production facility - smc corporationca01.smcworld.com/catalog/smc-hp-en/pdf/p-e07-9e-seis.pdf ·...

Clean Room

Exhaust Cleanerfor Clean Room

Production FacilityPneumatic Instrumentation Equipment

Piping Equipment for Facilities

Production FacilityPneumatic Instrumentation Equipment

Piping Equipment for Facilities

Air Piping Line

Water Piping Line Industrial water

(Municipal water) Steam Deionized water/

Chemical liquids

Compressed air Inert gas

(Nitrogen, Argon,etc.)

Tank

FlowSwitch

FlowSwitch

Dryer

Filter

Filter

Compressor

CoolingTower Filter

CompressorRoom

P-E07-9E

In principle, SMC products cannot be used outdoors.

For Pneumatic Control in

Factory AutomationProcess AutomationPAPA FAFAAir Preparation Equipment Pressure Control Equipment Piping Material

Operation Unit

Actuators

Detection Conversion Unit

Air Dryers Air Preparation Filters Fittings/S Couplers Tubing

Industrial Filters

Explosion-proofSpecifications

NAMUR Standards

Relay Electro-Pneumatic Transducer

Booster relay

Electro-pneumatictransducer

Intrinsically safeexplosion-proof

Explosion proof(Flameproof)

IP67

Stainless steel series

Coil tube

Double-layered tube

Longer length tube

Lock-up valve

Lever type

Rotary type

Cylinder

with Positioner

Solenoid Valves Accessories

Pressure Sensors Flow Sensors

Positioners

Compressor

1 2

Production FacilityPneumatic Instrumentation Equipment/Piping Equipment for Facilities

Series KKAFluid

Air, WaterPort size

6A to 50A (1/8 to 11/2)

S Couplers/Stainless Steel 304

Series LQFluid

Deionized water, Chemical liquids, etc.(Please contact SMC for details.)

Applicable tubing O.D. ø3 to ø25

Fluoropolymer Fittings

Clean One-touch Fittings

Series KPFluid

Air, N2, Water (Deionized water)(Please contact SMC for details.)


Series KFFluid

Air, Steam (Brass sleeve)Air, Water (Resin sleeve)


Insert Fittings

Brass sleeve

Resin sleeve

Series KQG2Fluid

Air, Water, SteamApplicable tubing O.D.

ø3.2 to ø16

Stainless Steel 316 One-touch Fittings

Series KQ2Fluid

Air, WaterApplicable tubing O.D.

ø2 to ø16

One-touch Fittings

wAftercoolerqAir Tank

eMain Line Filter

Series ATTank capacity

100 to 3000 LPort size

15A (1/2) to 4B flange

Air-cooled Series HAAApplicable compressor 7.5 to 37 kWAir flow capacity 1000 to 5700 L/min (ANR)Water-cooled Series HAWApplicable compressor 2.2 to 110 kWAir flow capacity 300 to 18000 L/min (ANR)

Series AFFFiltration accuracy

3 µm (99% filtration efficiency)Rated flow

300 to 45000 L/min (ANR)Port size


q w e r t y u

RefrigeratedAir Dryer

AftercoolerMist

Separator

i

Super MistSeparator

Air TankMicro MistSeparator

oOdor

Removal Filter(Deodorization)

Flow SwitchMain Line

Filter

Refrigerant: R134a (HFC) R407C (HFC) Ozone-depleting potential “0”

Series IDF 1E to 370DApplicable compressor 0.75 to 370 kWAir flow capacity 0.10 to 65.0 m3/min (ANR) Series IDU 3E to 75EApplicable compressor 2.2 to 75 kWAir flow capacity 0.32 to 12.4 m3/min (ANR)

rRefrigerated Air Dryer

Series IDF 100FS/125FS/150FSDouble energy saving function seriesApplicable compressor

100, 125, 150 kWAir flow capacity

18.8 to 27.0 m3/min (ANR)

tFlow Switch

Series PF2AMeasurement flow rate (L/min)

1 to 10, 5 to 50, 10 to 100, 20 to 200 50 to 500, 150 to 3000300 to 6000, 600 to 12000

Port size 6A to 50A (1/8 to 2)

Series AMEFiltration accuracy

0.01 µm (99.9% filtration efficiency)Rated flow


6A to 50A (1/8 to 2)

iSuper Mist SeparatoruMicro Mist Separator

oOdor Removal Filter

Series AMFFiltration accuracy




Series AMDFiltration accuracy




Series AMFiltration accuracy



6A to 50A (1/8 to 2)

yMist Separator

“Compressed Air” Line Piping Equipment (Fittings and Tubing)

Series KKFluid Air, WaterApplicable tubing O.D. ø3.2 to ø16Applicable hose I.D./ O.D. 5/8 to 11/16Port size M5 to 25A (3/4)

Series KK130Fluid AirApplicable tubing O.D. ø6 to ø12Applicable hose I.D./ O.D. 5/8 to 11/16Port size 6A to 15A (1/8 to 1/2)

S Couplers

Series H,DL,L,LLFluid

AirApplicable tubing O.D.

ø4 to ø12

Self-align Fittings

Series KQB2Fluid

Air, WaterApplicable tubing O.D.

ø3.2 to ø16

Metal One-touch Fittings

Series KFG2Fluid

Air, Water, SteamApplicable tubing O.D.

ø4 to ø16

Stainless Steel 316 Insert Fittings

SeriesT

TSTU

TUSTUH

TPH,TPSTHTD

TQ

TLTLM

Air, Water, Inert gas, Solvent

Length: Up to 500-meter rolls can be used, but the maximum roll length depends on tube materials and external diameter. Please consult SMC for details. (Made to Order)

Note) Please contact SMC for details.

Series T

Tubing

Water Separator

Series AMGDehumidification rate 99%Rated flow


6A to 50A (1/8 to 2)

500 m reel

Water drop removal

Compressor

Pressure accumulation,

Pulsation attenuation

Particle separation/Filtration

Pressure accumulation,

Pulsation attenuation

Flow rate detection

Water drop removal

Flow rate detection

Oil separation/Filtration



Cooling, Removing water

roughly

Dehumidification


DeodorizationDeodorization


MaterialNylon

Nylon (Soft Nylon)Polyurethane

Polyurethane (Soft Polyurethane)Polyurethane (Hard polyurethane)

Polyolefin-based resinFEP (Fluoropolymer)

Modified PTFE (Soft Fluoropolymer)

Super PFAPFA

FluidAir, Water

Air, Water Note)

Air, WaterAirAir

Air, N2, Water (Deionized water)Note)

Air, Water, Inert gasAir, Water, Inert gas

Deionized water, Chemical liquids, etc.Note)

Air, Water, Inert gas

O.D.ø4 to ø16ø4 to ø16ø2 to ø16ø4 to ø12ø4 to ø12ø4 to ø12ø4 to ø12ø4 to ø12

ø4 to ø12

ø4 to ø19ø2 to ø25

Outer layer: Special nylon resinInner layer: Special fluoropolymer

Cooling, Removing water

roughly

Dehumidification



43

SMC Air Preparation System

HAW

Cooling

Separation, Filtration

Main Line

AT AFF

IDF

HAA orHAW

B

C

D

E

F

G

H

HAA orHAW

Dehumidification

IDU

Sub Line

1234567

Cla

ss

≤ 0.10Not specifiedNot specifiedNot specifiedNot specifiedNot specified

0.10 < d ≤ 0.5100

100000Not specifiedNot specifiedNot specified

0.5 < d ≤ 1.01

100010000

Not specifiedNot specified

1.0 < d ≤ 5.00

10500

100020000

Max. number of particles/1 m3

Particle diameter d µm

NANA

Solid particle

Particlediameterµm

NA

≤ 5≤ 40

Concen-tration

mg/m3

NA

≤ 5≤ 10

1234

Oil

mg/m3

≤ 0.01≤ 0.1≤ 1≤ 5

123456

MoisturePressure dew pointAt air pressure( of 0.7 MPa )

°C≤ –70≤ –40≤ –20≤ +3≤ +7

≤ +10

Cla

ss

Cla

ssIndication: The degree of quality is indicated with 1, 4 and 2 for systems with solid particle “class 1,” moisture “class 4” and oil “class 2.”

Application Moisture

Dewpoint

Moisturecontent

Impurity in compressed air

Sys

tem

no

.

Filt

rati

on

Cle

anlin

ess

Oil

od

or

Qua

lity

grad

eas

sys

tem

(2)

Oil

mis

td

ensi

ty (

1)

Water drop removal air

A•

•

Air blowing (Simple removal of particles)General pneumatic tools

Dry air

Dry air

Dry clean air

Dry clean air

• Used for the same applications as A, when temperature drop in the middle of piping is large.

•

•

General pneumatic equipmentGeneral painting

••••••

High grade paintingSequence control Measurement device InstrumentationDrying and cleaning (Precision parts)Machine tools (Pneumatic bearing)

•

•

Without refrigerated air dryer on the sub lineBuilt-in with equipment (With machine tools, 3-D measurement device, etc.)

Deodorant air

Low dew point clean air

Low dew point clean air(For clean room)

•

•

Stirring, transporting, drying and packagingFood industry (Except direct blowing to foods)

•••••

Drying electric and electronic partsDrying a filling tankTransporting powdersOzone generatorLow temperature actuated equipment

• Blowing semi-conductor parts in the clean room

Note 1) When the inlet oil mist density (compressed air density) is approximately 30 mg/m3 (ANR) or less.Note 2) This describes the grade of compressed air quality based on ISO8573-1: 2001 (JIS B8392-1: 2003), which is the maximum quality grade for the system.

It varies, however, depending on the inlet air conditions.Note 3) Contact SMC since this can be manufactured as a special order (depending on the operating conditions).

3 µmFiltering

efficiency( 99% )

0.3 µmFiltering

efficiency( 99.9% )

0.01 µmFiltering

efficiency( 99.9% )

0.01 µmFiltering

efficiency( 99.99% )

—

Max.1 mg/m3

(ANR)

0.8 ppm

Max.0.1 mg/m3

(ANR)

0.08 ppm

Max.0.01 mg/m3

(ANR)

0.008 ppm

Max.0.004 mg/m3

(ANR)

0.0032 ppm

Max.0.004 mg/m3

(ANR)

0.0032 ppm

Max.0.01 mg/m3

(ANR)

0.008 ppm

—

Particleswith

0.3 µmor more:100 orless/ft3

(35 orless/10 L

(ANR))

Particleswith

0.1 µmor more:

0/6 L

Yes

Yes

No

No

3, -, -

3, 4, -3, 5, -3, 6, -

2, 4, 32, 5, 32, 6, 3

1, 4, 21, 5, 21, 6, 2

1, 4, 11, 5, 11, 6, 1

1, 1, 11, 2, 11, 3, 1

Atmosphericpressure dew point

6°C0.7 MPa

Pressure dew point40°C

Atmosphericpressuredew point

–14 to–23°C

0.7 MPaPressuredew point15 to 3°C


–30 to–60°C

0.7 MPaPressuredew point

–6 to–42°C

7 g/m3

(ANR)

1.7 g/m3

(ANR)to

0.8 g/m3

(ANR)

0.5 g/m3

(ANR)to

0.02 g/m3

(ANR)

(3)

Description

Capacity

Air Tank

AT HAA, HAW IDFAFF

Air Cooled AftercoolerWater Cooled Aftercooler

Main LineFilter Refrigerated Air Dryer

Representative model

Max. inlet air temperature

Filtration (Filtering efficiency)

Outlet oil mist concentration (Max.) (1)

Outlet cleanliness

100°C 60°C

3 µm(99%)

50°C

Flow capacity (L/min (ANR))

1,000 to 5,700300 to 18,000

70°C70°C, 180°C(Varies by model)

300 to 42,000 100 to 65,000100 to 3,000 L

–17°CAt inlet temperature 35°C

IDU

80°C

320 to 12,500


Air Tank

Class 2 pressurevessel

Main Line Filter

Not required when attached to air compressors.

Dehumidification

Applicable air compressors:5.5 kW (7 hp)to 220 kW(300 hp)

HAA

HAW

Refrigerated Air Dryer

Applicable air compressors:7.5 kW (10 hp)to 37 kW (50 hp)



Reciprocating air compressor

Screw air compressor

Outlet air pressure dew point10°C(0.7 MPa, at 35°C)


Refrigerated Air Dryer(High inlet air

temperature type)


Applicable air compressors:2.2 kW (3 hp) to75 kW (100 hp)

Oil con-centra-

tion

Atmospheric pressure dew point [At inlet air pressure of 0.7 MPa]

Pulsation attenuation,Accumulation,

Cooling Select either Air Cooled Aftercooler or Water Cooled Aftercooler

AFF

Required even for screw compressors since the piping of the oil-free type is rusted easily.


Air tank is not required for rotary screw compressors since pulsation is small, but required when it is used to accumulate pressure.

Required for reciprocating air compressors since carbon and tarry substances are generated at high temperatures.


A

B

C

D

E

F

G

H

Local line

AM

AMH

AMH IDG AME

AMF

AMF SFD

AMEAMDAMAMH

AME

AME

AMD

AMDAM

IDG

IDG

AMD

AMH

AMH

AM ID

IDAM

AMG

AMG AMH AMD IDG AME AMFAM ID SFD

SFA/SFB/SFC

WaterSeparator

HeatlessAir Dryer

MistSeparator

Micro MistSeparator

with Pre-filter

Odor RemovalFilter

Micro MistSeparator

Super MistSeparatorMembrane Air Dryer Clean

Gas FilterClean

Air Filter

SFA, SFB, SFC

50°C, 55°C(Varies by model)

80°C, 120°C(Varies by models)

60°C 60°C 60°C50°C 50°C

300 to 12,000 80 to 780 200 to 12,000 200 to 40,000 10 to 1,000 200 to 12,000 200 to 40,000 26 to 300

45°C

100 to 50075 to 30050 to 150

0.3 µm(99.9%)

0.01 µm(99.9%)

0.01 µm(99.99%)

0.01 µm(99.9%)

Water drop removal ratio99%

0.01 µm(With 0.3 µm

pre-filter)

1 mg/m3 (ANR)[ ≈ 0.8 ppm]

0.01 mg/m3 (ANR)[ ≈ 0.008 ppm]

0.004 mg/m3

(ANR)[ ≈ 0.0032 ppm]

0.1 mg/m3 (ANR)[ ≈ 0.08 ppm]

Particles with 0.3 µmor more: 100 or less/ft3

(35 or less/10 L (ANR))

0.01 µm(99.99%)

–30°C –50°CAt inlet temperature 35°C



Water Separator

Mist Separator

Micro Mist Separator

Micro Mist Separator with Pre-filter

With 0.3 µm pre-filter/Integrated AM + AMD

Membrane Air Dryer

Super Mist Separator

Odor Removal Filter

With oil saturation indicator

Atmospheric pressure dew point–15°C, –20°C(0.7 MPa, at 25°C)

Clean Gas Filter

Clean Air Filter

Membrane Air Dryer


Heatless Air Dryer


Filtration

Precision filtration

Water droplet separation




Dehumidification

Dehumidification

Deodorization

Dehumidification

Particles with 0.1 µmor more: 0/6 L

5 6

SMC Air Preparation System

HAW

Cooling


Main Line

AT AFF

IDF

HAA orHAW

B

C

D

E

F

G

H

HAA orHAW

Dehumidification

IDU

Sub Line

1234567

Cla

ss

≤ 0.10Not specifiedNot specifiedNot specifiedNot specifiedNot specified

0.10 < d ≤ 0.5100

100000Not specifiedNot specifiedNot specified

0.5 < d ≤ 1.01

100010000

Not specifiedNot specified

1.0 < d ≤ 5.0010500100020000

Max. number of particles/1 m3

Particle diameter d µm

NANA

Solid particle

Particlediameterµm

NA

≤ 5≤ 40

Concen-tration

mg/m3

NA

≤ 5≤ 10

1234

Oil

mg/m3

≤ 0.01≤ 0.1≤ 1≤ 5

123456

MoisturePressure dew pointAt air pressure( of 0.7 MPa )

°C≤ –70≤ –40≤ –20≤ +3≤ +7

≤ +10

Cla

ss

Cla

ss

Indication: The degree of quality is indicated with 1, 4 and 2 for systems with solid particle “class 1,” moisture “class 4” and oil “class 2.”

Application Moisture

Dewpoint

Moisturecontent

Impurity in compressed air

Sys

tem

no

.

Filt

rati

on

Cle

anlin

ess

Oil

od

or

Qua

lity

grad

eas

sys

tem

(2)

Oil

mis

td

ensi

ty (

1)

Water drop removal air

A•

•

Air blowing (Simple removal of particles)General pneumatic tools

Dry air

Dry air

Dry clean air

Dry clean air

• Used for the same applications as A, when temperature drop in the middle of piping is large.

•

•

General pneumatic equipmentGeneral painting

••••••

High grade paintingSequence control Measurement device InstrumentationDrying and cleaning (Precision parts)Machine tools (Pneumatic bearing)

•

•

Without refrigerated air dryer on the sub lineBuilt-in with equipment (With machine tools, 3-D measurement device, etc.)

Deodorant air

Low dew point clean air

Low dew point clean air(For clean room)

•

•

Stirring, transporting, drying and packagingFood industry (Except direct blowing to foods)

•••••

Drying electric and electronic partsDrying a filling tankTransporting powdersOzone generatorLow temperature actuated equipment

• Blowing semi-conductor parts in the clean room

Note 1) When the inlet oil mist density (compressed air density) is approximately 30 mg/m3 (ANR) or less.Note 2) This describes the grade of compressed air quality based on ISO8573-1: 2001 (JIS B8392-1: 2003), which is the maximum quality grade for the system.

It varies, however, depending on the inlet air conditions.Note 3) Contact SMC since this can be manufactured as a special order (depending on the operating conditions).

3 µmFiltering

efficiency( 99% )

0.3 µmFiltering

efficiency( 99.9% )

0.01 µmFiltering

efficiency( 99.9% )

0.01 µmFiltering

efficiency( 99.99% )

—

Max.1 mg/m3

(ANR)

0.8 ppm

Max.0.1 mg/m3

(ANR)

0.08 ppm

Max.0.01 mg/m3

(ANR)

0.008 ppm

Max.0.004 mg/m3

(ANR)

0.0032 ppm

Max.0.004 mg/m3

(ANR)

0.0032 ppm

Max.0.01 mg/m3

(ANR)

0.008 ppm

—

Particleswith

0.3 µmor more:100 orless/ft3

(35 orless/10 L

(ANR))

Particleswith

0.1 µmor more:

0/6 L

Yes

Yes

No

No

3, -, -

3, 4, -3, 5, -3, 6, -

2, 4, 32, 5, 32, 6, 3

1, 4, 21, 5, 21, 6, 2

1, 4, 11, 5, 11, 6, 1

1, 1, 11, 2, 11, 3, 1

Atmosphericpressure dew point

6°C0.7 MPa

Pressure dew point40°C


–14 to–23°C

0.7 MPaPressuredew point15 to 3°C


–30 to–60°C

0.7 MPaPressuredew point

–6 to–42°C

7 g/m3

(ANR)

1.7 g/m3

(ANR)to

0.8 g/m3

(ANR)

0.5 g/m3

(ANR)to

0.02 g/m3

(ANR)

(3)

Description

Capacity

Air Tank

AT HAA, HAW IDFAFF

Air Cooled AftercoolerWater Cooled Aftercooler

Main LineFilter Refrigerated Air Dryer

Representative model

Max. inlet air temperature

Filtration (Filtering efficiency)

Outlet oil mist concentration (Max.) (1)

Outlet cleanliness

100°C 60°C

3 µm(99%)

50°C

Flow capacity (L/min (ANR))

1,000 to 5,700300 to 18,000

70°C70°C, 180°C(Varies by model)

300 to 42,000 100 to 65,000100 to 3,000 L


IDU

80°C

320 to 12,500


Air Tank

Class 2 pressurevessel

Main Line Filter


Dehumidification


HAA

HAW

Refrigerated Air Dryer

Applicable air compressors:7.5 kW (10 hp)to 37 kW (50 hp)



Reciprocating air compressor

Screw air compressor



Refrigerated Air Dryer(High inlet air

temperature type)


Applicable air compressors:2.2 kW (3 hp) to75 kW (100 hp)

Oil con-centra-

tion

Atmospheric pressure dew point [At inlet air pressure of 0.7 MPa]

Pulsation attenuation,Accumulation,

Cooling Select either Air Cooled Aftercooler or Water Cooled Aftercooler

AFF

Required even for screw compressors since the piping of the oil-free type is rusted easily.


Air tank is not required for rotary screw compressors since pulsation is small, but required when it is used to accumulate pressure.

Required for reciprocating air compressors since carbon and tarry substances are generated at high temperatures.


A

B

C

D

E

F

G

H

Local line

AM

AMH

AMH IDG AME

AMF

AMF SFD

AMEAMDAMAMH

AME

AME

AMD

AMDAM

IDG

IDG

AMD

AMH

AMH

AM ID

IDAM

AMG

AMG AMH AMD IDG AME AMFAM ID SFD

SFA/SFB/SFC

WaterSeparator

HeatlessAir Dryer

MistSeparator

Micro MistSeparator

with Pre-filter

Odor RemovalFilter

Micro MistSeparator

Super MistSeparatorMembrane Air Dryer Clean

Gas FilterClean

Air Filter

SFA, SFB, SFC

50°C, 55°C(Varies by model)

80°C, 120°C(Varies by models)

60°C 60°C 60°C50°C 50°C

300 to 12,000 80 to 780 200 to 12,000 200 to 40,000 10 to 1,000 200 to 12,000 200 to 40,000 26 to 300

45°C

100 to 50075 to 30050 to 150

0.3 µm(99.9%)

0.01 µm(99.9%)

0.01 µm(99.99%)

0.01 µm(99.9%)

Water drop removal ratio99%

0.01 µm(With 0.3 µm

pre-filter)

1 mg/m3 (ANR)[ ≈ 0.8 ppm]

0.01 mg/m3 (ANR)[ ≈ 0.008 ppm]

0.004 mg/m3

(ANR)[ ≈ 0.0032 ppm]

0.1 mg/m3 (ANR)[ ≈ 0.08 ppm]

Particles with 0.3 µmor more: 100 or less/ft3

(35 or less/10 L (ANR))

0.01 µm(99.99%)




Water Separator

Mist Separator

Micro Mist Separator

Micro Mist Separator with Pre-filter

With 0.3 µm pre-filter/Integrated AM + AMD

Membrane Air Dryer

Super Mist Separator

Odor Removal Filter

With oil saturation indicator


Clean Gas Filter

Clean Air Filter

Membrane Air Dryer


Heatless Air Dryer


Filtration

Precision filtration

Water droplet separation




Dehumidification

Dehumidification

Deodorization

Dehumidification

Particles with 0.1 µmor more: 0/6 L

5 6

Pressure SwitchMain Line Filter Filter Regulator

Positioner

Serial Communication Valve

Sanitary Valve Control

Flow Switch

q w e r t

y

Manifold with Supply Stop Valve

rFilter Regulator

wPressure Switch

eFlow Switch

tPositioner

Series ISGSet pressure range

0.1 to 1.0 MPaPort size

10A (3/8)

Series 1301/IWFiltration accuracy

5 µmSet pressure range


8A (1/4)

Series IP Input current

4 to 20 mADCPort size

8A (1/4)

yReduced-wiring Fieldbus System (Serial Transmission System)

Series SY/VQC· DeviceNetTM

· CC-Link· PROFIBUS DP· AS-Interface· CANopen

· EtherNet/IPTM

· CompoNetTM

· EtherCAT®

· PROFINET

qMain Line Filter

Series AFFFiltration accuracy

3 µm (95% filtered particle size)Rated flow



Double-layered Tube for Instrumentation Device (single-tubed/double-tubed)

Element

q w e r

t

y

y

Pump

Cooling Tower(Cooling building)

<Air-cooled Refrigerated Type>

<Water-cooled Refrigerated Type>

Boiler

Installing extra cooling towers can be troublesome.The HRSH (air-cooled refrigerated type) can be moved easily to wherever you need it, when you need it. Cooling water is supplied from the attached hose.

wFlow SwitchqIndustrial Filter

ePressure Switch

t2 Port Valve (for Steam)

yCirculating Fluid Temperature Controller Thermo-cooler

Series PF3WMeasurement flow rate (L/min)

0.5 to 4, 2 to 16, 5 to 4010 to 100, 50 to 250

Port size10A to 40A (3/8 to 1 1/2)

Series IFW5Set flow rate range (L/min)

1 to 10, 10 to 20, 20 to 50Port size

3/8 to 3/4

Series VXOrifice diameter

ø3 to ø50Port size

Thread: 6A to 50A (1/8 to 2)Flange: 32A to 50A

Series FG/FQ/FNNominal filtration accuracy

0.5 to 120 µmPort size

Thread: 10A to 50A (3/8 to 2)Flange: 25A to 150A (1B to 6B)

Series ISE80Rated pressure range

−0.100 to 2.000 MPaPort size

M5, 6A (1/8), 8A (1/4)

r2 Port Valve

Series HRSHSet temperature 5 to 35°CPort size Rc1Cooling capacity (60Hz) 10 to 25 kW (air-cooled, water-cooled)

Series VNDOrifice diameter


Thread: 6A to 50A (1/8 to 2)Flange: 32F to 50F

Check Valve

INA-14-290 (Brass, Rc: 1/8)

XTO-674- (Brass, Rc: 1/4 to 1/2)

INA-14- (All stainless steel, Rc: 1/4 to 1/2)

TrademarkDeviceNet™ is a trademark of ODVA. EtherNet/IP™ is a trademark of ODVA. CompoNet™ is a trademark of ODVA.EtherCAT® is registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany.

IN-241--T0604 to T1075--- (X120, X121, X166)Double-layered tube with an external layer of vinyl chloride or polyolefin to protect the inner tube-Double-tubed type (Color: black + black/black + white) and 300 m length are available.∗ If you need a different no. of tubes, different colors or lengths over

300 mm, please contact our sales representatives.

Explosion-proof Solenoid Valve

NAMUR Standards Solenoid Valve

Series IF3Set flow rate range (L/min)

14 to 60, 20 to 150036 to 2600

Port size3/4, 1

This equipment supplies temperature-controlled water to the heatsource in a circular manner.Outer layer:

Vinyl chloride or Polyolefin-based resin

Inner Special: Nylon

Explosion-proof Solenoid Valve

51-SY5000/7000/900050-VFE3000/500050-VPE500/700

NAMUR Standards Solenoid Valve

VFN2120N-X23VFN2120N-X36Air operated typeSolenoid valve for actuating a sanitary valve, etc.Conforming to NAMUR standards

Manifold with Supply Stop Valve

SS5Y3-X460, SS5Y5-X4601 SS5Y7-X460, SS5Y3-X2104The supply pressure can be stopped individually.Solenoid valve can be replaced without shutting off the supply pressure in case of emergency.

Pneumatic Instrumentation Equipment “Industrial Water (Municipal Water)” Line





Pressure adjustment


Pressure detection

Flow rate detection

Actuator control Reduced wiring


Particle separation/Filtration Flow rate detection

Pressure detection

Flow rate control Flow rate control

Cooling watertemperature control

Pressure adjustment


Pressure detection

Flow rate detection

Actuator control Reduced wiring


Particle separation/Filtration Flow rate detection

Pressure detection

Flow rate control Flow rate control

Cooling watertemperature control

7 8

Clean Air Module

N2 Bomb

q w e t

y

r

Nitr

ogen

w2 Port ValveqRegulator

tClean Gas Filter yClean Air Module

Series VXOrifice diameter


Thread: 6A to 50A (1/8 to 2)Flange: 32A to 50A

Series ISERated pressure range

−0.100 to 1.000 MPaPort size

M5, 6A (1/8), 8A (1/4)

Series SRHSet pressure range


6A to 15A (1/8 to 1/2)Series AP/AZ/AK

Series LLB

Filtration accuracy 0.01 µmPort size 8A to 10A (1/4 to 3/8)

rPressure Switch

Series SFFiltration accuracy

0.01 µmPort size

8A to 10A (1/4 to 3/8)

Piping Equipment

eFlow Switch




Stainless Steel 316 Fittings: Series KQG2/KFG2Clean One-touch Fittings: Series KPFluoropolymer Tubing: Series TH/TL/TD/TLM/TQClean Tubing: Series TPH/TPS

q w e r t

r2 Port Valve

qPump wRegulator

eFlow Switch

tRestrictor

Series SRFPort size

Integral fitting: Applicable tubing O.D. ø4 to ø19

Tube extension: 1/4" to 3/4"Set pressure range

0.02 to 0.4 MPa

Series LVPort size

Thread: (1/8 to 1)/6A to 25AIntegral fitting: Applicable tubing O.D. ø3 to ø25Tube extension: ø3 to ø25

Orifice diameter ø2 to ø22

Series LVPApplicable tubing O.D.

16A, 20A, 25AOrifice diameter

ø16, ø22

Process Pump: Series PAFDischarge flow rate

1 to 45 L/minPort size

Thread: (3/8, 3/4)/10A, 20ATube extension: 1/2", 3/4"With nut: Connection

fitting size 4 or 5(LQ1, LQ3)

Series PF2DMeasurement flow rate

0.4 to 40 L/minPort size

Tube extension: 3/8" to 3/4"

Series PF3WMeasurement flow rate (L/min)

10 to 100, 30 to 250Port size

PVC tubing O.D. 25A, 30A

Needle Valve: Series LVNPort size

Integral fitting: Applicable tubing O.D. ø4 to ø12Orifice diameter

ø4.4 to ø10

Piping Equipment

Quick Drain Valve: Series LVWApplicable tubing O.D.

ø32 to ø89 (25A to 80A)

“Inert Gas” “Clean Dry Air” Line “Deionized Water/Chemical Liquids” Line

Fluoropolymer Fittings: Series LQFluoropolymer Tubing: Series TH/TL/TD/TLM/TQ


A flow switch, regulator, 2 port valve, restrictor, and filter have been combined into a single unit.Easily obtains clean air.

Pressure adjustment Fluid control

Pressure detection

Particle separation/Filtration Modularization

Flow rate detection

Liquid discharge Pressure adjustment

Flow rate detection Liquid discharge

Flow rate adjustment

Pressure adjustment Fluid control

Pressure detection

Particle separation/Filtration Modularization

Flow rate detection

Liquid discharge Pressure adjustment

Flow rate detection Liquid discharge

Flow rate adjustment

9 10

SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK

POLANDSMC Industrial Automation Polska Sp.z.o.o.ROMANIA SMC Romania S.r.l.RUSSIA SMC Pneumatik LLC.SLOVAKIASMC Priemyselná Automatizácia Spol s.r.o.SLOVENIASMC Industrijska Avtomatika d.o.o.SPAIN/PORTUGALSMC España S.A.SWEDENSMC Pneumatics Sweden ABSWITZERLANDSMC Pneumatik AGTURKEYSMC Pnömatik Sanayi Ticaret ve Servis A.S.U.K.SMC Pneumatics (U.K.) Ltd.

ASIACHINA <Beijing/Shanghai>SMC (China) Co., Ltd.CHINA <Guangzhou>SMC Pneumatics (Guangzhou) Ltd.HONG KONG <Hong Kong/South China>SMC Pneumatics (Hong Kong) Ltd.INDIASMC Pneumatics (India) Pvt. Ltd.MALAYSIASMC Pneumatics (S.E.A.) Sdn. Bhd.PHILIPPINESShoketsu SMC CorporationSINGAPORESMC Pneumatics (S.E.A.) Pte. Ltd. (Sales subsidiary)SOUTH KOREASMC Pneumatics Korea Co., Ltd.

TAIWANSMC Pneumatics (Taiwan) Co., Ltd.THAILANDSMC (Thailand) Ltd.VIETNAMSMC Pneumatics (VN) Co., Ltd

NORTH AMERICACANADASMC Pneumatics (Canada) Ltd.MEXICOSMC Corporation (Mexico), S.A. de C.V.U.S.A.SMC Corporation of America

SOUTH AMERICAARGENTINASMC Argentina S.A.BOLIVIASMC Pneumatics Bolivia S.r.l.BRAZILSMC Pneumaticos do Brasil Ltda.CHILESMC Pneumatics (Chile) S.A.COLOMBIASMC Colombia Sucursal de SMC Chile S.A.ECUADORASSISTECH CIA. LTDA.PERUIMPECO Automatizacion Industrial S.A.C.VENEZUELASMC Neumatica Venezuela S.A.

OCEANIAAUSTRALIASMC Pneumatics (Australia) Pty. Ltd.NEW ZEALANDSMC Pneumatics (N.Z.) Ltd.

EUROPEAUSTRIASMC Pneumatik GmbH (Austria)BELGIUMSMC Pneumatics N.V./S.A.BULGARIASMC Industrial Automation Bulgaria EoodCROATIASMC Industrijska Automatika d.o.o.CZECH REPUBLICSMC Industrial Automation CZ s.r.o.DENMARKSMC Pneumatik A/SESTONIASMC Pneumatics Estonia OÜFINLANDSMC Pneumatics Finland OyFRANCESMC Pneumatique SAGERMANYSMC Pneumatik GmbHGREECESMC Hellas E.P.E.HUNGARYSMC Hungary Ipari Automatizálási Kft.IRELANDSMC Pneumatics (Ireland) Ltd.ITALYSMC Italia S.p.A.KAZAKHSTANLLP “SMC Kazakhstan”LATVIASMC Pnuematics Latvia SIALITHUANIAUAB “SMC Pneumatics”NETHERLANDSSMC Pneumatics B.V.NORWAYSMC Pneumatics Norway AS

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