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© ABB Group May 16, 2014 | Slide 1 Power Semiconductors for Power Electronics Applications Munaf Rahimo, Corporate Executive Engineer Grid Systems R&D, Power Systems ABB Switzerland Ltd, Semiconductors CAS-PSI Special course Power Converters, Baden Switzerland, 8 th May 2014

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Page 1: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 1

Power Semiconductors for Power Electronics Applications Munaf Rahimo, Corporate Executive Engineer Grid Systems R&D, Power Systems ABB Switzerland Ltd, Semiconductors CAS-PSI Special course

Power Converters, Baden Switzerland, 8th May 2014

Page 2: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 2

Contents

§  Power Electronics and Power Semiconductors

§  Understanding the Basics

§  Technologies and Performance

§  Packaging Concepts

§  Technology Drivers and Trends

§  Wide Band gap Technologies

§  Conclusions

Page 3: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 3

Power Electronics and Power Semiconductors S5 S3 S1

S6 S2 S4

VDC

FWD1

Page 4: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 4

Power Electronics Applications are …. .. an established technology that bridges the power industry with its needs for flexible and fast controllers

Device Blocking Voltage [V]

Dev

ice

Cur

rent

[A]

104 103 102 101

104

103

102

101

100

HVDC Traction

Motor Drive

Power Supply

Automotive

Lighting

FACTS

HP

Grid Systems

Industrial Drives

Transportation

DC → AC AC → DC AC(V1,ω1, ϕ1) → AC(V2,ω2, ϕ2) DC(V1) → DC(V2)

PE conversion employ controllable solid-state switches referred to as Power Semiconductors

DC =

~ ~

= ~ ~

AC AC

M

Page 5: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 5

Power Electronics Application Trends

§  Traditional: More Compact and Powerful Systems

§  Modern: Better Quality and Reliability

§  Efficient: Lower Losses

§  Custom: Niche and Special Applications

§  Solid State: DC Breakers, Transformers

§  Environmental: Renewable Energy Sources, Electric/Hybrid Cars

Page 6: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 6

Module

Sub-module section

PIN

Wafer

IGBT

System Valve

1947: Bell`s Transistor Today: GW IGBT based HVDC systems

The Semiconductor Revolution

Page 7: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 7

Semiconductors, Towards Higher Speeds & Power

§  It took close to two decades after the invention of the solid-state bipolar transistor (1947) for semiconductors to hit mainstream applications

§  The beginnings of power semiconductors came at a similar time with the integrated circuit in the fifties

§  Both lead to the modern era of advanced DATA and POWER processing

§  While the main target for ICs is increasing the speed of data processing, for power devices it was the controlled power handling capability

§  Since the 1970s, power semiconductors have benefited from advanced Silicon material and technologies/ processes developed for the much larger and well funded IC applications and markets

Kilby`s first IC in 1958

Robert N. Hall (left) at GE demonstrated the first 200V/35A

Ge power diode in 1952

Page 8: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 8

The Global Semiconductor Market and Producers

Page 9: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 9

Power Semiconductors; the Principle

Power Semiconductor

Rectifiers (Diodes)

Switches (MOSFET, IGBT, Thyistor)

Current flow direction

Page 10: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 10

Power Semiconductor Device Main Functions

Switch §  Main Functions of the power device:

§  Support the off-voltage (Thousands of Volts)

§  Conduct currents when switch is on (Hundreds of Amps per cm2)

High Power Device Logic Device

Page 11: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 11

Silicon Switch/Diode Classification

Si Power Devices

BiPolar UniPolar

Thyristors GTO/IGCT

Triac BJT

§  Current drive §  up to 10kV

§  Current drive §  up to 2kV

JFET MOSFET (Lat. & Ver.)

BiMOS

IGBT (Lat. & Ver.)

SB Diode PIN Diode

§  up to 13kV

§  Voltage drive § up to 6.5kV

§  Voltage drive § up to 1.2kV

§  Voltage drive §  few 100V

§  few 100V

Page 12: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 12

Evolution of Silicon Based Power Devices

1970 1980 1990 1960 2000 2010

Bipolar Technologies

Ge → Si

GTO IGCT

MOS Technologies

IGBT

PCT/Diode

MOSFET

BJT

evolving

evolving

evolving

evolving

Page 13: Rahimo.pdf

Silicon, the main power semiconductor material

© ABB Group May 16, 2014 | Slide 13

§  Silicon is the second most common chemical element in the crust of the earth (27.7% vs. 46.6% of Oxygen)

§  Stones and sand are mostly consisting of Silicon and Oxygen (SiO2)

§  For Semiconductors, we need an almost perfect Silicon crystal

§  Silicon crystals for semiconductor applications are probably the best organized structures on earth

§  Before the fabrication of chips, the semiconductor wafer is doped with minute amounts of foreign atoms (p “B, Al” or n “P, As” type doping)

Page 14: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 14

Power Semiconductor Processes

Logic Devices

MOSFET, IGBT

Thyristor, GTO, IGCT

Critical Dimension

Min. doping concentration

Max. Process Temperature*

0.1 - 0.2 µm

1 - 2 µm

10 -20 µm

1015 cm-3

1013 - 1014 cm-3

< 1013 cm-3

1050 - 1100°C (minutes)

1250°C (hours)

1280-1300°C(days) melts at 1360°C

Device

§  It takes basically the same technologies to manufacture power semiconductors like modern logic devices like microprocessors

§  But the challenges are different in terms of Device Physics and Application

§  Doping and thickness of the silicon must be tightly controlled (both in % range)

§  Because silicon is a resistor, device thickness must be kept at absolute minimum

§  Virtually no defects or contamination with foreign atoms are permitted

Page 15: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 15

Power Semiconductors Understanding The Basics

Page 16: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 16

… without diving into semiconductor physics …

Power Semiconductors, S. Linder, EPFL Press ISBN 2-940222-09-6

-­‐1.50 -­‐1

.00 -­‐0

.50 0

.00 0

.50 1

.00 1

.50

nucleus

ionising radiation

electron “knocked out of orbit”

+ + + + + + + ++

conduction  band

band  gap  

valance  band

core  band

-­‐20

-­‐15

-­‐10 -­‐5 0 5 10 15 20

00.5

11.5

22.5

r= distance from nucleus

E= energy of electron

allowable energy levels

Conduction Band

Valence Band

Valence Band

Valence Band

Conduction Band Conduction Band

Metal(ρ ≈ 10-6Ω-cm)

Semiconductor(ρ ≈ 102…6Ω-cm)

Insulator(ρ ≈ 1016Ω-cm)

Band Gap

Si

Si

−−

−−

−−

−−

−−

Si

Si Si Si Si

SiSiSi

Si Si

Page 17: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 17

The Basic Building Block; The PN Junction

EC

EV

EF

Anode Cathode

Forward Bias P(+)N(-)

Reverse Bias P(-)N(+)

h

e

+

+

+

+

+

+

+

+

+

+

+ +

+

+

+

+

+

+

+ +

+

++−−−

−−

−−

−−

−−−

−−−

−−−−−

−−−

−−−

−−−−

−−

−−

+ donors − acceptors holes electrons

p-type n-typeelectric field

junction

No Bias

Space-charge region expands and avalanche break-down voltage is reached at critical electric field for Si (2x105V/cm)

Space-charge region abolished and a current starts to flow if the external voltage exceeds the “built-in” voltage ~ 0.7 V

Page 18: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 18

The PIN Bipolar Power Diode

Power Diode Structure and Doping Profile

The low doped drift (base) region is the main differentiator for power devices (normally n-type)

ρ = q (p – n + ND – NA)

Poisson’s Equation for Electric Field

Permittivity

Charge Density

Page 19: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 19

The Power Diode in Reverse Blocking Mode

V Nbd D= × −5 34 1013 3 4. /

V N Wpt D B= ×−7 67 10 12. Punch Through Voltage

Non - Punch Through Breakdown Voltage

•  All the constants on the right hand side of the above equations have units which will result in a final unit in (Volts).

Voltage (Volt)

Cur

rent

(Am

p)

0

0.000001

0.000002

0.000003

0.000004

0.000005

0 100 200 300 400 500 600 700 800 900 1000 1100 1200

Vpt

I s

Vbd

Page 20: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 20

Power Diode Reverse Blocking Simulation (1/5)

1.0E+12

1.0E+13

1.0E+14

1.0E+15

1.0E+16

1.0E+17

1.0E+18

1.0E+19

0 100 200 300 400 500 600depth [um]

Car

rier C

once

ntra

tion

[cm

-3]

0.0E+00

3.0E+04

6.0E+04

9.0E+04

1.2E+05

1.5E+05

1.8E+05

2.1E+05

Elec

tric

Fie

ld [V

/cm

]

VR=100V

Electric Field

Page 21: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 21

Power Diode Reverse Blocking Simulation (2/5)

1.0E+12

1.0E+13

1.0E+14

1.0E+15

1.0E+16

1.0E+17

1.0E+18

1.0E+19

0 100 200 300 400 500 600depth [um]

Car

rier C

once

ntra

tion

[cm

-3]

0.0E+00

3.0E+04

6.0E+04

9.0E+04

1.2E+05

1.5E+05

1.8E+05

2.1E+05

Elec

tric

Fie

ld [V

/cm

]

VR=1000V

Electric Field

Page 22: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 22

Power Diode Reverse Blocking Simulation (3/5)

1.0E+12

1.0E+13

1.0E+14

1.0E+15

1.0E+16

1.0E+17

1.0E+18

1.0E+19

0 100 200 300 400 500 600depth [um]

Car

rier C

once

ntra

tion

[cm

-3]

0.0E+00

3.0E+04

6.0E+04

9.0E+04

1.2E+05

1.5E+05

1.8E+05

2.1E+05

Elec

tric

Fie

ld [V

/cm

]

VR=2000V

Electric Field

Page 23: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 23

Power Diode Reverse Blocking Simulation (4/5)

1.0E+12

1.0E+13

1.0E+14

1.0E+15

1.0E+16

1.0E+17

1.0E+18

1.0E+19

0 100 200 300 400 500 600depth [um]

Car

rier C

once

ntra

tion

[cm

-3]

0.0E+00

3.0E+04

6.0E+04

9.0E+04

1.2E+05

1.5E+05

1.8E+05

2.1E+05

Elec

tric

Fie

ld [V

/cm

]

VR=4000V

Electric Field

Page 24: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 24

Power Diode Reverse Blocking Simulation (5/5)

1.0E+12

1.0E+13

1.0E+14

1.0E+15

1.0E+16

1.0E+17

1.0E+18

1.0E+19

0 100 200 300 400 500 600depth [um]

Car

rier C

once

ntra

tion

[cm

-3]

0.0E+00

3.0E+04

6.0E+04

9.0E+04

1.2E+05

1.5E+05

1.8E+05

2.1E+05

Elec

tric

Fie

ld [V

/cm

]

VR=7400VIR=1A

Electric Field

Page 25: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 25

Power Diode in Forward Conduction Mode

Voltage (Volt)

Cur

rent

(Am

p)

0

500

1000

1500

2000

2500

3000

3500

4000

4500

5000

0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 1.1 1.2 1.3 1.4 1.5

Vo1/Ron

V V V Vf pn B nn= + +

V kTq

WLBB

a=2

22( ) Base (Drift) Region Voltage Drop

Page 26: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 26

Power Diode Forward Conduction Simulation (1/5)

1.0E+12

1.0E+13

1.0E+14

1.0E+15

1.0E+16

1.0E+17

1.0E+18

1.0E+19

0 100 200 300 400 500 600depth [um]

Car

rier

Con

cent

ratio

n [c

m-3

]

Anode

Cathode

h+

e-

Page 27: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 27

Forward Conduction Simulation (2/5)

1.0E+12

1.0E+13

1.0E+14

1.0E+15

1.0E+16

1.0E+17

1.0E+18

1.0E+19

0 100 200 300 400 500 600depth [um]

Car

rier

Con

cent

ratio

n [c

m-3

]

eDensityhDensityDopingConcentration

0102030405060708090

0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5VF [V]

IF [A

]

Page 28: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 28

Forward Conduction Simulation (3/5)

1.0E+12

1.0E+13

1.0E+14

1.0E+15

1.0E+16

1.0E+17

1.0E+18

1.0E+19

0 100 200 300 400 500 600depth [um]

Car

rier

Con

cent

ratio

n [c

m-3

]

eDensityhDensityDopingConcentration

0102030405060708090

0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5VF [V]

IF [A

]

Page 29: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 29

Forward Conduction Simulation (4/5)

1.0E+12

1.0E+13

1.0E+14

1.0E+15

1.0E+16

1.0E+17

1.0E+18

1.0E+19

0 100 200 300 400 500 600depth [um]

Car

rier

Con

cent

ratio

n [c

m-3

]

eDensityhDensityDopingConcentration

0102030405060708090

0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5VF [V]

IF [A

]

Page 30: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 30

Forward Conduction Simulation (5/5)

1.0E+12

1.0E+13

1.0E+14

1.0E+15

1.0E+16

1.0E+17

1.0E+18

1.0E+19

0 100 200 300 400 500 600depth [um]

Car

rier

Con

cent

ratio

n [c

m-3

]

eDensityhDensityDopingConcentration

0102030405060708090

0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5VF [V]

IF [A

]

Page 31: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 31

Power Diode Reverse Recovery §  Reverse Recovery: Transition from the conducting to the blocking state

Stray Inductance

Diode inductive load

IGBT

VDC

(2800V)

Page 32: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 32

Reverse Recovery Simulation (1/5)

1E+12

1E+13

1E+14

1E+15

1E+16

1E+17

1E+18

1E+19

0 100 200 300 400 500 600depth [um]

conc

entr

atio

n [c

m-3

]

0.0E+00

5.0E+04

1.0E+05

1.5E+05

2.0E+05

2.5E+05

3.0E+05

3.5E+05

E-Fi

eld

[V/c

m]

Anode Cathode

Page 33: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 33

Reverse Recovery Simulation (2/5)

1E+12

1E+13

1E+14

1E+15

1E+16

1E+17

1E+18

1E+19

0 100 200 300 400 500 600depth [um]

conc

entr

atio

n [c

m-3

]

0.0E+00

5.0E+04

1.0E+05

1.5E+05

2.0E+05

2.5E+05

3.0E+05

3.5E+05

E-Fi

eld

[V/c

m]

Page 34: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 34

Reverse Recovery Simulation (3/5)

1E+12

1E+13

1E+14

1E+15

1E+16

1E+17

1E+18

1E+19

0 100 200 300 400 500 600depth [um]

conc

entr

atio

n [c

m-3

]

0.0E+00

5.0E+04

1.0E+05

1.5E+05

2.0E+05

2.5E+05

3.0E+05

3.5E+05

E-Fi

eld

[V/c

m]

Page 35: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 35

Reverse Recovery Simulation (4/5)

1E+12

1E+13

1E+14

1E+15

1E+16

1E+17

1E+18

1E+19

0 100 200 300 400 500 600depth [um]

conc

entr

atio

n [c

m-3

]

0.0E+00

5.0E+04

1.0E+05

1.5E+05

2.0E+05

2.5E+05

3.0E+05

3.5E+05

E-Fi

eld

[V/c

m]

Page 36: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 36

Reverse Recovery Simulation (5/5)

1E+12

1E+13

1E+14

1E+15

1E+16

1E+17

1E+18

1E+19

0 100 200 300 400 500 600depth [um]

conc

entr

atio

n [c

m-3

]

0.0E+00

5.0E+04

1.0E+05

1.5E+05

2.0E+05

2.5E+05

3.0E+05

3.5E+05

E-Fi

eld

[V/c

m]

Page 37: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 37

Lifetime Engineering of Power Diodes §  Recombination Lifetime: Average value of time (ns - us) after which free carriers

recombine (= disappear).

§  Lifetime Control: Controlled introduction of lattice defects è enhanced carrier recombination è shaping of the carrier distribution

ON-state Carrier Distribution

with local lifetime control

without lifetime control

CO

NC

ENTR

ATIO

N

DEPTH

Page 38: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 38

Power Diode Operational Modes •  Reverse Blocking State

•  Stable reverse blocking •  Low leakage current

•  Forward Conducting State •  Low on-state losses •  Positive temperature coefficient

•  Turn-On (forward recovery) •  Low turn-on losses •  Short turn-on time •  Good controllability

•  Turn-Off (reverse recovery) •  Low turn-off losses •  Short turn-off time •  Soft characteristics •  Dynamic ruggedness

Vf

25C 125C

Vpt

Is

Vbd

125C

25C

V V

I I

Forward Characteristics Reverse Characteristics

+ve Temp. Co.

-ve Temp. Co.

IF

Vpf

Vf

IF

dif/dt

tFI

V

V

prpr

Rdi/dt

dir/dtdv/dt

IF

Qrr

trr

Forward Recovery Reverse Recovery

Current

VoltageVoltageCurrent

time time

Page 39: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 39

Power Semiconductors Technologies and Performance

Page 40: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 40

Silicon Power Semiconductor Device Concepts

Conversion Frequency [Hz]

Con

vers

ion

Pow

er [W

] 104 103 102 101

108

106

104

102

PCT

IGCT

IGBT

Today`s evolving

Silicon based devices

MOSFET

and the companion Diode GTO / GCT

PCT IGBT

BJT

MOSFET 10s of volts 1000s of volts

In red are devices that are in

“design-in life”

Page 41: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 41

Silicon Power Semiconductor Switches

Low on-state losses High Turn-off losses

Technology Device Character

Bipolar (Thyristor) Thyristor, GTO, GCT

Control Type

Voltage Controlled (Low control power)

Current Controlled (“High” control power)

Bipolar (Transistor)

BJT, Darlington

BiMOS (Transistor)

IGBT

Unipolar (Transistor)

MOSFET, JFET

Voltage Controlled (Low control power)

Current Controlled (“High” control power)

Medium on-state losses Medium Turn-off losses

High on-state losses Low Turn-off losses

Medium on-state losses Medium Turn-off losses

Page 42: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 42

The main High Power MW Devices: LOW LOSSES

PCT/IGCT

IGBT

Plasma in IGCT for low losses

Plasma in IGBT

p

p

n-

n-

p n

n p

Cathode

Cathode Gate

Gate

Hole Drainage

Con

cent

ratio

n

p n-

p n

Anode

•  PCTs & IGCTs: optimum carrier distribution for lowest losses

•  IGBTs: continue to improve the carrier distribution for low losses

Page 43: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 43

The High Power Devices Developments

Page 44: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 44

Power Semiconductor Power Ratings

Pheat

ambient

Tj

Rthjc

Rthcs

Rthsa

Ta

IGBT chip Tj

Insulation and baseplate

HeatsinkRthja

Total IGBT Losses : Ptot = Pcond + Pturn-off + Pturn-on

Page 45: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 45

§  Power Density Handling Capability: §  Low on-state and switching losses

§  High operating temperatures

§  Low thermal resistance

§  Controllable and Soft Switching: §  Good turn-on controllability

§  Soft and controllable turn-off and low EMI

§  Ruggedness and Reliability: §  High turn-off current capability

§  Robust short circuit mode for IGBTs

§  Good surge current capability

§  Good current / voltage sharing for paralleled / series devices

§  Stable blocking behaviour and low leakage current

§  Low “Failure In Time” FIT rates

§  Compact, powerful and reliable packaging

Performance Requirements for Power Devices (technology curve: traditional focus)

Page 46: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 46

Power Semiconductor Voltage Ratings

VDRM

VRRM

VDSM

VRSMVRWM

VDWMVDPM

VRPM

•  VDRM – Maximum Direct Repetitive Voltage

•  VRRM – Maximum Reverse Repetitive Voltage

•  VDPM – Maximum Direct Permanent Voltage

•  VRPM – Maximum Reverse Permanent Voltage

•  VDSM – Maximum Direct Surge Voltage

•  VRSM – Maximum Reverse Surge Voltage

•  VDWM – Maximum Direct Working Voltage 6.5kV IGBT FIT rates due to cosmic rays

Page 47: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 47

Cosmic Ray Failures and Testing §  Interaction of primary cosmics with magnetic

field of earth “Cosmics are more focused to the magnetic poles”

§  Interaction with earth atmosphere: §  Cascade of secondary, tertiary … particles in the

upper atmosphere

§  Increase of particle density

§  Cosmic flux dependence of altitude

§  Terrestrial cosmic particle species:

§  muons, neutrons, protons, electrons, pions

§  Typical terrestrial cosmic flux at sea level: 20 neutrons per cm2 and h

atmosphere

earth

primary cosmic particle

secondary cosmics

Terrestrial cosmics

•  Failures due to cosmic under blocking condition without precursor

•  Statistical process and Sudden single event burnout

+-

p n

Page 48: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 48

Power Semiconductor Junction Termination

Conventional technologyPlanar technology

P+ P+

N+

Moly

P+ Diffusions

PassivationMetal source contact

Guard rings

N - Base (High Si Resistivity)

N+

PassivationMetal source contact

CathodeAnode

BevelN - Base (High Si Resistivity)

Page 49: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 49

The Insulated Gate Bipolar Transistor (IGBT)

cut plane

IGBT cell approx. 100’000 per cm2

Page 50: Rahimo.pdf

How an IGBT Conducts (1/5)

Collector

Emitter

Switch „OFF“: No mobile carriers (electrons or holes) in substrate. No current flow.

+

Page 51: Rahimo.pdf

How an IGBT Conducts (2/5)

Collector

Emitter

Turn-on: Application of a positive voltage between Gate and Emitter

+

3.3kV IGBT output IV curves

Page 52: Rahimo.pdf

How an IGBT Conducts (3/5)

Collector

Emitter

The emitter supplies electrons through the lock into the substrate.

The anode reacts by supplying holes into the substrate

+

Current flow

Current flow

A MOSFET has only N+ region, so no holes are supplied and the device operates in Unipolar mode

Page 53: Rahimo.pdf

How an IGBT Conducts (4/5)

Electrons and holes are flowing towards each other (Drift and diffusion)

Collector

Emitter

+

Current flow

Current flow

Page 54: Rahimo.pdf

How an IGBT Conducts (5/5)

Electrons and holes are mixing to constitute a quasi-neutral plasma. With plenty of mobile carriers, current can flow freely and the device is conducting (switch on)

Emitter

+

Collector

Current flow

Current flow 3.3kV IGBT doping/plasma

Page 55: Rahimo.pdf

3.3kV IGBT Switching Performance: Test Circuit Stray Inductance

Diode inductive load

IGBT

VDC

(1800V)

Page 56: Rahimo.pdf

Plasma extraction during turn-off (1/5)

1E+12

1E+13

1E+14

1E+15

1E+16

1E+17

1E+18

0 50 100 150 200 250 300 350 400depth [um]

conc

entr

atio

n [c

m-3

]

0.0E+00

5.0E+04

1.0E+05

1.5E+05

2.0E+05

2.5E+05

3.0E+05

E-Fi

eld

[V/c

m]

Anode

Cathode (MOS-side)

N-Base (Substrate)

Buffer

plasma, e ≈ h

Page 57: Rahimo.pdf

Plasma extraction during turn-off (2/5)

1E+12

1E+13

1E+14

1E+15

1E+16

1E+17

1E+18

0 50 100 150 200 250 300 350 400depth [um]

conc

entr

atio

n [c

m-3

]

0.0E+00

5.0E+04

1.0E+05

1.5E+05

2.0E+05

2.5E+05

E-Fi

eld

[V/c

m]

Page 58: Rahimo.pdf

Plasma extraction during turn-off (3/5)

1E+12

1E+13

1E+14

1E+15

1E+16

1E+17

1E+18

0 50 100 150 200 250 300 350 400depth [um]

conc

entr

atio

n [c

m-3

]

0.0E+00

5.0E+04

1.0E+05

1.5E+05

2.0E+05

2.5E+05

3.0E+05

E-Fi

eld

[V/c

m]

Page 59: Rahimo.pdf

Plasma extraction during turn-off (4/5)

1E+12

1E+13

1E+14

1E+15

1E+16

1E+17

1E+18

0 50 100 150 200 250 300 350 400depth [um]

conc

entr

atio

n [c

m-3

]

0.0E+00

5.0E+04

1.0E+05

1.5E+05

2.0E+05

2.5E+05

3.0E+05

E-Fi

eld

[V/c

m]

Page 60: Rahimo.pdf

Plasma extraction during turn-off (5/5)

1E+12

1E+13

1E+14

1E+15

1E+16

1E+17

1E+18

0 50 100 150 200 250 300 350 400depth [um]

conc

entr

atio

n [c

m-3

]

0.0E+00

5.0E+04

1.0E+05

1.5E+05

2.0E+05

2.5E+05

3.0E+05

E-Fi

eld

[V/c

m]

Page 61: Rahimo.pdf

3.3kV IGBT Turn-on and Short Circuit Waveforms IC=62.5A, VDC=1800V

-50

0

50

100

150

200

250

1.0 2.0 3.0 4.0 5.0 6.0time [us]

Cur

rent

[A],

Gat

e-Vo

ltage

[V]

0

400

800

1200

1600

2000

2400

Col

lect

or-E

mitt

erVo

ltage

[V]

VGE=15.0V, VDC=1800V

-50

0

50

100

150

200

250

300

350

400

450

5.0 10.0 15.0 20.0 25.0 30.0 35.0time [us]

Cur

rent

[A],

Gat

e-Vo

ltage

[V]

0

250

500

750

1000

1250

1500

1750

2000

2250

2500

Col

lect

or-E

mitt

erVo

ltage

[V]

Turn-on

waveforms

Short

Circuit

Page 62: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 62

Power Semiconductors Packaging Concepts

Page 63: Rahimo.pdf

Power Semiconductor Device Packaging

•  What is Packaging ? •  A package is an enclosure for a single element, an integrated

circuit or a hybrid circuit. It provides hermetic or non-hermetic protection, determines the form factor, and serves as the first level interconnection externally for the device by means of package terminals. [Electronic Materials Handbook]

•  Package functions in PE •  Power and Signal distribution •  Heat dissipation •  HV insulation •  Protection

chip

bond wires

substrate

epoxy

base plate

solder

copper terminalplastic housing

gel

metalization

Page 64: Rahimo.pdf

Power Semiconductor Device Packaging Concepts “Insulated” Devices Press-Pack Devices

fails into low impedance state open circuit after failure Failure Mode

heat sinks under high voltage

n  all devices of a system can be mounted on same heat sink

heat sink galvanically insulated from power terminals

n  every device needs its own heat sink

Mounting

MW typically 100 kW - low MW Power range

Industry Transportation T&D

Markets Industry Transportation T&D

transportation components have higher reliability demands

Page 65: Rahimo.pdf

Insulated Package for 10s to 100s of KW

Low to Medium Power Semiconductor Packages

Discrete Devices Standard Modules

Page 66: Rahimo.pdf

Insulated Modules •  Used for industrial and transportation applications (typ. 100 kW - 3 MW) •  Insulated packages are suited for Multi Chip packaging IGBTs

heat sink (water or air cooled)

package with semiconductors inside (bolted to heat sink)

power & control terminals

Page 67: Rahimo.pdf

Press-Pack Modules

heat sink (water or air cooled)

package with semiconductors inside

power terminals (top and bottom of module)

control terminal

current flow

Page 68: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 68

Power Semiconductors Technology Drivers and Trends

Page 69: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 69

Power Semiconductor Device Technology Platforms

substrate (silicon)

gate pad (control electrode)

junction termination (“isolation of active area”)

active area (main electrode)

Page 70: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 70

Power Semiconductor Package Technology Platforms

Encapsulation/ protection •  Hermetic / non-hermetic •  Coating / filling materials

Electrical distribution •  Interconnections •  Power / Signal terminals •  Low electrical parasitics

High Voltage Insulation •  Partial Discharges •  HV insulating •  Creepage distances

Heat dissipation •  Interconnections •  Advanced cooling concepts

Powerful, Reliable, Compact, Application specific

Insulated Press Pack

Pheat

ambient

Tj

Rthjc

Rthcs

Rthsa

Ta

IGBT chip Tj

Insulation and baseplate

HeatsinkRthja

1.E-­‐1

1.E+0

1.E+1

1.E+2

1.E+3

1.E+4

1.E+5

1.E+6

1.E+7

1.E+8

10 100

Nº o

f cyc

les

Junction temperature excursion (ºC)

Typical temperature cycling curve

smaller size, lower complexity

greater size, higher complexity

Page 71: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 71

Overcoming the Limitations (the boundaries)

Rth

Tj,max – Tj,amb Power = Von Ic or = Ron

Von

The Power

The Margins

Pmax = Vmax.Imax, Controllability, Reliability

The Application

Topology, Frequency, Control, Cooling

The Cost of Performance

Page 72: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 72

Technology Drivers for Higher Power (the boundaries)

ΔT/Rth Temperature

Increasing Device Power Density

I Area

Absolute Reduced Losses Carrier Enhancement

Thickness Reduction (Blocking)

Larger Area Larger Devices

Extra Paralleling

Increased Margins Latch-up / Filament Protection

Controllability, Softness & Scale

Improved Thermal High Temp. Operation

Lower Package Rth

Traditional Focus

Integration Termination/Active

HV, RC, RB

I Integration

New Technologies

New Tech.

Vmax.Imax SOA

V.I Losses

Page 73: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 73

The Bimode Insulated Gate Transistor (BIGT) integrates an IGBT & RC-IGBT in one structure to eliminate snap-back effect

BIGT Wafer Backside

IGBT Turn-off Diode Reverse

Recovery

Page 74: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 74

Wide Bandgap Technologies

ABB SiC 4.5kV PIN Diodes for HVDC (1999)

Page 75: Rahimo.pdf

Wind Bandgap Semiconductors: Long Term Potentials Parameter Silicon 4H-SiC GaN Diamond

Band-gap Eg eV 1.12 3.26 3.39 5.47

Critical Field Ecrit MV/cm 0.23 2.2 3.3 5.6

Permitivity εr – 11.8 9.7 9.0 5.7

Electron Mobility µn cm2/V·s 1400 950 800/1700* 1800

BFoM: εr·µn·Ecrit3 rel. to Si 1 500 1300/2700* 9000

Intrinsic Conc. ni cm-3 1.4·1010 8.2·10-9 1.9·10-10 1·10-22

Thermal Cond. λ W/cm·K 1.5 3.8 1.3/3** 20

* significant difference between bulk and 2DEG ** difference between epi and bulk

§ Higher Power § Wider Frequency Range §  Very High Voltages § Higher Temperature

§ Higher Blocking §  Lower Losses §  Lower Leakage § But higher built-in voltage © ABB Group May 16, 2014 | Slide 77

Page 76: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 76

SiC Switch/Diode Classification and Issues

SiC Power Devices

BiPolar UniPolar

Thyristors 5kV~….

BJT 600V~10kV

§  Bipolar Issues §  Bias Voltage

§  Bipolar Issues §  Current Drive

JFET 600V~10kV

MOSFET 600V~10kV

§  Normally on §  MOS Issues

BiMOS

IGBT 5kV~….

§  MOS Issues §  Bipolar Issues §  Bias Voltage

Diode 600V~5kV

Diode 5kV ~ ….

§  Bipolar Issues §  Bias Voltage

§  Defect Issues §  High Cost

Page 77: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 77

SiC Unipolar Diodes vs. Si Bipolar Diode

1700V Fast IGBTs with SiC Diodes during turn-on

SiC diodes

Si diode

Page 78: Rahimo.pdf

© ABB Group May 16, 2014 | Slide 78

Conclusions §  Si Based Power semiconductors are a key enabler for modern and future

power electronics systems including grid systems §  High power semiconductors devices and new system topologies are

continuously improving for achieving higher power, improved efficiency and reliability and better controllability

§  The Diode, PCT, IGCT, IGBT and MOSFET continue to evolve for achieving future system targets with the potential for improved power/performance through further losses reductions, higher operating temperatures and integration solutions

§  Wide Band Gap Based Power Devices offer many performance advantages with strong potential for very high voltage applications

Page 79: Rahimo.pdf