small area analysis using micro-diffraction techniques s/67531/metadc... · an overall trend toward...

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. Small area analysis using micro-diffraction techniques s 4 ‘w R.P. Goehner, R.G. Tissot, and J.R. Michael (#3 ~ Sandia National Laboratories, Albuquerque, New Mexico 87185-1405 cP:~ dsg’$t An overall trend toward smaller electronic packages and devices makes it @sfJ increasingly important and difficult to obtain meaningful diffraction information from small areas. X-ray micro-diffraction, electron back-scattered diffraction (EBSD) and Kossel are micro-diffraction techniques used for crystallographic analysis including texture, phase identification and strain measurements, X-ray micro-diffraction primarily is used for phase analysis and residual strain measurements of areas between 10pm to 10Oym. For areas this small glass capillary optics are used for producing a usable collimated x-ray beam. These optic are designed to reflect x-rays below the critical angle therefore allowing for larger solid acceptance angle at the x-ray source resulting in brighter smaller x-ray beams. Less than 10pm beams have been produced with a tapered bored single capillary optic using conventional x-ray sources. i A Xenon filled HiStar area detector used for x-ray micro-diffraction captures a large area of the diffraction cone which allows for rapid analysis (typically 10 to 20 minutes) and also visually shows texture and particle size influences from the sample. Fig. 1 is a 20 minute area detector image showing a textured Al (222) fine-grained thin film with much coarser grained random oriented LaB6 used as an internal standard. Also visible is a Laue spot from the Si single crystal substrate. The determination of residual strain using micro-diffraction techniques is very important to the semiconductor industry. Residual stresses have caused voiding of the interconnect metal which then destroys electrical continuity. Being able to determine the residual stress helps industry to predict failures from the aging effects of interconnects due to this stress voiding. Stress measurements would be impossible using a conventional x-ray diffractometer; however, utilizing a 3Oum glass capillary these small areas are readily assessable for analysis. Kossel produces a wide angle diffraction pattern from fluorescent x-rays generated in the sample by an e-beam in a SEM. This technique can yield very precise lattice parameters for determining strain. Fig. 2 shows a Kossel pattern from a Ni specimen. Phase analysis on small areas is also possible using an energy dispersive spectrometer (EB SD) and x-ray micro-diffraction techniques. EB SD has the advantage of allowing the user to observe the area of interest using the excellent imaging capabilities of the SEM. An EDS detector has been used for simultaneous element identification which enhances phase identification of unknowns.2 The x-ray area detector also allows for rapid microstructure information including crystallite orientation and size by directly observing the diffraction rings. Coarse crystallite would tend to show a more spotty rings (Fig. 1) than fine crystallite. Fig. 3 shows highly textured orthorhombic (left) and rhombohedral (right) fine-grained PZT thin film. Slight omega rotation distinguishes Laue spots by showing trails perpendicular to the Debye arcs. These Laue spots are from the single crystal substrate. These techniques allow for small area analysis that in the past would have been difficult if not impossible to obtain. The future development in x-ray optics and the use of synchrotrons sources will allow for the potential of nondestructive submicron x-ray diffraction analysis.

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Page 1: Small area analysis using micro-diffraction techniques s/67531/metadc... · An overall trend toward smaller electronic packages and devices makes it @sfJ increasingly important and

.

Small area analysis using micro-diffraction techniques s4 ‘w

R.P. Goehner, R.G. Tissot, and J.R. Michael (#3 ~

Sandia National Laboratories, Albuquerque, New Mexico 87185-1405 cP:~

dsg’$t

An overall trend toward smaller electronic packages and devices makes it @sfJincreasingly important and difficult to obtain meaningful diffraction information fromsmall areas. X-ray micro-diffraction, electron back-scattered diffraction (EBSD) andKossel are micro-diffraction techniques used for crystallographic analysis includingtexture, phase identification and strain measurements, X-ray micro-diffraction primarily

is used for phase analysis and residual strain measurements of areas between 10pm to

10Oym. For areas this small glass capillary optics are used for producing a usablecollimated x-ray beam. These optic are designed to reflect x-rays below the critical angletherefore allowing for larger solid acceptance angle at the x-ray source resulting in

brighter smaller x-ray beams. Less than 10pm beams have been produced with a taperedbored single capillary optic using conventional x-ray sources. i A Xenon filled HiStararea detector used for x-ray micro-diffraction captures a large area of the diffraction conewhich allows for rapid analysis (typically 10 to 20 minutes) and also visually showstexture and particle size influences from the sample. Fig. 1 is a 20 minute area detectorimage showing a textured Al (222) fine-grained thin film with much coarser grainedrandom oriented LaB6 used as an internal standard. Also visible is a Laue spot from theSi single crystal substrate. The determination of residual strain using micro-diffractiontechniques is very important to the semiconductor industry. Residual stresses havecaused voiding of the interconnect metal which then destroys electrical continuity. Beingable to determine the residual stress helps industry to predict failures from the agingeffects of interconnects due to this stress voiding. Stress measurements would beimpossible using a conventional x-ray diffractometer; however, utilizing a 3Oum glasscapillary these small areas are readily assessable for analysis. Kossel produces a wideangle diffraction pattern from fluorescent x-rays generated in the sample by an e-beam ina SEM. This technique can yield very precise lattice parameters for determining strain.Fig. 2 shows a Kossel pattern from a Ni specimen.

Phase analysis on small areas is also possible using an energy dispersivespectrometer (EB SD) and x-ray micro-diffraction techniques. EB SD has the advantage ofallowing the user to observe the area of interest using the excellent imaging capabilitiesof the SEM. An EDS detector has been used for simultaneous element identificationwhich enhances phase identification of unknowns.2

The x-ray area detector also allows for rapid microstructure information includingcrystallite orientation and size by directly observing the diffraction rings. Coarsecrystallite would tend to show a more spotty rings (Fig. 1) than fine crystallite. Fig. 3shows highly textured orthorhombic (left) and rhombohedral (right) fine-grained PZTthin film. Slight omega rotation distinguishes Laue spots by showing trails perpendicularto the Debye arcs. These Laue spots are from the single crystal substrate.These techniques allow for small area analysis that in the past would have been difficultif not impossible to obtain. The future development in x-ray optics and the use ofsynchrotrons sources will allow for the potential of nondestructive submicron x-raydiffraction analysis.

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1. York, B., Fabrication and Development of Tapered Capillary X-ray Optics for Microbeam Analysis,1995 MAS Meeting, Breckeridge, CO.2. Industrial Applications of X-Ray Diffraction edited by Chung, F. and Smith, D. (2000). Industrial

Applications of X-ray Diffraction, Marcel Dekker, 2000,p. 896-890.

3. This work was supported by the United States Department of Energy under contract DE-AC04-94 AL85000. Sandia is a multiprogram laboratory operated by Sandia Corporation, a Lockheed MartinCompany, for the United States Department of Energy

Fig. 1 Area Detector image of textured Al(111)

Fig, 3 Area detector image of textured PZT thin film left orthorhombic and right rhombohedral phase

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DISCLAIMER

Portions of this document may be illegiblein electronic image products. Images areproduced from the best available originaldocument.

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n? What is Knowledge Management?m

+:+Findingways to create, identify, capture, and distribute organizational knowledge tothe people who need it.

+ To help information and knowledge flow to the right peopleat the right time so theycan act more efficiently and effectively.

+ Recognizing, documenting and distributing ex@c~tand tact knowledge in order toimprove organizational performance.

+ A systematic approach to find, understand and use knowledge to create value.

Findingways to identi~ criticalinformationandknowledge, both exzJlicitand taci~ and makingitflow to the peode who need i~ so they canpetiormmore effectively and ei77ciently.

=~knowledge is quantifiable and definable. It makes UPrepo~,manuals, instructional materials, etc.

-t knowledge is doing and performing. It is a combination of experience,hunches, intuition, emotions, and belie~.

What is Sandia National Laboratories

+ Z Division of Los Alamos National Laboratory.- Born out of America’s World War II atomic bomb development effort.- Manhattan Project - Trinity Te3. July 1945.

“:+ November 1, 1949 became a separate laboratory.- Original Mission: To provide engineering design for all non-nuclear

components of the nation’s nuclear weapons.- Today: Sandia performs a wide variety of national security R&D work and

provides scientific and engineering solutions to environmental issues andemerging national challenges.

+:+Main facilities in New Mexico and California.- Smaller sites scattered around the United States.- About 8,000 employees.

Michelle Fromm+ewjsSandia National ~boratori~

Presented at ISPI

[email protected], Ohio

(505) 844-063SApril 14,2000

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,

Other areas of achievement:

Electronic & microelectronic devicesAdvanced experimental satellites

New energy sources, use efficiencyNew medical instruments and materials

Environmentally conscious manufacturing

We accessinformation to learn.

.

‘aG\

d The “Puil” of Knowledge Managementat Sandia

The Information Cvcle:Vital to Advance Technology - Vital to Sandia’s Mission

We preserve

n

We processInformation so thatothers may learn.

u ‘n;’’’’”We pr;duce

information which needsto be communicated

The Issues:+> Graying of the workforce - experts retire - separation incentives.4+ Reduced budgets – fewer new hires - less “OJT” opportunity.4+ Pressure to maintain design and development expertise;

Replacing limited life components - no complete system design work.+3 Pressure to maintain a safe, secure stockpile.+3 Inadequate records management (retention & access of data.)

Lost or destroyed - obsolete electronic equipment.+3 Inadequate sharing of “tacit” knowledge (individual knowledge transfer.)

Transferring the “know-how” and “know-why.”

Michelle Fromm-LewisSandia National Laboratories

Pr~ted at ISPICinannati, Ohio

[email protected] APril 14, 2000(505) 844-0635

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Group Sharing: WHY are other companies implementing KM?

I Connect and Collect I

Two Dimensions of Knowledge Management(The “l-lows”)

Connecting = linking peopie who know, with peopie who need to know.●3 Communities of Practice: Based on common interestt or experience; Ideas, effors, soiutions, and

lessons iearned are snared. Can be formai or i.nformai.

“:+ Coaching and Mentoring: Formai mentoring/coaching programs are designed to achieve bothcorporate training needs and individual career goals.

●> Physicai Structure: Learning Centers; corporate libraries; meeting rooms and gathering rooms; Teamspace, e.g., “the Sandbox”, “War Room”.

+3 Help Desks

“3 Advisory Services made up of teams of experts to whom one can tail to obtain s~ecific know how crheip soiving a problem.

●:* Who’s Who Directory indicating who knows what (Corporate Yellow Pages.)

+:+ Alliances and partnerships (oRen are extensions of communities of practice. )

●3 Benchmarking & Best Practices activities.

Collecting = capturing and disseminating data/information via communication technologies.

+3 Provide computer based performance support systems (tools) and job aids.●3 Databases, Groupware.+3 Corporate Intranet.+3 Video Conferencing.

, lib, ,Ql,u , , “, ,,, ,,–L= ”,,=

Sandia National Labomtori~wesenteo at w-’l

Cincinnati, [email protected](505) 844-0635

April14, 2000

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EIements of Successful Knowledge Sharing I

●:+ Linked to organizational goals and objectives.Product to Market Excellence: Strategy is to apply shared learning to product development for abetter product and shorter time to market.Customer Focus: Strategy is to market, sell, and sewice customers more efficiently and effectively bysharing knowledge about customer needs, behaviors, etc.Operational Excellence: Strategy is to share concepts between locations to eliminate mediocrity,create savings and achieve process improvement and production capacity.

+3 Linked to organizational rewards system.

4+ Clear understanding of what knowledge needs to be shared.

●:+ Culture for knowledge sharing:- Learn before doing: Find the best way it has been done so far.- Learn while doing: Adapt the learning to the task at hand.- Learn aller doing: Determine what you learned & capture it.

Barriers to Successful Knowledge Sharing I

+;+Appearance that you might be wasting time if you’re standingaround talking.

+:+Asking for help may indicate that you can’t do the job yourself./q<

Q.D

(( }a3JI+3 Timing is not right for sharing: If you don’t need

the information right away it may be meaninglessor forgotten when needed.

+:+Takes too long to figure out whereto get what you need.+:+Takes too long to go through use!ess data to find what you need.

mm

+:+No rewards●3 Don’t know who to get what you need from.●:+ TOO busy.+ Information is power syndrome.

@

Michelle Fromm-LewisSandia National Laboratories

Presented at ISPI

mfromml(tka ndia.aovCincinnati, Ohio

(505) 844-0635APril 14, 2000

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,

I!lmIi

Group Sharing: Whu? steps can organizations take to overcome these

barriers?

P -● ; Knowledge Management Iea’ At Sandiam

Retiree Corm (Approx 250people): Use ofcontracts to have ready access to retiredscientist andengineers whohave unique skiils or knowledge. Participation is uncurrentprojects, project reviews, analyzing stockpile issues, mentoring and teaching,

WeaDons Intern Procwam: A 2 year training program: Classes,seminars, engineeringprojects, research, site visits, rotational assignments, mentoring. Includes Sandia,Production Agency, DOE, Military participants.

Knowledqe Presemation: Videotaping intemiews with panels of experts, Applying“metadata,” digitalizing, storing.

Data Bases+3 Weapons Encyclopedia: A restricted access database including a breakdown of

weapons systems, subsystems, components, and parts.+3 Web File Share: An easy to manage electronic file storage system allows which

allows each “ business unit” to input, store, access, share, retrieve, and archive files.Utilizes all formats (HTML, JPEG,MPEG,RTF,VHS, ASCII, Word, Powerpoint, Excel,Access, etc.) and all media (memos, documents, audio, images, drawings, ex-rays,microfiim, maps, vugraphs, etc.)

Communities of Practices: Encouraged throughout the labs. A “Communities ofPractice” Web Site is under development.

Also Under Development: A Qualification Program for Weaponeers

Michelle Fromm-LewisSandia National ~boratorl=

Presented at ISPI

mfromml@~Gnannati, Ohio

ndia.aov(505) 844-0635

A@ 14, 2000

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Page 10: Small area analysis using micro-diffraction techniques s/67531/metadc... · An overall trend toward smaller electronic packages and devices makes it @sfJ increasingly important and

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Iml

Group Sharing: WHAT are other organizations doing to implement knowledge

management?

m The Complex and IntertwinedCompetencies to Manage Knowledge

At the Individual Level+3 Open to self-learning.+3 Demonstrates reflection,+3 Takes appropriate risks,+3 Learns by mistakes.●3 Generates new knowledge.S+ Accesses knowledge from many sources – internal and external.●:+ Embeds knowledge in processes, products, and sewices.+:+Transfers existing knowledge around the organization.+:+Uses accessible knowledge in decision making and problem solving.

At the Corporate Level+3 Maintains a long-term perspective.+:+Promotes personal andprofessional learning.+3 Invests intrainifig activities for staff.+:+Values knowledge andencourages communities of interest.+3 Maintains knowiedge management systems.+3 Facilitates knowledge growth through culture and incentives.●:+ Measures the value of knowledge assets and knowledge management.+:+Uses intellectual capital for competitive advantage.+:+Applies technological innovation for competitive advantage.+3 Helps determine what knowledge is valuable and which is not.

..-

Michelle Fromm-Lewis D.xantoA .+ TC DT

Sandka National labo~atoriesmfromml@ sandia.aov(505) 844-0635

., -,,.=” a. IJr.

Gncinnati, OhioAPril 14, 2000

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. . . ,

I%W4:Qf++::,.j: :

I Measuring Knowledge Management I

Five Sucmested Measures (Basedonthe’’KnowledgeManagementAssessmentTool’’developedbyArthurAndersenandAPQC):

+3 Leadershi~ - Does leadership place a high value on knowledge, and use knowledgeas a strategy to achieve desired business outcomes? Do employees understand howtheir skills and competencies contribute to desired business outcomes?

●:+ Culture - Is there a positive corporate culture of trust? Is knowledge sharing andlearning encouraged? Is there a focus on solving customers’ problems? Is risktaking encouraged?

●:+ Technology - Is technology used to provide just-in-time interface with customersand suppliers? Is it used to create a corporate memory?

+:+Measurement - Is knowledge management linked to financial results? Are metricsdeveloped around customers, process improvement, partnerships and alliances, andinnovation?

+3 Knowledqe Management Process -Is a process in place to identify gaps in skills andknowledge documentation, and are steps being taken to close those gaps? Areenvironmental trends (customer, competitors, suppliers) evaluated and strategicchanges implemented based on the evaluation? Is there a formal process forsharing best practices?

Group Sharing: WHAT other indicators could be used as knowledge

management metrics?

Michelle Fromm-Lewis%fldia National Laboratories

Presented at ISPICncinnati, Ohio

mfromml@sa ndla.aov Acnl 14, 2000(505) S44-0635

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RESOURCES

O’Dell, Carla; Grayson, C Jackson, Jr; If Onlv We Knew What We Know: The FreePress, NY; 1998

Davenport, Thomas H.; Prusak, Laurence; Workirm Knowledqe; Harvard BusinessSchool Press, MA, 1998

“The Knowledge Management Assessment Tool” (KMAT); Developed by ArthurAnderson and The American Productivity & Quality Center (APQC)

Arthur Anderson APQC69 W. Washington St., A28B 123 North Post Oak LaneChicago, IL 60602 Houston, Tx 77024

“Knowledge Management”, ASTD Infoline, March 1999, Issue 9903Articles in several recent issues of “Training and Development” Magazine.

Connections (A list of Knowledge Management web-sites)http://www.webcom .com/quantera/connect. htmi

Knowledge Management Exchange:htip://[email protected]/BusinessEconomics/dssakbdkmexch.htm

Knowledge Management Think Tank:http://www.brint.com/wwwboard/wwwboard.html

Harvard Business School Ideas at Work:hRp://w.hbsp.haward. eduhdeasa@ortihansen. html#iv4i5-2l 6-idea216

@

,$W+%(

Bilm!diil: t4 ‘. Sandia is a multiprogram laboratory operated by Sandia Corporation, a Lockheed Martin

- ij Company, kllkllfor the United States Department of Energy under contract DE-AC04-94AL85000. 1

t

Michellel Fromm-LewisSandia National Laboratories

Presented at ISPICincinnati, Ohion

mfromml @ sandia.qov April 14,2000(505) 844-0635