Carbon-Nanotube-Templated Metallic Microstructures for MEMS: Preparation and Characterization

Richard Hansen

Micro-electro-mechanical Systems (MEMS)

Motivation

CNT-M

CVI Process

CVI Challenges

Materials Properties

Conclusion

MEMS Fabrication Processes

DRIE

Deep reactive-ion etching

LIGALithographie, Galvanoformung,

Abformung (Lithography, Electroplating, and Molding)

Motivation

CNT-M

CVI Process

CVI Challenges

Materials Properties

Conclusion

Carbon-Nanotube-Templated Microfabrication

Motivation

CNT-M

CVI Process

CVI Challenges

Materials Properties

Conclusion

Carbon-Nanotube-Templated Microfabrication

Motivation

CNT-M

CVI Process

CVI Challenges

Materials Properties

Conclusion

CVI Using Metal Carbonyl Precursors

Heating Electrodes

Metal Carbonyl

CNT Sample Cartridge Heater

Gas

Motivation

CNT-M

CVI Process

CVI Challenges

Materials Properties

Conclusion

High Tensile Stress in Deposited Metal Film

1 mm

Motivation

CNT-M

CVI Process

CVI Challenges

Materials Properties

Conclusion

Extent of Infiltration

Motivation

CNT-M

CVI Process

CVI Challenges

Materials Properties

Conclusion

200 μm

200 μm

200 μm 1 μm

1 μm

1 μm

Structure of Metal film in CNT composite materials

The metal oxycarbide puts metal atoms in an FCC structure with C or O at their octahedral sites (Lattice constant of about 4.16 Å)

TEM Analysis Powder Diffraction

30 35 40 45 50 55 60 65 70 75 80 852Theta (°)

0

1000

2000

3000

Inte

nsity

(co

unts

)

Motivation

CNT-M

CVI Process

CVI Challenges

Materials Properties

Conclusion

Materials Properties of CNT composite materials

Cantilever Setup

Young’s Modulus on the order of 10 GPa

4-Point Probe Setup via the Van der Pauw Method

Resistivity on the order of 100 μΩm

Motivation

CNT-M

CVI Process

CVI Challenges

Materials Properties

Conclusion

Conclusion

Versatile Process

High-Aspect-Ratio

Materials Properties Dominated By Filler Material

Motivation

CNT-M

CVI Process

CVI Challenges

Materials Properties

Conclusion