Report copyright - Investigation of the Structure and Properties of PVD and PACVD … · 2012. 7. 13. · 2 9.09 0.77 0.21 0.037 0.011 89.79 0.0915 3 5.92 0.49 0.15 0.037 0.007 93.33 0.0613 4 2.96 0.23
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