project fama: modernization of channels for surface modification of materials
DESCRIPTION
Project FAMA: Modernization of channels for surface modification of materials V. Alexandrov, S. Bogomolov, N. Kazarinov, V. Shevtsov JINR, Dubna, 141980, Russia P.Beličev, N. Nešković, A.Dobrosavljević Vinča Institute of Nuclear Sciences, P. O. Box 522, 11001 Belgrade, Serbia. - PowerPoint PPT PresentationTRANSCRIPT
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IX семинар памяти В.П.Саранцева 1
Project FAMA:
Modernization of channels for surface modification of materials
V. Alexandrov, S. Bogomolov, N. Kazarinov, V. Shevtsov JINR, Dubna, 141980, Russia
P.Beličev, N. Nešković, A.Dobrosavljević Vinča Institute of Nuclear Sciences, P. O. Box 522,
11001 Belgrade, Serbia
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IX семинар памяти В.П.Саранцева 2
Project FAMA is related to the construction of the low energy part of TESLA Accelerator Installation (TAI) in the Vinča Institute of Nuclear Sciences (Belgrade, Serbia) and is intended for modification and analysis of materials by ion beams. FAMA includes 3 machines and 6 experimental channels. The machines are: - 14.5 GHz ECR heavy ion source – the M1 machine, - a plasma source of light ions – the M2 machine, - a small isochronous cyclotron – the M3 machine.
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IX семинар памяти В.П.Саранцева 3
M2
A scheme of the FAMA : C1 – the channel for analysis of ion beams and irradiation, C2 – the channel for surface modification of materials,
mVINIS14.5 GHz ECRIS
pVINISMulticusp ECRIS
C3 – the channel for ion implantation, and C4 – the channel for deeper modification of materials.
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IX семинар памяти В.П.Саранцева 4
A three-dimensional view of the M1 machine
14.5 GHz ECRIS
extraction electrode(puller)
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IX семинар памяти В.П.Саранцева 5
A schematic view of the M1 channel
202.
7
506.
5
165
1042
.5
166.
5
elementeff.lengthon В/Во
(mm)
Aperturewh(mm)
B(T)
GQL
(T/m)
M1-SL 165.0 7070 0.6 -
M1-QL 202.7 8989 - 0.874
M1-AM1*) 658.6 10662 0.207 -
*) Eff.radius – 419.3 mm, geometrical radius – 400 mm, bending angle 90о, entrance angle 0о, exit angle 26.6о, Rogowski type.
Geometry and maximum values of fields and gradient
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IX семинар памяти В.П.Саранцева 6
A three-dimensional view of the C1 channel
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IX семинар памяти В.П.Саранцева 7
A schematic view of the C1 channel
125.7282
C1-SMC1-SL
255180
M1-AM1
249 334300 479170
779C1
Channel
1425.7
target
elementeff.length,
mm
Inner diameter,
mm
Good field
region,mm
B,T
C1-SM 180 110 80 0.04
C1-SL 170 110 80 0.7
Geometry and maximum values of fields
C1-BS
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IX семинар памяти В.П.Саранцева 8
Some of the ion beams produced with the M1 machine
for C1 & C2
Ionspecies
Ionenergy(keV)
Ioncurrent(eA)
4He+ 15760
20
4He2+ 30410
40
14N4+ 60230
80
40Ar2+ 3050
40
86Kr12+ 180130
240
136Xe19+ 28543
380
for C2
Ionspecies
Ionenergy(keV)
Ioncurrent(eA)
14N5+ 75
470100125
14N6+ 90
87120150
40Ar8+
120660160
200
40Ar12+180
36240300
for C2
Ionspecies
Ionenergy(keV)
Ioncurrent(eA)
136Xe23+
345
25460
575
207Pb16+
24030320
400
207Pb20+
300
10400
500
136Xe19+ 475 43
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IX семинар памяти В.П.Саранцева 9
Some of the ion beams spectra
Kripton beam spectrum
Ar 2+, mVINIS 05.02.1998
00.10.20.30.40.50.6
2 3 4 5 6 7 8 9 10 11 12
charge state
cu
rre
nt,
mA
136 Xe 19+
136 Xe 23+
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IX семинар памяти В.П.Саранцева 10
Initial beam parameters
Initial particle distribution - VK
emittance, mmmrad
250
α 0radius, mm 5
XX`-plane XY-plane
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IX семинар памяти В.П.Саранцева 11
Particle trajectories and 14N4+ beam envelope (C1)
0 50 100 150 200 250 300 350 400 450 500
D istance, cm
- 5- 4- 3- 2- 1
012345
En
ve
lop
es
, cm
Bz,
T
Horizontal
Vertical
Aperture
Aperture
1.0
0.5
0
-0.5
-1.0
puller
М1-АМ1
М1-АМ1
C1-SLM1-SL
Particle trajectories and 14N4+ beam envelope (C1)
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IX семинар памяти В.П.Саранцева 12
Beam envelopes (C1)
0 50 100 150 200 250 300 350 400 450 500
D istance, cm
- 5- 4- 3- 2- 1
012345
En
ve
lop
es
, cm
Bz,
T
Horizontal
Vertical
Aperture
Aperture
1.0
0.5
0
-0.5
-1.0
0 50 100 150 200 250 300 350 400 450 500
D istance, cm
- 5- 4- 3- 2- 1
012345
En
ve
lop
es
, cm
Bz,
T
Horizontal
Vertical
Aperture
Aperture
1.0
0.5
0
-0.5
-1.0
4He2+
40Ar2+
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IX семинар памяти В.П.Саранцева 13
Xenon beam
q=19
q=18
q=18
q=19
q=20
On target
Inside C1-DC
XX`-planeBeam spot
Beams with А > 100 need in collimation
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IX семинар памяти В.П.Саранцева 14
Efficiency of transportation (C1)
М1 exitParameters of
elementsOn target
Ionspecies
Ionenergy(keV)
Ioncurrent(eA)
BM1-SL
(T)
BC1-SL
(T)
GM1-QL(Т/m)
Ioncurrent(eA)
Effici-ency(%)
xMF / yMF
(mm)
4He+ 15 760 0.33 0.28 -0.32 494 65 10 / 1220 760 0.38 0.33 -0.57 692 91 14 / 14
4He2+ 30 410 0.25 0.20 -0.35 82 20 12 / 1640 410 0.28 0.22 -0.29 123 30 10 / 15
14N4+ 60 230 0.31 0.27 -0.13 110 48 10 / 2080 230 0.35 0.31 -0.15 161 70 10 / 20
40Ar2+ 30 50 0.60 0.70 -0.79 1.5 3 17 / 2440 50 0.60 0.70 -0.91 1.5 3 9. / 9.
86Kr12+ 180 130 0.46 0.41 -0.14 77 59 18 / 20240 130 0.54 0.43 -0.22 115 89 6 / 19
136Xe19+ 285 43 0.45 0.41 -0.19 35 82 21 / 26380 43 0.53 0.43 -0.28 43 100 7 / 20
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IX семинар памяти В.П.Саранцева 15
CONCLUSION on M1-C1 channel
Losses in magnet A1-M1 and in channel C1 for all beams, except argon, possible avoid. Practically there are losses for all types of beams at the beginning of M1 channel (in region of solenoid M1-SL). At increase in current of beam and reduction of its energy these losses grow (helium and 14N4+ at energy 60 Kev) and there are losses in puller. For elements with A<100 there is only the main charged state near target, extraneous ones are lost on the channel aperture. For heavier elements, in particular for xenon, it is required to use the variable vertical ion beam slit (C1-BS).
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IX семинар памяти В.П.Саранцева 16
M1-C2 channel (heavy ions)
C2-QT12
C2-QT13C2-SL
M1-AM1
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IX семинар памяти В.П.Саранцева 17
M1-C2 channel (heavy ions)Analysing magnet C2-MA
Radius of deflection 600 mm
Pole face rotation angles 26.6о
Pole edge profile Rogowski type
Scanners
Leff,
mmAperturewh, mm
C2-CS1 160 74 250
C2-CS2 160 250 74
C2-SL solenoid
Length with screen, mm 196
Inner diameter, mm 110
External diameter with screen, mm 384
Thickness of screen, mm 20
Effective length (В/Во)2, mm 131
B, T 0.7
Electrostatic triplets
length(mm)
(mm)
VQ
(kV)
QT21 75.0 69.5 1.3
QT22 150.0 69.5 1.3
QT23 75.0 69.5 1.3
QT31 100.0 69.5 1.3
QT32 200.0 69.5 1.3
QT33 100.0 69.5 1.3
B,T
.0138
.0138
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IX семинар памяти В.П.Саранцева 18
M1-C2 channel (heavy ions)
Particle trajectories of krypton beam and apertures.Interface of MCIB04 code
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IX семинар памяти В.П.Саранцева 19
C2 channel (heavy ions)
RMS 86Kr12+, 240 keV beam envelopes. Interface of OPTIMA code
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IX семинар памяти В.П.Саранцева 20
M1-C2 channel. Efficiency of transportation
АМ1 exit С2-МА entry С2-МА exit
Energy(keV)
Ion current(eA)
Eff-cy(%)
Ion current(eA)
Eff-cy(%)
Ion current(eA)
Eff-cy(%)
Ion current(eA)
14N4+ 60 230 49 113 47 108 47 10814N4+ 80 230 70 160 68 156 62 142
86Kr12+ 180 130 59 76 50 65 45 5886Kr12+ 240 130 89 115 88 114 84 109
4He+ 15760380
6575
494285
3262
243235
2859
213220
4He+ 20760380
8796
660365
4378
327296
3276
243290
4He2+ 30 410 20 82 20 82 20 824He2+ 40 410 28 116 28 116 28 116
136Xe23 345 25 72 18 70 17.5 63 16207Pb16 400 30 98 29 84 25 84 25
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IX семинар памяти В.П.Саранцева 21
M1-C2 channel. CONCLUSION
The loss in the triplet QT1 will exist under any adjustment and any currents of bunch.
To reduce these losses it needs to replace the first quadrupole QT11 in the triplet QT1 on solenoid.
Efficiency of transportation in channel C2 is in interval 80 - 100%.
Main losses occur in channel M1.
On example of 4He+ it is shown that efficiency of transportation possible to enlarge for smaller initial beam currents.
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IX семинар памяти В.П.Саранцева 22
M2-C2 channel. Light ions
Multicusp ECRIS pVINIS
Ionspecies
E[keV]
Itot
[mA]
(90%)[
mmmrad]
Ispice
[mA]
H− 30 3.30 22.5 3.30
H2+ 30 10.25 28.3 4.61
H3+ 30 10.28 28.2 7.71
D− 30 2.58 23.0 2.58
D2+ 30 7.91 32.5 3.95
D3+ 30 11.62 33.7 8.13
Itot
[mA]
Ispice
[mA]
1.16 1.16
1.03 0.46
1.03 0.77
0.77 0.77
0.79 0.40
0.58 0.41
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IX семинар памяти В.П.Саранцева 23
M2-C2 channel. Light ions:gradients and voltages of elements of channel
IonsGQD1
(T/m)
GQD2
(T/m)
BMА
(T)
VQT21
(kV)
VQT22
(kV)
VQT23
(kV)
VQT31
(kV)
VQT32
(kV)
VQT33
(kV)
H− -0.0049 -0.1807 0.042 1.44 -0.69 -0.30 -0.56 0.32 0.15
H2+ 0.1174 0.1281 0.059 -1.73 1.52 -1.27 -0.16 -0.02 0.09
H3+ 0.1285 0.1842 0.072 -1.94 1.51 -0.99 -0.94 0.37 0.22
D− -0.0069 -0.2556 0.059 1.44 -0.69 -0.30 -0.56 0.32 0.15
D2+ 0.1484 0.2127 0.083 -1.32 1.38 -1.40 -0.58 0.36 -0.15
D3+ 0.0297 0.3918 0.102 -1.31 1.37 -1.39 -0.56 0.36 -0.15
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IX семинар памяти В.П.Саранцева 24
M2-C2 channel. Light ions:phase space of 2H+ on target
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IX семинар памяти В.П.Саранцева 25
M2-C2 channel. Light ions:passing of fractions along channel
0 100 200 300 400 500 600 700 800 900 1000d istance, cm
0.0
0.2
0.4
0.6
0.8
1.0C
urr
i / C
urr
oi
D3+
D2+
D1+
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IX семинар памяти В.П.Саранцева 26
M2-C2 channel. Light ions: CONCLUSION
Possible provide 100% transportation through channel M2-C2 if initial beam current to reduce (in contrast with nominal) before values, provided in Table. For light ions it is required to raise the voltages on triplet QT2 before 2 kV.
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IX семинар памяти В.П.Саранцева 27
CONCLUSION
Потерь в магните М1-АМ1 и в канале С1 для всех пучков можно избежать. Для всех типов пучков есть потери в начале канала M1. При увеличении тока пучка и уменьшении его энергии потери растут. Для элементов с А < 100 в районе мишени остается только основная зарядность, посторонние теряются. Для более тяжелых элементов требуется диафрагмирование пучка.Эффективность транспортировки в канале С2 находится в интервале 80 100%. Ее можно увеличить для меньших начальных токов пучка. В канале М2-С2 можно обеспечить 100% токопрохождение для уменьшенных начальных токов пучков. Для легких ионов требуется увеличить до 2 кВ напряжения на квадруполях C2-QT21 и C2-QT22.
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IX семинар памяти В.П.Саранцева 28
THANK YOU