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The top documents tagged [function of ion energy]
1.Introduction and application. 2.Ion implantation tools. 3.Dopant distribution. 4.Mask thickness and lateral distribution. 5.Effect of channeling. 6.Damage
216 views
Mitigation of fast particles from laser- produced Sn plasma for an extreme ultraviolet lithography source Y.Tao and M.S.Tillack
[email protected]
University
217 views
Mechanisms of ultra-smoothing induced by ion beam erosion Randall L. Headrick, University of Vermont, DMR-0348354 Ion erosion of solid surfaces is known
216 views
MMFW Madison, Wisconsin 6 May 2011 D.J. Den Hartog, R. M. Magee, S.T.A. Kumar, V.V. Mirnov (University of Wisconsin–Madison) D. Craig (Wheaton College)
218 views
Ion energization during magnetic reconnection in MST RFP
35 views