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FREMONT
FORT COLLINSVICTORIA
BUTLERMIRIBEL
TERRASSABINASCO
DRESDEN
NASHIK
PENANG
SINGAPORE
TAIPEI
SEOUL
OSAKABEIJING
SHANGHAI
TOKYO
TAICHUNG CITY
KULIM
MOSCOW
PHOENIXTOLEDO
CHANDLERPERRYSBURG
CANADA
RUSSIA
CHINA
AFRICA
USA
WORLDWIDE SALES AND SERVICE VON ARDENNE GmbH (headquarters) I Am Hahnweg 8 I 01328 DRESDEN I GERMANYSales: +49 (0) 351 2637 342 I [email protected] Service: +49 (0) 351 2637 9400 I [email protected]
VON ARDENNE Vacuum Equipment (Shanghai) Co., Ltd. I +86 21 6173 0210 I +86 21 6173 0200 I [email protected]; [email protected]
VON ARDENNE Malaysia Sdn. Bhd. I +60 4408 0080 I +60 4403 7363 I [email protected]; [email protected]
VON ARDENNE Japan Co., Ltd. I Tokyo office I +81 3 6435 1700 I +81 3 6435 1699 I [email protected]; [email protected]
VON ARDENNE Japan Co., Ltd. I Osaka office I +81 6 6324 4600 I +81 6 6324 8870 I [email protected]; [email protected]
VON ARDENNE North America, Inc. I Ohio office I +1 419 386 2789 I +1 419 873 6661 I [email protected]; [email protected]
VON ARDENNE North America, Inc. I Arizona office I +1 480 726 5470 I +1 480 855 0947 I [email protected]; [email protected]
VON ARDENNE develops and manufactures industrial equipment for vacuum coatings on materials such as glass, wafers, metal strip and polymer fi lms. These coatings give the surfaces new functional properties and can be between one nanometer and a few micrometers thin, depending on the application.
Our customers use these materials to make high-quality products such as architectural glass, absorbers and absorber tubes for solar-thermal power plants, refl ectors for lighting systems, displays for smartphones and touchscreens, solar modules and heat protection window fi lm for automotive glass.
We supply our customers with technologically sophisticated vacuum coating systems, extensive expertise and global service. The key components are developed and manufactured by VON ARDENNE itself.
Systems and components made by VON ARDENNE make a valuable contribution to protecting the environment. They are vital for manufacturing products which help to use less energy or to generate energy from renewable resources.
VON ARDENNE WHO WE ARE & WHAT WE DO.
PRODUCTTOPICS
SALES CONTACTS
SERVICE CONTACTS
PRODUCTINDEX COMPONENTS
WORLDWIDE SALES AND SERVICE VON ARDENNE GmbH (headquarters) I Am Hahnweg 8 I 01328 DRESDEN I GERMANYSales: +49 (0) 351 2637 342 I [email protected] Service: +49 (0) 351 2637 9400 I [email protected]
VON ARDENNE Vacuum Equipment (Shanghai) Co., Ltd. I +86 21 6173 0210 I +86 21 6173 0200 I [email protected]; [email protected]
VON ARDENNE Malaysia Sdn. Bhd. I +60 4408 0080 I +60 4403 7363 I [email protected]; [email protected]
VON ARDENNE Japan Co., Ltd. I Tokyo office I +81 3 6435 1700 I +81 3 6435 1699 I [email protected]; [email protected]
VON ARDENNE Japan Co., Ltd. I Osaka office I +81 6 6324 4600 I +81 6 6324 8870 I [email protected]; [email protected]
VON ARDENNE North America, Inc. I Ohio office I +1 419 386 2789 I +1 419 873 6661 I [email protected]; [email protected]
VON ARDENNE North America, Inc. I Arizona office I +1 480 726 5470 I +1 480 855 0947 I [email protected]; [email protected]
VON ARDENNE develops and manufactures industrial equipment for vacuum coatings on materials such as glass, wafers, metal strip and polymer fi lms. These coatings give the surfaces new functional properties and can be between one nanometer and a few micrometers thin, depending on the application.
Our customers use these materials to make high-quality products such as architectural glass, absorbers and absorber tubes for solar-thermal power plants, refl ectors for lighting systems, displays for smartphones and touchscreens, solar modules and heat protection window fi lm for automotive glass.
We supply our customers with technologically sophisticated vacuum coating systems, extensive expertise and global service. The key components are developed and manufactured by VON ARDENNE itself.
Systems and components made by VON ARDENNE make a valuable contribution to protecting the environment. They are vital for manufacturing products which help to use less energy or to generate energy from renewable resources.
VON ARDENNE WHO WE ARE & WHAT WE DO.
PRODUCTTOPICS
SALES CONTACTS
SERVICE CONTACTS
PRODUCTINDEX COMPONENTS
SERVICE HOTLINE +49 (0) 351 2637 9400
SPUTTERING & PUMPING SOLUTION IN ONE KEY COMPONENT
T-SERIES MAGNETRONS
T-SER
IES M
AGNE
TRON
SAD
VANC
ED CO
ATING
EQUIP
MENT
Photos © VON ARDENNE GmbH ENGLISH 04/2017
T-SERIES MAGNETRONS SPUTTERING & PUMPING SOLUTION IN ONE KEY COMPONENT
Thanks to the combination of sputtering and pumping, an indefinite number of sputtering processes can be placed next to each other if they are working in the same mode (metallic or reactive) and within a similar pressure range.
1
This concept has been proven during several large-scale installations in the field, both for Low-E applications and in the photovoltaic industry for a wide range of applications.
2
T-Series Magnetrons are suitable for a wide range of DC and AC processes ranging from 10 kW to 180 kW.3
The T-Series features a fully integrated binary gas manifold with up to 6 segmented trim gas delivery systems with a precise gas mixture and balance and fast reaction times.
4
The single layer uniformity achievable with a RDMT 3750 is below +/-1.0 % depending on the process parameters and the target material.
5
ADVANTAGE OF INTEGRATION:REDUCED FOOTPRINT
Pumping section and sputtering section (Classic concept)
SPUTTERING SECTION WITH PUMPED MAGNETRONS
VON ARDENNE has combined the magnetron sputter source technology with turbomolecular pumps to create a new key component class - the T-Series Magnetrons.
Furthermore, we have equipped the rotatable magnetrons of the T-Series with the new X-Series end blocks.
Into the T-Series Magnetrons such as the Rotatable Dual Magnetron RDMT , we have integrated the state-of-the-art sputter sources with their superior coating uniformities and turbomolecular pumps with the needed pumping speed in close proximity of the process. The result is an independent sputtering and pumping unit.
Similar to the Rotatable Dual Magnetron RDMT , we also offer Wide Single Magnetrons WSMT for planar targets.
T-SERIES MAGNETRONS IN A NUTSHELL
Increase the coating speed Reduce the machine footprint Improve the layer uniformity Suitable for AC and DC processes Available for rotatable and planar magnetrons
Suitable for a wide range of applications Available for retrofits and integration into existing coating systems
Reduce the cost of ownership