SiliconSilicon SpinningSpinningThe Beginning of The Beginning of MicroprocessorsMicroprocessors

By: Mahmoud Hayat and Will Farrell Mentor: Kwame Owusu-Adom

IntroductionIntroduction

•We tested contact angles of We tested contact angles of different fluids on different different fluids on different

surfaces.surfaces.

•We spin coated silicone fluids We spin coated silicone fluids of different viscosity on a of different viscosity on a

silicon wafer.silicon wafer.

The Engineers @ WorkThe Engineers @ Work

FTA Contact Angle FTA Contact Angle AnalyzerAnalyzer

Spin Coating MachineSpin Coating Machine

Picture of Droplet on Contact Angle Picture of Droplet on Contact Angle MachineMachine

Drop of Fluid

Contact Angles

Contact Angle GraphContact Angle Graph

0

20

40

60

80

100

Wat

er

DIW

Soapw

ater

Silicon

e 10

0

Silicon

e 50

0

Silicon

e 10

00

Fluid

Co

nta

ct

An

gle

s Silicon wafer

UHMWPE

Glass

Polycarbonate

Spin Coating @ 1000 RPMSpin Coating @ 1000 RPM

0

0.005

0.01

0.015

0.02

0.025

0.03

0.035

0.04

20 30 40 50 60 70

Time (sec)

Fil

m t

hic

kn

es

s (

cm

)

100 Viscosity

500 Viscosity

1000 Vicosity

Soapw ater

Spin Coating @ 2000 RPMSpin Coating @ 2000 RPM

0

0.004

0.008

0.012

0.016

0.02

20 30 40 50 60 70

Time (sec)

Film

th

ick

ne

ss

(c

m)

100 Viscosity

500 Viscosity

1000 Viscosity

Soapwater

Spin Coating @ 3000 RPMSpin Coating @ 3000 RPM3000 rpm

0

0.004

0.008

0.012

0.016

20 30 40 50 60 70

Time (sec)

Film

th

ick

ne

ss

(c

m)

100 Viscosity

500 Viscosity

1000 Viscosity

Conclusion Of Contact Conclusion Of Contact AnglesAngles• Surfactant reduces contact angle of DIW on all Surfactant reduces contact angle of DIW on all

four surfaces. four surfaces. • Each silicone with the same viscosity has almost Each silicone with the same viscosity has almost

the same contact angle on all four surfaces. the same contact angle on all four surfaces. • All Water based liquids (Water, DIW, and Soap All Water based liquids (Water, DIW, and Soap

Water) have a bigger contact angle on all Water) have a bigger contact angle on all surfaces than any of the three silicone fluids. surfaces than any of the three silicone fluids.

• A large Contact angle = Less DeformationA large Contact angle = Less Deformation• A smaller Contact angle = More DeformationA smaller Contact angle = More Deformation• The silicone fluids had more deformation than The silicone fluids had more deformation than

the water based fluids. the water based fluids. • Water has more surface energy so water forms a Water has more surface energy so water forms a

bigger contact angle on all four surfaces. bigger contact angle on all four surfaces.

Conclusion Of Spin Conclusion Of Spin CoatingCoating

• All four fluids, soap water, silicone All four fluids, soap water, silicone with 100, 500 and 1000 viscosity, with 100, 500 and 1000 viscosity, when spun at 1000, 2000 or 3000 when spun at 1000, 2000 or 3000 RPM for a longer period of time, RPM for a longer period of time,

produces a thinner film on the wafer.produces a thinner film on the wafer.

• The opposite happens when the The opposite happens when the wafer is spun for a shorter period of wafer is spun for a shorter period of

time. time.

Thank YouThank You

• SESEY programSESEY program

• Skip RochefortSkip Rochefort

• Kwame Owusu-AdomKwame Owusu-Adom

• The rest of SESEY students for being The rest of SESEY students for being cool.cool.