silicon sensor module production for phenix focal s.h. lim yonsei university
TRANSCRIPT
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Silicon sensor module production
for PHENIX FOCAL
S.H. Lim Yonsei University
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Contents
• Introduction– PHENIX FOCAL– Silicon pad sensor
• Micro-module production– Components & Structure– Wafer dicing– Gluing process– Results
• Summary & Outlook
2Yonsei Nuclear Physics
Lab.
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Contents
3Yonsei Nuclear Physics
Lab.
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PHENIX FOCAL
Yonsei Nuclear Physics Lab.
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Silicon pad sensor
Yonsei Nuclear Physics Lab.
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ground
-
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p n
Sensor operation
Yonsei Nuclear Physics Lab.
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ground
--
+++
+++
++++ - -
---
-- --
Depletion
Region
PN diode
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Leakage current
•IV measurement data
Yonsei Nuclear Physics Lab.
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Contents
8Yonsei Nuclear Physics
Lab.
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Micro-module schematics
Yonsei Nuclear Physics Lab.
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Components for micro-module
Yonsei Nuclear Physics Lab.
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Wafer Dicing
Yonsei Nuclear Physics Lab.
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IV characteristics after dicing
Yonsei Nuclear Physics Lab.
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Gluing Process
• Gluing process
– 3 Steps
– 1 day for each step
Yonsei Nuclear Physics Lab.
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2nd
1st
1st
3rd
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Glue properties
Yonsei Nuclear Physics Lab.
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Araldite KE45 CW2400
Company HUNTSMAN(Swiss) ShinEtsu(Japan) CircuitWorks(USA)
Material EpoxySilicone Rubber
CompoundSilver epoxy
Color / appearance
Creamy liquidAmber liquid
White pasteBright silverGray silver
Specific gravity
1.17 /Resin0.92 /Hardener
1.05 2.85
Feature
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Production results
•4 sample micro-module production has completed.•Mechanical and electrical issues have been checked
Yonsei Nuclear Physics Lab.
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IV characteristics after gluing
Yonsei Nuclear Physics Lab.
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Contents
17Yonsei Nuclear Physics
Lab.
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Summary & Outlook
Yonsei Nuclear Physics Lab.
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THE END
THANK YOU