Report copyright - DLC - Nihon University...146 140 130 [eV] 100 % 50 110 100 [eV] O Si,SiO,SiO 2,SiC C 質量比:500000[ppm] P 100 % 50 542540 530 [eV] 100 % 50 294 290 280[eV] 100 % 50 146
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