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The top documents tagged [sccm nh]
Evaluating Baseline Deposition and Etch Recipes for Silicon Dioxide and Silicon Nitride using PECVD and RIE Tools Presented by Ayesha K. Denny NNIN RET
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Effect of Environmental Gas on the Growth of CNT in Catalystically Pyrolyzing C 2 H 2 Minjae Jung*, Kwang Yong Eun, Y.-J. Baik, K.-R. Lee, J-K. Shin* and
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