singulus clustertool
DESCRIPTION
SINGULUS Clustertool for R&D of CIS/CIGS Solar CellsTRANSCRIPT
Smart Solutions to Drive the Future.
SINGULUS Clustertoolfor R&D of CIS/CIGS Solar Cells
The engineers at SINGULUS TECHNOLOGIES develop new, efficiently operating solar productionmachines with a high depth of integration for high-performance solar cells. In order to improve the efficiency of solar cells and to reducecosts at the same time, SINGULUSTECHNOLOGIES cooperates withleading solar cell manufacturers. At theSINGULUS TECHNOLOGIES site in
Kahl/Main, Germany, machine conceptsfor vacuum deposition, cathode sputtering and selenization processesare developed and assembled. At oursubsidiary SINGULUS STANGL SOLARGmbH in Fürstenfeldbruck, Germany,we focus on machines for wet-chemicalprocesses, i.e. cleaning, etching andcoating machines for the manufacturingof silicon and thin-film solar cells.
The new CIS-CIGS Clustertool is adevelopment tool for the productionand thermal treatment of semiconductorlayers based on copper, indium andgallium for photovoltaic applications.With the CIS-CIGS Clustertool eco-nomic research of new manufacturingprocesses for CIS-CIGS semiconductorfilms can be realized. In this way, thehighest level of efficiency of thin-filmsolar modules compared to existingconcepts can be achieved. With theprocess results on the basis of thefindings from the demonstration plant,industrial manufacturing processes canbe developed and optimized, enablinghigher cell performances as well as asignificant reduction of manufacturingcosts for thin-film photovoltaic modulesper watt peak.
The CIS-CIGS Clustertool contains a central transportation station andseveral process stations. In theprocess stations the thermal treatmentof the secluded precursor layers isconducted. With the combination of all available options for the CIS-CIGSClustertool, a full inline R&D thin-filmsolar cell can be manufactured.
SINGULUS TECHNOLOGIES Solar Success with Innovative Technologies
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SINGULUS Clustertool for R&D of CIS/CIGS Solar Cells
The system is designed in the followingconfigurations for glass substrates upto 300 mm x 300 mm:
Central Transportation:The Central Transportation describesthe basic equipped CIS-CIGS ClusterTool, which is expandable for furtherprocess options.
Option 1: Sputtering Unit The R&D vertical inline sputtering system is designed to apply all requiredlayers for a CIS/CIGS coating, e.g. Mo, CIGS and top layer.
Option 2: Selenium Evaporator The Selenization Equipment RTP labtool is designed for the formation of
absorber coatings on glass substratesthrough thermal processing of CIG precursors under H2S/ H2Se.
Option 3: RTP 1 included Thermal ChamberThe Inline Selenization Equipment CISARIS is designed for the formationof CIGSSe absorber material on glass substrates through thermal processing of CIG precursors underH2S atmosphere.
Option 4: RTP 2 StationThe option of the second RTP station could be interesting for further application such as the formation of the H2Se layer in a gas atmosphere.
Option 5: Elementar Selenium orSulfer EvaporatorA further option is the application ofselenium or sulfer evaporation undervacuum condition.
Option 6: Wet Process EquipmentTENUIS GEN 2 The Wet Process Equipment TENUISGEN 2 Lab manual set-up is designedas manual coating tool for CdS/alternatives and an optional KCN-Etching function for buffer layers onglass substrates.
Option 7: P1, P2, P3 Laser ScriberThe implementation of a laser scriber for P1, P2 and P3 does fulfill all requirements for a inline thin-filmcell manufacturing.
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1. Loading/Unloading Section2. Central Handling3. Sputtering Unit for
Absorber Layer
4. Selen Evaporator5. Rapid Thermal Process,
Section 1
6. Rapid Thermal Process, Section 2
7. TENUIS Buffer Layer
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Affiliated Companies
ChinaSINGULUS MANUFACTURING GUANGZHOU LTD.Tel. [email protected]
FranceSINGULUS TECHNOLOGIES FRANCE S.A.R.L.Tel. +33 3 893111-29 [email protected]
GermanySINGULUS STANGL SOLAR GMBHTel. +49 8141 [email protected]
Great BritainSINGULUS TECHNOLOGIES UK LTD.Tel. +44 1793 [email protected]
ItalySINGULUS TECHNOLOGIES ITALIA S.R.L.Tel. +39 071 [email protected]
Latin AmericaSINGULUS TECHNOLOGIES LATIN AMERICA LTDA.Tel. +55 1121 [email protected]
NetherlandsSINGULUS TECHNOLOGIES AGBranch Office SINGULUS MASTERINGTel. +31 40 [email protected]
HeadquartersSINGULUS TECHNOLOGIES AGHanauer Landstrasse 103D - 63796 Kahl, GermanyTel. +49 6188 440-0Fax +49 6188 [email protected]
SingaporeSINGULUS TECHNOLOGIES ASIA PACIFIC PTE LTD.Tel. +65 674 [email protected]
SpainSINGULUS TECHNOLOGIES IBERICA S.L.Tel. +34 936 [email protected]
TaiwanSINGULUS TECHNOLOGIES TAIWAN LTD.Tel. +886 2 [email protected]
United States and CanadaSINGULUS TECHNOLOGIES INC. Tel. +1 860 [email protected]
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