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    STICK DIAGRAMS

    P- Diffusion

    n- Diffusion

    Poly silicon

    Metal 1

    Contact cut

     N implant

    Demarcation line

    Substrate contact

    PMS !n"ancement Transistor 

     NMS !n"ancement Transistor 

     NMS Depletion transistor 

     NPN #ipolar Transistor 

    #urie$ Contact

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    %DD

    GND

     NMS IN%!RT!R STICK DIAGRAM

    D

    A

    #S

    D

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    %DD

    GND

    CMS IN%!RT!R STICK DIAGRAM

    &IG 1 Supply rails

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    VDD

    GND

    PMOS

    NMOS

    S

    S

    D

    D

    CMOS INVERTER STICK DIAGRAM

    Fig 2 Drawing Pmos and Nmos Transistors between S!!"# rai"s

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    %DD

    GND

    PMS

     NMS

    A

    S

    S

    D

    D

    CMS IN%!RT!R STICK DIAGRAM

    &i' ( Combinin' Gate of Pmos an$ Nmos Transistors an$ 'i)in' common input

      *it" same 'ate poly silicon metal

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    %DD

    GND

    PMS

     NMS

    A

    DS

    S D

    CMS IN%!RT!R STICK DIAGRAM

    &i' + Combinin' Drain pf Pmos an$ Nmos Transistors to ta,e output it" metal 1

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    %DD

    GND

    PMS

     NMS

    D

    A

    S

    S D

    $

    CMS IN%!RT!R STICK DIAGRAM

    &i' . Ta,e t"e output it" t"e poly silicon metal

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    %DD

    GND

    PMS

     NMS

    D

    A

    S

    S D

    #

    CMS IN%!RT!R STICK DIAGRAM

    &i' / Connect t"e source of Pmos to %DD an$ Nmos to GND

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    %DD

    GND

    PMS

     NMS

    D

    A

    S

    S D

    #

    CNTACT

    CMS IN%!RT!R STICK DIAGRAM

    &i' 0 Connect t"e contact cuts "ere t"e $ifferent metals are connecte$

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    %DD

    GND

    PMS

     NMS

    D

    A

    S

    S D

    #

    CNTACT

    CMS IN%!RT!R STICK DIAGRAM

    &i' &inal CMS In)erter 

    Substrate contact

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    %DD

    GND

    CMS NAND GAT! STICK DIAGRAM

    &IG 2 Supply rails

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    %DD

    GND

    CMS NAND GAT! STICK DIAGRAM

    &i' 13 Drain' P an$ N Diffusion beteen Supply rails

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    %DD

    GND

    SS

    SD

    DD

    DS

    A #

    C

    CMS NAND GAT! STICK DIAGRAM

    &i' 11 Drain' t"e poly silicon for to $ifferent inputs an$

    i$entify t"e source an$ $rain

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    %DD

    GND

    SS

    SD

    DD

    DS

    A #

    C

    CMS NAND GAT! STICK DIAGRAM

    &i' 14 Connect t"e source of Pmos to %DD an$ Nmos to GND an$

    subtrate contacts of bot"

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    %DD

    GND

    SS

    SD

    DD

    DS

    A #

    C

    CMS NAND GAT! STICK DIAGRAM

    &i' 1( Dra t"e output connections

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    %DD

    GND

    SS

    SD

    DD

    DS

    A #

    C

    CMS NAND GAT! STICK DIAGRAM

    &i' 1+ Connect t"e contact cuts "ere t"e $ifferent metals are connecte$

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    %A&O'T

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    2(

    2(

    )(

    2(

    *(

    P di+sion N di+sion

    P di+sion

    P di+sion N di+sion

    P di+sion

    META% )

    META% ),(

    ,(*(

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    2(

    ,(

    ,(

    )( 2( ,(

    ,(

    )(

    2(*(

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    %AM$DA $SED R'%ES

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    CMOS INVERTER%A&O'T

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    VDD

    VSS

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    VDD

    VSS

    ND

    PD

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    VDD

    VSS

    ND

    PD

    PO

    % &

    S D

    S D

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    VDD

    VSS

    ND

    PD

    PO

    % &

    S D

    S D

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    VDD

    VSS

    ND

    PD

    PO

    % &

    S D

    S D

    INP' T

    O'TP' T

    S'$CONT

    S'$CONT

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    CMOS NAND%A&O'T

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    VDD

    VSS

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    VDD

    VSS

    S S

    S SD

    DD

    D

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    VDD

    VSS

    S'$CONT

    S'$

    CONT

    A $ O'TP' T

    S SDD

    S SD D

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    Scaling

      %5SI tec"nolo'y is constantly e)ol)in' toar$s

    smaller line i$t"s

     Re$uce$ feature si6e 'enerally lea$s to

     better 7 faster performance

    More 'ate 7 c"ip

     More accurate $escription of mo$ern tec"nolo'y is

    85SI 9ultra lar'e scale inte'ration:

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    MOSFET Scaling

    SCA5ING - refers to or$ere$ re$uction in $imensions of

    t"e MS&!T an$ ot"er %5SI features

     Re$uce Si6e of %5SI c"ips?

     C"an'e operational c"aracteristics of MS&!Ts an$

     parasitic?

     P"ysical limits restrict $e'ree of scalin' t"at can be

    ac"ie)e$?

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    2. Constant Voltage Scaling

      %$$ is ,ept constant?

      All $imensions; inclu$in' t"ose )ertical to t"e

    surface are scale$?

      Concentration $ensities are scale$?

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    DERIVATION OF SCA%ING PARAMETERS 6

    1?Gate Area9 A': #efore Scalin'

    After Scalin'

     Area is reduced by α2,it is advantage.

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    * Gate Ca!a3itan3e 7C 86

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    * Gate Ca!a3itan3e 7Cg 86

      #efore Scalin'

      After Scalin'

    Cg is s3a"ed b#

    9:;2

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    < C4arge in C4anne" = 6

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    - C4anne" Resistan3e 7RON 86

     #efore Scalin'

    After Scalin'

    H - Constant

     

    RON is s3a"ed b#

    )

    > G t d " 7T 8

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     #efore Scalin'

    After Scalin'

    >Gate de"a# 7Td8 6

     Td is s3a"ed b# 9 :

    ;2

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    @ Satration Crrent 7I 8 6

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    @ Satration Crrent 7Idss8 6

     #efore Scalin' 

    After Scalin'

    Ids is s3a"ed b# ):9

    ) Crrent Densit# 7B8 6

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    ) Crrent Densit# 7B8 6

     #efore Scalin' 

    After Scalin'

     B is s3a"ed b# ;2:9

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      ower ss !at on !er gate

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    ! ! g7Pg8 6

     #efore Scalin'

    Static Component

    Dynamic Component

    After Scalin'

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    Pg is s3a"ed b# ):92 

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    ), Power S!eed Prod3t 7PT8 6

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    ), Power S!eed Prod3t 7P T8 6

     #efore Scalin' After Scalin'

    P T is s3a"ed b#

    ):;29

    PARAM!T!R SCA5ING MD!5

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     PARAM!T!R SCA5ING MD!5Constant Constant 5ateral

      &iel$ %olta'e 

    5en't" 95: 17α 17α 17α

    *i$t" 9*: 17α 17α 1

    Supply %olta'e 9%: 17α 1 1

    Gate >i$e t"ic,ness 9to>: 17α 17α 1

    unction $ept" 9J: 17α 17α 1

    Current 9I: 17α α α

    Poer Dissipation 9P: 17α2   α α

    !lectric &iel$ 1 α 15oa$ Capacitance 9C: 17α 17α 17α

    Gate Delay 9T: 17α 17α2  17α2

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    Scalin' of Interconnects

    • Resistance of trac, R L 5 7 t

    • R 9scale$: L 95 7

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    Scalin' - Time Constant

    • Time constant of trac, connecte$ to 'ate;• T B R C'

    • T9scale$: B < R 9= 7

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