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The top documents tagged [splat simulator]
2000 SRC/DARPA Annual Review - Research Network for Advanced Lithography Enter your Univ. or Group up Here – Task 460.## UC Berkeley TCAD Research L ithography
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L ithography A nalysis using V irtual A ccess UC Berkeley TCAD Research 2000 1998 1997 Frank Gennari Toshihiro Horie Peter Chien Steve LeeTimothy JamesJefferey
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