nanovea.comPROFILOMETERS | 3D Non Contact Metrology

PROFILOMETER INTRO

Nanovea 3D Non-Contact Profilometers are designed with leading edge optical pens using

superior white light axial chromatism. Nano through macro range is obtained during

measurement (Profile/Dimension, Roughness/Finish/Texture, Shape/Form/Topography,

Flatness/Warpage, Volume/Area, Step-Height/Depth/Thickness and others) on a wider

range of geometries and materials than any other Profilometer. With the use of a large

range of optical pens the Profilometer precisely measures an endless range of applications.

Nanovea optical pens have zero influence from sample reflectivity, variations require no

sample preparation and have advanced ability to measure high surface angles. Easily

measure any material: transparent, opaque,

specular, diffusive, polished, rough etc. Unlike

other optical measurement techniques, large

surface areas can be precisely measured without any imaging stitching. For applications exceeding

Profilometer capability an AFM integration is available to maximize measurement range. All Profilometers use

the same Software and Nanovea PRVision is optional on most Profilometers for auto pattern recognition.

Profilometer speeds range from 7mm/s to 1m/s for laboratory or research to the needs of hi-speed inspection

on large surface areas. Nanovea Profilometers can be built with custom size, speeds, scanning capabilities,

Class 1 Clean Room compliance, with Indexing Conveyor and for Inline or online Integration and now with

true portability capability.

PROFILOMETERS

Jr25 Optical Profilometer | True Portable Capability using the same technology and software as the PS50, along with

25mm X-Y stages, the high-performance, portable Jr25 provides measurement capability rarely available for immovable objects

or during field study. The Jr25 has a small footprint (27cm x 14cm) with a total weight less than 5.5 Kg and runs on a laptop,

which makes for portable ease. With a fully rotational, single axis, head the Jr25 has the ability to measure surfaces at difficult

angles. Durable carrying case for safe and secure transport. Ideal option for portable measurement needs during field studies or

immovable objects in processing environments.

PS50 Optical Profilometer | Limited Budget Using the same technology and software as the ST400, along with

50mm X-Y stages, the high-performance PS50 is the ideal choice to replace stylus and laser profilers. The PS50 has a

small footprint (30cm x 25cm) and the option of running on a laptop, which makes for an easy installation where space

is critical. Ideal option for budget limitations and small research facilities.

ST400 Optical Profilometer | Nanovea Standard with 150mm X-Y stages and a large coarse height adjustment to

easily accommodate larger sample sizes. The ST400 also has an optional offset camera, with either manual or motorized

zooms, to easily identify small features prior to measuring them. The Custom ST400, a more open configuration, allows for the addition of larger X-Y stages

to measure even larger areas, a 360° rotational stage for measuring spherical or cylindrical parts and many other custom configurations. Works well for

larger samples and larger scan areas. Available with various automation options. Ideal option for diverse and expanding measurement needs.

HS1000 Optical Profilometer | Hi-Speed Automated Inspection at speeds 50 times faster than most inspection systems in

its class. Inspection speeds can reach up to 1m/s and data acquisition up to 31KHz providing crucial inspection for more time

constraint production and quality control environments. The HS1000 is made mostly of granite to provide superior stability

and comes with an optional enclosure workstation to create a fully contained stand-alone instrument. The HS1000 can also be

equipped with an 180point line sensor to make inspection up to 180 times faster, which gives 1m/s stage speed and an

acquisition rate up to 324,000. Ideal option for hi-speed automation and quality control environments. Optimized versions of

the HS1000 Profilometer has been built for Photovoltaic, Microelectronics and Asphere production environments. Capable of

acquiring up to 31,000 points per second and scan areas up to 1m x 1m. Measurements can range from microelectronic

planarity, to solar cell flatness to aspheric topography and dimension. Available as stand alone or inline for integration production lines for quality control

inspection.

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PROFILOMETER OPTICS

Optical Pens | Nanovea optical pens have zero influence from sample reflectivity. Variations require no

sample preparation and have advanced ability to measure high surface angles. Capable of large Z

measurement ranges. Unlike other optical techniques, Nanovea optical pens provide ability to measure

any material, whether transparent, opaque, specular, diffusive, polished or rough. Large pen selection for

varying dynamic vertical measurements. Excellent vertical and spatial resolution.

AFM | The AFM is available for maxim measurement range.

Providing user ability to quickly move from a chosen area of

optical profiler measurement to an AFM three-dimensional measurement at higher lateral and vertical

resolution. AFM measurements are non-destructive and require no sample preparation. Standard mode:

Static Force (Contact): Constant Force, Constant Height. Extended modes: Dynamic Force (Intermittent

Contact etc.): Constant Amplitude, Constant Height. Static Force: Force Modulation, Spreading Resistance.

Dynamic Force: Phase Contrast, Magnetic Force, Electrostatic Force. Scan area up to 110μm, Z range up to

22μm, XY resolution down to 0.15nm and Z resolution down to 0.027nm

Video Zoom Imaging | The Video Zoom offers user ability to select areas to be measured through

live camera view. The camera is offset to the optical pen with a calibrated distance through the Nanovea

3D software. Complete with manual or motorized zoom capabilities with a diagonal field of view

ranging from 11.42mm to 1.77mm. Video option will be available in the software that allows the user to

draw a box around a feature to be measured, take a picture of the surface and stitch multiple images

together to create a large picture of the surface. Pattern recognition Software can be included when

camera option is added (PRVision). Magnification = 0.7x - 4.5x, Diagonal Field of View = 11.42 - 1.77

(mm), N.A. = 0.050 - 0.140, Depth of Field = 0.23 - 0.03 (mm), Working Distance = 36mm

Microscope Imaging | The Microscope, with similar functions to the Video Zoom Camera, allows the

full capability of a microscope with options such as polarizer and analyzer slides. The Microscope can be

equipped with up to 5 microscope objectives ranging from 5x to 100x, and provides an overall total

video magnification of up to 4000x. The Microscope Turret can be used when a high level of detail is

needed to resolve small features on any surface. Available Objectives = 5x, 10x, 20x, 50x, Video

Magnification of up to 4000x

PROFILOMETER SOFTWARE

Nanovea 3D Software | The Nanovea 3D software is the

acquisition software that is used with all Nanovea Profilers. The software permits the user to define the

size of the area, or line to be measured, as well as the lateral resolution of the measurement. The

software also allows three different views of the measurement in real-time: cross-sectional, top-down

and 3-dimensional views. To make it easier to find and measure small surfaces, a recentering function

allows the user to point-and-click on the scanned image in order to recenter the next scan to that

specific point; or by use of a point-and click feature from an optional offset video camera. Macro

measurement is a standard feature in all versions of

Nanovea 3D software. Macro allows users to load several samples, or trays, to stage to create a user

trained measurement across several chosen locations and or samples.

Mountains 3D Analysis Software | Optional software package available to all Nanovea Profilers,

which provides a complete set of surface analysis tools. User-friendly report making and editing. An

extensive list of roughness, flatness, waviness and other surface parameters. Create's 3D images in false

color, contour maps and photo simulation. A variety of filtering, leveling and other surface correction

functions. --Continued on next page

Ability to create templates to be applied to multiple individual measurements. Dimensional analysis, surface area, volume, bearing ratio and texture

direction. Grain counting, sorting, and other grain analysis. Spectral analysis, auto correlation, and fractal analysis. Statistical analysis over a

population of results. Ability to export raw data, images, and entire reports. Create and export your videos of the surface. 4D analysis to look at

surface changes as a function of time. Motif analysis and additional functions available, please contact Nanovea for more details.

Nanovea PRVision Software | PRVision Software module can be included in Nanovea 3D Software

when an optional camera is included. PRVision has the ability to automatically recognize features from a

user-trained image file. The surface is scanned while automatically recognizing all features of interest;

then either automatically measures every feature found or a select few that are chosen by the user.

PROFILOMETER APPLICATIONS

Nanovea Profilometers provide unmatched 3D Non Contact Surface Metrology (Profile Dimension, Roughness Finish Texture, Shape Form

Topography, Flatness Warpage Coplanarity, Volume Area, Step-Height Depth, Thickness and others) at Nano through Macro range, for research and

quality control environments. Industries include: Semiconductor, Automotive, Coatings, Solar, Metallurgy, Microelectronics, Pharmaceutical,

Biomedical, Aerospace and many others.

PROFILOMETER SPECS

MEASUREMENT RANGE

110μm

300μm

1.1mm

3.0mm

10mm

20mm

20μm

300μm

350μm

6mm

10mm

24mm

WORKINGDISTANCE (MM)

3.3

11

12.7

16.4

29

19.6

0.37

5.68

12.7

27.3

66.9

223

VERTICALRESOLUTION (NM)

5

12

25

75

280

600

2

10

10

200

300

1500

VERTICALACCURACY (NM)

20

60

200

400

900

3000

10

90

60

600

900

3000

MINIMUMTRANSPARENT

THICKNESS (μM)

7

15

25

60

200

590

12

25

25

200

425

1570

LATERALRESOLUTION (μM)

1.10 / 1.55 / 2.60

1.10 / 1.55 / 2.60

1.55 / 2.60

2.60 / 8.00 / 11.0

2.60 / 8.00 / 11.0

8.00 / 11.0

1.5

3.7

3.5

6.25

25.5

22.5

Classical Optical Pens ( Not Available on Jr25 or PS50)

Modular Optical Pens

HS1000

400 x 600 mm

50 mm

0.005 μm

1 m/s

N/A

N/A

Optional

N/A

Jr25

25 mm

30 mm

0.1μm

7 mm/s

N/A

N/A

N/A

N/A

ST400

150 mm

60 mm

0.1 μm

20 mm/s

Optional

Optional

Optional

Optional

PS50

50 mm

30 mm

0.1 μm

10 mm/s

N/A

N/A

N/A

N/A

Line Sensors WAVY MICROVIEW

Line Length (mm)

Number of Points

Spot Size (μm)

Pitch (μm)

Numerical Aperture

Working Distance (mm)

Z Measurement Range (mm)

Resolution (μm)

Accuracy (μm)

Field Scanning (mm) (Optional)

44.75

180

50

250

0.2

36

2

0.5

2.5

44.75 x 48.5

1.8

180

3.85

10

0.5

10

0.5

0.125

0.5

1.8 x 1.8

BASE

X-Y Axis Travel

Z Axis

X-Y Axis Resolution

Maximum X-Y Speed

Rotational Stage

Microscope Imaging

Zoom Video Imaging

AFM

*Specifications may change, please contact Nanovea for clarification.

Today's Standard For Tomorrow's Materials

Nanovea is the result of over 20 years experience providing professional solutions

and experienced service throughout the fields of nano/micro/macro profilometry,

mechanical, tribology, imaging and other related fields of materials research & development

industries. After years of client feedback and the dedication to providing superior instrumental

solutions, Nanovea was launched in 2004 as a privately held California corporation.

From the Irvine, CA office Nanovea designs and manufactures Profilometers, Mechanical Testers &

Tribometers to combine the most advanced testing capabilities in the industry: Scratch Adhesion,

Indentation Hardness, Wear Friction & 3D Non-Contact Metrology at Nano, Micro & Macro range.

Unlike other manufactures Nanovea also provides Laboratory Services, offering clients availability to

the latest technology and optimal results through improvements in material testing standards.

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