Technology with Passion

RF DELIVERY SYSTEMS LEADING TECHNOLOGY2018

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Empowering Tomorrow ___________________________________________________ 4

Combined Competence ___________________________________________________ 5

Product Portfolio _________________________________________________________ 7

cito RF generators ________________________________________________________ 9

Impedance Matching Networks ___________________________________________ 12

Linear Pulse Power Amplifiers for Medical Products _________________________ 14

VHF Power Generators for Laser Products __________________________________ 15

Technical Information ____________________________________________________ 17

Sales and Technical Support ______________________________________________ 19

TABLE OF CONTENTS

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Anticipating Tomorrow’s Market Needs

As mobile devices become more and more powerful and interconnected, COMET’s RF technology is playing a critical role.

Our expertise is helping to empower innovation and growth in this fast-moving industry. Every new smartphone, every new tablet exceeds the functionality of its predecessors. Smaller devices need smaller chips; new applica-tions demand better performance; higher functionality necessitates faster semiconduc-tors. And to accomplish all of this while remain-ing environmentally responsible requires truly efficient technology.

We create solutions that respond both to today’s trends and tomorrow’s needs. This mission is the day-to-day focus of our research and development efforts.

For the last five decades, COMET Plasma Control Technologies has significantly contributed to the progress of RF and vacuum technology. This pioneering spirit is driving RF technology a step forward every day.

Developing High Value RF Solutions

COMET is a global innovation partner of RF related industries. Since 1965, our products have earned a global reputation of excellence in quality and reliability over a broad variety of applications. We combine years of busi-ness experience with high-level technological expertise, always developing new ways for our customers to gain marketplace advantage.

Every day in our R&D departments, across our supply chains, and along our production lines, top-notch specialists are working to build and improve the products that empower your business.

From Silicon Valley to the Swiss Alps, from metropolitan Shanghai to rural Stolberg, our global network of professionals is dedicated to helping you thrive in today’s fast-moving marketplace. They may speak many different languages, but they share the same passion: the desire to make a difference for you — and for the next generation.

EMPOWERING TOMORROW

“Market needs and special require-ments are drivers of progress. Anticipating them is what gives key technology players an edge. Responding to them is what makes a true market leader.”

Michael Kammerer, President PCT

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COMBINED COMPETENCE GLOBAL PRESENCE

“Close collaboration with our customers is the foundation for success.” Paul Smith, Global Product Marketing PCT

Reliable RF Power Control System

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I Innovation partner for RF Technology

I Diversified product portfolio: Matching networks, generators, capacitors

I Customized solutions: Designed to serve your needs

I Global R&D centers for industry leading innovation

I Patented technologies invented in all product areas

COMET’s customized RF products combine leading-edge components, fast control algorithms, and circuit designs which outperform customers’ expectations.

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cito RF generators ________________________________________________________ 9

Impedance Matching Networks ___________________________________________ 12

Linear Pulse Power Amplifiers for Medical Products ________________________ 14

VHF Power Generators for Laser Products _________________________________ 15

PRODUCT PORTFOLIO

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Platform architecture eases business process flow

cito is not just another RF power generator. It is the heart of an advanced power delivery sys-tem capable of cost-effectively meeting even the most advanced and demanding RF plasma application requirements.

The innovative platform design offers best in class technology thanks to adaptable architecture and sophisticated feature sets.

I Scalable in power

I Ideal for frequencies from 13.56 MHz to 200MHz

I Air cooled (2U) platform is offered in all generators up to 1 kW

I Water cooled (3U) platform is offered in all generators from 2 to 7 kW

Customer Benefits

Ultra-high efficiency and robustness

I Lower operating temperature drives higher reliability

I Lower electricity consumption

I Less demand for coolants

Flexible and user friendly design

I Quick availability of new product variants

I Short learning curve for technicians and operators

I Easy recipe migration to cito models with different power ratings and frequencies

cito GENERATORS POWERED BY LDMOS FET TECHNOLOGY

cito RF generators employ the latest generation of LDMOS FET technology. LDMOS has become the industries choice for reliable power generation. Combined with COMET’s latest power amplifier designs, the cito is both extremely rugged and efficient. A rare combination.

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I Operating frequencies: 13.56 MHz, 27.12 MHz, 40.68 MHz, 60 MHz

I RF power efficiency > 85%

I Pulse mode operation compatible with automatic impedance matching

Applications

I CVD

I Plasma enhanced

I ALD

I Plasma Etch

I Sputtering

I Plasma Cleaning

I Surface Modification

I Atmospheric Plasma

cito GENERATORS FOR PRECISE PROCESS CONTROL

cito GeneratorsPowerW

Frequency

13.56 MHz 27.12 MHz 40.68 MHz 60 MHz

600

1000

2000

3000

4000

5000

6000

7000

released under development

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cito GENERATORS PROCESS PULSING

Pulsing performance is the key to many advanced plasma processes and COMET is leading the way with selectable pulse rate and duty cycles to optimize your process.

Customer Benefits

I Improved process control

I Reduced wafer damage

I High-aspect-ratio etching

Industry leading pulse performance

I Precise measurement and control

I Fast rise (< 4 µs) and fall time (< 1 µs)

I Pulsing without turning RF OFF

I Pulse synchronization between multiple cito generators Example of a perfect rise time at ~ 2 µs

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Customer Benefits

Flexible: Tune range and output types

I Variable tap settings on series inductor

I Multiple RF output locations and types

Simple: Fast setup and easy operation

I Complete and intuitive control via front panel of cito RF generator

I Remote control via analog matching interface

The AGS and cito – a perfect match

The AGS is highly integrated with the cito RF Generator for fast and easy set-up, while offer-ing high reliability and repeatable operation over the life time of the product.

The digital controller features high speed tuning, customized algorithms and synchro-nized pulsing.

AGS matching networks automatically track the optimum tuned position:

I Pulsing synchronized with cito RF generator

I End-to-end capacitor tuning within max. 3 s

I Standalone auto-tuning for any RF source

IMPEDANCE MATCHING NETWORKS AGS

COMET vacuum capacitors are at the core of every AGS design.

Compact size with multiple mounting possibilities

L configuration with tappable inductors

Compatible with pulsed RF up to 10 kHz

Max. 3 sec. end-to-end capacitor tuning

Multiple output connector types

High performance components

I Swiss-designed, highly reliable vacuum capacitors

I High torque stepper motors for high speed and precision

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IMPEDANCE MATCHING NETWORKS CUSTOMIZED

Customer benefits

I Built to your system specifications

I Designed and manufactured for accuracy and repeatability

Designed to serve future needs

COMET’s RF and VHF matching networks are designed for semiconductor and flat-panel- display (FPD) applications from 400 kHz to >150 MHz.

Our RF design expertise creates a full range of industry leading matching network solutions that meet or exceed your specifications.

An advanced digital controller enables active tuning while in frequency sweep mode or RF pulse mode. Full sensor options include VI, DC Bias and VPP.

Multiple configurations are available with sin-gle or dual outputs, as well as multi frequency inputs.

Talk to us. Our solutions are designed to serve your needs.

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LINEAR PULSE POWER AMPLIFIERS FOR MEDICAL PRODUCTS

COMET is specialized in high linear power amplifiers for high-field MRI and NMR applications mainly in the high-end range of 3 Tesla to 11.7 Tesla, corre-sponding to operating frequencies as high as 500 MHz.

Fulfilling the toughest customer requirements

LPPA 13080 is a long time success story cover-ing the frequency range from 16.7 MHz to 123 MHz serving multicore 0.5 T (Tesla) to 3 T appli-cations. In fact, COMET is proud to have served the MRI market leader for over 25 years.

With LPPA 22080 we offer another wideband amplifier, covering the frequency range from 30 to 220 MHz. We design leading edge 8 and 16 kW multichannel MRI power amplifiers from 279 MHz to 500 MHz. All models consist of a high number of power semiconductors per kilowatt RF ensuring a low pulse power droop and very high linearity. Our R&D department in Stolberg/Germany offers you technical and application support around the globe.

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VHF POWER GENERATORS FOR LASER PRODUCTS

Success through technology advantage

Employing the latest high power LDMOS transistors and compact planar transformer technology, COMET VHF laser power sup-plies come with a small footprint at competi-tive prices.

If your VHF laser needs rugged power

I from 600 W to 25 kW

I within 60 MHz and 125 MHz

we have the solution, give us a call.

COMET Plasma Control Technologies has proven to be a reliable and highly competent partner for many customized projects such as modules for laser applications.

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COMET is working constantly to solve the most critical technology challenges.

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citoStandard Platform Features

Dimensions User Ports / Interface

Compact 19’’ rack-mount design600 W - 1000 W: 2U x 490 mm (19.29 in)2000 W - 7000 W: 3U x 630 mm (24.8 in)

Scalable Analog I/ODigital I/O RS 232Digital I/O EthernetCOMET Matching Network Interface

Active Front Panel Control CEX/Master Slave

Standardized front panel for quick assessment and devel-opement including a large LC display, extensive features, and full monitoring function

CEX master slave option for up to 4 cito generatorsPhase shift control +/- 180°

Power management modes Software

Forward powerDelivered powerProcess feedback control (DC bias or others)

PC based controlMonitoring softwareAccess to all generator settings

Presets AC Input

1 factory preset5 customer presets

600 W - 1000 W: 1 Ph. 187 - 265 VAC2000 W - 5000 W: 3 Ph. 180 - 220 VAC or 360 - 505 VAC6000 W - 7000 W: 3 Ph. 360 - 505 VAC

Power Profiles (Recipes) RF connector

10 user-programmable power profiles 600 W - 1000 W: N-type2000W - 7000 W: 7-16 typeSynchronization

Ultrafast multiple RF generator synchronizationMaster/slave operation up to 4 units

Optional Platform Features

User Ports

Cooling Anybus module for additional protocolsRS-485CANopenProfibusEtherCATDeviceNet

600 W - 1000 W: Air2000 W - 7000 W: Water

Output Impedance

50 Ω

Pulsing

Industry leading 30 kHz pulse rate

AGSStandard Features

Dimensions (width x depth x height)

1000 W - 3000 W: 208 mm x 324 mm x 157 mm4000 W - 5000 W: 208 mm x 384 mm x 193 mm

Output

1000 W: 7-16, MC10, Mount Bar2000 W - 5000 W: MC10, Mount Bar

Digital user Interface

Control via the front panel of the RF generatorDigital User Interface (via host control)

AC mains input

90 to 264 VAC

Compatibility

Can be combined with any RF generatorSeamless communication with cito generator series

Cooling

1000 W - 3000 W: Air4000 W - 5000 W: Water

Range of applications

Up to 5 kW capacitive loadsInductive load applications (ICP)

Application setup (only aircooled models)

Multiple taps on main inductor for flexible selection of the appropriate load impedance rangeAdjustable tuning algorithm sensitivity

Pulsing

Pulse mode with cito generators up to 10 kHz

Load impedance

Very wide load impedance range due to taps on inductor

TECHNICAL INFORMATION cito & AGS

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COMET Plasma Control Technologies has a worldwide customer service network. All time zones are covered with our local sales and technical support organization.

COMET PCT Subsidiaries

1 Flamatt, Switzerland (headquarters)2 Stolberg, Germany3 San Jose, CA, USA4 Shanghai, China5 Suwon, Korea

Sales Representatives & Agents

6 Most EU Countries (Germany, Italy, France)7 India8 Taiwan9 Japan

SALES AND TECHNICAL SUPPORT

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For more information, please contact our international sales and service offices:

COMET AGPlasma Control TechnologiesHerrengasse 10, CH-3175 Flamatt/SwitzerlandT +41 31 744 95 00, F +41 31 744 95 90info@comet-pct.comwww.comet-pct.com

COMET Technologies USA, Inc.Plasma Control Technologies2360 Bering Drive, San Jose, CA 95131/USAT +1 408 325 8770, F +1 408 325 8773info@cometusa.comwww.comet-pct.com

YXLON International GmbHPlasma Control TechnologiesMünsterau 168, D-52224 Stolberg-Vicht/GermanyT +49 2402 99777-0, F +49 2402 99777-900info@comet-pct.comwww.comet-pct.com

COMET China1201 Guiqiao Road, Building 10, 1st floorPudong, Shanghai 201206/P.R. ChinaT +86 21 6879 9000, F +86 21 6879 9009info@cometchina.comwww.comet-pct.com

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COMET Technologies Korea Co., Ltd. Suwon Venture Plaza Bldg, Room 402 48, Samsung-ro 168beon-gil, Yeongtong-gu Suwon-si, Gyeonggi-do, Korea (South) 16676 T +82 (0)70 4337 1282, F +82 (0)70 4332 1580 infokr@comet.ch www.comet-pct.com