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    IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMSI: FUNDAMENTAL THEORY AND APPLICATIONS, VOL. 45, NO. 8, AUGUST 1998 849

    Resonance and Damping in CMOS Circuitswith On-Chip Decoupling Capacitance

    Patrik Larsson

    AbstractDesign of on-chip decoupling capacitance and mod-eling of resonance effects in the power supply network of CMOSintegrated circuits is addressed. The modeling is based on math-ematical limits proving that damping will be low, resulting inresonance unless careful design is used. Design strategies thatreduce resonance are discussed. It is shown that an optimalparasitic resistor in series with the decoupling capacitor gives amaximum damping factor of 0.5 and practical values are withinthe range 0.30.4. Examples of digital circuits show that properdesign of on-chip decoupling capacitance may reduce the numberof bonding wires by an order of magnitude. The modeling anddesign suggestions are also applicable to mixed-mode circuits. Inparticular, sampled analog networks benefit with a potentially

    higher sampling rate if enhanced damping is introduced duringdesign.

    Index Terms Noise, resonance, circuits.

    I. INTRODUCTION

    SCALING of MOS technologies gives higher speed andreduced area. On the other hand, scaling imposes higherdemands on material, packaging, and interconnections. One

    example is voltage fluctuations in the power distribution

    network [1], [2], mainly caused by inductors associated with

    the package. Assuming constant field scaling, the signal-to-

    noise ratio (SNR) due to noise scales as when

    scaling the process by Keeping the supply voltageconstant, the SNR scales as , indicating severe limitations

    on the package [3]. In recent years, techniques to reduce noise

    have gained interest. A discrete capacitor inside a package [4]

    and on-chip decoupling capacitance [5], [6] have been proven

    efficient to reduce noise.

    Adding decoupling capacitance on a chip may give reso-

    nance oscillations in the power distribution network [1]. This

    may cause noise accumulation with unexpectedly large noise

    amplitude. Resonance has been discussed in various contexts,

    as, for example, capacitive decoupling [4], wafer-scale power

    distribution [7], simultaneous switching of output buffers

    [8][10], testing [11], [12], and board-level analysis [13]. In

    [14] and [15] detailed simulation models of complex packagesand circuits were matched to measured data. Measurements

    of specific packaged devices were presented, whereas this

    paper is focused on predictive modeling of general circuits

    and design suggestions to control resonance during design of

    integrated CMOS circuits.

    Manuscript received September 3, 1996; revised August 21, 1997. Thispaper was recommended by Associate Editor T. G. Noll.

    The author is with Bell Laboratories, Lucent Technologies, Holmdel, NJ07733 USA (e-mail: [email protected]).

    Publisher Item Identifier S 1057-7122(98)05539-1.

    The paper is organized in three parts. The first part derives

    a model predicting the resonance frequency and the damping

    factor of a general CMOS circuit. This model is used in

    the second part that proposes design techniques that increase

    damping to avoid resonance. Design examples that show the

    practical use of the modeling and proposed design suggestions

    are given in the third part.

    II. THE NEED FOR DAMPING

    Fig. 1(a) shows a model of a digital CMOS circuit including

    inductive power supply connections , on-chip decouplingcapacitance , and logic gates Later, it is shown

    that the circuit in Fig. 1(a) can be approximated by the

    circuit in Fig. 1(b), which acts as a resonance circuit since the

    dc supply is ideally a short for ac signals [1]. The resonance

    frequency and damping factor are expressed in Fig.

    1(b). Modeling the dc source as an ideal short might seem

    a crude model. However, often low-impedance decoupling

    capacitors are connected close to the package [1], [2], which

    are easily included in the model in Fig. 1(b) by replacing the

    assumed short with their impedance [14]. The inductors in

    Fig. 1 are simple models of bonding wires, package leads,

    and other inductive elements. This model neglects the effects

    of capacitive coupling between intermediate nodes in theserially connected bonding wire, package lead, and external

    inductors. Furthermore, mutual coupling between neighboring

    connections is assumed to be modeled as a reduced (or

    increased) effective inductance for each individual connection.

    It is mainly this crude modeling of inductance that will give

    an upper frequency limit for which the models derived in the

    following are valid.

    When logic gates generate a current spike, the peak noise

    in the node, illustrated near in Fig. 1(c), is given as

    [6], [16]

    (1)

    where , and is the total capacitance that is

    switched during a clock cycle. This is derived from charge

    sharing between and , assuming that the total charge of

    the current spike is supplied by the decoupling capacitance and

    not by the bonding wires. A more accurate model was derived

    in [17] including the bonding wires and the rise/fall time of

    the switched node, but, for large values of , (1)

    is a good approximation. In the second-order system in Fig.

    10577122/98$10.00 1998 IEEE

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    850 IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMSI: FUNDAMENTAL THEORY AND APPLICATIONS, VOL. 45, NO. 8, AUGUST 1998

    (a) (b)

    (c)

    Fig. 1. (a) Model of a CMOS circuit including bonding wire inductance. (b) Second-order model of the chip for which resonance frequency

    and dampingfactor are defined. (c) Noise waveform of the internal node for an underdamped system when the internal circuits are switched.

    1(b) with a damping factor , the peak-to-peak noise is

    (2)

    where is given by (1). A worst-case limits to

    If the next clock edge occurs at in Fig. 1(c), the noise

    peak will be larger than at , giving noise accumulation.

    Adding on-chip decoupling capacitance increases in

    Fig. 1(b) and allows larger inductance, yielding a lower

    resonance frequency. Assuming a fixed clock period, there

    will be fewer oscillation periods during which oscillation

    energy must be dissipated before the next clock edge arrives.

    Therefore, systems with on-chip decoupling capacitance needmore attention to damping during design to avoid risk of

    noise accumulation. Although the peak noise [ in (1)] is

    reduced by an increased , the peak value to which noise

    accumulates may remain the same if is not selected carefully

    and damping is not sufficient. The peak accumulated noise can

    be estimated by setting the energy injected into the tank

    by the switching circuit equal to the energy loss introduced by

    resistive losses. This will not be treated further in this paper.

    The derivations presented below will focus on digital cir-

    cuits. Modifying the derivations to suit mixed-mode designs

    show that damping is a critical design parameter for these

    circuits as well. For sampled analog systems, noise oscillations

    must be sufficiently damped before a sample is taken. Im-proved damping directly maps to better performance in terms

    of a higher sampling frequency.

    III. MODELINGCMOS CIRCUITS WITH NETWORKS

    The model in Fig. 1(a) is approximated in two steps to get

    the model in Fig. 1(b). First, each logic gate is modeled as a

    resistor and two capacitors as in Fig. 2(a), which is reduced

    to a single branch in Fig. 2(b). Secondly, the parallel

    branches in Fig. 2(b) are merged into a single branch as in

    Fig. 1(b).

    (a)

    (b)

    Fig. 2. (a) Logic circuits in Fig. 1(a) have resistive path to either or and there is a parasitic resistance in the decoupling capacitance. (b)Network in (a) can be approximated with a simpler network.

    A. Simplified Model of Each Logic Gate

    The output of each logic gate in Fig. 1(a) has a resistive

    path to either or , depending on its logic state.

    When approximating the circuit in Fig. 2(a) with the model

    in Fig. 2(b), the lower limits on both the capacitance and the

    inductance are first determined. These give an upper limit onthe resonance frequency at which the relative impedance of

    and in Fig. 2(a) are compared. The result is that

    is shorting , i.e., Fig. 2(b) is a good approximation of Fig.

    2(a).

    Capacitance Estimation: The total capacitance in Fig. 1(a)

    consists of and , where

    (3)

    A lower limit on is determined from the required noise

    level in (1), where . is the activity ratio often

    used in power consumption estimations and within the range

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    LARSSON: RESONANCE AND DAMPING IN CMOS CIRCUITS 851

    0.050.3 [18], [19]. In digital CMOS circuits it is customary

    to keep the noise below , the threshold voltage of an

    MOS transistor. Preparing for an underdamped system with

    a required peak-to-peak noise less than , is set to

    in (1), which gives a required decoupling capacitance of

    (4)

    Here, we assume in (1), where

    the second term is the capacitance of inactive circuits. The

    switched capacitance is excluded from operating as decoupling

    capacitance, as explained in the Appendix. A standard CMOS

    process with and gives

    . was selected to ten in [6]. A lower limit on the

    total capacitance in Fig. 1(b) is

    (5)

    The sign esteems from the fact that cannot be lower

    than when and are connected in series in Fig. 1(a),

    reducing the effective capacitance to only ,

    assuming

    Inductance Estimation: Decoupling capacitance is added

    because the inductive noise is too large. Assume, e.g.,

    and that the current charging/discharging the

    switched capacitance is a triangle pulse with amplitude

    and duration , the rise time of an internal node. This gives

    (6)

    If all of the capacitance was not switched simultaneously, the

    lower limit on would be even larger.

    Resonance Frequency and Relative Impedance: With

    lower limits on both the inductance and capacitance, an upper

    limit on the resonance frequency can be estimated as

    (7)

    Comparing the impedance of and in Fig. 2(a) at the

    resonance frequency gives

    (8)

    where the last step is based on

    and The impedance ratio for the circuit in

    [14] can be estimated as 0.05, indicating that real circuits have

    a ratio much smaller than the limit predicted by (8). Assuming

    , a logic gate in Fig. 2(a) can be approximated

    by in series with shown in Fig. 2(b). This gives

    in Fig. 1(b) as

    (9)

    If the time constant of the decoupling capacitor is made similar

    to that of standard logic, an upper limit on the damping factor

    can be estimated as

    (10)

    indicating that resonance is likely.

    B. Merging Several Branches

    In the following the circuit in Fig. 2(b) is approximated

    with the model in Fig. 1(b). If the capacitor and resistor of each

    branch in Fig. 2(b) can be written and

    for , all branches can be merged into a single

    branch with

    (11)

    Another approximation is to first replace each branch of

    series resistor and capacitor with an equivalent branch where

    and are connected in parallel. At a single frequency, ,

    the impedance of the circuit in Fig. 3(a), is equivalent to that

    of the network in Fig. 3(b) if [20]

    (12)

    By choosing , given in Fig. 1(b) with determined

    by (11), the circuit in Fig. 3(a) is equivalent to the model in

    Fig. 3(b), which is transferred to Fig. 3(c). Equation (12) is

    used to get the model in Fig. 3(d). The latter approach gives

    better estimates than (11) when merging branches with large

    differences in time constants, which violates the assumption

    at (11). Both of these methods were compared in simulations

    of large circuits in both the time and frequency domain,

    showing good agreement [3].

    The previous two methods of creating the second-ordermodel in Fig. 1(b) do not take the influence of the switching

    circuits into account. As shown in Appendix, the switching

    circuits will appear either as a damping resistor or as de-

    coupling capacitance. However, the contribution to damping

    and/or decoupling is small, so both of these positive effects

    can be ignored.

    Now we have a simple circuit model of a chip, which allows

    us to estimate the resonance frequency and the damping

    factor In the following, these estimates are used to provide

    a circuit with proper on-chip decoupling capacitance, giving

    reasonable damping.

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    852 IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMSI: FUNDAMENTAL THEORY AND APPLICATIONS, VOL. 45, NO. 8, AUGUST 1998

    (a) (b)

    (c) (d)

    Fig. 3. (a) Series and (b) parallel connection of and gives equivalentimpedance at a single frequency. Several logic gates can be merged to a singleparallel branch as in (c), which can be translated to the equivalent serialcircuit in (d).

    IV. INTRODUCING DAMPING

    A resistor can increase damping in a resonance circuit.

    Resistors exist at three places in Fig. 2(b): inherent resistance

    of logic circuits, resistance in decoupling capacitance, and

    resistance in the power supply paths (not shown). A resistancefrom to would also give damping with the drawback

    of dc current.

    A. Resistance of Logic Circuits

    By intuitively selecting the resistance of the decoupling

    capacitance to give a similar time constant in the capacitor

    as in the logic circuits, the damping has an upper limit as

    shown in (10). This damping is low, so one cannot rely on

    this resistance to reduce resonance oscillations. A decoupling

    capacitor with smaller time constant than the logic circuits

    [5] will give an even lower damping factor. For mixed-mode

    design, the acceptable noise level is often lower than used in(4). This gives a larger and an even lower limit on in (10).

    B. Selecting Resistance in the Decoupling Capacitance

    The resistance of the decoupling capacitance in Fig. 2

    is a design parameter. To maximize the damping, it is derived

    how the damping depends on First, (11) is used to merge

    all branches representing the internal logic circuits. Then a

    decoupling capacitance according to (4) is added, which gives

    the model in Fig. 4(a), where as in

    (9). Equation (12) is used to merge these branches, which

    gives the intermediate circuits in Figs. 4(b) and 3(c). An

    approximate solution to this optimization problem is obtained

    when minimizing , the equivalent resistance of ,

    and As cannot be changed, the possibility of

    minimizing by selecting a proper is investigated, i.e.,

    (13)

    which gives and This leads to

    (14)

    (a)

    (b)

    Fig. 4. (a) Model used when choosing

    to maximize damping. (b)Equivalent parallel circuit of model in (a).

    where it is assumed from (9) and

    Equations (12) and (13) also give

    (15)

    where the last step is based on part of (9), and

    Equation (12) gives and

    (16)

    A typical circuit with and in (4) will

    have By selecting so that the decoupling

    capacitance has a similar time constant as the internal circuits

    [5], will be much lower than 0.5.

    A large may give large resistive voltage drop when

    the peak current of switching circuits is injected into the

    decoupling capacitor. However, for most circuits, the inactive

    part of the circuit will act as decoupling capacitance and it

    has sufficiently low resistance to take care of the peak current.

    The added decoupling capacitance takes care of the main

    portion of the charge that is switched during each clock cycle.

    Furthermore, if the inherent parasitic channel resistance of an

    MOS transistor [21] is used as , good damping can be

    achieved since the resistance is large at low frequencies at

    the same time as resistive noise is avoided due to the reducedresistance at high frequencies.

    C. Double Decoupling Capacitors

    If the circuit has high degree of activity [large in (4)]

    or if there is a large peak current, the inactive circuits might

    not have low enough resistance to avoid resistive drop. In

    this case the use of two decoupling capacitors is suggested

    [22]. One capacitor is used to assure low resistive drop

    while the other capacitor optimizes the damping. The design

    procedure for this strategy is as follows. First, a low-resistance

    decoupling capacitor is selected according to (4). Then

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    LARSSON: RESONANCE AND DAMPING IN CMOS CIRCUITS 853

    another capacitor is added as

    (17)

    i.e., is the ratio between the well-damped capacitance and

    the nearly undamped capacitance. A parasitic resistance

    is then chosen to maximize the damping according to (13). The

    same reasoning as deriving (14)(16) gives an equation similar

    to (16) with replaced by This indicates that circuits

    with high degree of pipelining require a larger decoupling

    capacitance than predicted by (4). A similar technique for

    reducing the -factor of circuits with on-chip decoupling was

    presented in [23], where an additional inductor was connected

    in series with

    D. Resistance in Power Supply Paths,

    The resistance in the power supply paths adds to the

    equivalent series resistance in Fig. 1(b). is not only

    the resistance of on-chip wiring, but also the series resistance

    of external components [14].

    A series resistance in the decoupling capacitance maypractically give a damping factor of about 0.30.4. This is

    sufficient if the resonance frequency is a few times larger than

    the clock frequency. For high-speed systems, this requires a

    low power supply path inductance. In this case can be

    used to increase the damping. It might be sufficient to model

    or, if the power supply resistance is small, a resistor is

    added [10], [13]. This coincides with the suggestion to add

    a series resistance in an output buffer [8], [9] that not only

    reduces levels but also improves damping. Difficulties

    in modeling the parasitics can be avoided by minimizing the

    parasitics and adding It may even be process compensated

    as suggested in [10].

    Due to resonance effects, the peak-to-peak noise can be

    lower when including This indicates that a zero-resistance

    power distribution network might not give the lowest noise,

    contradicting the common rule of using minimum-resistance

    power distribution. The contribution to damping is greater for a

    resistor in series with the bonding wires than if the resistor is in

    the power distribution system of the logic circuits. Therefore,

    decoupling capacitance should electrically be connected as

    close as possible to the logic circuits and not close to the

    bonding wires (for example, in the pad frame). In this way,

    resistive noise seen by the logic circuits will also be smaller

    since the peak current through the bonding wires is smaller

    than the peak current injected into the decoupling capacitance.

    E. Adding a Parallel Resistor from to

    As discussed in the Appendix, the switching circuits can

    be modeled as a resistor from to with a current

    equal to the average circuit current. This resistor will intro-

    duce damping and, by adding another resistor in parallel, the

    damping is further improved. However, the improvement in

    damping introduced by the switching circuits is rather small.

    To double this increase in damping would require an additional

    dc power consumption equivalent to the power consumption

    of the circuit itself, which is unrealistic.

    Fig. 5. Noise accumulation in a system with gated clock and a too large time constant.

    V. SELECTION OF POWER SUPPLY PATH INDUCTANCE

    The basic rule of selecting the power supply path inductance

    is to add a sufficient number of bonding wires not to violate

    their current limitation. Traditionally, the number of wires is

    selected to keep noise below noise specifications, but

    that should be accomplished with the decoupling capacitance.

    To not degrade the efficiency of the decoupling capacitor,

    the charge redistribution from the switching circuits to the

    decoupling capacitor must be achieved in less than half a

    clock cycle, which gives , where is theclock period. For latch-based logic, we need

    Assuming a total chip capacitance of determined by (9)

    and choosing as (13), we get

    (18)

    The time constant must also be smaller than a clock

    period. As illustrated in Fig. 5, where the bold line indicates

    3/4 of a cycle at the resonance frequency, noise accumulation

    might occur if This gives a rule that is

    less strict than the rule of keeping much lower than

    [1]. The rule in (18) is critical for systems with gated

    clocks and shutdown techniques. Such systems may have large

    changes in the average current demand, which may cause

    noise accumulation during several clock cycles. However, for

    a continuously clocked system with , it may be

    assumed that there is no subharmonic of , or any other

    signal, at the resonance frequency, so that resonance will not

    occur. Furthermore, with a continuous clock, part of the current

    demand of the circuit will appear as a dc current if the time

    constant is larger than the resonance frequency. Therefore,

    the decoupling capacitor need not take care of all charge

    during a clock cycle and it is possible to violate (18). This

    will be illustrated with the example circuits discussed later

    and having is actually used in [6] as evident from

    [14]. Note that the time constant restriction is not validfor the technique with double decoupling capacitors. in

    series with is used to improve the damping, so the time

    constant need not be less than a clock period.

    VI. DESIGN SUGGESTIONS

    Sections IV and V are summarized by the design checklist

    below, describing the flowchart in Fig. 6.

    1) Choose according to (5) and according to (13),

    and select the number of bonding wires to not violate

    their current limitation.

    2) If causes too large resistive noise, reduce

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    854 IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMSI: FUNDAMENTAL THEORY AND APPLICATIONS, VOL. 45, NO. 8, AUGUST 1998

    Fig. 6. Flowchart for selecting on-chip decoupling capacitance and power

    supply path inductance.

    3) If damping is satisfactorily, go to 7). This is not very

    likely according to the discussion in Section IV-B. If

    damping is too low, add

    4) If the voltage drop over is acceptable, go to 7).

    Otherwise, reduce , increase , and select a new

    An increased improves damping according to (16).

    5) If the size of is acceptable, go to 7). Otherwise, try to

    add a damping capacitor with a parasitic resistor

    according to Section IV-C and select new values

    of , , and

    6) If the resistive noise and the achieved damping are

    satisfactorily, go to 7). Otherwise, reduce inductance by

    adding more bonding wires and start from 2).

    7) If the requirements discussed in conjunction with (18)

    are fulfilled, the design is completed. Otherwise, reduce

    and start from 2).

    Note that this design scheme starts with the smallest possible

    number of bonding wires and then adds as small decoupling

    capacitance as possible to meet design requirements for the

    noise level and damping. If the damping techniques are not

    sufficient, additional capacitance is added. In the worst case,

    inductance is reduced. It is always possible to find a solution to

    the design problem, but this scheme will give the solution with

    the smallest cost assuming that the cost of reducing inductanceis larger than the cost of increased decoupling capacitance.

    VII. TWO EXAMPLE CIRCUITS

    Two realistic circuits in a 1- m CMOS technology were

    simulated to verify the previous estimates and design sugges-

    tions. The circuits were a 12 16-b multiplier with five latch

    stages and an 8 8-b multiplier where each fulladder has two

    latch stages. The multipliers consisted of ten different cells,

    including clock buffers. It is impractical to run analog simu-

    lations of large-scale networks to find damping and resonance

    frequency. Therefore, SPICE simulations of the simplified

    TABLE ICHARACTERISTICS OF TWO EXAMPLE CIRCUITS

    122 6 multiplier 82 8 multiplier

    5 V 5 V

    0.75 V 0.75 V

    110 pF 100 pF

    0.4 0.4

    0.2 0.2

    40 mA 90 mA

    100 MHz 200 MHz

    110 mW 195 mW

    22 mA 39 mA

    # transistors 7000 5400

    network in Fig. 2(a) were compared with SPICE simulations

    of the complete transistor networks including parasitics. The

    circuit in Fig. 2(b) was simulated in the frequency domain

    with MATLAB. The simplified models were obtained by first

    extracting and for each of the ten logic gates and then

    connecting all branches in parallel using a weighting

    factor reflecting the multiplicity of each cell in the circuit [3].

    A. Estimating and for the 12 16-b Multiplier

    The circuit capacitance in (3) was extracted to

    pF and the resistance was estimated to

    using (10). From simulations of power consumption, the

    average capacitance switched in each clock cycle was 43.7

    pF including the clock buffer. This gives

    , describing the average behavior of the

    circuit. Since the circuit is based on latches, half of the

    switched capacitance is charged/discharged at the positive and

    the negative clock edge, respectively. Therefore,

    should be used, and it implies that the charge redistribution

    from the switching circuits to the decoupling capacitor mustbe achieved in less than half a clock cycle, giving a modified

    restriction in (18).

    B. Estimating and for the 8 8-b Multiplier

    The 8 8-b multiplier had an extracted circuit capacitance

    of pF and a resistance of A

    capacitance of 39 pF was switched each clock cycle. This

    gives and as defined

    above. As will be shown, the decoupling capacitance design

    procedure will be quite different for the two multipliers, which

    is caused by a larger peak current of the 8 8-b multiplier as

    shown in Table I summarizing the multiplier characteristics.

    VIII. DECOUPLING THE EXAMPLE CIRCUITS

    This section demonstrates the practical use of the flowchart

    in Fig. 6. The goal of the simulations was to supply the two

    multipliers with power using as few bonding wires as possible.

    It was assumed that the current limit of a bonding wire is 200

    mA and its inductance is 10 nH. A peak-to-peak power supply

    noise limit was set to V. The subsections below are

    labeled i, ii, , according to Fig. 6.

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    858 IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMSI: FUNDAMENTAL THEORY AND APPLICATIONS, VOL. 45, NO. 8, AUGUST 1998

    assumed to be some mixture of the two extremes derived

    here. Furthermore, both the improvement in damping and the

    contribution to decoupling capacitance are small. Therefore,

    the effects of the switching circuits can be neglected, as done

    in various sections of this paper.

    ACKNOWLEDGMENT

    The author would like to thank Prof. C. Svensson, C.

    Jansson, and the late Associate Prof. S. Eriksson at Linkoping

    University for their helpful discussions.

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    Patrik Larsson received the Ph.D. degree fromLinkoping University, Linkoping, Sweden, in 1995,where his research focused on the inherent analogproperties of digital signals and how they affectdigital circuits.

    From 1993 to 1994 he was with a mixed-modedesign group at ERSO/ITRI, Taiwan. He is now withthe DSP and VLSI Systems Research Group, BellLaboratories, Lucent Technologies, Holmdel, NJ.His current interests are in low-power arithmetic andsignal processing, clock recovery and equalization

    for cable modems, and various flavors of phase-locked loops (PLLs). He hascontributed to analysis, measurement, testing, and robust design. He has alsoworked on PLLs and high-speed CMOS frequency dividers and counters.