Smart Sensors and MEMS

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Series II: Mathematics, Physics and Chemistry – Vol. 181

Smart Sensors and MEMS

edited by

Sergey Y.YurishNational University Lviv Polytechnic,Ukraine

and

Maria Teresa S.R. GomesUniversity of Aveiro,Portugal

Kluwer Academic Publishers

Dordrecht / Boston / London

Published in cooperation with NATO Scientific Affairs Division

Proceedings of the NATO Advanced Study Institute onSmart Sensors and MEMS

A C.I.P. Catalogue record for this book is available from the Library of Congress.

ISBN 1-4020-2928-4 (PB)ISBN 1-4020-2927-6 (HB)ISBN 1-4020-2929-2 (e-book)

Published by Kluwer Academic Publishers,P.O. Box 17, 3300 AA Dordrecht, The Netherlands.

Sold and distributed in North, Central and South Americaby Kluwer Academic Publishers,101 Philip Drive, Norwell, MA 02061, U.S.A.

In all other countries, sold and distributedby Kluwer Academic Publishers,P.O. Box 322, 3300 AH Dordrecht, The Netherlands.

Printed on acid-free paper

All Rights Reserved© 2004 Kluwer Academic PublishersNo part of this work may be reproduced, stored in a retrieval system, or transmittedin any form or by any means, electronic, mechanical, photocopying, microfilming,recording or otherwise, without written permission from the Publisher, with the exceptionof any material supplied specifically for the purpose of being enteredand executed on a computer system, for exclusive use by the purchaser of the work.

Printed in the Netherlands.

Povoa de Varzim, Portugal 8-19 September 2003

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Contents

List of Contributors………………………………………....…..ix-xiPreface ……………………………..………………………......xii-xivAcknowledgement…………………………………………...……..xv

1. Smart Sensors for Electrical and Non-electrical, Physical and

Chemical Variables: State-of-the-art Sergey Y. Yurish…………………………………………………………1

2. Novel Conversion Methods for Self-Adaptive Smart Sensors Sergey Y. Yurish and Nikolay V. Kirianaki…………………….……....51

3. Resonant Piezoelectric Devices as Physical and Biochemical

SensorsFabien Josse and Richard W. Cernosek………………………………...91

4. Acoustic-Wave Piezoelectric and Pyroelectric Sensors Based on

PZT Thick FilmsVittorio Ferrari………………………………………………………...125

5. Wireless Passive SAW Identification Marks and SensorsElke Mackensen and Leonhard Reindl..................................................155

6. Precise Vectorial Magnetic SensorsPavel Ripka……………………………………………………………203

7. Micro-Hall Magnetic Sensors: Physics, Technologies and

ApplicationsRadivoje S. Popovic, Giovanni Boero, and Pierre-Andre Besse……...229

8. Modern Silicon-based MEMS Technology Ulrich Mescheder……………………………………………………...255

9. Porous Silicon: Technology and Applications for

Micromachining and MEMS Ulrich Mescheder……………………………………………………...273

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10.Thermal Design of Microelectronics Systems Dmytro Fedasyuk and Volodymyr Makar…………...………………...289

11.Chemical and Biological Sensors Based on Microcantilevers P.G. Datskos, N.V. Lavrik and M. J. Sepaniak…………………….….331

12.Uncooled Infrared MEMS Detectors P.G. Datskos, N.V. Lavrik………………………………………….….381

13.Bulk Acoustic Wave Sensors in Chemical AnalysisMaria Teresa S. R. Gomes…………………………………...….…..…421

14.Electronic Biosensors Based on Biomaterial-Nanoparticle

Hybrid Systems Eugenii Katz………………………………………………..…...……..447

Index………………………………………………………………..…….475

Smart Sensors and MEMS

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List of Contributors

Sergey Y. Yurish – NATO ASI Co-director, Dr., Associate Professor, IFSA Vice President, National University Lviv Polytechnic, Ukraine, 79013 Lviv, Bandera str., 12, Telephone: +380 322 970857 Fax: +380 322970857 E-mail: info@sensorsportal.com Http://www.sensorsportal.com

Maria Teresa Seabra dos Reis

Gomes, NATO ASI Co-director, Professor, Dr., Department of Chemistry University of Aveiro, 3810-193 Aveiro, Portugal Telephone: +351 234370722 Fax +351 234370084 E-mail: mtgomes@dq.ua.pt

Fabien Josse, Profesor, Dr., Electrical, Computer and Biomedical Engineering, Marquette University, P.O.Box. 1881, Milwaukee, WI 53201-1881, USA E-mail: fabien.josse@marquette.edu

Vittorio Ferrari, Professor, Dr., Dip.Elettronica per l'Automazione, Facoltá di Ingegneria - Universitá di Brescia, Via Branze, 38 - I25123 Brescia – Italy E-mail: vittorio.ferrari@unibs.it

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Elke Mackensen, Professor, Dr., Albert-Ludwigs-University Freiburg, Institute of Microsystem Technology, IMTEK, Laboratory for Electrical Measurement and Testing, Georges-Köhler-Allee; Geb. 103,D-79110 Freiburg, Germany E-mail: mackense@imtek.uni-freiburg.de

Pavel Ripka, Professor, Dr., Czech Technical University, Faculty of Electrical Engineering, Dept. of Measurement, Technicka 2, Prague 6, 166 27, Czech Republic E-mail: ripka@feld.cvut.cz

Radivoje Popovic, Professor, Dr.,Swiss Federal Institute of Technology Lausanne, EPFL – DMT – IMS, 1015 Lausanne, Switzerland E-mail: radivoje.popovic@epfl.ch

Ulrich Mescheder, Professor, Dr.,FH Furtwangen - University of Applied Sciences, Furtwangen, Department Computer and Electrical Engineering, Robert-Gerwig-Platz 1, D-78120 Furtwangen, Germany E-mail: mes@fh-furtwangen.de

Smart Sensors and MEMS

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Panos Datskos, Professor, Dr., Oak Ridge National Laboratory, Engineering Science and Technology Division, Bldg. 4500S, Rm H-160, MS 6141, Bethel Valley Rd., MS6141, P.O. Box 2008, Oak Ridge,TN 37831-6141, USA E-mail: pgd@ornl.gov

Eugenii Katz, Professor, Dr., Instituteof Chemistry, The Hebrew University of Jerusalem, Givat Ram, Jerusalem 91904, Israel E-mail: ekatz@vms.huji.ac.il

Dmytro V. Fedasyuk, Professor, Dr., CAD Departament, Institute of Computer Sciences and Information Technologies, National University Lviv Polythechnic, Lviv, Ukraine Department of Microelectronics and Information System, Technical University of Lodz, Poland E-mail: fedasyuk@polynet.lviv.ua

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Preface

‘Smart Sensors and MEMS’ was the title of a NATO Advanced Study Institute (ASI) held in Povoa de Varzim, Portugal, from 8 to 19 September 2003. The purpose of the meeting was to discuss and disseminate the latest knowledge in field of smart sensors, transducers and MEMS technologies with a view of advanced signal processing and novel conversion methods. With that in mind, a broad range of physical, chemical and biosensors design principles, technologies and applications were included in the programme.

It was a first attempt to discuss in the same event different physical, chemical, biological sensors and MEMS technologies in point of view of smart sensors creation. Fourteen experts from Czech Republic, Germany, Italy, Israel, Netherlands, Portugal, Russia, Switzerland, Ukraine and USA have been invited to give lectures on latest achievements in sensors area and technologies.

The main task of measuring instruments, sensors and transducers designing has always been to reach high metrology performances. At different stages of measurement technology development, this task was solved using technological methods, consisting in technology perfection, as well as structural and structural-algorithmic methods. Historically, technological methods have received prevalence in the USA, Japan and Western European countries. The structural and structural-algorithmic methods have received a broad development in the former USSR and continue developing in NIS countries. The improvement of metrology performances and extension of functional capabilities are being achieved through the implementation of particular structures designed in most cases in heuristic way, and using advanced calculations, algorithms and signal processing (for example, Lyapunov’s characteristic functions, weight functions, inferential calculations for soft sensors, advanced self-adaptive methods for frequency-to-digital conversion, etc.). Digital and quasi-digital smart sensors and transducers are not the exception [1].

The last crisis in the area of high technologies has evidently shown, that it is not enough to use only the technological methods. Despite of crisis, we need now smart sensors with increased accuracy, reliability and speed. Nowadays, intelligent sensors are extremely necessary for such applications, as electronic noses and tongues, smart vision systems, personnel (human body) detection, authentication systems, building monitoring system, etc. Most effectively for achievement of this purpose is a combination of technological methods and structural-algorithmic methods. It allows to achieve the same performances (or even better) at reduced material and human costs, with a much faster response.

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The NATO ASI has brought together experts from the various and highly diverse areas of this broad field and to diffuse their work in the field of smart sensors and MEMS. The diffusion and share of concepts is very important and timely for the future developments in this emerging scientific area. In fact, the main objective of the NATO ASI was to disseminate up to date knowledge concerning the new and emerging applications of modern smart sensors (including their usage in the defense against terrorism) and to stimulate active international cooperation in the area of novel physical and (bio) chemical sensing principles, modern microsystem technologies and new methods of signal processing and conversion.

The NATO ASI ‘Smart Sensors and MEMS’ has presented the state-of-the-art and given an excellent opportunity to provide a systematic, in-depth treatment of the new and rapidly developing field of smart sensors and MEMS. The ultimate goal of the NATO ASI - to encourage the participants from many countries to work together on different smart sensors and to develop joint projects in the future has been achieved in full.

In addition to the round table and two panel discussions, the addition discussion on ‘Smart Sensor Systems’ has been initiated by lecturers and participants and held during the NATO ASI. It has been considered that there are a lot of new technologies, suitable for smart sensors creation [2], for example, micro- or nano-cantilevers (lecturer P. Datscos, Oak Ridge National Laboratory, USA) porous silicon (lecturer U. Mescheder,University of Applied Science, Furtwangen, Germany), thick films (lecturer V. Ferrari, Universitá di Brescia, Italy), resonant piezoelectric (lecturer F. Josse, Marquette University, USA), molecular architecture and nanotechnologies (lecturer E. Katz, The Hebrew University of Jerusalem, Israel) and other modern technologies let to produce different sensors classes: physical, chemical and biological. But still there is a problem how to joint them and use in a frame of smart sensor systems. One of points of view was to use novel frequency-to-digital conversion methods and converters (lecturer S. Yurish, International Frequency Sensor Association) in order to move from a traditional analog (voltage and current) signal domain to frequency-time signal domain. The last one lets to eliminate a lot of technical problems due to properties of frequency as informative parameters. No output standardization is necessary as in the case of analog signal domain. Nevertheless, as rule, the sensitive response of many sensors is in mV, it is expediently to use the voltage-to-frequency intermediate conversion. In additional such approach will give an opportunity to create new self-adaptive smart sensors (S. Yurish).

New conversion methods and advanced signal processing will play role a bridge between many different technologies at smart sensor systems design. The best modern approach for smart sensor systems creation is to

Preface

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use both modern technologies and advanced methods for signal processing and measurement, especially in the frequency-time signal domain. Many type of sensing elements and read-out circuitry can be merged by this way on a single chip or in SoC. However, the combination of monolithic and hybrid integration with advanced processing and conversional methods in many cases allows also to achieve good results.

Such kind of research has been initiated by International Frequency Sensor Association IFSA [3] and now is a hot topic for a big international joint research project.

The aims of this volume are to disseminate wider and in-depth theoretical and practical knowledge about smart sensors and its applications, to create a clear consciousness about the effectiveness of MEMS technologies, advanced signal processing and conversion methods, to stimulate the theoretical and applied research in these very important areas, and promote the practical using of these techniques in the industry.

The book is an excellent guide for the practicing engineer, the researcher and the student interested in this crucial aspect of actual smart sensor design.

REFERENCES

[1] Yurish S.Y. Modern MEMS Technologies and Advanced Signal Processing: How to Obtain More Benefits in Smart Sensors Systems ? Sensors & Transducers 2003; 36:I:III.

[2] Smart Sensors and MEMS: Tutorials and Posters Abstracts, NATO ASI ‘Smart Sensors and MEMS’. Preprints, ed. by Maria Teresa Gomes and Sergey Y. Yurish, Povoa De Varzim, 8-19 September 2003 (ISBN 0-9733840-0-X).

[3] Yurish S.Y., Novel Measurement Techniques up for License, IFSA Press Release, 21 November 2002, Toronto, ON, Canada, http://www.sensorsportal.com

Lviv, January 2004 The editors

Smart Sensors and MEMS

Acknowledgements

The rapidly growing interest in smart sensors design as observable through the activities of International Frequency Sensor Association (IFSA) has been the motivation to start the preparation of a NATO Advanced Study Institute on the topic ‘Smart Sensors and MEMS’.

The NATO ASI and this book would not have been possible without the support and enthusiasm of many people and organizations. But still the book cannot reflect the stimulating mood of the many discussions during the course, which were due to the interest and active contribution of the ASI lecturers and students.

For the excellent and very responsive hosting in Povoa de Varzim, the congress manager Vanessa Pinto Campos (LusoCongressos, Portugal)deserve our acknowledgement.

All lecturers did a great job in the preparation of the contents of their contributions both during ASI and for this book. Since only a few books are available on this hot topic.

Finally, however, neither the NATO ASI nor this book would have been possible without the considerable financial support of the NATO Scientific Council who deserves our very special acknowledgement.

The NATO ASI ‘Smart Sensors and MEMS’ was sponsored by

NATO – North-Atlantic Treaty Organization (Grant No. PST.ASI.979712)

and organized with the technical cooperation of

University of Aveiro, Department of Chemistry LusoCongressos (Portugal) International Frequency Sensor Association (IFSA) Sensors Web Portal, Inc. (Canada) – media support

The directors of the NATO ASI on Smart Sensors and MEMS, Povoa de Varzim, 2003,

Sergey Y. Yurish, National University Lviv Polytechnic, UA

Maria Teresa S.R. Gomes University of Aveiro, Department of Chemistry, Portugal

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