sulzer thin film presentation july 28 2011

Dan Schumacher | 27th July 2011

SULZER Metco Thin Film Technology

MyPresentation | slide 2

Who is Sulzer


Where is Sulzer Metco

Productions Coating machines Customer service Sales

Aufstrebende Märkte • Brasilien• Russland• Indien• China


Overview


Substrate

Surface

Substrate

Adding of materials for PTA welding

Substrate

Adding of materials in thinfilms

(PVD, PACVD, Hybrid)

Thermo chemical processesIONIT IONIT OX

Adding of materials bythermal spraying

Substrate

HVOF

Plasma

Arc

Arc-PVD

IONIT IONIT OX

Materials forPTA*-welding

DC

, HF,

HC

PM

S

PA

CV

D

Portfolio


Overview

� General Processes

� CVD and PACVD

� PVD

– APA Arc, Sputter

� Plasma Heat Treatment

– Plasma-nitriding

� Special Processes

� Combi Treatment

– Nitriding + PVD

� Hybrid

– Combination of two high ionization coating technologies (Arc and Sputter; Arc and HPPMS)

� HIPAC


Overview

� Two basic processes

� CVD (Chemical Vapour Deposition)

– One or more chemical precursor gases are used

– Chemical reactions in the gas phase

– PACVD / DLC

� PVD (Physical Vapour Deposition)

– Arc PVD

– Sputter

CVD

PACVD

PVD


Overview


CVD


CVD

CVD

PACVDPlasma-Assisted CVD

DLC layers(150–250°C)

Thermal CVD- High-temperature

(900–1050˚C)- Medium-temperature

(720–900˚C)

Classichardcoating layers

Classichardcoating layers(400–600°C)


PVD


PVD

Vacuum measurementand control system

Process gasVacuumpumpset

CircularEvaporators

Powersupplies

Coatingchamber

Infrared-temperature-measurement

Window

BIAS Power supply(substrate)

Substrate holder


PVD

� PVD coating

� Applied to most metal alloys and galvanised products (metals and plastics)

� Coating thickness: 0,5 -10 µm

� Hardness: 1.000 – 4.000 HV

� Temperature resistance: 300 – 900 °C

� Deposition temperature: 200 – 600 °C

� Structures:

– Multilayer

– Nanostructure Layers

– Modified Layers


PVD

� Arc Evaporation:

� Thermal electron beam

__________________________________________________________________

� Sputter:

� DC sputtering

� Magnetron sputtering

� HF sputtering


PVD

� Coating deposited by a classic circular evaporator

� Arc

________________________________________________________________

� Coating deposited by an evaporator with

extended magnetic filed

� APA Arc

� faster spot motion

� smaller spot size

� less droplet emission

� higher evaporation rate

� higher target utilization


Thin Film Coatings

� Coating design and architecture

substrate substrate substrate substrate substratesubstrate


PVD

� Benefits

� Low friction and low adhesion characters

� Strong wear resistance

� High hardness, high oxidation resistance and reduced chemical reactions

� New developments open up economic machining of new materials

� Coating of plastics

� Cost reduction

� Improved product quality

� Longer maintenance intervals

� Reduction of coolants and lubricants

� Increased life time


Plasma Heat Treatment


Plasma Heat Treatment – Plasma-Nitriding

� Conventional heat treatment

� Annealing, hardening and tempering

� For applications in tribological, corrosive, and mechanical-dynamic systems

________________________________________________________________

� IONIT®: Plasma-nitriding for alloyed steel, cast, sinter, and special materials

� IONIT OX®: Special process for improved corrosion and wear protection



� Plasma heat treatment

� High surface hardness

� Improved resistance against wear, corrosion, and fatigue

� Reproducible nitride structure

� Activation of high-alloyed steels

� High accuracy grade, low distortion

� Reduced adhesion and cold welding

� Environmentally friendly

� Our Service for Customers

� Tailored solutions

� Treatment of big parts (up to 13 metres length, 10 tons, 1.8 metres diameter)

� Long experience (over 40 years)

� Consultant service


PACVD - DLC


PACVD - DLC

� PACVD (Plasma-Assisted Chemical Vapour Deposition)

� Takes place at significantly lower temperatures than thermal CVD

� Differentiable in two application areas

� Deposition of classic hardcoating layers (TiN, TiCN, Al2O3)

� Deposition of hard amorphous carbon layers (DLC)


PACVD - DLC

� System for DLC coatings

advanced arc modulegraphite cathode

planetary


PACVD - DLC

� DLC coatings

� Amorphous Carbon based structure

� At temperatures below 200°C on the basis of pulsed glow discharges or high-frequency discharges

� All DLC coatings have an adhesion layer, multilayer possibly

� Coatings can be tailored with respect to:

– Electrical conductivity

– Hydrophobic/hydrophilic behaviour

� Applications

� Tribological applications

� Automotive, Racing, Engineering

� Plastic injection and molding

� Optical industries


PACVD - DLC

� Hardness

� Coefficient of

friction


PACVD - DLC

After 192 hoursNew

� Corrosion test Salt spray exhalation test DIN SS 50021 (100% rel. humidity, 35°C, 5% NaCl)


� Surface energy

� Surface energy is a measure of the affinity to sticking

� The lower the value, the less a material will weld or stick to a surface

TiAlN

θ

TiN

θ

MetalCarbideDLC

θ


PACVD - DLC

� Benefits:

� High wear resistance

� Low coefficient of friction

� Excellent adhesion

� Corrosion resistance

� Smooth surfaces

� Chemical inertness

� Possibility to run two coated surfaces against each other for optimal performance and reliability


Combi Treatment


Combi Treatment

� Two steps:

� Plasma-nitriding

� Subsequent PVD or DLC coatings

� Plasma-nitrided surfaces considerably improve the supporting effect for PVD or DLC coating

� Surface treatment may be applied either in one single or two separate processes 1.2344 CrN 1.2344 PN + CrN[N]

Load

Penetration depth: 33 µm Penetration depth: 6,5 µm

[N]

Load


Combi Treatment

� Basic precondition for successful combi treatment ensures best adhesion of the PVD layer

� Nitriding process usually generates a compound layer that has to be removed prior to coating

� Plot of hardness for a combi treatment

� CL = Compound layer

� DL = Diffusion layer

� SM = Substrate material


Combi Treatment

� Not to be forgotten is a slight roughening of the surfaces during nitriding

� Necessitates intermediate polishing prior to PVD coating therefore permits only the classic combi treatment in two separate operations


Combi Treatment

� Benefits

� Optimisation of tool and component properties

� Significantly longer tool and component life

� Increased production reliability and delivery reliability

� All types of PVD coatings can be applied (TiN, CrN, CrN-multilayer, CrN-mod, and DLC)

� Improvement of fatigue properties by residual compressive stresses

� Can make PVD coatings affordable for mass production


Hybrid


Hybrid

� Combination of two high ionization coating technologies

� Arc and Sputter

� Arc and HPPMS

APA Arc module Magnetron sputter


Hybrid

� Coating structure

Sputteredinsulating amorphous

coating

Arc depositedcrystalline

AlTiN2 µm

1 µm


HIPAC


HIPAC

IOT RWTH Aachen


HIPAC

� HIPAC = High Ionisation Plasma for Advanced Coatings

� A slight modification of the HPPMS (or HIPIMS) technology

� Combination of two high ionization coating technologies

� Arc and Sputter

� Arc and HPPMS

� Characteristics

� Low duty time (< 5 %)

� low frequency (< 1000 Hz)

� High peak power (> 0.5 MW)

� Low plasma temperature (possibility to perform low temperature depositions)


HIPAC

� Deposition in edges and holes

� By DC processes

� By HIPAC20

mm

10 mm


HIPAC

� Benefits

� Very high plasma density

� Dense and smooth coatings

� High target utilization

� Very low substrate temperature

� Homogeneous coating thickness in complex substrates

� Deposition inside tubes and trenches with high aspect ratios


Pre-Treatment


Pre-Treatment

� Cleaning of the surfaces

� Wet chemical cleaning of oil, grease and other contaminations

� Rinsing of the parts using de-ionized water in a three stage cascade

� Blown dry using nitrogen or hot dry air, or dried in a tunnel kiln

� Optimization of the roughness profile

� Removal of surface layers, or their systematic

� Adjustment by means of nitriding


Pre-Treatment

� AEGD (Arc-Enhanced Glow Distance)

� Ion cleaning: cleaning of the surfaces in plasma

� Performed in vacuum coating machine

� Removal of reaction layers and activation of the surface

�� Optimizing adhesion to ensure adequate coating functionality


Post-Treatment


Post-Treatment

� Procedures can be used for post-treatment, depending on the application:

� Blasting

� Brushing

� Polishing

� Functional layers on tools and components are smoothed

� Thanks to their amorphous structure DLC coatings are already very smooth after coating, no pre-treatment is needed


Thin Film Equipment


Thin Film Equipment

� Modular METAPLAS-DOMINO technology platform

� Magnetron sputter modules

� HIPAC technology

� DLC technology modules (PACVD, PACVD plus PVD)

� Combi Treatments (plasma-nitriding and PVD)

� Hybrid technology (sputtering plus Arc, HPPMS plus Arc)

� AEGD (Arc-Enhanced Glow Distance)

� Different system sizes:

– 300x300

– 400x500

– 600x700

– 1200x1100 (usable volume)


Thin Film Coatings


Thin Film Coatings

� Coating design and architecture

substrate substrate substrate substrate substratesubstrate


Thin Film Coatings

� Classic PVD coatings

� TiN, TiCN, TiCNgrad

� CrN, CrNmulti, CrNmod

� Special PVD coatings

� AlTiN, AlTiN Saturn

� W-C:H

� Micro alloyed coatings

� M�A�C for Plastics, Forming, Machining

� Amorphous coatings

� PACVD coatings

– Cavidur®

– DYLYN®, DYLYN® Plus


� TiN

� Monolayer structure

� Coating thickness 2 to 7 �m; Hardness 2500

� High oxidation resistance

� Very good adhesive properties of the coating

______________________________________

� TiCN

� Multilayer structure


� High degree of oxidation resistance

� Excellent adhesive properties of the coating


Thin Film Coatings� CrN

� Monolayer structure� Coating thickness 2 to 7 �m; Hardness 2300

� High oxidation resistance� Very good adhesive properties of the coating� Resistant to solvents_______________________________________

� CrNmulti� Multilayer structure� Coating thickness 3 to 7 �m; Hardness 2500� High degree of oxidation resistance

� Very smooth surface� Excellent adhesive properties of the coating________________________________________

� CrNmod� Multilayer structure with a glass-like cover coating� Coating thickness 3 to 7 �m; Hardness 2500� Extremely low tendency of sticking

� Very low tendency of cold welding


Thin Film Coatings

� Builds of the CrN layers

� Applications

CrNChrom

- PE, PP, PET, POM

- versatile usable

- PVD extrusion

- die casting

- die casting

- PUR


Thin Film Coatings

� AlTiN

� Monolayer


� High degree of oxidation resistance

� Very good adhesion

� Solvent resistant

� Insensitive to fingerprints

________________________________________

� AlTiN Saturn

� Monolayer


� High aluminium content

� Extremely high oxidation resistance

� Very smooth surface

� Nanocrystalline morphology

� Excellent adhesion

� Combination of high hardness and fracture toughness


Thin Film Coatings

� Micro Alloyed Coatings (M�A�C)

� Based on APA evaporation technology

� Individually adjustable coating design by micro alloying

� Targeted optimisation of particle size, ductility, oxidation resistance, hot hardness, wear resistance, thermal conductivity

�� Extended tool life, energy efficiency, and environmentally sensible savings


Thin Film Coatings� Plastics

� Longer lifetime

� Extended cleaning intervals� Prevention of adhesion and sticking

_______________________________________

� Forming� Higher forming speeds

� Improved quality of parts

� Prevention of cold welding and sticking

_______________________________________

� Machining� Higher cutting rates

� Higher rates of feed

� Reduction of wear and friction


Thin Film Coatings

� W-C:H

� Cutting of Al and non ferrous metals

� Coating temperature: 150 – 200 °C

� Hardness: 1000 – 1200 HV

� multilayer structure with a

– Cr adhesion layer;

– WC supporting layer

– and a functional layer WC/C Multilayer

� the coating thickness can be adjusted


Thin Film Coatings

� W-C:H

� tribological coatings

wind power application

uncoated W-C:H coatedLoad: 1500 N/mm2; 1.35 x 106 cycles Load: 2000N/mm2; 5.4 x 107 cycles

� W-C:H provides plus 30% power density


Thin Film Coatings

� Cavidur® for Racing

� Amorphous PACVD coating

� Coating takes place in a clean room

� Coating temperature from 180 – 350 °C

� Very high adhesion and hardness

� Extremely low friction


Thin Film Coatings

� Benefits

� Extending component life

� Performance boost

� Increased hardness

� Reduces wear on counter parts

� Coating mostly used on engine parts, gears


Thin Film Coatings

� DYLYN®, DYLYN® Plus

� Amorphous PACVD coating

� Coating takes place in a clean room

� Coating temperature from 200 – 390 °C

� High hardness

� Low friction

� High wear resistance

� Little or no lubricants needed

� Less production stops

�No change of design needed

� Less maintenance

sulzer thin film presentation july 28 2011

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