April 18, 2003 SECA 4th Annual Meeting 1

SURFACE ENGINEERING OF FUEL CELL COMPONENTS USING LARGE AREA FILTERED ARC TECHNOLOGYDr. V. GorokhovskyARCOMAC Surface Engineering, LLC in Collaboration with High Temperature Electro-Chemical Center of Montana State University, Bozeman, Montana www.arcomac.com

April 18, 2003 SECA 4th Annual Meeting 2

Coatings for SOFC

Pin-hole free alumina for sealcoatHT corrosion resistant conductive coating for metal interconnect platesYSZ doped with NiO, LaO for anodesDoped lanthanum chromate for cathodesPossibility of Entire Cell Fabrication

April 18, 2003 SECA 4th Annual Meeting 3

Large Area Filtered Arc Deposition

(LAFADTM) Technology

April 18, 2003 SECA 4th Annual Meeting 4

Cathodic Arc Deposition

Filtered Cathodic Arc Deposition

Filtered Arc Plasma Immersed Surface

Engineering Technologies: PACVD, PVD, Ion Etching, Ion

Nitriding, Ion Implantation

3 2 1 0 -1 -2 - 3 -4 -5 -6 -7

PlasmaSpray,

Atmospheric Pressure CVD

Glow Discharge Ion Etching, Ion Nitriding,

Low Pressure CVD, Plasma CVD, Vacuum

Plasma Spray

Thermal and Electron Beam Evaporation,

Reactive Evaporation

Sputtering(Diode, Triode,

Magnetron)

Ion Beam Assisted Deposition (IBAD)

Ion Implantation

OPERATING PRESSURE RANGES FOR VARIOUS PLASMA SURFACE ENGINEERING PROCESSES

LOG (PRESSURE, TORR)

April 18, 2003 SECA 4th Annual Meeting 5

Filtered Arc Plasma Source Ion Deposition (FAPSID) Surface Engineering System(b)- side view(a)- top view

Schematic Illustration of ArcomacTM FAPSID Surface Engineering System, Utilizing Large Area Filtered Arc Sources (LAFAS) in Universal Hybride Layout with Conventional PVD sources.

April 18, 2003 SECA 4th Annual Meeting 6

CrN/TiN MULTILAYERGLOW-DISCHARGE OPTICAL EMISSION SPECTROSCOPY

TiN/Ti MULTILAYER(WEAR-SCAR TEST)

April 18, 2003 SECA 4th Annual Meeting 7

ARCOMACTM

Copper over Silicon

CONVENTIONAL(KENNAMETAL)

TiAlN

ARCOMACTM

April 18, 2003 SECA 4th Annual Meeting 8

NANOCRYSTALLINE TiAlN COATING WITH SIZE OF GRAINS 1 NM(Courtesy of Dr.David Gelles, PNNL, Richland WA)

April 18, 2003 SECA 4th Annual Meeting 9

5000 Cycles Thermal Fatigue Test ARCOMAC MULTILAYER TiBCN/TiCN COATING

0.1

1.0

10.0

100.0

Rel

ativ

e W

eigh

t Los

s, %

Duplex M

L 1Duplex

ML 2

Duplex M

L 3 Filte

red A

rc TiC

N

CA-CrN

TD-VC

IP-CrN

MS-B4C

IP-CrC

UNCOATED H-13

PVD Hard Coatings

Hot Corrosion Test Data

UNCOATED H-13 STEELCourtesy of Prof. R.Shivpuri, Ohio State University, Columbus, OH

April 18, 2003 SECA 4th Annual Meeting 10

Corrosion resistant, electrically conducting coatings for interconnects in SOFC using Filtered Arc Deposition Technology

0.0 0.5 1.0 1.5 2.0 2.5 3.0-1

0

1

2

3

4

Electrical Properties

Cur

rent

(Am

p/cm

2 )

Applied Voltage (V)

Coatings: FAD by Arcomac Surface EngineeringMeasurements: R.J. Smith, Montana State Univ. at PNNL, Richland WA

AFM 1000nmTop: CrAlNreference sampleBottom: CrN/CrAlN multilayer10 hr @ 800 oC

0 5 10 15 20 25

0

500

1000

1500

2000

2500

3000

3500

4000Oxidation of CrN/CrAlN Coating on Steel

Con

cent

ratio

n (1

015 a

t/cm

2 )Time (hours) at 800 oC

Total N in coating Total O in coating Total N in CrAlN ref Total O in CrAlN ref

April 18, 2003 SECA 4th Annual Meeting 11

SUMMARYLarge Area Filtered Arc Technology is available to provide defectless pin-hole free coatings over large surface areas in a cost effective mannerMultilayer and nanostructure coating architecturesHT corrosion resistant conductive coatings for metal interconnect plates operating over a wide temperature range in a hostile environmentLow cost material sets in replacement of exotic materialsProvide for low cost manufacturing processesPossibility of Entire Cell FabricationWe want to be part of your technology team to help to get your $/kW cost down and your ease of manufacturing SOFC improved