stec2005 – jan h. hales – 8 th of april 2005 mems in space jan h. hales [email protected] mic –...
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STEC2005STEC2005 – Jan H. Hales – 8 – Jan H. Hales – 8thth of April 2005 of April 2005
MEMS in SpaceMEMS in Space
Jan H. Hales Jan H. Hales
[email protected]@mic.dtu.dk
MIC – Department of Micro and Nanotechnology MIC – Department of Micro and Nanotechnology
Technical University of Denmark, DTUTechnical University of Denmark, DTU
Space Technology Education Conference 2005Space Technology Education Conference 2005Session 7: “ACDS and Orbit Control 2”Session 7: “ACDS and Orbit Control 2”
STEC2005STEC2005 – Jan H. Hales – 8 – Jan H. Hales – 8thth of April 2005 of April 2005
Micro Electro Mechanical System Micro Electro Mechanical System MEMSMEMS
Integration of devices on micrometer scale Integration of devices on micrometer scale based on IC batch processingbased on IC batch processing
STEC2005STEC2005 – Jan H. Hales – 8 – Jan H. Hales – 8thth of April 2005 of April 2005
Space RelevanceSpace Relevance
Enhanced device performance by Enhanced device performance by down-scaling down-scaling Low mass and power consumptionLow mass and power consumption Robustness and redundancyRobustness and redundancy Batch production – reducing device costBatch production – reducing device cost
STEC2005STEC2005 – Jan H. Hales – 8 – Jan H. Hales – 8thth of April 2005 of April 2005
Space ApplicationsSpace Applications Sensors/detectorsSensors/detectors
Sun sensorSun sensor MagnetometerMagnetometer Particle/radiation detectorParticle/radiation detector
ActuatorsActuators Thrusters/micro valvesThrusters/micro valves Reaction wheels Reaction wheels MagnetotorquersMagnetotorquers Micro valvesMicro valves
Communication devicesCommunication devices Optical Optical RFRF
OtherOther Thermal controlThermal control Lab-on-a-ChipLab-on-a-Chip
STEC2005STEC2005 – Jan H. Hales – 8 – Jan H. Hales – 8thth of April 2005 of April 2005
Projects at MICProjects at MIC
Sun SensorSun Sensor Electron EmitterElectron Emitter Ion ThrusterIon Thruster Nano Environment Monitoring Unit Nano Environment Monitoring Unit
(NEMU)(NEMU)
STEC2005STEC2005 – Jan H. Hales – 8 – Jan H. Hales – 8thth of April 2005 of April 2005
Sun SensorSun Sensor
b
c
a
O
l i
2e
i
Pyrex
Si Cr/Au
Sensor areaSiO2
Two-Axis Triagular Slit Two-Axis Triagular Slit Sensor Sensor
FOV FOV ±70° (>55°), ±70° (>55°), resolution<0.1°resolution<0.1°
PCB size: 39mm PCB size: 39mm 50mm 50mm Sub System Mass: 7.1gSub System Mass: 7.1g Power act./standby: Power act./standby:
10mA/65µA10mA/65µA
STEC2005STEC2005 – Jan H. Hales – 8 – Jan H. Hales – 8thth of April 2005 of April 2005
Sun Sensor on SSETISun Sensor on SSETI
STEC2005STEC2005 – Jan H. Hales – 8 – Jan H. Hales – 8thth of April 2005 of April 2005
Electron EmitterElectron EmitterElectrons
Silicon with spikes
GateE-field
Oxide layer
STEC2005STEC2005 – Jan H. Hales – 8 – Jan H. Hales – 8thth of April 2005 of April 2005
Electric PropulsionElectric Propulsion Electro thermalElectro thermal ElectromagneticElectromagnetic ElectrostaticElectrostatic
Field Emission Electric Field Emission Electric Propulsion (FEEP)Propulsion (FEEP)
STEC2005STEC2005 – Jan H. Hales – 8 – Jan H. Hales – 8thth of April 2005 of April 2005
Ion Thruster - FEEPIon Thruster - FEEP
Design Goals Design Goals 100 times better than 100 times better than
comparable thrusterscomparable thrusters 1cm2 chip producing 1cm2 chip producing
1mN of thrust with a 1mN of thrust with a resolution of 3.9µNresolution of 3.9µN
Integrated neutralizerIntegrated neutralizer ApplicationsApplications
Charge controlCharge control Station keepingStation keeping Fine pointing - Fine pointing -
formation flyingformation flying Main propulsion systemMain propulsion system
VVaa
RRhh
Ga/In
2rc
ddee
STEC2005STEC2005 – Jan H. Hales – 8 – Jan H. Hales – 8thth of April 2005 of April 2005
Ion Thruster - FEEPIon Thruster - FEEP
200µm
200µm
8µm
STEC2005STEC2005 – Jan H. Hales – 8 – Jan H. Hales – 8thth of April 2005 of April 2005
OutlookOutlook
Obtain a larger student involvementObtain a larger student involvement Better packaged sun sensorBetter packaged sun sensor Fabrication of final batch of e-Fabrication of final batch of e-
emittersemitters Optimised version of Ion thrusterOptimised version of Ion thruster Initiation of the NEMU projectInitiation of the NEMU project
STEC2005STEC2005 – Jan H. Hales – 8 – Jan H. Hales – 8thth of April 2005 of April 2005
MEMS in SpaceMEMS in Space
Thank you for your attentionThank you for your attention
Any questions?Any questions?