probing beyond 100nm: electrical, mechanical and biological · 04.06.2006 · probing beyond 100nm:...
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Sematech Product Analysis Forum: August 19, 2004 2006/6/4
Zyvex Confidential1
Zyvex Corporation: Confidential
Probing Beyond 100nm: Electrical, Mechanical and
Biological
Lerwen Liu, PhDBusiness Development (Asia Pacific)
April, 2006
Zyvex Corporation: Confidential
Founded by Mr James Von Ehrwho invested USD50M in nanotech
Zyvex is the world’s first molecular nanotechnology company.
Our vision is to be the leading worldwide supplier of tools, products, and services that enable adaptable, affordable, and molecularly precise manufacturing.
Sematech Product Analysis Forum: August 19, 2004 2006/6/4
Zyvex Confidential2
Zyvex Corporation: Confidential
Corporate Introduction
• Privately held company; Founded in 1997• Located in Richardson, Texas• Detailed Five-Year
Strategic Business and Marketing plans• Detailed Technology Roadmap• Aggressive IP strategy• Extensive list of scientific and business publications
Zyvex Corporation: Confidential
Resources
• Headcount: 64 and increasing— 14 Ph.D.s— Engineers, scientists,
technical management• 44,000 sq. ft. facility• Class 1000 clean room• Several fully equipped
laboratories• CNC-equipped machine shop• Equipment: SEM, TEM, AFM,
SPM, UHV-STM, numerous lasers, MEMS motion analyzer, electrical testing station
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Zyvex Corporation: Confidential
Intellectual Property
Zyvex patents• 26 U.S. patents issued• 37 patents pending• 5 notifications of allowance• 57 International patents pending
Categories• Molecular nanotechnology• Microassembly technology• Nanostructure process techniques• Micro- and nanodevices• Microconnector technology• Nanomaterials
Zyvex Corporation: Confidential
CustomersPartial List
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Zyvex Corporation: Confidential
Alliances Partial List
Berkeley Sensor & Actuator Center
XEI Scientific
Zyvex Corporation: Confidential
Technology Base
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Science Technology DevelopmentMolecularly
Precise Manufacturing
MolecularAssembler
MolecularDevices &Materials
MolecularManipulation
NanotubeDispersion
Control &Automation
PatternedAtomic Layer
Epitaxy NanotubeSuper Fibers
MolecularlyPrecise
TipsMechanoChemistry
MolecularBinding
Sites
PotentialProducts
Control &Automation
MEMSDevices
MEMSDesignTools
MEMSAssembler
MEMSParallel
Assembler
NEMSAssembler
NanoFabrication
Process
NIST-ATP
Nano-manipulator
NEMSParallel
Assembler
1998 2000 2002 2004 2006 2008 20122010
Top Down
Bottom Up
Zyvex Corporation: Confidential
Zyvex Technologies
• Nanomaterials— CNT functionalization— CNT processing
• Structures— Assembly of microcomponents
(MEMS-based) for integrated microsystems
• Tools (S100, F100, A100, L100)— Nanomanipulators for
characterization and manipulation of nanostuctures in SEM, FIB, optical microscopes
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Zyvex Corporation: Confidential
The Zyvex Approach:NanoSolve™ Materials
Zyvex Corporation: Confidential
Commercially Available Applications
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Zyvex Corporation: Confidential
The Zyvex Approach:MicroAssembly Program
Zyvex Corporation: Confidential
Small-scale assembly
10nm1µm
End-effector (Tools)
100nm10µm 1nm 0.1nm
Assemblies (structures)
Systems (Tools)
MEMS / NEMS / micro
assembly
Nanoassembly
Future atomically
precise manufac-
turing
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Zyvex Corporation: Confidential
The Zyvex Approach:NanoWorks™ Tools
Zyvex Corporation: Confidential
Zyvex NanoWorks™ Tools
• Technology Platform with several configurations—S100 Nanomanipulator System—F100 Nanomanipulator System—L100 Nanomanipulator System—A100 Assembly System—KZ100 Probing System— IC Nanoprobing System
• Subcomponents—NanoEffector™ Probes—NanoEffector™ Microgrippers—mDriver™ 1000 MEMS Driving System—tDriver™1600 MEMS Driving Station—pDriver™ Piezo Motor Driver
Sematech Product Analysis Forum: August 19, 2004 2006/6/4
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Zyvex Corporation: Confidential
Zyvex NanoWorks™ Tools
• 3-Dimensional control• Illuminated keypad• Control software runs
on Windows
Zyvex Corporation: Confidential
Zyvex NanoWorks™ Tools• Complete Solution
—Includes:– Prober– Zyvex Proprietary Probe Tips– Exclusive Anti-Contamination Module– Keithley 4200– Zyvex Control Software (Full system integration)– Zyvex DataViewer Software– Installation/Training and Service from Zyvex
• Future Advancements/Roadmap—Closed loop control system —Re-positional modular robots—Step and repeat capability
Sematech Product Analysis Forum: August 19, 2004 2006/6/4
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Zyvex Corporation: Confidential
Zyvex NanoWorks™ Tools• Current Technology:
— Successfully probing 65nm contacts– 5 nm positional accuracy– Linear x,y,z motion– Single robot provides both coarse and fine motion
— Keithley Partner– IC characterization in conjunction with Keithley 4200– 1 pA measurement resolution
— Exclusive Anti-Contamination Unit from XEI Scientific– Reduces SEM/FIB pump-down time– Insures clean SEM/FIB environment for ohmic contact
— Zyvex software seamlessly integrates entire system– Windows based software with precision joystick– SEM/FIB control if desired– DataViewer software collects and archives data automatically
and remotely if desired
Zyvex Corporation: Confidential
XEI ScientificAnti-Contamination System
O2 + O+ --> O2+ + O
O2+ + e- --> O + O
No Cleaning Done 10 minutes of ACU Cleaning
Sematech Product Analysis Forum: August 19, 2004 2006/6/4
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Zyvex Corporation: Confidential
Probes and IC at 0 deg. Tilt
Zyvex Corporation: Confidential
KZ100 IC nanoprobing system
Zyvex offers complete probing solutions for the semiconductor failure analysis industry.
With over 20 systems worldwide, the KZ100 IC Nanoprobing System is the preferred choice in transistor characterization.
Sematech Product Analysis Forum: August 19, 2004 2006/6/4
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Zyvex Corporation: Confidential
IC Probing• FA labs are concerned that
probing with FIB pads affects the transistor characteristic
• Characterize transistors in die at contact level
• Find and characterize non visual fails, which are difficult to diagnose with other techniques
• Probe 90 nm node technology and below (45 nm and shrinking)
• Probe copper and aluminum metal 1 layers
Zyvex Corporation: Confidential
IC Probing of a 65nm Node
Sematech Product Analysis Forum: August 19, 2004 2006/6/4
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Zyvex Corporation: Confidential
90 nm Data – Threshold Voltage
Id vs Vgs
0.00E+00
1.00E-04
2.00E-04
3.00E-04
4.00E-04
5.00E-04
6.00E-04
7.00E-04
8.00E-04
9.00E-04
1.00E-03
0 0.2 0.4 0.6 0.8 1 1.2 1.4 1.6
Gate Voltage
Dra
in C
urre
nt
Zyvex Corporation: Confidential
90 nm Data – Family of Curves
Id vs Vds
0.00E+00
1.00E-04
2.00E-04
3.00E-04
4.00E-04
5.00E-04
6.00E-04
7.00E-04
8.00E-04
9.00E-04
1.00E-03
0 0.2 0.4 0.6 0.8 1 1.2 1.4 1.6
Drain Voltage
Dra
in C
urre
nt
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Zyvex Corporation: Confidential
90 nm data – low currentZero Gate Voltage Id vs Vds
0.00E+00
1.00E-09
2.00E-09
3.00E-09
4.00E-09
5.00E-09
6.00E-09
7.00E-09
8.00E-09
0 0.2 0.4 0.6 0.8 1 1.2 1.4 1.6
Drain Voltage
Dra
in C
urre
nt
Low Voltage Id vs. Vds
0.00E+00
1.00E-06
2.00E-06
3.00E-06
4.00E-06
5.00E-06
6.00E-06
7.00E-06
0 0.2 0.4 0.6 0.8 1 1.2 1.4 1.6
Drain Voltage
Dra
in C
urre
nt
Zyvex Corporation: Confidential
SEM compatibility
SEMLEO Supra 35VP
SEMLEO Supra 25
SEMLEO Ultra 55
DBLEO 1540 XB
SEMLEO 1430 series
SEMLEO 1450 series
SEMLEO 1530 series
SEMLEO 1550 series
SEMJEOL JSM-5800
SEMJEOL JSM-6400
SEMJEOL JSM-6500F
SEMJEOL JSM-6060
Type 1 SEMHitachi S-4500
Type 2 SEMHitachi S-4500
Type 2 SEMHitachi S-4700
Type 2 SEMHitachi S-4800
SEMAmray 1830
FIBFEI FIB200 XP
SEMFEI Quanta 400
FEI Strata 400
FIBFEI Micrion 2500
DBFEI DB620
DBFEI DB237
DBFEI DB235
FEI Quanta 600
FIBFEI XL40
SEMFEI XL30
Sematech Product Analysis Forum: August 19, 2004 2006/6/4
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Zyvex Corporation: Confidential
Manipulating the nanoworld• Nanomaterials/Nanostructure
s characterization
• Manipulating individual nanoscale structures
• BioNano manipulation
• Chip scale probing
• Manipulating individual structures for TEM sample preparation, device fabrication, and basic research
Zyvex Corporation: Confidential
Nanomaterials characterization
• Electrically probe individual nanostructures with ohmic contact
• Qualitatively probe mechanical properties of individual nanostructures
• Versatile platform allows for user customization of end effectors— Quantitative mechanical
measurements— Microgripping— And much more
Sematech Product Analysis Forum: August 19, 2004 2006/6/4
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Zyvex Corporation: Confidential
Ge Nanowire Cleaving for TEM
Zyvex Corporation: Confidential
Nanotube Characterization
Sematech Product Analysis Forum: August 19, 2004 2006/6/4
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Zyvex Corporation: Confidential
Ge Nanowire electrical probing
Zyvex Corporation: Confidential
BioNano at a glance
• Characterize individual cells and individual organelles
• Combine multiple techniques (patch clamping, microinjection, and nanosurgery)
• Probe cells at a resolution never seen before in an optical microscope (Fluorescence)
Sematech Product Analysis Forum: August 19, 2004 2006/6/4
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Zyvex Corporation: Confidential
Bio applications
• Cellular nanosurgery
• Micro and nano injection
• Precise and multiple patch clamping
• Cellular electrophysiology
• Intracellular biosensing
Zyvex Corporation: Confidential
Life Sciences: Collagen Fiber
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Zyvex Corporation: Confidential
TEM Sample Prep
1 2 3
6
4
5 7 8
Zyvex Corporation: Confidential
Conclusions
Advantages• Compatible with SEM and FIB platform• 5 nanometer resolution movement• Linear Motion in X,Y,Z• Easy to learn, easy to use Joystick and computer control • Utilizes controlled vacuum environment• Proprietary NanoEffector Probes (<50 nm tip radius)
• Complete System Solution —Seamless Interface to Keithley 4200 —Microscope Controls—XEI Anti-Contamination Unit—Applications development, support, and service from
our PhDs and engineers.
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Zyvex Corporation: Confidential
For more information:
Toll free: 1.877.998.3999
[email protected], [email protected]
www.zyvex.com
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Zyvex Corporation: Confidential
Publications (truncated list)
• www.zyvex.com – Applications Notes (truncated list)— Rishi Gupta et al Physical Property Characterization of Nanotubes, Nanowires,
and Nanocoils Using a Zyvex S100 Nanomanipulator System www.zyvex.comApplication Note 9707.
— Richard Stallcup II Probing transistors at the contact level in integrated circuitswww.zyvex.com Application Note 9708.
• MinFeng Yu et al Three-dimensional manipulation of carbon nanotubes under a scanning electron microscope 1999 Nanotechnology 10 244-252.
• MinFeng Yu et al 2002 Nanowire nonlinear mechanical system: techniques and experiment APS Annual March Meeting #M25.006.
• Kim Tuck et al 2004 FIB prepared TEM sample lift-out using MEMS grippersMicroscopy and MicroAnalysis 10(Suppl 2) 1144-1145.
• George Skidmore et al 2004 Assembly technology across multiple length scales from the microscale to the nanoscale 17th IEEE International Proceedings on Micro Electro Mechanical Systems 588-592.
Zyvex Corporation: Confidential
Upgrades and extensions
• Heated/Cooled Stage (Model 1; -10 to 135 C)
• Low Noise upgrade (Base noise < 10 fA, Leakage < 400 fA @ 5V)
• Encoded XYZ sample stage (select SEM models)
Sematech Product Analysis Forum: August 19, 2004 2006/6/4
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Zyvex Corporation: Confidential
• Compatible with SEM and FIB platform• 5 nanometer resolution movement• Linear motion in X,Y,Z• Easy to learn, easy to use joystick and
computer control • Utilizes controlled vacuum environment• Proprietary NanoEffector probes (<50 nm tip
radius)
Advantages
Zyvex Corporation: Confidential
• Complete system solution —Seamless interface to Keithley 4200 —Microscope control via software—Advanced software for data capture and
archiving—Anti-Contamination Unit—Applications development, support, and
service from our PhDs and engineers
Advantages
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Zyvex Corporation: Confidential
TEM sample preparation system
• Available on FIB and dual beam platforms
• NanoEffector grippers• 6 samples per hour lift out to
placement• 1 welding step• Rotation for previewing
samples• STEM detection capable• Compact design• 4 DOF system• Patented process