferential

pricing for such packages. Together with our three

key spare hubs in Europe, Asia and the US the

program operates fast and smooth.

On-Site

Depending upon your requirements and location,

from time to time it will be sensible to invest in a

support resource that is dedicated to a particular

facility. Such an additional expert can work side by

side with your engineers building a long term and

effective relationship that has been shown to be

successful in all regions.

If you would like to find out more, then please

contact your local Service Representative, who will

be happy to explain the ZEISS Predict program in

more detail.

Predict® Service

Program by ZEISS

Customized support

program for your

individual needs

› Main Facts

› Predict® Program Levels

› Additional

service offerings

› ZEISS

7

ZEISS dense global Sales and Service Network

About ZEISSZEISS is an internationally leading technology enterprise operating in the optics and optoelectronics industries. ZEISS develops and distributes lithography optics, measuring technology, microscopes, medical technology, eyeglass lenses, camera and cine lenses, binoculars and planetarium technology. With its solutions, the company constantly advances the world of optics and helps shape technological progress. The company is divided up into the six business groups Industrial Metrology, Microscopy, Medical Technology, Vision Care, Consumer Optics and Semiconductor Manufacturing Technology. ZEISS is represented in over 40 countries – with around 30 production sites, over 50 sales and service locations and about 25 research and development facilities.

About Semiconductor Manufacturing Technology With a broad product portfolio and globally leading know-how in the fields of lithography and optical modules, the business group covers key processes in microchip production. Semiconductor Manufacturing Technology includes the Semiconductor Manufacturing Optics and Semiconductor Metrology Systems strategic business units. The business group generated revenues of 1.047 billion euros in fiscal year 2013/14 and has a workforce of over 2,900 people. The business group is headquartered in Oberkochen.

For more information please visit us at www.zeiss.com/mask-solutions

International Spare Part Hub

ZEISS Representation/Distributor

Spare parts main flow

Spare parts flow

ZEISS SBE

Carl Zeiss SMT GmbH

ZEISS Korea

ZEISS Japan

Customer Care Centre, TaiwanZEISS Israel

Taiwan Instruments Co. Ltd.

Predict® Service

Program by ZEISS

Customized support

program for your

individual needs

› Main Facts

› Predict® Program Levels

› Additional

service offerings

› ZEISS

8

The moment your vision becomes reality.This is the moment we work for.

// PERFECTION MADE BY ZEISS

Predict® Service

Program by ZEISS

Customized support

program for your

individual needs

› Main Facts

› Predict® Program Levels

› Additional

service offerings

› ZEISS

Carl Zeiss SMT GmbHStrategic Business Unit SMS ZEISS GroupCarl-Zeiss-Promenade 1007745 Jena GermanyTel. +49 3641 64 2563Fax +49 3641 64 [email protected]

Carl Zeiss Co. Ltd. ZEISS Group22 Honshio-cho, Shinjuku-kuTokyo 160-0003JapanTel. +81 3 3355 0256Fax +81 3 3358 [email protected]

facebook.com/zeisssmt

www.zeiss.com/smt/youtube

Carl Zeiss SBE, LLC ZEISS GroupOne Zeiss Drive Thornwood, NY 10594USATel. +1 855 253 8126 Fax +1 914 459 [email protected]

Carl Zeiss Co. Ltd.ZEISS Group9F Kyoungdong Building Sunae-dongGyeonggi-do463825 Bundang-gu Seongnam-siSouth KoreaTel. +82 31 711 5961Fax +82 31 711 [email protected]

Taiwan Instrument Co. Ltd.Customer Care Center15F-2, No. 27, Guanxin Rd.East Dist.Hsinchu City 300TaiwanTel. +886 2 2772 3333Fax +886 2 2731 [email protected]

www.zeiss.com/mask-solutions

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Learn more under www.zeiss.com/mask-solutions

Predict® Service

Program by ZEISS

Customized support

program for your

individual needs

› Main Facts

› Predict® Program Levels

› Additional

service offerings

› ZEISS