series 46 heaters · † passes semi s9-95 strain relief test of 35 pounds † integral thermal...

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Series 46 Heaters

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HEATER JACKETS FOR STAINLESS STEEL PIPINGSIZES 1 1/2” TO 4”(NW 40 TO NW 100)

Series 46 Heaters - 11/2015MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited.

Due to continuous development, specifications and prices are subject to change without notice. Copyright © 2008 by MKS Instruments, Inc. All rights reserved.

mksinst™ is a trademark of MKS Instruments, Inc.US patent number is 5,714,738. Foreign patents pending.

MKS Series 46 Heaters 1www.mksinst.com

Table of Contents

Features and Benefits . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2

Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3

Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-4

Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5

Ordering Information

Straight Sections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-9

90° Elbows . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10

45° Elbows . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11

Tees . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12

Bellows . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12

Reducers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13

Hoses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13

Flange Insulators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .14

Tube Insulators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .15

Spare Parts, Power Cords and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .15

2 MKS Series 46 Heaterswww.mksinst.com

New Improved Heater Design• Tighter temperature control enabled by micro-

processor controlled thermocouple

• Improved reliability of heater control system dueto no-arc relay circuit

• Improved design of thermal fuse, eliminating failures caused by transient thermal spikes

• Completely compatible with Series 45 heaters insize and connectivity

• Special temperature settings available onrequest

Enhanced Heater Safety• Outside temperature of heater 45-65°C, safe

to touch

• UL listed and CE tested and marked for both electrical and thermal safety

• Passes SEMI S9-95 strain relief test of 35pounds

• Integral thermal fuse

• Ground Fault Equipment Leakage CircuitInterrupter power cord option eliminates shockhazard

Greater Thermal Performance• Reduced power consumption

• Improved temperature uniformity, prevents coldzones

• Patented design retains heat and improves thermal safety

Other Important Features• May be used in forelines or exhaust lines

• Fast delivery of standard heaters

• Light emitting diodes (LEDs) on local controllerconfirms that heater is operating properly

• Low Temperature Alert (LTA) option providesremote warning when heater is cold

• Specially designed heaters available

Series 46 HeatersHeater Jackets for Stainless Steel TubingMKS Series 46 Heaters are our newest heater design that provides improved temperature control and unifor-

mity. The heaters are UL listed and CE marked for thermal and electrical safety.

The preset temperature setpoint is microprocessor controlled through an integral electronic controller within

the power cord. The addition of a no-arc relay technique significantly extends the relay life in high current

heaters. This new control method allows you to heat longer sections of tubing with fewer heaters.

Completely compatible with Series 45 heaters, the Series 46 heaters are the same dimensional size, have a

lower current draw, and are the same price.

The heaters’ molded shape conforms to the tubing, minimizing gaps and subsequent heat loss. Taking advan-

tage of a patented process, silicone foam insulation is bonded to the outside of the reinforced silicone heater

mat, resulting in external temperatures that are safe for human contact, and meets many OSHA safety

requirements.

Features and Benefits


ApplicationsCurrent trends in semiconductor processing are towardsless maintenance, more uptime, and increased productyield. Reduction of the solid buildup resulting from the cool-ing of effluent gasses can be a factor in achieving thosegoals. Heating the system is part of a method to managethese by-products, increasing uptime, and improving waferyields, with a quick payback.

In the LPCVD silicon nitride process it is not uncommon tosee a six-fold improvement in uptime. Maintenance cycleshave increased from two-week intervals to twelve weeks, orexpressed in runs, from 20 to 145 runs.

In other applications, such as tungsten CVD or aluminumetch, heaters are used on the exhaust line to prevent clog-ging downstream of the pump or at the scrubber inlet.

Save $15,000 Per Day

For example, in a fab running 24 hours a day, 7 days aweek, if a batch of wafers is processed every 4 hours and isworth $250,000, a yield improvement of only 1% will resultin savings of $15,000 per day. Processes at several semi-conductor fabs have yielded even better results.

This improvement is achieved by keeping process effluentsin their vapor phase so that they may be carried away fromthe process chamber. Solid buildup in vacuum lines betweenthe process chamber and the pump is a major source forparticulate contamination.

Figures 1 and 2 compare the particulate contamination on awafer before and after MKS heated lines were installed. Suchbuildup can also reduce the effective pumping speed of a sys-tem by decreasing the conductance of the vacuum lines.

DescriptionMKS Series 46 Heaters are designed to improve heat distri-bution on downstream lines while complying with strictagency and corporate personnel safety standards.

The heating elements are microprocessor controlled withthe use of a thermocouple. Their molded shape conforms tothe piping, eliminating gaps and subsequent heat loss.Taking advantage of a patented process, silicone foam insu-lation is bonded to the outside of the reinforced siliconeheater mat, resulting in external temperatures that are safefor human contact.

A line of heaters is connected together (daisy-chained)using interlocking power connectors. The loss of any singleheater has no effect on the operation of the other heaters inthat chain. A power cord is required for every 12 ampsdrawn by a chain of heaters.

Flange insulators, made of the same silicone foam material,help keep heat losses at flange connections to a minimumwhile providing user safety by covering the exposed connec-tion. MKS Series 46 Heaters and insulators are fabricatedentirely from cleanroom compatible materials.

Low Temperature Alerts

An optional Low Temperature Alert (LTA) Monitor indicates ifthe temperature of one or more heaters in a line has fallenbelow the set operating temperature, through an LED and arelay output. The alarm signal can be connected to a user-supplied computer or other instrumentation to provideremote verification that the heater chain is at operating tem-perature.

Heaters equipped with the LTA option contain a normallyopen thermal switch that closes as the heater approachesnormal operating temperature.

The thermal switches are designed to be connected inseries to permit monitoring a line of heaters with a singleLTA monitor. If any of the thermal switches fails to close,then one of the heaters in the line has gone cold and theLTA monitor will signal a fault via a flashing red LED. Whenall heaters are within their normal operating temperaturerange, the monitor’s green LED will be on.

Enhanced Safety

MKS Series 46 Heaters are the result of many years of con-tinuous improvement dedicated to satisfy the demands ofmodern semiconductor facilities and represent the higheststandard of thermal and electrical safety on the market.

Figure 1 - Particles on wafer before MKS heaters

Figure 2 - Particles on wafer afterinstalling MKS heaters


Low outside temperature safe to touch

One of the primary concerns of safety engineers is exposureto hot surfaces. Pipeline heaters in particular present oppor-tunity for incidental contact because of the vast amount ofvacuum piping typically found in a fab. Superior thermalinsulation is key to holding the heat near the pipe where it isneeded, and away from the outside surface. A heater operat-ing at 150°C requires a 0.5-inch thick layer of silicone foamin order to meet safety standard limits (see Figure 3).

When an object touches the outer diameter of the Series 46heater jacket, it acts as a heat sink and the outside tempera-ture of the heater drops. When the object is removed, the sil-icone temperature returns to 65°C (see Figure 4).

UL listed

The basic heater mat, power leads, critical temperaturedevices such as the controller and thermal fuse, and otherconstruction materials have all been reviewed and certifiedby UL and given the UL listing designation. UL safety stan-dards cover both thermal and electrical issues.

CE marked for both electrical and thermal safety

An independent test lab has tested and certified the entireheater for compliance with the relevant EuropeanElectromagnetic Compatibility and Low Voltage directives.

Passes SEMI S9-95 strain relief test of 35 pounds

Each power lead is capable of sustaining a load in excess of35 pounds without damage. The heaters are durable anddesigned to withstand the rigors of repeated installation andremoval without damage.

Integral thermal fuse

A secondary temperature-limiting device is required by sev-eral safety standards organizations. Our thermal fuse is con-sidered a critical safety component and has been certifiedby UL, CSA, and VDE testing agencies.

Ground Fault Equipment Leakage CircuitInterrupter (GFELCI) power cord option

Vacuum piping installations should be grounded. In the eventthat the ground connection is lost, the GFELCI power cordoption will maintain electrical safety even with a short circuitto ungrounded piping. The GFELCI power cord will cutpower off to the heaters within 25 msec upon sensing a cur-rent imbalance between the hot and neutral power lines. Thedetection circuit is similar to those used in new residentialconstruction.

Figure 3 - Outside and inside temperatures of the Series 46 heater jackets

Figure 4 - Series 46 “Heat-Sink” Graph


Heater Specifications

Nominal Set Point Temperature 150°C (302° F)

105°C (221°F)

Exterior Range Temperature 60°-70°C (140°-158°F)

45°-55°C (113°-131°F)

Interior Range Temperature 130°-170°C (266°-338°F)

90°-120°C (194°-248°F)

Foam Thickness 0.5 in. (12.7 mm)

Materials Molded silicone foam, fiber-

glass reinforced silicone,

Teflon insulated wire

Connectors Midget Twist-Lock, nylon,

NEMA ML-1

Weight Range 0.5 to 6.2 lb (0.73 to 2.8 kg)

Product Safety CE Mark: 89/336/EEC EMC

Directive, 73/23/EEC LV

Directive UL Listed File

E52951 2JR

Heater Features1. Exterior Heater Surface

2. Interior Heat Mat

3. Cable Lead with Male Twist-Lock Connector

4. Microprocessor

5. Cable Lead with Female Twist-Lock Connector

6. Nylon-capped Metal Snaps

LTA Specifications

Enclosure Black Plastic

Power Requirements 90-130VAC input, 12VDC

±3VDC output

Power Consumption 0.3 W

Relay Contact Rating SPDT, 2 A @ 50 VAC

resistive, 1 A @ 30 VDC

Input/Output Wiring 1 Thermal switch line IN

2 Thermal switch line OUT

3 Normally closed

4 Common

5 Normally Open

Dimensions 2.58" x 4.76" x 1.46" (in.)

66 x 121 x 37 (mm)

Product Safety CE Mark: 89/336/EEC

EMC Directive92/59/EEC

General Product Safety

Directive

Ordering and InstallationStandard MKS Series 46 Heaters have preset control for twocommon temperatures, 105°C and 150°C. The first step inselecting heaters is to determine which temperature will bestsuit your process application. If unsure as to which tempera-ture heater to use, let the MKS applications engineeringteam assist in determining the appropriate heaters for thesystem.

Once the temperature is determined, select heaters to fit thegeometry of the system piping. MKS Series 46 Heaters aredesigned to fit onto standard MKS piping components, butwill often fit onto components from other manufacturers.Consult the MKS applications engineering team for help withnon-standard shapes, configurations, and applications.

When fitting a heater, do not use a length that is too long forthe fitting. Forcing the heater to compress to fit the compo-nent can cause damage to the heater. Instead, use a heateror combination of heaters. After covering as much of the vac-uum line as reasonable with heaters, select insulators toeliminate cold spots at flanged joints, or gaps betweenheaters. Insulators can be trimmed to fit the gap. Nevertrim a heater, only an insulator.

Finally, select the accessories needed to complete each linesuch as power cords, Low Temperature Alert diagnostics,and ground fault detection.

12

4

3

6

5


Straight Section - 1.5” Diameter Tubing

Without LTA

Tube SizeNominal Length

in. (mm)Amps at

120VPart Number

(replace the X with a 0 for 150° C or a 1 for 105° C)

Price

1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”

2.00 (51)3.00 (76)4.00 (102)5.00 (127)6.00 (152)7.00 (178)8.00 (203)9.00 (229)10.00 (254)11.00 (279)12.00 (305)13.00 (330)14.00 (356)15.00 (381)16.00 (406)17.00 (432)18.00 (457)19.00 (483)20.00 (508)21.00 (533)22.00 (559)23.00 (584)24.00 (610)30.00 (762)36.00 (914)

0.180.170.230.280.340.400.460.510.580.620.690.730.800.860.920.971.031.091.141.201.261.321.381.702.07

4615-0X024615-0X034615-0X044615-0X054615-0X064615-0X074615-0X084615-0X094615-0X104615-0X114615-0X124615-0X134615-0X144615-0X154615-0X164615-0X174615-0X184615-0X194615-0X204615-0X214615-0X224615-0X234615-0X244615-0X304615-0X36

With LTA


in. (mm)Amps at

120VPart Number


Price

1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”1.5”

2.00 (51)3.00 (76)4.00 (102)5.00 (127)6.00 (152)7.00 (178)8.00 (203)9.00 (229)10.00 (254)11.00 (279)12.00 (305)13.00 (330)14.00 (356)15.00 (381)16.00 (406)17.00 (432)18.00 (457)19.00 (483)20.00 (508)21.00 (533)22.00 (559)23.00 (584)24.00 (610)30.00 (762)36.00 (914)

0.180.170.230.280.340.400.460.510.580.620.690.730.800.860.920.971.031.091.141.201.261.321.381.702.07




Without LTA


in. (mm)Amps at

120VPart Number


Price

2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”

2.00 (51)3.00 (76)4.00 (102)5.00 (127)6.00 (152)7.00 (178)8.00 (203)9.00 (229)10.00 (254)11.00 (279)12.00 (305)13.00 (330)14.00 (356)15.00 (381)16.00 (406)17.00 (432)18.00 (457)19.00 (483)20.00 (508)21.00 (533)22.00 (559)23.00 (584)24.00 (610)30.00 (762)36.00 (914)

0.140.210.280.350.420.490.560.640.710.780.850.930.991.061.131.201.281.341.431.481.561.631.702.132.55


With LTA


in. (mm)Amps at

120VPart Number


Price

2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”2.0”

2.00 (51)3.00 (76)4.00 (102)5.00 (127)6.00 (152)7.00 (178)8.00 (203)9.00 (229)10.00 (254)11.00 (279)12.00 (305)13.00 (330)14.00 (356)15.00 (381)16.00 (406)17.00 (432)18.00 (457)19.00 (483)20.00 (508)21.00 (533)22.00 (559)23.00 (584)24.00 (610)30.00 (762)36.00 (914)

0.140.210.280.350.420.490.560.640.710.780.850.930.991.061.131.201.281.341.431.481.561.631.702.132.55




Without LTA


in. (mm)Amps at

120VPart Number


Price

3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”

2.00 (51)3.00 (76)4.00 (102)5.00 (127)6.00 (152)7.00 (178)8.00 (203)9.00 (229)10.00 (254)11.00 (279)12.00 (305)13.00 (330)14.00 (356)15.00 (381)16.00 (406)17.00 (432)18.00 (457)19.00 (483)20.00 (508)21.00 (533)22.00 (559)23.00 (584)24.00 (610)30.00 (762)36.00 (914)

0.190.280.380.480.580.680.760.880.981.061.171.271.371.461.561.661.751.841.962.052.132.232.332.923.53


With LTA


in. (mm)Amps at

120VPart Number


Price

3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”3.0”

2.00 (51)3.00 (76)4.00 (102)5.00 (127)6.00 (152)7.00 (178)8.00 (203)9.00 (229)10.00 (254)11.00 (279)12.00 (305)13.00 (330)14.00 (356)15.00 (381)16.00 (406)17.00 (432)18.00 (457)19.00 (483)20.00 (508)21.00 (533)22.00 (559)23.00 (584)24.00 (610)30.00 (762)36.00 (914)

0.190.280.380.480.580.680.760.880.981.061.171.271.371.461.561.661.751.841.962.052.132.232.332.923.53




Without LTA


in. (mm)Amps at

120VPart Number


Price

4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”

2.00 (51)3.00 (76)4.00 (102)5.00 (127)6.00 (152)7.00 (178)8.00 (203)9.00 (229)10.00 (254)11.00 (279)12.00 (305)13.00 (330)14.00 (356)15.00 (381)16.00 (406)17.00 (432)18.00 (457)19.00 (483)20.00 (508)21.00 (533)22.00 (559)23.00 (584)24.00 (610)30.00 (762)36.00 (914)

0.240.360.490.610.730.860.981.111.231.331.481.601.741.852.002.112.232.362.482.602.732.842.983.724.44


With LTA


in. (mm)Amps at

120VPart Number


Price

4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”4.0”

2.00 (51)3.00 (76)4.00 (102)5.00 (127)6.00 (152)7.00 (178)8.00 (203)9.00 (229)10.00 (254)11.00 (279)12.00 (305)13.00 (330)14.00 (356)15.00 (381)16.00 (406)17.00 (432)18.00 (457)19.00 (483)20.00 (508)21.00 (533)22.00 (559)23.00 (584)24.00 (610)30.00 (762)36.00 (914)

0.240.360.490.610.730.860.981.111.231.331.481.601.741.852.002.112.232.362.482.602.732.842.983.724.44



90° Elbow For ISO Flanged Elbows, Standard Modulus in./(mm)Without LTA

TubeSize

ModulusBend

RadiusAmps at

120VFor Use With

Part Number(replace X with a 0 for

150° C or a 1 for 105° C)Price

1.5”2.0”3.0”4.0”

2.25 (57)2.38 (60)3.75 (95)5.25 (133)

1.50 (38)2.00 (51)4.50 (114)6.00 (152)

0.230.280.540.98

100314505100314506100764608100764610

4615-0X614620-0X614630-0X634640-0X63

With LTA

TubeSize

ModulusBend

RadiusAmps at

120VFor Use With



1.5”2.0”3.0”4.0”

2.25 (57)2.38 (60)3.75 (95)5.25 (133)

1.50 (38)2.00 (51)4.50 (114)6.00 (152)

0.230.280.540.98

100314505100314506100764608100764610

4615-1X614620-1X614630-1X634640-1X63

90° Elbow for ISO Flanged Elbows, Long Radius in./(mm)Without LTA

TubeSize

ModulusBend

RadiusAmps at

120VFor Use With



1.5”2.0”

4.75 (121)5.13 (130)

2.25 (57)3.00 (76)

0.490.64

100314415100314416

4615-0X634620-0X63

With LTATubeSize

ModulusBend

RadiusAmps at

120VFor Use With



1.5”2.0”

4.75 (121)5.13 (130)

2.25 (57)3.00 (76)

0.490.64

100314415100314416

4615-1X634620-1X63

90° Elbow For Weld Elbows, Standard Modulus in./(mm)Without LTA

TubeSize

ModulusBend

RadiusAmps at

120VFor Use With

Part Number(replace X with a 0 for 150°

C or a 1 for 105° C)Price

1.5”2.0”3.0”4.0”

2.25 (57)3.00 (76)4.50 (114)6.00 (152)

2.25 (57)3.00 (76)4.50 (114)6.00 (152)

0.200.330.671.13

1002390150100239020010023903001002390400

4615-0X664620-0X664630-0X664640-0X66

With LTATubeSize

ModulusBend

RadiusAmps at

120VFor Use With



1.5”2.0”3.0”4.0”

2.25 (57)3.00 (76)4.50 (114)6.00 (152)

2.25 (57)3.00 (76)4.50 (114)6.00 (152)

0.200.330.671.13

1002390150100239020010023903001002390400

4615-1X664620-1X664630-1X664640-1X66

90° Elbow For Weld Elbows, with Tangents in./(mm)Without LTA

TubeSize

ModulusBend

RadiusAmps at

120VFor Use With



1.5”2.0”3.0”4.0”

2.88 (73)4.00 (102)6.25 (159)8.25 (210)

2.25 (57)3.00 (76)4.50 (114)6.00 (152)

0.270.481.031.71

1002390WT1501002390WT2001002390WT3001002390WT400

4615-0X674620-0X674630-0X674640-0X67

With LTATubeSize

ModulusBend

RadiusAmps at

120VFor Use With



1.5”2.0”3.0”4.0”

2.88 (73)4.00 (102)6.25 (159)8.25 (210)

2.25 (57)3.00 (76)4.50 (114)6.00 (152)

0.270.481.031.71

1002390WT1501002390WT2001002390WT3001002390WT400

4615-1X674620-1X674630-1X674640-1X67


45° Elbow For ISO Flanged Elbows, Standard Modulus in./(mm)

Without LTA

TubeSize

ModulusBend

RadiusAmps at

120VFor Use With



1.5”2.0”3.0”4.0”

1.37 (35)1.62 (41)2.94 (75)4.05 (103)

2.25 (57)3.00 (76)4.50 (114)6.00 (152)

0.200.210.550.97

100318705100318706100764408100764410

4615-0X624620-0X624630-0X624640-0X62

With LTATubeSize

ModulusBend

RadiusAmps at

120VFor Use With



1.5”2.0”3.0”4.0”

1.37 (35)1.62 (41)2.94 (75)4.05 (103)

2.25 (57)3.00 (76)4.50 (114)6.00 (152)

0.200.210.550.97

100318705100318706100764408100764410

4615-1X624620-1X624630-1X624640-1X62

45° Elbow For Weld Elbows, Standard Modulus in./(mm)

Without LTA

TubeSize

ModulusBend

RadiusAmps at

120VFor Use With



1.5”2.0”3.0”4.0”

0.93 (24)1.24 (31)1.86 (47)2.49 (63)

2.25 (57)3.00 (76)4.50 (114)6.00 (152)

N/A†0.160.330.58

1002345150100234520010023453001002345400

9515-08064620-0X644630-0X644640-0X64

With LTATubeSize

ModulusBend

RadiusAmps at

120VFor Use With



2.0”3.0”4.0”

1.24 (31)1.86 (47)2.49 (63)

3.00 (76)4.50 (114)6.00 (152)

0.160.330.58

100234520010023453001002345400

4620-1X644630-1X644640-1X64

45° Elbow For Weld Elbows, with Tangents in./(mm)

Without LTA

TubeSize

ModulusBend

RadiusAmps at

120VFor Use With



1.5”2.0”3.0”4.0”

1.56 (40)2.24 (57)3.61 (92)4.74 (120)

2.25 (57)3.00 (76)4.50 (114)6.00 (152)

0.180.300.691.15

1002345WT1501002345WT2001002345WT3001002345WT400

4615-0X654620-0X654630-0X654640-0X65

With LTA

TubeSize

ModulusBend

RadiusAmps at

120VFor Use With



1.5”2.0”3.0”4.0”

1.56 (40)2.24 (57)3.61 (92)4.74 (120)

2.25 (57)3.00 (76)4.50 (114)6.00 (152)

0.180.300.691.15

1002345WT1501002345WT2001002345WT3001002345WT400

4615-1X654620-1X654630-1X654640-1X65

† 1.5” 45° elbow is too small to heat, and serves as an insulator


Tee - For ISO Flanged Tees in./(mm)

Without LTA

TubeSize

Modulus LengthAmps at

120VFor Use With



1.5”2.0”3.0”4.0”

2.25 (57)2.38 (60)3.00 (76)3.38 (86)

4.50 (114)4.75 (121)6.00 (152)6.75 (171)

0.320.440.731.01

100314605100314606100761408100761410

4615-0X384620-0X384630-0X384640-0X38

With LTA

TubeSize


120VFor Use With



1.5”2.0”3.0”4.0”

2.25 (57)2.38 (60)3.00 (76)3.38 (86)

4.50 (114)4.75 (121)6.00 (152)6.75 (171)

0.320.440.731.01

100314605100314606100761408100761410

4615-1X384620-1X384630-1X384640-1X38

Tee - For Weld Tees in./(mm)Without LTA

TubeSize


120VFor Use With



1.5”2.0”3.0”4.0”

2.19 (56)2.94 (75)3.19 (81)3.81 (97)

4.38 (111)5.88 (149)6.38 (162)7.63 (194)

0.300.540.791.18

10023T15010023T20010023T30010023T400

4615-0X394620-0X394630-0X394640-0X39

With LTATubeSize


120VFor Use With



1.5”2.0”3.0”4.0”

2.19 (56)2.94 (75)3.19 (81)3.81 (97)

4.38 (111)5.88 (149)6.38 (162)7.63 (194)

0.300.540.791.18

10023T15010023T20010023T30010023T400

4615-1X394620-1X394630-1X394640-1X39

Bellows - For ISO Flanged Bellows in./(mm)

Without LTA

TubeSize

LengthBellowsDiameter

HeaterO.D.

Amps at 120V

For Use With



1.5”2.0”3.0”4.0”

3.31 (84)3.19 (81)

4.00 (102)4.00 (102)

1.81 (46)2.41 (61)3.80 (97)

4.70 (119)

3.00 (76)3.50 (89)

5.00 (127)6.00 (152)

0.130.180.290.33

100314915100314916100763508100763510

4615-0X694620-0X694630-0X694640-0X69

With LTA

TubeSize


HeaterO.D.

Amps at 120V

For Use With



1.5”2.0”3.0”4.0”

3.31 (84)3.19 (81)

4.00 (102)4.00 (102)

1.81 (46)2.41 (61)3.80 (97)4.70 (119)

3.00 (76)3.50 (89)

5.00 (127)6.00 (152)

0.130.180.290.33

100314915100314916100763508100763510

4615-1X694620-1X694630-1X694640-1X69

Reducer - For ISO Flanged Reducers in./(mm)

Without LTA

Tube Size(in.)

LengthLarge EndTangent

Small EndTangent

Amps at 120V

For Use With



3.0 x 1.53.0 x 2.04.0 x 2.04.0 x 3.0

3.90 (99)3.83 (97)3.83 (97)3.18 (81)

0.39 (10)0.42 (12)0.49 (12)0.47 (12)

1.00 (25)0.93 (23)0.93 (23)0.28 (7)

0.300.320.380.42

100765016100765008100765018100764908

4630-0X434630-0X474640-0X434640-0X47

With LTA

Tube Size(in.)


Small EndTangent

Amps at 120V

For Use With



3.0 x 1.53.0 x 2.04.0 x 2.04.0 x 3.0

2.90 (99)3.83 (97)3.83 (97)3.18 (81)

0.39 (10)0.42 (12)0.49 (12)0.47 (12)

1.00 (25)0.93 (23)0.93 (23)0.28 (7)

0.300.320.380.42

100765016100765008100765018100764908

4630-1X434630-1X474640-1X434640-1X47

Reducer - For Weld Reducers in./(mm)


Without LTA

Tube Size(in.)


Small EndTangent

Amps at 120V

For Use With



2.0 x 1.53.0 x 1.53.0 x 2.04.0 x 2.04.0 x 3.0

2.38 (60)3.63 (92)3.63 (92)3.63 (92)3.63 (92)

0.50 (13)0.50 (13)0.70 (18)0.50 (13)0.50 (13)

0.50 (13)0.50 (13)0.50 (13)0.50 (13)0.50 (13)

0.260.300.320.380.42

10023200CR15010023300CR15010023300CR20010023400CR20010023400CR300

4620-0X454630-0X414630-0X454640-0X414640-0X45

With LTA

TubeSize (in.)


Small EndTangent

Amps at 120V

For Use With



2.0 x 1.53.0 x 1.53.0 x 2.04.0 x 2.04.0 x 3.0

2.38 (60)3.63 (92)3.63 (92)3.63 (92)3.63 (92)

0.50 (13)0.50 (13)0.70 (18)0.50 (13)0.50 (13)

0.50 (13)0.50 (13)0.50 (13)0.50 (13)0.50 (13)

0.260.300.320.380.42

10023200CR15010023300CR15010023300CR20010023400CR20010023400CR300

4620-1X454630-1X414630-1X454640-1X414640-1X45

Hose - For ISO-KF Flanged Thin Wall Hose in./(mm)

Without LTA

TubeSize (in.)


HeaterO.D.

Amps at 120V

For Use With



1.5”2.0”

9.19 (233)9.06 (230)

1.95 (50)2.50 (64)

3.00 (76)3.50 (89)

0.430.53

100317415100317416

4615-0X774620-0X77

With LTA

TubeSize (in.)


HeaterO.D.

Amps at 120V

For Use With



1.5”2.0”

9.19 (233)9.06 (230)

1.95 (50)2.50 (64)

3.00 (76)3.50 (89)

0.430.53

100317415100317416

4615-1X774620-1X77

Hose - For ISO-KF Flanged Thick Wall Hose in./(mm)

Without LTA

TubeSize (in.)


HeaterO.D.

Amps at 120V

For Use With



1.5”2.0”

9.19 (233)9.06 (230)

2.12 (54)2.71 (69)

3.50 (89)4.00 (102)

0.380.44

100315905100315906

4615-0X794620-0X79

With LTA

TubeSize (in.)


HeaterO.D.

Amps at 120V

For Use With



1.5”2.0”

9.19 (233)9.06 (230)

2.12 (54)2.71 (69)

3.50 (89)4.00 (102)

0.380.44

100315905100315906

4615-1X794620-1X79


FlangeSizeNW

Hole 1I.D.

Hole 2I.D.

O.D. For Use With Part Number Price

404050508080100100

2.50 (64)2.50 (64)3.00 (76)3.00 (76)

4.00 (102)4.00 (102)5.00 (127)5.00 (127)

2.50 (64)3.00 (76)3.00 (76)

4.00 (102)4.00 (102)5.00 (127)5.00 (127)6.00 (152)

6.20 (157)6.20 (157)7.78 (198)7.78 (198)6.68 (170)6.68 (170)7.42 (188)7.42 (188)

MKS ISO-KF ClampsMKS ISO-KF ClampsMKS ISO-KF ClampsMKS ISO-KF Clamps

MKS Double Claw Clamp 100761106




4515-00164515-00174520-00164520-00174530-00164530-00174540-00164540-0017

Flange Insulators - Standard, fits most clamps in./(mm)

Flange Insulators - ISO-KF Flanges, on Short Radius Elbows in./(mm)Flange

SizeNW

Hole 1I.D.

Hole 2I.D.

O.D.For Use With

(will only work withMKS clamps)

Part Number Price

40

50

2.50 (64)

3.00 (76)

2.50 (64)

3.00 (76)

4.00 (102)

4.75 (121)

100314505/100314605and

100312905

100314506/100314606and

100312906

4515-0036

4520-0036

Flange Insulators - ISO-KF Flanges, Compact in./(mm)Flange

SizeNW

Hole 1I.D.

Hole 2I.D.

O.D.For Use With

(will only work withMKS clamps)

Part Number Price

404040505050

2.50 (64)2.50 (64)2.50 (64)3.00 (76)3.00 (76)3.00 (76)

2.50 (64)3.00 (76)3.50 (89)3.00 (76)3.50 (89)

4.00 (102)

4.20 (107)4.20 (107)4.20 (107)5.16 (131)5.16 (131)5.16 (131)

MKS Wing Nut Clamp 100312905


HPS Wing Nut Clamp 100312905




9515-02699515-02709515-02809520-02479520-02859520-0248


Tube Insulators - Foam Only in./(mm)

Trim and use to fill straightgaps on line.

Attaching straps must beordered separately.

TubeSize

Length Use Part Number Price

1.5”2.0”3.0”4.0”

12.00 (305)12.00 (305)12.00 (305)12.00 (305)

Insulating gaps on 1.5 inch tube systemsInsulating gaps on 2.0 inch tube systemsInsulating gaps on 3.0 inch tube systemsInsulating gaps on 4.0 inch tube systems

4515-00004520-00004530-00004540-0000

Tube Insulators - Foam with Straps in./(mm)

Trim and use to fill straightgaps on line.

TubeSize

Length Use Part Number Price

1.5”2.0”3.0”4.0”

1.00 (25)1.00 (25)1.00 (25)1.00 (25)

Insulating gaps on 1.5 inch tube systemsInsulating gaps on 2.0 inch tube systemsInsulating gaps on 3.0 inch tube systemsInsulating gaps on 4.0 inch tube systems

4515-00014520-00014530-00014540-0001

Straps with Snaps in./(mm)

For installing foam only tubeinsulators.

TubeSize

Quantity For Use With Part Number Price

1.5”2.0”3.0”4.0”

10101010

4515-00004520-00004530-00004540-0000

4515-SNAP4520-SNAP4530-SNAP4540-SNAP

Elbow Insulators - Foam with Straps in./(mm)

For insulating gaps on 45° elbows

TubeSize

For Use With Part Number Price

1.5” 1002345150 9515-0806

Power Cables and AccessoriesDescription Part Number Price

Double claw clamp, grounding, ISO-Universal NW 80 and NW 100Spare fuse, 12 amps, (quantity of 1)Kit, LTA lead, with male & female connector & 10 ft. of wireKit, LTA jumper, with male & female connector & 6 in. of wireLow Temperature Alert Monitor

Power cable, 6 ft. (1.83m), 120 VACPower cable, custom length, Max 25 ft., 120 VACPower cable, 12 ft. (3.66m), 120 VACPower cable, 120 VAC, with ground fault leakage circuit interrupter, 6 ft. (1.83m)Power cable, 120 VAC, with ground fault leakage circuit interrupter, custom, max 25 ft.Power cable, 120 VAC, with ground fault leakage circuit interrupter, 12 ft. (3.66m)

100007322100006985100008680100008683100010832

43PWRCORD0143PWRCORD0243PWRCORD0343PWRCORD0443PWRCORD0543PWRCORD06

The power cables are not included with any of the heater jackets and must be ordered separately. Do not exceed 12 amps draw per power cord.

MKS Instruments, Inc. Integrated Process Solutions 5330 Sterling DriveBoulder, CO 80301

Tel: 303.449.9861 800.345.1967 (in USA)

ChinaFranceGermanyIrelandIsraelItalyJapanKoreaNetherlandsSingaporeTaiwanUnited KingdomUnited States

MKS Instruments, Inc. Global Headquarters 2 Tech Drive, Suite 201 Andover, MA 01810

Tel: 978.645.5500 800.227.8766 (in USA)

Web: www.mksinst.com

series 46 heaters · † passes semi s9-95 strain relief test of 35 pounds † integral thermal...

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