single-chip mass flow controller with integrated coriolis ... · •a single chip mass flow...
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Single-Chip Mass Flow Controller With Integrated Coriolis Flow Sensor and
Proportional Control Valve
Jarno Groenesteijn, Dennis Alveringh, Maarten Groen, Remco Wiegerink, Joost Lötters
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Contents
• Micro Coriolis mass flow sensor
• Micro proportional control valve realized in SOI wafer
• Single-chip mass flow controller
– No external tubing
– Reduces internal volume
• Measurement results
• Conclusion
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Integrated mass flow controller
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Micro Coriolis mass flow sensor
J. Groenesteijn et al., Towards nanogram per second Coriolis mass flow sensing, MEMS 2016. 4
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Proportional Control Valve Realized in a SOI Wafer
M.S. Groen et al., A piezoelectric micro control valve with integrated capacitive sensing for ambulant blood pressure waveform monitoring, JMM, 24 (12), 2014
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Micro valves in surface channel technology
• Artist impression of the proportional control valve
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Surface channel technology
7 M. Dijkstra et al., A versatile surface channel concept for microfluidic applications, JMM,2007.
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Micro valves in surface channel technology
• Variation in slit density gives varying channel depth
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Fabrication process
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Fabrication process
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Fabricated integrated mass flow controller
• Fabricated single-chip mass flow controller with integrated Coriolis flow sensor and proportional control valve
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Printed circuit board
• Chip mounted on a printed circuit board with the two permanent magnets to either side of the chip.
• A glass stylus is used to transfer the displacement from the piezoelectric actuator to the valve plate.
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Measurement set-up
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Measurement results – Flow sensor
• Coriolis flow meter, nitrogen flow (70 mg/h = 1 sccm)
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Measurement results – Micro valve
• Leakage of 15-20% of full-scale due to deformation of valve ring
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Measurement results – Flow controller
• Closed loop flow control, nitrogen flow (35 mg/h = 0.5 sccm)
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Conclusions
• A single chip mass flow controller has been presented consisting of a Coriolis mass flow sensor and a proportional micro valve.
• The mass flow controller can control the flow up to 70 mg/h at an applied pressure of 500 mbar.
• Future work will include reducing the leakage of 15-20% of full-scale due to bending of the valve ring.
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