taurus modeling environment, taurus layout tutorialjmbussat/physics290e/fall-2006/... · taurus...

Taurus Modeling EnvirnomentTaurus Layout TutorialVersion X-2005.10, October 2005

ii

Copyright Notice and Proprietary InformationCopyright 2004 Synopsys, Inc. All rights reserved. This software and documentation contain confidential and proprietary information that is the property of Synopsys, Inc. The software and documentation are furnished under a license agreement and may be used or copied only in accordance with the terms of the license agreement. No part of the software and documentation may be reproduced, transmitted, or translated, in any form or by any means, electronic, mechanical, manual, optical, or otherwise, without prior written permission of Synopsys, Inc., or as expressly provided by the license agreement.

Right to Copy DocumentationThe license agreement with Synopsys permits licensee to make copies of the documentation for its internal use only. Each copy shall include all copyrights, trademarks, service marks, and proprietary rights notices, if any. Licensee must assign sequential numbers to all copies. These copies shall contain the following legend on the cover page:

“This document is duplicated with the permission of Synopsys, Inc., for the exclusive use of __________________________________________ and its employees. This is copy number __________.”

Destination Control StatementAll technical data contained in this publication is subject to the export control laws of the United States of America. Disclosure to nationals of other countries contrary to United States law is prohibited. It is the reader’s responsibility to determine the applicable regulations and to comply with them.

DisclaimerSYNOPSYS, INC., AND ITS LICENSORS MAKE NO WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, WITH REGARD TO THIS MATERIAL, INCLUDING, BUT NOT LIMITED TO, THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE.

Registered Trademarks (®)Synopsys, AMPS, Arcadia, C Level Design, C2HDL, C2V, C2VHDL, Cadabra, Calaveras Algorithm, CATS, CSim, Design Compiler, DesignPower, DesignWare, EPIC, Formality, HSPICE, Hypermodel, I, iN-Phase, InSpecs, in-Sync, Leda, MAST, Meta, Meta-Software, ModelAccess, ModelTools, NanoSim, OpenVera, PathMill, Photolynx, Physical Compiler, PowerMill, PrimeTime, RailMill, Raphael, RapidScript, Saber, SiVL, SNUG, SolvNet, Stream Driven Simulator, Superlog, System Compiler, Testify, TetraMAX, TimeMill, TMA, VCS, Vera, and Virtual Stepper are registered trademarks of Synopsys, Inc.

Trademarks (™)abraCAD, abraMAP, Active Parasitics, AFGen, Apollo, Apollo II, Apollo-DPII, Apollo-GA, ApolloGAII, Astro, Astro-Rail, Astro-Xtalk, Aurora, AvanTestchip, AvanWaves, BCView, Behavioral Compiler, BOA, BRT, Cedar, ChipPlanner, Circuit Analysis, Columbia, Columbia-CE, Comet 3D, Cosmos, CosmosEnterprise, CosmosLE, CosmosScope, CosmosSE, Cyclelink, Davinci, DC Expert, DC Expert Plus, DC Professional, DC Ultra, DC Ultra Plus, Design Advisor, Design Analyzer, Design Vision, DesignerHDL, DesignTime, DFM-Workbench, DFT Compiler, Direct RTL, Direct Silicon Access, Discovery, DW8051, DWPCI, Dynamic-Macromodeling, Dynamic Model Switcher, ECL Compiler, ECO Compiler, EDAnavigator, Encore, Encore PQ, Evaccess, ExpressModel, Floorplan Manager, Formal Model Checker, FoundryModel, FPGA Compiler II, FPGA Express, Frame Compiler, Galaxy, Gatran, HDL Advisor, HDL Compiler, Hercules, Hercules-Explorer, Hercules-II, Hierarchical Optimization Technology, High Performance Option, HotPlace, HSPICE-Link, iN-Tandem, Integrator, Interactive Waveform Viewer, i-Virtual Stepper, Jupiter, Jupiter-DP, JupiterXT, JupiterXT-ASIC, JVXtreme, Liberty, Libra-Passport, Library Compiler, Libra-Visa, Magellan, Mars, Mars-Rail, Mars-Xtalk, Medici, Metacapture, Metacircuit, Metamanager, Metamixsim, Milkyway, ModelSource, Module Compiler, MS-3200, MS-3400, Nova Product Family, Nova-ExploreRTL, Nova-Trans, Nova-VeriLint, Nova-VHDLlint, Optimum Silicon, Orion_ec, Parasitic View, Passport, Planet, Planet-PL, Planet-RTL, Polaris, Polaris-CBS, Polaris-MT, Power Compiler, PowerCODE, PowerGate, ProFPGA, ProGen, Prospector, Proteus OPC, Protocol Compiler, PSMGen, Raphael-NES, RoadRunner, RTL Analyzer, Saturn, ScanBand, Schematic Compiler, Scirocco, Scirocco-i, Shadow Debugger, Silicon Blueprint, Silicon Early Access, SinglePass-SoC, Smart Extraction, SmartLicense, SmartModel Library, Softwire, Source-Level Design, Star, Star-DC, Star-MS, Star-MTB, Star-Power, Star-Rail, Star-RC, Star-RCXT, Star-Sim, Star-SimXT, Star-Time, Star-XP, SWIFT, Taurus, Taurus-Device, Taurus-Layout, Taurus-Lithography, Taurus-OPC, Taurus-Process, Taurus-Topography, Taurus-Visual, Taurus-Workbench, TimeSlice, TimeTracker, Timing Annotator, TopoPlace, TopoRoute, Trace-On-Demand, True-Hspice, TSUPREM-4, TymeWare, VCS Express, VCSi, Venus, Verification Portal, VFormal, VHDL Compiler, VHDL System Simulator, VirSim, and VMC are trademarks of Synopsys, Inc.

Service Marks (SM)MAP-in, SVP Café, and TAP-in are service marks of Synopsys, Inc.

SystemC is a trademark of the Open SystemC Initiative and is used under license.ARM and AMBA are registered trademarks of ARM Limited.All other product or company names may be trademarks of their respective owners.

Printed in the U.S.A.

Taurus Layout Tutorial, version V-X-2005.10

WHAT’S NEW IN THIS RELEASE

What’s New in This Release0

For additional information about Taurus Layout, see:

• The documentation installed with the Taurus Layout software and available through the Taurus Layout Help menu.

• The Taurus Layout release notes, available on SolvNet (see Accessing Solv-Net on page ix).

• Documentation on the Web, which provides PDF documents and is available through SolvNet at http://solvnet.synopsys.com.

Note:The only change to this manual is the version number. See the release notes for current platform information. Go to the Synopsys Web page at http://solvnet.synopsys.com and click SlovNet.

LO 2005.10 iii

Draft 9/10/05

http://solvnet.synopsys.com


What’s New in This Release

iv LO 2005.10

Draft 9/10/05

ABOUT THIS GUIDE

About This Guide0

OverviewThis tutorial guides you in learning how to use the interactive features of Taurus Layout. These features allow you to create, import and pass IC mask information to a variety of Synopsys TCAD tools.

This document contains the following chapters:

What’s New in This Release

Describes the enhancements and bug fixes.

About This Guide Includes conventions, related publications, and customer support information.

Chapter 1 Introduces Taurus Layout.

Chapter 2 Describes basic Taurus Layout operations, including starting Taurus Layout, loading a GDS II Stream file, and quitting Taurus Layout.

Chapter 3 Explains how to modify a layout including changing mask layer properties, and drawing and deleting polygons.

Chapter 4 Shows how to create files for use with Synopsys TCAD simulators, e.g., TSUPREM-4, Taurus Lithography, or Raphael.

Chapter 5 Explains how to run Taurus Layout in the Batch mode.

LO 2005.10 v

Draft 9/10/05

About This Guide Related Publications

Related PublicationsFor additional information about Taurus Layout, see:

• Synopsys Online Documentation (SOLD), which is included with the software for CD users or is available to download through the Synopsys Electronic Software Transfer (EST) system

• Documentation on the Web, which is available through SolvNet at http://solvnet.synopsys.com

• The Synopsys MediaDocs Shop, from which you can order printed copies of Synopsys documents, at http://mediadocs.synopsys.com

• You might also want to refer to the documentation for the following related Synopsys products:- For information on Taurus-Process installation procedures, see the TCAD

Products and Utilities Installation Manual.- Taurus-Process uses many references from the changing body of industry

literature. Where appropriate, you are directed to source material. References are included in the Taurus Process Reference Manual, Chapter 3, “References.”

ConventionsThe following conventions are used in Synopsys documentation.

Convention Description

Courier Indicates command syntax.

Courier italic Indicates a user-defined value in Synopsys syntax, such as object_name. (A user-defined value that is not Synopsys syntax is indicated by regular text font italic.)

Courier bold Indicates user input—text you type verbatim—in Synopsys syntax and examples. (User input that is not Synopsys syntax, such as a user name or pass-word you enter in a GUI, is indicated by regular text font bold.)

[ ] Denotes optional parameters, such as pin1 [pin2 ... pinN]

| Indicates a choice among alternatives, such as low | medium | high(This example indicates that you can enter one of three possible values for an option: low, medium, or high.)

vi LO 2005.10

Draft 9/10/05

Conventions About This Guide

If a button label appears grayed out, the button is not currently active. Attempts to click the button are ignored.

Raphael-NES specific enhancements and modifications are marked with a special icon in the manual.

Mouse Button Conventions Most workstation computers have a mouse with three buttons. The functions of the three buttons depend on the “look” (Open Look or Motif) that has been selected. Throughout this tutorila, mouse buttons are referred to by name (SELECT, or MENU), rather than by position (left, right, or middle). The follow-ing table shows the mouse button definitions for the two most common looks, Open Look and Motif.

_ Connects terms that are read as a single term by the system, such as set_annotated_delay

Control-c Indicates a keyboard combination, such as holding down the Control key and pressing c.

\ Indicates a continuation of a command line.

/ Indicates levels of directory structure.

Edit > Copy Indicates a path to a menu command, such as opening the Edit menu and choosing Copy.

Convention Description

Raphael -NES

Name Open Look

Motif Use

SELECT Left Left Select objects

MENU Right Left Display and choose menus

LO 2005.10 vii

Draft 9/10/05

About This Guide Conventions

Window Button Conventions Many of Taurus Layout’s windows have one or more buttons at the bottom, which you click using the SELECT mouse button. The functions of these buttons are as follows:

If a button is labeled using light, faint lettering, the button is not currently active. Attempts to click the button are ignored.

Menu Conventions Throughout this tutorial, the shorthand convention “execute Menu➔ Item” means to use the MENU mouse button to select Item from Menu.

To do this, move the cursor to the desired Menu, then press and hold the MENU mouse button to display the items available under the menu. While continuing to

Button Function

OK The entries or changes you have made in the window are accepted and the window is closed. For windows that perform an action (such as a Load window), the action is also performed.

Apply The entries or changes you have made in the window are accepted, but the window is not closed. This allows you to con-tinue making changes in this window. For windows that perform an action (such as a Load window), the action is performed and the button may be labeled with the appropriate action verb such as Load rather than Apply.

Reset The entries or changes you have made in the window since the most recent Apply are ignored, and the window is reset to the state it was in at the most recent Apply.

Cancel The entries or changes you have made in the window since the most recent Apply are ignored, the window is reset to the state it was in at the most recent Apply, and the window is closed.

Close The window is closed.

viii LO 2005.10

Draft 9/10/05

Customer Support About This Guide

hold the MENU mouse button, drag the mouse down until the desired Item is high-lighted, then release the mouse button.

If a menu item appears in light, faint lettering, the item is not currently available. Attempts to select the item will be ignored.

Keyboard Accelerators If you prefer to use the keyboard instead of the mouse for menu selection, there are keyboard shortcuts (accelerator keys) for many of the menu selection opera-tions. For example, in Figure I-2 above, the first letter of each of the menu bar items is underlined (File, Edit, and View). You can display a menu by pressing and holding the Alt key, followed by the desired letter. For example, Alt-F will display the File menu. Once a menu is displayed, one letter in each item is under-lined. Make your selection by pressing the corresponding letter on your keyboard.

Once a menu is displayed, you may move up and down the menu using the up-arrow ↑ and down-arrow ↓ keys. You may move left and right (from menu to menu) using the left-arrow ← and right-arrow → keys. Press Return to make your menu selection.

Customer SupportCustomer support is available through SolvNet online customer support and through contacting the Synopsys Technical Support Center.

Accessing SolvNetSolvNet includes an electronic knowledge base of technical articles and answers to frequently asked questions about Synopsys tools. SolvNet also gives you access to a wide range of Synopsys online services, which include downloading software, viewing Documentation on the Web, and entering a call to the Support Center.

To access SolvNet:

Figure I-1 Select File➔ Save menu item

LO 2005.10 ix

Draft 9/10/05

About This Guide Customer Support

1. Go to the SolvNet Web page at http://solvnet.synopsys.com.

2. If prompted, enter your user name and password. (If you do not have a Synop-sys user name and password, follow the instructions to register with SolvNet.)

3. If you need help using SolvNet, click SolvNet Help in the Support Resources section.

Contacting the Synopsys Technical Support CenterIf you have problems, questions, or suggestions, you can contact the Synopsys Technical Support Center in the following ways:

• Open a call to your local support center from the Web by going to http://solvnet.synopsys.com (Synopsys user name and password required), then clicking “Enter a Call to the Support Center.”

• Send an e-mail message to your local support center:- E-mail [email protected] from within North America. - Find other local support center e-mail addresses at

http://www.synopsys.com/support/support_ctr.• Telephone your local support center:

- Call (800) 245-8005 from within the continental United States.- Call (650) 584-4200 from Canada.

• Find other local support center telephone numbers at http://www.synopsys.com/support/support_ctr.

x LO 2005.10

Draft 9/10/05



http://www.synopsys.com/support/support_ctr

http://www.synopsys.com/support/support_ctr

Table of Contents

CONTENTS

What’s New in This Release iii

About This Guide v

Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vRelated Publications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . viConventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vi

Mouse Button Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . viiWindow Button Conventions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . viiiMenu Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . viiiKeyboard Accelerators. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ix

Customer Support . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ixAccessing SolvNet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ixContacting the Synopsys Technical Support Center . . . . . . . . . . . . . . . x

Introduction 1-1

Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

Using Taurus Layout 2-1

Getting Started . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1Typical Task Outline . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2What If . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2See Also . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

Starting Taurus Layout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

Understanding the Taurus Layout Main Window . . . . . . . . . . . . . . . . . 2-4

Draft 9/10/05LO 2005.10 xi

Table of Contents Taurus Layout Tutorial

Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4

Understanding the Main Window. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6

Understanding Mask, Structure, and IWB Modes . . . . . . . . . . . . . . 2-7Understanding the Tools Icons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8

Loading and Examining a GDS File. . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10

Loading a GDS File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10Selecting a Cell for Expansion. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12Understanding GDS File Information Window. . . . . . . . . . . . . . . . 2-13

GDS II File Reading Capability . . . . . . . . . . . . . . . . . . . . . . . . . . 2-15Viewing the Mask Layout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-15

Changing the View of a Mask Layout . . . . . . . . . . . . . . . . . . . . . . . . . 2-17Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17

Panning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17Zoom In and Zoom Out . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17Resetting the View. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18Viewing Polygon Outlines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18Changing the Background Color . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19

Changing Taurus Layout’s Grid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19

Scaling the Layout through the GUI. . . . . . . . . . . . . . . . . . . . . . . . . . . 2-21Erasing an Entire Mask Layout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22

Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22

Tagging Text to a Polygon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22

Printing a Mask Layout. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23

Printing Layout to a Printer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23Saving Layout to a PostScript File. . . . . . . . . . . . . . . . . . . . . . . . . . 2-24

Quitting Taurus Layout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-25Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-25Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-25

Modifying Mask Layout 3-1

Changing Mask Layer Names . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

Draft 9/10/05xii LO 2005.10

Taurus Layout Tutorial Table of Contents

Changing Layer Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

Ignoring Layers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6

Selecting Colors and Patterns . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6

Defining Layer Properties. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8

Defining Field and Optical Properties . . . . . . . . . . . . . . . . . . . . . . . . . 3-10Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10What If . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12

Defining Additional Mask Layer Properties in IWB Mode . . . . . . . . . 3-12Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12

Saving Mask Layer Properties . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13

Loading Mask Layer Properties . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15

Resetting Mask Layer Properties . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15

Polygon Drawing and Editing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16Drawing Rectangles . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17

Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17

Drawing Irregular Polygons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18

Editing Polygons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18

Saving and Loading Polygons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20

Saving Polygons to a GDS II Stream File . . . . . . . . . . . . . . . . . . . . 3-20Text Information in GDS II Files . . . . . . . . . . . . . . . . . . . . . . . . . 3-20

Saving Polygons in a .tl2 File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-21Loading Polygons from a .tl2 File . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23

Draft 9/10/05LO 2005.10 xiii

Table of Contents Taurus Layout Tutorial

Creating Files for TCAD Simulators 4-1

Creating Files for TMA SUPREM-3, TSUPREM-4, and Taurus Lithogra-phy and Taurus Topography 3D AAM. . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

Defining Simulation Point for TMA SUPREM-3 . . . . . . . . . . . . . . . 4-2Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2

Defining Simulation Cut-Line for TSUPREM-4 . . . . . . . . . . . . . . . . 4-4Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4

Defining Simulation Rectangle for Taurus Lithography, Taurus Topog-raphy 3D. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6

Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6

Defining Simulation Rectangle for IWB . . . . . . . . . . . . . . . . . . . . . . 4-9Creating Structures for Raphael . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9

Preparing 2D Structure for Raphael. . . . . . . . . . . . . . . . . . . . . . . . . 4-10Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10

Preparing 3D Structure for Raphael . . . . . . . . . . . . . . . . . . . . . . . . 4-17Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17Considerations When Using the Interface to RC3 . . . . . . . . . . . . 4-19

Text in RC2 and RC3 Files . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21Performing Connectivity Analysis. . . . . . . . . . . . . . . . . . . . . . . . . . 4-22

Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-22Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-22

Understanding Structures Created for Raphael / Raphael-NES. . . . 4-25Goals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-25Context . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-25

Batch Mode 5-1

Batch Mode File Processing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

Index Index-1

Draft 9/10/05xiv LO 2005.10

CHAPTER 1

L

Introduction 1

Taurus Layout is part of the Taurus Modeling Envirnonment (TME), a unified scripting infrastructure that combines Taurus Visual, Taurus Workbench, and Tau-rus Layout. A brief introduction of each tool follows:

• Taurus Visual (TV) is used to visualize results generated by physical simula-tion software tools in one (1D), two (2D), and three dimensions (3D). You may visualize data for an initial understanding and analysis, then modify the plots to gain a new perspective.

• Taurus WorkBench is a virtual IC factory that simulates semiconductor manu-facturing processes and predicts product characteristics. Taurus-Workbench provides simulation management and data management so that the engineer can easily and efficiently predict product characteristics. Utilities include Design of Experiment (DOE), Response Surface Modeling (RSM),statistical analysis, plotting, visualization, optimization; and aids the engineer in explor-ing, refining, and centering a design. Taurus WorkBench is an open environ-ment in which to integrate, not only Synopsys TCAD products, but also inhouse and third-party tools and simulators. Job farming allows simulations to be executed in parallel across a network for faster results

• Taurus Layout is an interactive program that provides a direct interface to mask layout information for a variety of SynopsyTCAD simulators includ-ingTMA SUPREM-3, TSUPREM-4, and Raphael. Also, Taurus Layout can be used within the Taurus WorkBench environment. Taurus Layout also has a direct interface to Raphael-NES.

OverviewThis tutorial guides you in learning how to use the interactive features of Taurus Layout. These features allow you to create, import, and pass IC mask information to a variety of Synopsys TCAD simulators.

Figure 1-1 shows an overview of Taurus Layout input-output.

O 2005.10 1-1

Draft 9/10/05

Introduction Taurus Layout Tutorial

Mask layout files written in the industry-standard GDS II Stream format can be loaded into Taurus Layout and displayed. Additionally, simple layouts may be prepared directly using Taurus Layout’s polygon drawing and editing capabilities.

With Taurus Layout, it is easy to define a simulation point, cut-line, or rectangular region of interest for process simulation with TMA SUPREM-3, TSUPREM-4, or Taurus-Lithography.

Taurus Layout also makes it easy to create two- and three-dimensional (2D and 3D) structures for interconnect analysis using Raphael. Through its interface to Raphael NES, Taurus Layout’s capacitance extraction is very fast.

Figure 1-1 Taurus Layout input-output overview

Taurus-Layout

TSUPREM-4Taurus-

Raphael

GDS IIStream File

Taurus-WorkbenchSUPREM-3

LayoutEditor

User can create oredit layouts

User can define masklayer properties

TAurus-WorkBench

Commandsfrom

Raphael-NES

Taurus-Topography Lithography

1-2 LO 2005.10

Draft 9/10/05

CHAPTER 2

L

Using Taurus Layout2

This tutorial guides you in learning how to use the interactive features of Taurus Layout. These features allow you to create, import, and pass IC mask information to a variety of Synopsys TCAD simulators.

Getting StartedThe tasks in this section guide you through basic Taurus Layout operations includ-ing:

• Starting Taurus Layout

• Loading a GDS II Stream file

• Changing the view of the mask layout and grid points

• Quitting Taurus Layout

Note:For best results, perform the tasks in sequence. Once you are familiar with the basic operations, you can go on to advanced tasks in the remaining chapters.

“GDS II Stream” is referred to as “GDS” for the remainder of this tutorial. The GDS format is an industry standard binary file format containing hier-archical cell-based information about the polygons appearing on the set of 64 layers that comprise a mask layout. A complete description of the GDS file format is complex and beyond the scope of this manual. Taurus Layout can accommodate the GDS II Stream format, but not variations of that for-mat.

Taurus Layout can read 1024 (0-1023) layers from the GDS II Stream file.

Raphael-NES specific enhancements and modifications are marked with a special icon in the manual.

Raphael -NES

O 2005.10 2-1

Draft 9/10/05

Using Taurus Layout Taurus Layout Tutorial

Typical Task OutlineAlthough the tasks are meant to be performed sequentially, many can be per-formed individually after minimal setup.

Each task is designed for easy comprehension. The outline of a typical task is as follows:

Task Title

Goals What you will learn in this task

Context What you should have already done to start this task

Information about the task.

1. First step

a. Supplemental information about the step or task

2. Second step

a. Substep

Continue to last step.

What If Potential problems, and what to do in case they occur

See Also Other reference material

Starting Taurus Layout

Goals Learn how to start Taurus Layout from the STUDIO Tool Palette or a command shell.

Context The STUDIO Tool Palette is up and running or a command shell is open.

To start Taurus Layout from the STUDIO Tool Palette, double-click the Tau-rus Layout icon shown in Figure 2-1.

2-2 LO 2005.10

Draft 9/10/05

Taurus Layout Tutorial Starting Taurus Layout

To open the Taurus Layout main window (see Figure 2-2), which is discussed in “Understanding the Taurus Layout Main Window,” p.2-4.

The following output appears in the lower left corner of the STUDIO Tool Palette window:

Running tauruslayout... OK. (pid= <pid>)

The process ID number <pid> of the Taurus Layout process is indicated in parentheses. As an alternative, you may run Taurus Layout directly from the command line by typing the command:

tlayout

This allows you to bypass the STUDIO Tool Palette.

❖ If you invoke Taurus Layout directly from a command line, you may provide a file name as a command line argument. The specified file must contain Taurus Layout batch mode commands (Chapter 5). This feature is primarily intended for use within the Taurus-WorkBench en-vironment.

If you invoke Taurus Layout directly from a command line, you may also specify the desired “look and feel.” Type:

tlayout -laf motif or

tlayout -laf openlookfor the user interface you desire. Motif is the default.

What if The Taurus Layout main window opens, but does not look like the window shown in Figure 2-2.

You may have invoked a previous version of Taurus Layout (formerly known as TMA Layout, Lorenzo, or STUDIO Layout). When the Taurus Layout main win-dow first opens, the status line appearing at the bottom should display “Taurus Layout Version2003.09.”

If you invoked Taurus Layout from the STUDIO Tool Palette and the Taurus Lay-out version number is not “2003.09,” consult the STUDIO Tool Palette Tutorial in the STUDIO User’s Manual (Chapter 2, Task 3: “Selecting Tool Versions”) for instructions on choosing the correct version of Taurus Layout

If you invoked Taurus Layout directly from the command line and the Taurus Lay-out version number is not “2003.09,” you need to ensure that the latest version of

Figure 2-1 Taurus Layout icon

LO 2005.10 2-3

Draft 9/10/05


Taurus Layout was correctly installed. See the Taurus Layout installation instruc-tions for more information.

What if You attempt to invoke Taurus Layout from the STUDIO Tool Palette, and you receive an error message of the form:

Running tauruslayout... FAILED. (pid= <pid>)

• Problem: The Taurus Layout command could not be executed by the STUDIO Tool Palette.

• Solution: You need to ensure that your:

b. STUDIO and Taurus Layout shipments were installed correctly.

c. Path includes the location of the executables provided.

d. See the STUDIO installation instructions or the Taurus Layout installa-tion instructions for more information.

What if You attempt to invoke Taurus Layout from the command line, and you receive an error message of the form:

tlayout: Command not found.

Problem: The UNIX system could not find the Taurus Layout executable.

Solution:

1. Try invoking Taurus Layout from the STUDIO Tool Palette as described in on page 2-2.

2. If that fails, you must ensure that your:

a. Taurus Layout shipment was installed correctly.

b. Path includes the location of the executable provided.

c. See the TCAD Product and Utilities Installation Manual for more infor-mation.

See also The STUDIO User’s Manual explains the operation of the STUDIO Tool Palette. Consult the STUDIO installation instructions or the Taurus Layout installation instructions to verify correct installation.

Understanding the Taurus Layout Main Window

Goals Understand the various parts of the Taurus Layout main window by opening and reading about them.

Context You have started Taurus Layout, and the main window appears on screen as shown in Figure 2-2.

2-4 LO 2005.10

Draft 9/10/05

Taurus Layout Tutorial Understanding the Taurus Layout Main Window

In the main window, you make selections and receive status information. Each of these points of interaction is explained in the following sections.

Figure 2-2 Taurus Layout main window

Menus

Magnification Mask Layers

ModeButtons

ToolsIcons

StatusLine

Central Display Area

Cursor Location

Feature Definition

Menus Notice the menus across the top of the main window. Press and hold the MENU mouse button on each of the menus (File, Edit, and View) to see the choices.

Mode Buttons The Mode buttons near the top left corner of the main window allow you to switch between Mask, Structure, or IWB modes. Structure is the default mode.

Tools Icons The Tools icons on the left side of the window allow you to pan, zoom, draw polygons, define simulation regions, and so on. Operation of these icons is explained in “Understanding the Tools Icons,” p.2-8.

LO 2005.10 2-5

Draft 9/10/05


Understanding the Main Window

Goals Learn the operation of the Mode buttons and Tools icons in the Taurus Layout main window.

Context The Taurus Layout main window is open, as shown in Figure 2-2.

The Taurus Layout main window Mode buttons are near the top left corner, and the Tools icons are on the left side of the window. The buttons and icons function independently.

Note:Structure mode is chosen as the default mode. However, by setting the TAURUSLAYOUT_MODE environment variable to MASK, STRUC-TURE or IWB you can start up Taurus Layout in any of these three modes.

Magnification The Magnification field shows the magnification factor when zooming the view of a mask layout. Initially, this field displays a default value of 1.0.

Cursor Location The Cursor Location field shows the X, Y coordinates of the cursor when the cursor is in the central display area.

Central DisplayArea

The large rectangular area dominating the main window is the central display area where Taurus Layout dis-plays the mask layout’s polygons. Horizontal and verti-cal scroll bars are provided for panning the mask layout.

Status Line The status line at the bottom of the main window dis-plays various status messages. When Taurus Layout is first invoked, the status line displays the current version of the program. When you begin using Taurus Layout, other information appears on this line.

Mask Layers The Mask Layers list appears to the right of the main window and serves to label the polygons displayed in the central display area. The colors, patterns, and mask layer names are all user-changeable, as described in “In this section, you learn how to use Taurus Layout to make changes to the mask layer properties. Topics include:,” p.3-1. You may use the vertical scroll bar to scroll through the Mask Layers list.

Feature Definition

2-6 LO 2005.10

Draft 9/10/05

Taurus Layout Tutorial Understanding the Main Window

L

Understanding Mask, Structure, and IWB Modes

1. Click the Mask button to place Taurus Layout in Mask mode. Use this mode to prepare input files for:

❖ “Creating Files for TMA SUPREM-3, TSUPREM-4, and Taurus Li-thography and Taurus Topography 3D AAM,” p.4-1 explains the sig-nificance of .tl0, .tl1, and .tl2 files.

❖ When in Mask mode, the Mask Layer Properties window contains an Optical Properties panel (Figure 3-1, p. 3-3) enabling you to define the transmission and phase shift properties for layers and polygons. The transmission and phase shift are useful for Taurus-Lithography but are ignored by TMA SUPREM-3, TSUPREM-4, and Taurus-To-pography.

2. Click the Structure button to place Taurus Layout in Structure mode. Use this mode to create 2D and 3D structures for use with Raphael. To create struc-tures for Raphael-NES, Structure mode is used.

❖ When in Structure mode, the Mask Layer Properties window con-tains a Layer Properties panel (Figure 4-5, p. 4-12) in which you can define layer thickness and dielectric constant (for dielectric layers) or voltage level (for conducting layers). These properties are only useful when preparing structures for simulation with Raphael.

When you click to switch from Mask to Structure mode, a short explanation appears in the status line of the main window.

3. Click the IWB button to place Taurus Layout in IWB mode. Use this mode to create .tl2 files with Taurus-Lithography or Taurus-Topography 3D AAM for use with Synopsys TCAD’s Interconnect WorkBench product.

❖ When in IWB Mode, the Mask Layer Properties window contains an Optical Properties panel enabling you to define the transmission and phase shift properties for layers and polygons. Further, in the Layer Properties panel you can set additional layer properties, e.g., the ver-tical coordinates (Zmin, Zmax), dielectric constant (Eps), and sheet re-sistivity (Rho). The Polygon Properties window, invoked by executing Edit➔ Polygon Properties from the menu bar, allows you to assign names to each of the polygons.

Figure 2-3 Taurus Layoutmain window Mask, Structure, and IWB Mode buttons

File Name Program Name

.tl0 TMA SUPREM-3

.tl1 TSUPREM-4

.tl2 Taurus-Lithography and Taurus-Topogra-phy 3D AAM

O 2005.10 2-7

Draft 9/10/05


Understanding the Tools Icons

When you click a Tools icon, a short explanation appears in the status line at the bottom of the main window.

Figure 2-4 Taurus Layout main window Tools icons

Select Polygons

Pan Layout

Zoom Layout

Draw Rectangles

Draw Polygons

Simulation Point

Simulation Line

Simulation Rectangle

Connectivity Analysis

Extract Net Tool(For Raphael NES only)

Icon Function

Select Polygons Select and highlight any polygon appearing in the cen-tral display area of the main window. See “Editing Poly-gons,” p.3-18 for details.

Pan Layout Pan the layout. See “Panning,” p.2-17 for details.

Zoom Zoom in or zoom out of the layout. See “Zoom In and Zoom Out,” p.2-17.

Draw Rectangles Draw simple rectangles directly in Taurus Layout. See “Editing Polygons,” p.3-18 for details.

Draw Polygons Draw irregular polygons directly in Taurus Layout. See “Drawing Irregular Polygons,” p.3-18 for details.

2-8 LO 2005.10

Draft 9/10/05

Taurus Layout Tutorial Understanding the Main Window

LO 2

Sim. Point Define a simulation point and generate a .tl0 file for TMA SUPREM-3. The Define Simulation Point win-dow opens. See “Defining Simulation Point for TMA SUPREM-3,” p.4-2 for details.

❖ The selection of Mask vs. Structure mode is ignored when defining a simulation point. That is, the same .tl0 file is generated re-gardless of which mode is selected.

Sim. Line Define a simulation cut-line. The Define Simulation Cut-Line window opens.

❖ If you select Mask mode, Taurus Layout generates a .tl1 file for TSUPREM-4 when you click OK in the Define Simulation Cut-Line window. See “Defining Simulation Cut-Line for TSUPREM-4,” p.4-4 for de-tails.

❖ If you select Structure mode, Taurus Layout generates an .rc2 file for Raphael when you click OK in the Define Simulation Cut-Line window. The Side View window opens after you draw a cut-line. See “Preparing 2D Structure for Raphael,” p.4-10.

Sim. Rect Define a simulation rectangle. The Define Simulation Rectangle window opens.

❖ If you select Mask mode, Taurus Layout generates a .tl2 file for Taurus-Lithography and Taurus-Topography when you click OK in the Define Simulation Rectangle win-dow. See “Defining Simulation Rectangle for Taurus Lithography, Taurus Topography 3D,” p.4-6 for details.

❖ If you select Structure mode, Taurus Layout generates an .rc3 file for Raphael when you click OK in the Define Simulation Rectan-gle window. The Front & Side View win-dow opens after you draw a simulation rectangle. See“Preparing 3D Structure for Raphael,” p.4-17 for details.

ConnectivityAnalysis

Highlight polygons that are electrically connected. See “Performing Connectivity Analysis,” p.4-22 for details.

Extract Net Use to select the nets for capacitance extraction using Raphael-NES.

Icon Function

005.10 2-9

Draft 9/10/05


Note:If you have a Raphael-NES license, an extra tool is available in the Tool Palette called the Extract Net tool. This tool is used to extract the capaci-tance of the desired net from the layout. Refer to Section 1 of the Raphael-NES Manual for further details. This tool is disabled if you do not have a Raphael-NES license.

Loading and Examining a GDS File

Goals Learn how to:

• Load and display a GDS II Stream file

• Select a cell

• Understand the GDS File Information window

Context Taurus Layout has been started.

Example file s4ex4m.gds must be installed on your system.

• Taurus Layout examples subdirectory includes the GDS files s4ex4m.gds and bus.gds.

• File s4ex4m.gds is used with Example 4 from Chapter 5 of the TSUPREM-4 User Guide. See “Defining Simulation Cut-Line for TSUPREM-4,” p.4-4 for details.

• File bus.gds is used with Raphael. See “Performing Connectivity Analysis,” p.4-22 for details.

Loading a GDS File

1. Execute File➔ Load GDS from the main window Menu Bar.

Raphael NES

Figure 2-5 Extract Net tool available to Raphael-NES users

2-10 LO 2005.10

Draft 9/10/05

Taurus Layout Tutorial Loading and Examining a GDS File

Move the cursor to the File menu, then press and hold the MENU mouse but-ton to display the menu items. While continuing to hold the MENU mouse but-ton, drag the cursor down until the Load GDS menu item is highlighted, then release the mouse button.

Note:Throughout this tutorial, the shorthand convention “execute Menu➔ Item” means to use the MENU mouse button to select Item from Menu.

2. The Load GDS File browser window opens, as shown in Figure 2-6. Move the browser window to a different part of your screen, if you wish.

3. Use the browser to move to the examples directory that contains the file s4ex4m.gds.

You may change directories by typing a path in the Open: field of the browser and pressing Return, or double-click in the scrolling list of directory folders appearing in the left portion of the browser.

4. Scroll the list of files until the file s4ex4m.gds is in view, and open the file.

a. To open the file, click the SELECT once on the file name.

b. Clicking the Load GDS File browser OK button. You may also double-click the file name.

The list of files shows only those files that end with .gds. By convention, Taurus Layout assumes that all GDS files will end with .gds.

c. To open a GDS file that does not end with .gds, type the file name and click the OK button.

Figure 2-6 Load GDS File browser window

LO 2005.10 2-11

Draft 9/10/05


What if You receive an error message indicating that Taurus Layout was unable to load the file.

1. Make sure the file you are attempting to load is a binary GDS II Stream file. Taurus Layout can only accommodate the GDS II Stream format.

2. Make sure you are not attempting to load a .tl2 file as a GDS file.

Taurus Layout now displays TEXT records if they are present in a GDS II Stream file. However, Taurus Layout ignores the associated PRESENTATION record, and uses a default font to display all text. Also, the text is not included when polygons are saved to a GDS II or a .tl2 file.

Taurus Layout currently ignores the PATH and NODE GDS II Stream file for-mat record types.

Selecting a Cell for Expansion

1. If the GDS file you loaded in “Loading a GDS File,” p.2-10 contains only one cell, the cell is automatically expanded, and this task does not apply.

For example, the file s4ex4m.gds contains only one cell, so you may skip this task.

2. If the GDS file contains more than one cell, Taurus Layout opens a Cell List window enabling you to select the cell of interest.

This feature can be extremely useful when you load a large hierarchical GDS file containing hundreds of cells but are only interested in expanding (flatten-ing) one or two cells.

For example, the file bus.gds contains three cells: CONT, VIA, and new; if you load bus.gds, the Cell List window in Figure 2-7 opens.

3. The Cell List window (Figure 2-7) displays a list of cell names with informa-tion about the contents of the currently selected cell. The name of the “master

Figure 2-7 Cell List window

2-12 LO 2005.10

Draft 9/10/05


cell” (the topmost cell in the hierarchy) is always shown in the Master Cell field.

4. Scroll through the list of cells, as needed.

a. Select the cell that you wish to expand either by double-clicking the cell name.

b. Or click the cell name to select it and click the Expand button. Taurus Layout hierarchically expands the selected cell and displays the resulting layout.

5. To look at another cell, choose the Select Cell... menu item from the File menu in the main window. The Cell List window opens, allowing you to select a new cell.

6. To expand all cells in the entire GDS file, select the master cell for expansion.

a. Taurus Layout can accommodate hierarchical GDS II Stream files con-taining an unlimited number of polygons and up to 525 cells.

b. However, if you expand all cells in a large GDS file, it will consume large amounts of memory, and can exhaust your computer’s available swap space. To avoid this, only expand the cell(s) of interest.

c. Taurus Layout currently ignores the following GDS II Stream file format record types: PATH and NODE.

Understanding GDS File Information Window

After loading a GDS file (“Loading a GDS File,” p.2-10), or expanding a cell (“Selecting a Cell for Expansion,” p.2-12), the GDS File Information window opens, as shown in Figure 2-8. You may move the window to a different part of your screen.

LO 2005.10 2-13

Draft 9/10/05


The GDS File Information window contains useful information about the GDS file just loaded. You can view the portion of interest with the scroll bar on the right side of the window. Additionally, you can make the window wider or longer if you wish. Displayed lines are defined in the following list:

Figure 2-8 GDS File Information window

Path name and File nameVersion #Library name

Reading cell #

Cell statistics

Layer information

Text Lines Definition

First Two Show path name and file name of the file just loaded

Third Shows the version of the GDS II Stream file format standard used when the file was written.

Fourth Shows the library name assigned when the file was written. It is not necessarily the same as the file name. (You could, for example, use a UNIX command to rename the file. This would not affect the library name encoded into the file as part of the GDS file format.)

2-14 LO 2005.10

Draft 9/10/05


1. To close the GDS File Information window at any time, click the Close but-ton. The GDS File Information window disappears,without losing any of the information contained in it.

2. To make the window and its contents reappear, execute View➔ GDS File Info... from the main window Menu Bar.

a. If you load another GDS file, the information about the newly loaded GDS file is added to the end of the text already present in the GDS File Information window.

The GDS File Information window automatically reopens and scrolls so that the information about the new file is visible.

b. Use the scroll bar to view information about previously loaded files.

GDS II FileReading

Capability

Taurus Layout can process the PATH record in the GDS II file. However, PATH records with negative widths (which imply that the width of the path is absolute and not affected by magnification of any parent) are ignored.

Viewing the Mask Layout

After you execute the task described in “Understanding Mask, Structure, and IWB Modes,” p.2-7, the polygons contained in the GDS file appear in the central dis-play area of the Taurus Layout main window, as shown in Figure 2-9.

Fifth Beginning at line 5, Taurus Layout shows the names of the GDS cells being read, followed by a summary of cell statistics.

LAYERINFORMATION

For each GDS layer containing at least one polygon, the remaining lines of the GDS File Information window show the layer name, GDS layer number (by conven-tion numbered 0 through 63), the number of polygons on the layer, and the polygon numbers.

Text Lines Definition

LO 2005.10 2-15

Draft 9/10/05


The colors and patterns used to display polygons are assigned based on GDS layer numbers. All polygons present on GDS layer 0 are displayed using Taurus Lay-out’s default color and pattern for GDS layer 0 (shown in the Mask Layers list). All polygons on GDS layer 1 are drawn using the default color and pattern of layer 1. “Selecting Colors and Patterns,” p.3-6 shows you how to change the col-ors and patterns used for the GDS layers.

1. Move the cursor to the central display area of the main window. As you move the cursor over the displayed polygons, the Cursor Location field shows the X, Y coordinates of the cursor.

❖ The X and Y coordinates only take on certain discrete values, such as 2.400, 2.600, 2.800, and so on, because, by default, the cursor is “snapping to grid,” and there are five grid points per micron. “Chang-ing Taurus Layout’s Grid,” p.2-19 explains how to change these de-fault settings.

2. Refer to the Mask Layers list on the right side of the main window. Notice that Taurus Layout has automatically provided default layer names for those layers containing at least one polygon, and has moved those layers to the top of the list.

a. The default mask layer name for layers containing at least one polygon is “layer_<n>”, where <n> is the 0-63 GDS layer number.

Figure 2-9 Taurus Layout main window after loading file s4ex4m.gds

2-16 LO 2005.10

Draft 9/10/05

Taurus Layout Tutorial Changing the View of a Mask Layout

b. The default mask layer name for layers without polygons is “UNDEF_<n>”. These are referred to as undefined layers because they have no polygons and no user-defined name.

c. You may change the mask layer names described in “Changing Mask Layer Names,” p.3-1.

d. Once a name has been defined for a layer, Taurus Layout does not change the layer name when you load additional GDS files.

Changing the View of a Mask Layout

Goals Learn various aspects of viewing a mask layout, including zooming, panning, resetting the view, and changing the background color.

Context You have loaded a file or have drawn polygons in the central display area.

Panning

1. Click the Pan icon in the Taurus Layout main window to enter Pan mode.

2. Move the cursor to the central display area where the mask layout polygons are displayed. Press and hold the SELECT mouse button to display the “grab-ber hand;” drag or push the mask layout in the direction you want it to move and release the SELECT mouse button. The scroll bars automatically move to indicate the mask layout position within the scrolling area.

❖ You may notice that panning seems “sluggish” if the screen is display-ing many grid points. Panning is much faster if you turn off the display of grid points, or use fewer grid points per micron (“Changing Taurus Layout’s Grid,” p.2-19).

3. In addition to the grabber hand, you may pan the mask layout by using the horizontal or vertical scroll bars. Panning via scroll bars is available even when Taurus Layout is in Zoom mode.

Zoom In and Zoom Out

1. Click the Zoom icon in the Taurus Layout main window to enter Zoom mode.

In the following steps you will draw a zoom rectangle over the area of the mask layout that you want to zoom in on.

2. Move the cursor to any corner of the region of the mask layout you want to zoom in on.

3. Press and hold the SELECT mouse button.

LO 2005.10 2-17

Draft 9/10/05


4. Drag the mouse in any direction to draw a rectangle around the region of interest.

5. Release the SELECT button.

The central display updates to zoom in on the region you selected.

a. The zoom rectangle is drawn as you move the mouse. The Cursor Loca-tion field in the main window shows the cursor location as you draw. After you have defined the zoom rectangle, the Magnification field updates to show the new magnification factor.

b. The original aspect ratio of the display is always maintained during zoom operations. No matter what shape zoom rectangle is used, the same mag-nification is applied to both the X and Y dimensions of the display.

c. If you zoom the file s4ex4m.gds and use the default grid settings, the grid points are too dense to be displayed until you reach a magnification of approximately 1.5 or greater. Once you zoom to a magnification of 1.5 or greater, the grid points appear.

6. You may repeatedly zoom in on the GDS file to achieve higher magnifica-tions, although after several successive zooms, the status line in the main win-dow will eventually display the following message:

Unable to zoom to this magnification.

This is not an error condition. Taurus Layout is telling you that it cannot mag-nify the file to the requested level. Try drawing a larger zoom rectangle.

7. To zoom out the mask layout, click and release the SELECT mouse button anywhere in the central display area. The layout will be zoomed out by a mag-nification factor of 2.0.

What if The following message appears in the status line in the lower left corner of the main window:

The grid will not be drawn (grid points too dense).

This is not an error. The message explains that Taurus Layout will not draw the grid points because they would be too closely spaced. This message is discussed in more detail when you learn to change the grid properties (“Changing Taurus Layout’s Grid,” p.2-19).

Resetting the View

To restore the mask layout to its original magnification (1.000), execute View➔ Reset from the main window Menu Bar.

Viewing Polygon Outlines

Taurus Layout can display polygons with or without pattern-fill depending on your choice. By default, polygons are displayed with filled patterns. Execute

2-18 LO 2005.10

Draft 9/10/05

Taurus Layout Tutorial Changing Taurus Layout’s Grid

View➔ Outline Only if you wish to see only polygon outlines. Execute View➔ Outline Only again to restore pattern-fill mode.

Changing the Background Color

1. The default background color used in the main window central display area is white. To change to a black background, execute View➔ Invert Background from the main window Menu Bar.

2. To change back to a white background, execute View➔ Invert Background again.

Changing Taurus Layout’s Grid

Goals Learn how to use the Grid Properties window.

Context The file s4ex4m.gds has been loaded (“Loading and Examining a GDS File,” p.2-10).

1. Execute View➔ Reset from the Taurus Layout main window Menu Bar. This resets the view of the GDS file, restoring it to its original magnification.

2. Execute View➔ Grid... from the main window Menu Bar. The Grid Properties window opens with default properties as shown in Figure 2-10. You may move the Grid Properties window to a different part of your screen.

The depressed Show Grid button indicates that the grid points will be dis-played on screen if the grid points are not too dense (too closely spaced).

The depressed Snap to Grid button indicates that when you move the mouse in the central display area, the X,Y cursor location snaps to the nearest grid point, whether or not the grid points are visible on screen.

The Grid Points per Micron field specifies the number of grid points to be plotted per micron in the central display area. The default value is 5. The Min-imum Grid Spacing field has a default value of 10 pixels, meaning that grid points will be no closer than 10 pixels from each other. This value is usually appropriate and is not normally changed.

Figure 2-10 Grid Properties window

LO 2005.10 2-19

Draft 9/10/05


3. Occasionally you may see the following message in the status line of the main window:

The grid will not be drawn (grid points too dense).

This is not an error—the message means that at the current magnification (zoom) level, and with the specified number of grid points per micron, the grid points would be too densely packed if they were displayed on screen. The entire screen might consist of nothing but very closely-spaced grid points.

4. The grid points do not initially appear for the file s4ex4m.gds because the grid points are too dense. One way to make the grid points appear for this file is to reduce the number of grid points per micron, from 5 to 1.

a. To do this, move to the Grid Points per Micron field. Hold down the SELECT mouse button and move the I-beam cursor across the numeral 5 to highlight it and type the numeral 1. Click the Apply button at the bot-tom of the Grid Properties window to enter your choice.

b. If you click the OK button at the bottom of the Grid Properties window, the new number of grid points per micron are accepted; however, the Grid Properties window is closed and must be reopened.

c. Because you will be changing several grid properties during this task and do not want the window to close, use the Apply button. For more informa-tion, see "Mouse Button Conventions" in "About This Guide".

The grid points are drawn on screen. Also, the status line in the main window is blank.

5. Another way to make the grid points appear for the file s4ex4m.gds is to zoom the file.

a. Change the Grid Points per Micron field back to 5.

b. Click Apply to enter the new value. The grid points disappear.

c. Click the Zoom button in the Taurus Layout main window to place the main window in Zoom mode.

d. Draw a zoom rectangle from (0.000, 6.000) to (6.000, 0.000). (See “Zoom In and Zoom Out,” p.2-17 if you need help). The grid points appear. The Magnification field in the main window displays 2.420.

6. With the grid points visible in the main window, click the SELECT mouse button on the Show Grid button in the Grid Properties window. The button appears raised.

a. Click the Apply button to enter your choice. The grid points disappear.

b. To make the grid points reappear, click SELECT on the Show Grid button and click the Apply button.

7. To disable the “snap to grid” feature, click SELECT on the Snap to Grid but-ton. The button is raised.

a. Click the Apply button to enter your choice.

b. Move the cursor around in the main window central display area, and notice that the cursor location no longer snaps to the nearest grid point.

2-20 LO 2005.10

Draft 9/10/05

Taurus Layout Tutorial Scaling the Layout through the GUI

The Cursor Location field now displays fractional values such as (1.432, 2.578).

8. This completes the discussion of the Grid Properties window. However, if you plan to duplicate Example 4 from Chapter 5 of the TSUPREM-4 User Guide, draw the cut-line (“Defining Simulation Cut-Line for TSUPREM-4,” p.4-4) in exactly the correct place. To assist you in this, set the grid properties as follows:

a. Click both the Show Grid and Snap to Grid buttons to select the “show grid” and “snap to grid” modes of operation.

b. Set the Grid Points per Micron field to 5.

c. Set the Minimum Grid Spacing field to 10.

d. Be sure to click the Apply button to enter your choices.

Scaling the Layout through the GUIThe displayed layout can be scaled and offset in the X and Y directions by execut-ing Edit➔ Scale All Layers from the Menu Bar. This brings up a window in which the numeric values for X scale, X offset, Y scale, and Y offset can be specified.

Figure 2-11 illustrates the Scale All Layers window used to specify the scaling and the offset factor for all the polygons in the displayed layout.

For example, if X scale = 0.5, X offset = 0.0, Y scale = 0.5, Y offset = 0.0, all the polygons in the displayed layout will be scaled down by 50%. If the GDS II file is saved now, the scaled version of the layout is saved.

Note:Only the cell that is displayed is affected by the scaling. If a different cell is chosen by executing File➔ Select Cell, the scaling information is lost.

Figure 2-11 Scaling the polygons in the X and Y directions

LO 2005.10 2-21

Draft 9/10/05


Erasing an Entire Mask Layout

Goals Learn how to erase an entire mask layout (delete all polygons and reset all mask layer properties to their default values).


• Perform this task only if you wish to erase your entire mask layout at this time.

Note:If you wish to continue with the tutorial, skip this task.

• Execute File➔ New from the main window Menu Bar (not from the Mask Layer Properties window Menu Bar). All polygons disappear from the Tau-rus Layout main window, and all mask layer properties reset to default val-ues.

What if The mask layer names are reset, but polygons remain in the central display area.

• You may have executed File➔ New from the Mask Layer Properties window Menu Bar. This only resets the mask layer properties (layer name, color, pat-tern, and so on.).

• To completely clear a mask layout and remove all the polygons, you must exe-cute File➔ New from the main window Menu Bar.

Tagging Text to a Polygon

Goals Learn how to tag a text label to individual polygons in the mask layout.


You may tag a text label to individual polygon in Taurus Layout using the Poly-gon Properties window.

1. Execute Edit➔ Polygon Properties from the main window Menu Bar to open the Polygon Properties window.

2. Select the polygon that you want to tag text to using the select tool. The default name for that polygon appears in the Polygon Properties window.

3. Enter the new name in the cell titled Name and execute Apply or OK.

2-22 LO 2005.10

Draft 9/10/05

Taurus Layout Tutorial Printing a Mask Layout

Executing Cancel closes the window without changing the name of the poly-gon.

Printing a Mask Layout Taurus Layout now provides the facility to print a mask layout either to a printer or to a PostScript file.

Goals Learn how to print a mask layout either to a printer or to a PostScript file.

Context A layout is loaded or polygons are drawn.

Printing Layout to a Printer

1. Select File➔ Print... from the main window to open the Printer Setup win-dow. In this window you can set or change the following properties:

a. Printer name

b. Number of copies to be printed

c. Paper size

d. Orientation

Figure 2-12 Polygon Properties window to tag text to polygons

LO 2005.10 2-23

Draft 9/10/05


2. Enter the printer name, number of copies, and select the paper size and orien-tation.

3. Click the Print button to print the layout with the selected properties

4. If you do not want to print, click the Cancel button.

Note:Only the part of the layout that is visible in the display area is printed.

What If You receive the message

“Unable to Print. Check the Printer Options.”

Problem: You specified an unknown printer, or your system is not configured cor-rectly for the specified printer.

Solution: Specify a known printer or reconfigure system for specified printer.

Saving Layout to a PostScript File

1. Repeat steps 1 and 2 in “Printing Layout to a Printer,” p.2-23.

2. Select the Print To PostScript File check box.

3. Click the Print button. A File Chooser opens displaying all files in the cur-rent directory with an extension of .ps. The File Chooser also displays a default filename in which to save.

4. Use the File Chooser to select the path and filename.

Figure 2-13 Printer Setup window

2-24 LO 2005.10

Draft 9/10/05

Taurus Layout Tutorial Quitting Taurus Layout

5. Click the OK or Apply button to save the layout to the selected file in Post-Script format.

6. Click the Cancel button to cancel this operation.

Note:Only the part of the layout that is visible in the display area will be saved.

Quitting Taurus Layout

Goals Learn how to quit Taurus Layout.

Context Perform this task only if you wish to actually exit Taurus Layout at this time. If you wish to continue with the tutorial, skip this task.

1. Execute File➔ Quit from the main window Menu Bar. The Taurus Layout main window and any other Taurus Layout windows close.

2. If you changed any mask layer properties, the Quit confirmation window opens. Click the Yes button to quit.

Figure 2-14 Quit confirmation window

LO 2005.10 2-25

Draft 9/10/05


2-26 LO 2005.10

Draft 9/10/05

CHAPTER 3

L

Modifying Mask Layout3

In this section, you learn how to use Taurus Layout to make changes to the mask layer properties. Topics include:

• Changing Mask Layer Names

• Changing Layer Sequence

• Selecting Colors and Patterns

• Defining Layer Properties

• Defining Field and Optical Properties

• Saving Mask Layer Properties

• Loading Mask Layer Properties

• Resetting Mask Layer Properties

• Polygon Drawing and Editing

Changing Mask Layer Names

Goals Learn how to change the default mask layer names.

Context The file s4ex4m.gds has been loaded (see “Loading and Examining a GDS File,” p.2-10).

Note:Taurus Layout can read 1024 (0-1023) layers from the GDS II Stream file.

1. If the GDS File Information window is not visible, execute View➔ GDS File Info... to display the window.

O 2005.10 3-1

Draft 9/10/05

Modifying Mask Layout Taurus Layout Tutorial

a. Scroll to the bottom of the window to see the four lines of information about the four GDS layers that have polygons on them (see Figure 2-8,p. 2-14).

GDS layers 1, 2, 4, and 8 have polygons on them. The default layer names automatically assigned by Taurus Layout to these four layers are in the form of “layer_<n>”, where <n> is the 0-1023 GDS layer number. The default mask layer name for layers without any polygons is “UNDEF_<n>”. These are referred to as undefined layers because they have no polygons and no user-assigned name.

The goals in this task are to change the mask layer names as follows:

• Change “layer_1” to “Metal”

• Change “layer_2” to “Poly”

• Change “layer_4” to “Field”

• Change “layer_8” to “Contact”

Question: Why do you have to change the layer names at all?

Answer: Because the GDS II Stream file format does not allow the inclusion of ASCII layer names—just the 0-1023 mask layer numbers. So you have to pro-vide reasonable layer names using Taurus Layout.

Question: How do you know what the mask layers should be named?

Answer: Examine the information in the GDS File Information window. Notice how many polygons appear on each layer. Also, compare the colors and patterns used when the polygons are drawn in the central display area to the color/pattern squares appearing just to the left of the layer names in the Mask Layers list in the main window. Assign meaningful names based on the commands you will use in TMA SUPREM-3, TSUPREM-4, Taurus Lithogra-phy, Taurus Topograhy 3D AAM, or Raphael when referencing the layers.

3-2 LO 2005.10

Draft 9/10/05

Taurus Layout Tutorial Changing Mask Layer Names

2. The first layer name to change is “layer_1.” Double-click the name “layer_1” in the Mask Layers list (located on the right side of the Taurus Layout main window) to bring up the Mask Layer Properties window, as in Figure 3-1.

The different parts of the Mask Layer Properties window are explained dur-ing this and subsequent tasks.

3. To change the layer name, move to the Layer Name field in the General Properties panel. The Layer Name field shows the current name for this layer.

Notice that the cursor changes from an arrow to an I-beam in any editable field.

4. Hold down the SELECT mouse button and move the I-beam cursor across the name “layer_1” to highlight it and type “Metal.” The original layer name is deleted and replaced with “Metal.”

5. To enter this new layer name, click the Apply button at the bottom of the Mask Layer Properties window. As you do so, the list of mask layer names on the left side of the Mask Layer Properties window updates to reflect the new layer name.

a. The Mask Layers list on the right side of the Taurus Layout main win-dow also updates to reflect the new layer name; however, you should attend to the list of mask layer names appearing in the Mask Layer Prop-erties window.

b. If you click the OK button at the bottom of the Mask Layer Properties window, the new layer name is accepted.

c. However, the Mask Layer Properties window closes and must be opened again. Because you are working with several layers during this task, it is important to keep the window open. Use the Apply button instead, which

Figure 3-1 Mask Layer Properties window open in Mask mode

LO 2005.10 3-3

Draft 9/10/05


will not close the window. See “Understanding the Main Window,” p.2-6, for more information.

CAUTIONIf you forget to click Apply or OK after typing a new layer name, your changes will be ignored and lost if you close the window or move on to a new layer.

6. You have just changed “layer_1” to “Metal.” To change “layer_2” to “Poly,” move to the list of mask layer names on the left side of the Mask Layer Properties window.

a. Click the name “layer_2.” The Layer Name field in the General Proper-ties panel of the Mask Layer Properties window now displays “layer_2.” Also, the large color/pattern sample in the General Properties panel updates appropriately.

b. Change the layer name to “Poly” and click the Apply button.

7. Repeat Steps 3–6 to change “layer_4” to “Field” and change “layer_8” to “Contact”.

8. Click the layer name “Metal” in the list of mask layer names on the left side of the Mask Layer Properties window. The status line in the Taurus Layout main window displays the following:

Metal (GDS #1) contains 2 polygons: 0 1

Repeat for the Poly, Field, and Contact layers, observing the status line con-tents. This is a useful method for finding information about a GDS layer.

❖ Whenever you click a layer name in the list of mask layer names in the Mask Layer Properties window, the status line in the main window displays the layer name, GDS layer number, and the number of poly-gons on the layer, followed by the actual polygon numbers. Polygon numbers start at 0.

❖ Once you define new layer names for all four GDS layers that con-tained polygons, and if you reload the file s4ex4m.gds, the last four lines of the GDS File Information window use the new layer names (instead of the default layer names shown in Figure 2-8).

Changing Layer Sequence

Goals Learn how to change the sequence of the mask layers. This affects the order in which the layer names appear in lists and the display of polygons in the central display area of the Taurus Layout main window.

Context The file s4ex4m.gds has been loaded (see “Loading and Examining a GDS File,” p.2-10).

3-4 LO 2005.10

Draft 9/10/05

Taurus Layout Tutorial Changing Layer Sequence

The Mask Layer Properties window is visible, Figure 3-1.

Four new layer names have been entered and appear in the list of mask layer names on the left side of the Mask Layer Properties window as follows:

MetalPolyFieldContactUNDEF_0UNDEF_3...

1. To change the layer sequence, click the name of a layer and then click one of the Move Layer buttons. For example, to move the Contact layer to the top, click the “Contact” layer name in the Mask Layer Properties window, then click the Top button in the Move Layer panel of the Mask Layer Properties window.

The Contact layer’s two polygons now appear on top in the central display area of the main window. Also, the list of mask layer names now appears as follows in the Mask Layer Properties window (as well as in the main win-dow):

ContactMetalPolyField...

This is the desired sequence.

2. To experiment with additional sequence changes, click the layer name “Field,” then click the Up button. This moves the Field layer up one place in the layer sequence. Also, the Field layer polygons now appear on top of the Poly layer polygon in the central display area.

3. To restore the Field layer to its position below the Poly layer, click the Down button.

You may wish to experiment further with the Top, Up, Down, and Bottom buttons. These buttons make it easy to change the layer sequence to any sequence you desire.

a. While the layer sequence is easy to change, there are always 64 GDS lay-ers. This is specified by the GDS II Stream file format specification. Tau-rus Layout makes no provision for “deleting” unused GDS layers.

b. There is no special requirement that the unused layers be moved to the bottom of the stack, or that the unused layers be kept in ascending sequen-tial order. However, certain layer sequences may make it easier for you to view the polygons in the central display area of the main window.

LO 2005.10 3-5

Draft 9/10/05


Ignoring Layers

Goals Learn how to ignore layers.

Context The file s4ex4m.gds has been loaded.

This feature is useful when you have loaded a mask layout containing many lay-ers, but here you are only interested in some of the layers and wish to ignore all others.

1. To ignore all the polygons on a given layer, select the desired layer (click the layer name in the list on the left side of the Mask Layer Properties window), and click the Ignore Layer button.

a. Click the button again to restore the layer.

The names of ignored layers are shaded in the mask layer lists appearing in the Mask Layer Properties window and in the Taurus Layout main window.

The polygons on ignored layers are invisible, and are not included in any files that are subsequently written, such as .tl0 files, .tl1 files, .rc2 files and so on.

2. To ignore all layers, execute View➔ Ignore All Layers from the Mask Layer Properties window Menu Bar.

3. To show (restore) all layers, execute View➔ Show All Layers.

4. If you have a layout with many layers, and you wish to view a single layer, the easiest method is to execute View➔ Ignore All Layers.

a. Click the name of the desired layer.

b. To restore (show) the layerlick the Ignore Layer checkbox .

Selecting Colors and Patterns

Goals Learn how to select the colors and patterns used when displaying polygons in the central display area of the Taurus Layout main window.

Context The file s4ex4m.gds has been loaded.

The Mask Layer Properties window is visible.

Four new layer names have been defined.

The layers have been placed in the desired sequence.

3-6 LO 2005.10

Draft 9/10/05

Taurus Layout Tutorial Selecting Colors and Patterns

1. Click the Edit Color & Pattern... button (see Figure 3-1) to open the Color & Pattern Selection window, as shown in Figure 3-2.

The Color squares present 32 predefined color choices. You may choose any of these colors, but you cannot modify them or define new ones.

a. The top row of eight colors represents the ROYGBIV colors of the spec-trum (Red, Orange, Yellow, Green, Blue, Indigo, and Violet) plus gray. This row has the most useful colors. The colors in columns beneath each of the ROYGBIV colors provide various shades. That is, the first column consists of various Reds; the second column consists of various Oranges, and so on.

b. The Pattern squares present 32 predefined pattern choices. You may choose any of these patterns, but you cannot modify them or define new ones.

c. The top row contains the patterns you use the most frequently.

2. Click the name “Contact” in the list of layers in the Mask Layer Properties window to specify that you want to change the Contact layer color and pat-tern.

The Layer field in the Color & Pattern Selection window shows the layer name and GDS layer number of the selected layer.

Also, the small color/pattern sample near the bottom of the Color & Pattern Selection window changes to show the current color and pattern of the selected layer.

a. Make sure the central display area of the main window is visible so that you can watch as the color and pattern of the Contact layer polygons change.

3. Move to the Color squares. Click the lower right color square (solid black).

The new color (black) immediately appears in the small color/pattern sample near the bottom of the Color & Pattern Selection window, yet the polygons in the main window central display area remain unchanged. This allows you

Figure 3-2 Color & Pattern Selection window

LO 2005.10 3-7

Draft 9/10/05


to experiment with different color and pattern combinations in the Color & Pattern Selection window before applying them to the actual mask layout.

4. Click the Apply button at the bottom of the Color & Pattern Selection win-dow to tell Taurus Layout to use this color and pattern selection when display-ing polygons on the Contact layer.

a. At the moment you click Apply, the affected polygons in the main win-dow central display area change to the appropriate color.

b. When you click Apply, various other occurrences of the color and pattern combination are also updated, including the lists of mask layers in the main window and the Mask Layer Properties window, as well as the color/pattern sample in the Mask Layer Properties window.

5. Move to the Pattern squares. Click the upper right pattern square (solid black), then click Apply. The two contact polygons in the main window now appear solid black.

In the Color squares, the solid black square indicates the color “black,” which can be used with any of the 32 Pattern squares. However, in the Pattern squares, the solid black square indicates that no pattern is to be used; rather, a solid color is displayed (whichever color was selected from the Color squares).

The black color combined with the solid pattern results in solid black poly-gons that are indistinguishable from a black background unless they lie on top of some nonsolid black polygons.

In the Pattern squares, the solid white square just to the left of the solid black square indicates that a simple outline is to be used. The outline is drawn using whichever color was selected from the Color squares.

What If You cannot see the two solid black polygons on the Contact layer, or they do not appear solid black.

Problem: Most likely, the Contact layer is not at the top of the layer stack. Per-form “Changing Layer Sequence,” p.3-4, Step 1 to move the Contact layer to the top.

Solution: Experiment with various colors and patterns for the remaining layers (Metal, Poly, and Field). Try using both a black background and a white back-ground. See “Changing the Background Color,” p.2-19.

Defining Layer Properties

Goals Learn how to change the layer properties related to layout.

Context The file s4ex4m.gds is loaded.


3-8 LO 2005.10

Draft 9/10/05

Taurus Layout Tutorial Defining Layer Properties

L

Taurus Layout must be in Structure mode, not in Mask mode.

Four new layer names were defined

The layers are in desired sequence:

• For each of the layers, the thickness can be entered in the Thickness field of the Layer Properties panel. For dielectrics, the thickness entered is the inter-metal dielectric thickness.

• If a GDS II layer contains polygons then it is considered as a conductor (it can be a contact or via too).

• Therefore, the Dielectric field is enabled only for layers with no polygon present in them. A via/contact layer (identified by the keyword “via” or “cont” as its name, would have the Thickness and the Dielectric constant fields dis-abled.

• The Volt field is enabled only for conducting layers. Figure 3-3 illustrates the Mask Layer Properties window in the Structure mode for defining the layer properties.

Figure 3-3 Mask Layer Properties window open in the Structure mode

O 2005.10 3-9

Draft 9/10/05


Defining Field and Optical Properties

Goals Learn how to change the field and optical properties for a layer.



Taurus Layout must be in Mask mode, not in Structure mode.

Four new layer names were defined.

The layers are in the desired sequence.

The Clear and Opaque buttons in the General Properties panel of the Mask Layer Properties window are used to specify that a particular layer has a clear field or an opaque field.

• Users may be familiar with the terms “bright field” and “dark field.” These terms are synonymous with “clear field” and “opaque field” (respectively).

• The default setting for all layers is “clear field.”

The terms “clear” and “opaque” apply to the layer’s field, not the polygons.

• If you select Clear, the layer is assumed to be clear everywhere, except where polygons appear. Polygons on a clear layer are interpreted by Synopsys TCADsimulation programs as opaque regions on an otherwise clear layer (see the left side of Figure 3-4).

• If you select Opaque, the layer is assumed to be opaque everywhere, except where polygons appear. Polygons on an opaque layer are interpreted as clear openings in an otherwise opaque layer (see the right side of Figure 3-4).

1. If you plan to duplicate the results of Example 4, discussed in Chapter 5 of the TSUPREM-4 User Guide, you need to change the Contact layer field to opaque.

Figure 3-4 Polygons on a Clear field are opaque; Polygons on an Opaque field represent clear openings

Opaque field

(polygon is opaque)

Clear field

(polygon is a clear opening

3-10 LO 2005.10

Draft 9/10/05

Taurus Layout Tutorial Defining Field and Optical Properties

a. To do this, click the “Contact” layer name in the Mask Layer Properties window. The Layer Name field in the General Properties panel updates to show the name “Contact.”

b. Click SELECT on the Opaque button, and click the Apply button to enter your choice.

Leave the other layers (Metal, Poly, and Field) with the default clear field.

2. The Transmission and Phase Shift fields in the Optical Properties panel of the Mask Layer Properties window are used to specify the optical properties of the polygons drawn on a layer and the optical properties of a layer’s field.

a. The transmission and phase shift specified for a layer affect all the poly-gons appearing on that layer. The current version of Taurus Layout does not allow the specification of different optical properties for different polygons appearing on a single layer.

b. The default value for transmission is 1.0 (complete transmission). The default value for phase shift is 0 degrees (no phase shifting occurs).

c. The only Synopsys TCAD simulation program that currently uses the transmission and phase shift values is Depict. Other programs such as TMA TSUPREM-3 and TSUPREM-4 ignore these values.

3. To change the transmission or phase shift values, move to the Transmission or Phase Shift field.

a. Hold down the SELECT mouse button and move the I-beam cursor across the field value to highlight it, and then type the new value.

b. Be sure to click the Apply button to enter your choice.

Figure 3-5 Mask Layer Properties window after changes to the Contact layer

LO 2005.10 3-11

Draft 9/10/05


Since TSUPREM-4 ignores the transmission or phase shift values, no changes to transmission or phase shift values are necessary to duplicate the results of Example 4, discussed in Chapter 5 of the TSUPREM-4 User Guide.

What If You cannot locate the Optical Properties panel or the Transmission and Phase Shift fields in the Mask Layer Properties window.

1. Make sure that Taurus Layout is in Mask mode, not Structure mode.

2. Click the Mask button in the Taurus Layout main window.

3. See “Understanding Mask, Structure, and IWB Modes,” p.2-7 for details.

Defining Additional Mask Layer Properties in IWB Mode

Goals Learn how to define mask layer properties in the IWB mode.



must be in IWB mode, not in Mask or Structure mode.

Four new layer names were defined.

The layers are in the desired sequence.

In addition to properties available in the Mask mode, four additional fields are dis-played in the Mask Layer Properties window as shown in Figure 3-6.

• The Zmin and Zmax determine the vertical coordinates of the layer. The thickness of the layer is calculated by Zmax - Zmin value.

• The Eps value specifies the dielectric constant if the layer is a dielectric

3-12 LO 2005.10

Draft 9/10/05

Taurus Layout Tutorial Saving Mask Layer Properties

• The Rho value specifies the bulk resistivity (in ohm * meter) of the layer if it is a conducting layer.

Saving Mask Layer Properties

Goals Learn how to save the mask layer properties you have defined (layer names, sequence, colors, patterns, optical properties, etc.) to an MLP file.

Context You loaded a file or have drawn polygons in the central display area.

You defined new mask layer properties that you wish to save.


1. Execute File➔ Save As... from the Mask Layer Properties window Menu Bar to display the Save MLP File browser.

Mask Layer Properties files are assumed to have a file extension of .mlp and are referred to as MLP files.

Figure 3-6 Mask Layer Properties window in IWB mode

LO 2005.10 3-13

Draft 9/10/05


2. The Save MLP File browser window opens as shown in Figure 3-7. You may move the browser window to any part of your screen.

3. Use the browser to change directories (if desired) and to specify an MLP file name. If you have not loaded or saved any files yet, the default MLP file name will be myfile.mlp. If you have already loaded a file (e.g., s4ex4m.gds), the default file name will be the root of the file name previously loaded (s4ex4m), with the .mlp extension added (s4ex4m.mlp).

a. When specifying a new MLP file name, you may double-click the root portion of the file name (s4ex4m). This will highlight the root but does not highlight the .mlp file extension. Pressing any key will erase the root name and replace it with the new name you have begun to type, without disturbing the .mlp extension.

b. Alternatively, you may single-click one of the file names appearing in the list of files. The file name you click becomes the name of the saved file.

4. Click the Save MLP File browser Save button to save the MLP file. The sta-tus line in the main window displays:

MLP file saved: <your_path>/<your_name.mlp>.

This confirms the path and name of the MLP file just saved.

5. If you make additional changes to the mask layer properties and wish to save these to an MLP file using the same path and file name used in Steps 3 and 4, you may execute File➔ Save from the Mask Layer Properties window Menu Bar. This saves the MLP file without bringing up the Save MLP File browser.

6. If you wish to save the additional changes in an MLP file under a different directory or a different file name, execute File➔ Save As... rather than File➔ Save.

Figure 3-7 Save MLP File browser

3-14 LO 2005.10

Draft 9/10/05

Taurus Layout Tutorial Loading Mask Layer Properties

Loading Mask Layer Properties

Goals Learn to restore previously saved mask layer properties by loading an MLP file.

Context A file or drawn polygons are loaded in the central display area.


You previously saved mask layer properties to an MLP file.

1. Execute File➔ Load... from the Mask Layer Properties window Menu Bar. to open the Load MLP File browser.

The Load MLP File browser is similar to the browser appearing in Figure 3-7, except that in this case you are loading an MLP file, not saving one.

2. Use the browser to change directories (if desired) and to select and load an MLP file.

a. Loading an MLP file is very similar to loading a GDS file. See “Loading a GDS File,” p.2-10 for details.

b. After loading the file, the status line in the main window displays:

MLP file loaded: <your_path>/<your_name.mlp>.

This confirms the path and name of the MLP file just loaded.

3. After the MLP file has been loaded, the polygons in the Taurus Layout main window central display area will automatically be redrawn using the new col-ors, patterns, and layer sequence just read from the MLP file.

Resetting Mask Layer Properties

Goals Learn how to reset mask layer properties to their default values.

Context A file or drawn polygons are loaded in the central display area.


You modified the default mask layer properties, either by changing the properties manually or by loading an MLP file.

1. To reset all mask layer properties to their default values, execute File➔ New from the Mask Layer Properties window Menu Bar.

LO 2005.10 3-15

Draft 9/10/05


What If You receive a window containing an error message as follows:

Changes to mask layerproperties since the last “Save”or “Save As” command will be lost if you execute the “New”command.

OK to proceed?

The message is a warning that any changes you made to layer names, colors, or patterns since the last time you saved an MLP file (by executing File➔ Save or File➔ Save As...) will be lost if you proceed.

1. If you want to cancel the File➔ New command to avoid losing your changes, click the Cancel button in the window.

a. If you wish to proceed anyway, click the OK button in the window.

2. To reset the mask layer properties for a single layer, click the layer name appearing in the list in the Mask Layer Properties window.

a. Execute Edit➔ Reset Layer from the Mask Layer Properties window Menu Bar.

b. You should see the layer name reset to “UNDEF_<n>”, where <n> is the 0-63 GDS layer number. You should also see the layer color, pattern, and other properties reset to default values.

What If The layer name does not change to “UNDEF_<n>”.

If you were in Structure mode and were defining a simulation cut-line or a simula-tion rectangle when you reset the mask layer properties (for a single layer or for all layers) Taurus Layout may automatically reassign a name to the reset layers.

To prevent the automatic renaming, exit the “Structure/Simulation Cut-Line” or “Structure/Simulation Rectangle” combination. To exit, you may

1. Click the Mask button in the Taurus Layout main window, or

2. Click the Cancel button in the Define Simulation Cut-Line or DefineSimulation Rectangle window, or

3. Click the Pan or Zoom icons in the Taurus Layout main window.

Now if the mask layer properties are reset, the layer names are not renamed auto-matically.

Polygon Drawing and EditingIn the following sections, you will learn how to draw and edit rectangles or irregu-lar polygons directly in Taurus Layout. This will enable you to prepare simple mask layouts without using a layout editor or loading previously prepared GDS II Stream files.

3-16 LO 2005.10

Draft 9/10/05

Taurus Layout Tutorial Polygon Drawing and Editing

Topics include:

• Drawing Rectangles

• Drawing Irregular Polygons

• Editing Polygons

• Saving and Loading Polygons

• Saving Polygons to a GDS II Stream File

• Saving Polygons in a .tl2 File

• Loading Polygons from a .tl2 File

Drawing Rectangles

Goals Learn how to draw rectangles directly in Taurus Layout.

Context The Taurus Layout main window appears on screen.

In Taurus Layout, rectangles are drawn differently than irregular polygons. In all other processes rectangles and irregular polygons are treated in the same way.

1. Click the Draw Rectangles icon in the Taurus Layout main window.

2. To select the layer on which you wish to draw a rectangle, click the desired layer name in the Mask Layers list.

a. When you double-click a layer name in the Mask Layers list, the Mask Layer Properties window automatically opens (Figure 3-1).

b. You may click on either the list of mask layers appearing in the main win-dow or in the Mask Layer Properties window.

3. Change to the central display area of the main window.

a. Press and hold the SELECT mouse button. Drag the mouse in any direc-tion to create a rectangle and release the button.

The status line in the main window shows the polygon number and the GDS layer on which it was drawn.

b. The rectangle appears drawn with the color and pattern used for that layer. To change the color and pattern, click the Edit Color & Pattern... button in the Mask Layer Properties window. See“Selecting Colors and Patterns,” p.3-6 for details.

4. Draw as many rectangles as you wish on this layer. Repeat Steps 2 and 3 to draw rectangles on other layers.

LO 2005.10 3-17

Draft 9/10/05


Drawing Irregular Polygons

Goals Learn how to draw irregular polygons directly in Taurus Layout.


1. Click the Draw Polygons icon in the Taurus Layout main window.

2. To select the layer on which you wish to draw an irregular polygon, click the desired layer name in the Mask Layers list.

a. When you double-click a layer name in the Mask Layers list, the Mask Layer Properties window automatically opens (Figure 3-1).

3. To draw a polygon, move to the central display area of the main window.

4. Click the SELECT mouse button and a dot appears.

5. Move to another point in the main window, and click the SELECT mouse but-ton again. Another dot appears and Taurus Layout connects the dots with a line.

6. Continue defining as many vertices (dots) as you wish.

7. Press the Del key to delete the most recent dot.

8. Double-click (or press the Esc key) to end. TTaurus Layout automatically joins the first and last dots.

a. The status line in the main window shows the polygon number and the GDS layer on which it was drawn. The polygon will appear drawn with the color and pattern used for that layer. To change the color and pattern, click the Edit Color & Pattern... button in the Mask Layer Properties window. See“Selecting Colors and Patterns,” p.3-6 for details.

9. Draw as many polygons as you wish on this layer. Repeat Steps 2 through 8 above to draw polygons on other layers.

Editing Polygons

Goals Learn how to edit polygons directly in Taurus Layout.


The polygon editing functions available in the current version of Taurus Layout are:

• Select

• Delete

3-18 LO 2005.10

Draft 9/10/05


• Undelete (an “undo” of the most recent polygon deletion)

Note:You may not stretch or reposition polygons at this time. You may not add, delete, or move vertices at this time.

1. Click the Select icon in the Taurus Layout main window.

2. Move the cursor to the desired polygon in the central display area of the main window, then click and release the SELECT mouse button. The selected poly-gon is highlighted.

a. The status line displays the polygon number and the layer on which it is drawn.

b. If more than one polygon is present at the location you clicked, one of the polygons are highlighted and the status line shows how many polygons overlap at this point. If you click again at the same point, a different over-lapping polygon will be selected. By repeatedly clicking at the same point, you can unambiguously select a specific polygon.

c. Note that the selection point does not snap to the nearest grid point when you click to select a polygon, even if the Snap to Grid button is selected in the Grid Properties window. See “Changing Taurus Layout’s Grid,” p.2-19 for details.

d. You may not select more than one polygon at a time in this mode.

3. Once a polygon has been selected, you may delete the polygon by executing Edit➔ Delete Polygon from the main window Menu Bar.

This choice is not available under the Edit menu until you have selected a polygon.

Note:You may not delete more than one polygon at a time; however, you may find that keyboard shortcuts can speed up your work considerably where you want to delete several polygons.

a. Select a polygon, then without moving the mouse, press Alt-E keys to dis-play the Edit menu.

b. Release the Alt key, then press D to delete the selected polygon.

c. Move and click the mouse on the next polygon to be deleted, and repeat the Alt-E, D keyboard sequence.

4. Once a polygon has been deleted, you may undelete the polygon by executing Edit➔ Undelete Polygon from the main window Menu Bar.

This choice is not available under the Edit menu until you have deleted a poly-gon.

This choice is unavailable after you click the Draw Rectangle, Draw Polygon, Sim. Point, Sim. Line, Sim. Rectangle, or Connectivity Analysis icons. The same effect occurs if you exit and then re-enter Select Polygons

LO 2005.10 3-19

Draft 9/10/05


mode. This means that if you delete a polygon, you lose the option of undelete it after clicking any of those buttons.

Note:Only a single polygon is saved in the “delete buffer.” This means that if you perform the select and delete operations successively on three poly-gons, then decide to undelete, you can only restore the most recently deleted polygon. The first two polygons are lost.

Saving and Loading Polygons

Goals Learn how to save and load a mask layout’s polygons and layer properties using the GDS II and .tl2 file formats.

Context The Taurus Layout main window is open on screen.

You have loaded a file or have drawn polygons in the central display area.

Note:Taurus Layout does not preserve any hierarchical information that may have been present in the layout from a previously read GDS file when saving polygons either to a GDS or .tl2 file.

Saving Polygons to a GDS II Stream File

1. Execute File➔ Save GDS... from the Taurus Layout main window Menu Bar. Choose a file name from the browser.

2. Click OK on the browser.

The polygons appearing on the Taurus Layout main window are saved in a GDS-II Stream file format.

Note:This action only writes a nonhierarchical (flat) GDS file. Also, only the polygon information is written out to the GDS file. Any other informa-tion, either loaded from a file, or added by Taurus Layout (e.g., color, pattern, layer name, or sequence) will not be written out. To preserve all this information, save the layout to a .tl2 file (as described below).

Text Informationin GDS II Files

Text information is saved into the GDS II files when you execute File➔ Save GDS File from the Menu Bar.

3-20 LO 2005.10

Draft 9/10/05


Note:The transformations for the text is not saved into the GDS II file. This implies that the saved GDS II file would not contain the transformations performed on the text (rotation and magnification).

Saving Polygons in a .tl2 File

This task explains how to save polygons using the .tl2 file format. The .tl2 file for-mat is more typically used for creating simulation files to be read by Taurus-Lithography or Taurus-Topography 3D (see “Defining Simulation Rectangle for Taurus Lithography, Taurus Topography 3D,” p.4-6). However, because Taurus Layout can read and write the .tl2 file format, it can be used for saving and loading mask layouts (including user-drawn polygons).

• Unlike the GDS II Stream file format, the .tl2 file format includes all user-defined mask layer properties: layer name, color, pattern, sequence, and so on. Additionally, when saving a .tl2 file, you may define a rectangular subregion of interest and save only a selected portion of the entire mask layout.

Taurus Layout’s ability to save and load subsets of a mask layout can be very use-ful. For example, you could load a large GDS file containing hundreds or thou-sands of polygons into Taurus Layout; define the mask layer properties; save a subregion to a .tl2 file; and load the just-saved .tl2 file (typically containing far fewer polygons than the original GDS file). The smaller .tl2 file results in faster display refreshing and speedier calculations within Taurus Layout.

Note:You must use Mask mode or IWB mode (not Structure mode) when sav-ing polygons in a .tl2 file. See “Understanding Mask, Structure, and IWB Modes,” p.2-7 for details. .tl2 files saved in the IWB mode have additional properties (Zmin, Zmax, eps, rho and polygon name) saved which are applicable to TCAD’s IWB product and Taurus Topography-Raphael interface.

You start this task one of two ways; either execute Steps 1-2 or Step 3.

1. Click the Mask or IWB button in the Taurus Layout main window to place Taurus Layout in Mask mode.

2. Click the Sim. Rect icon in the main window to open the Define Simulation Rectangle window. This window is similar to the window shown in Figure 4-1 and is discussed in “Defining Simulation Point for TMA SUPREM-3,” p.4-2.

or

3. Execute File➔ Save Layout To .tl2 from the Taurus Layout main window Menu Bar. This causes Steps 1-2 above to be completed automatically.

Proceed with Step 4.

LO 2005.10 3-21

Draft 9/10/05


4. Decide on a file name. A default file name appears in the Save to File field.

For help in changing the path and file name, see “Defining Simulation Cut-Line for TSUPREM-4,” p.4-4, Step 3.

5. Draw a simulation rectangle around the rectangular subregion of interest.

To define the simulation rectangle:

a. Change to the central display area of the main window.

b. Press and hold the SELECT mouse button to place one corner of the sim-ulation rectangle.

c. Drag the mouse any direction to define the simulation rectangle. The sim-ulation rectangle must encompass at least one vertex (corner) of each polygon you want to save.

d. To save all polygons in a mask layout, draw a simulation rectangle large enough to encompass all the polygons in the layout.

e. Release the SELECT mouse button.

If “snap to grid” is in effect, the cross hairs snap to the nearest grid point, even if the grid points are not currently displayed. See “Changing Taurus Layout’s Grid,” p.2-19 for more information.

• When you release the mouse button, any polygon with at least one ver-tex (corner) contained by the simulation rectangle is highlighted for in-clusion in the .tl2 file. The status line at the bottom of the main window displays the number of polygons selected, along with the indi-vidual polygon numbers.

• Only those polygons with an actual vertex contained by the simulation rectangle is selected. This means that a long thin vertical polygon with four corners would not be selected by a small simulation rectangle drawn near the middle of the polygon. Step 6 below explains how to include such a polygon.

6. To change the set of polygons selected, either:

a. Redraw the simulation rectangle

or

b. Click the SELECT mouse button on individual polygons (even those not contained by the simulation rectangle) to toggle their selected/unselected status.

• If several polygons overlap at the point you clicked, the selected/unse-lected status of all polygons at that point will toggle—that is, polygons that were selected will be unselected, and vice versa.

7. Now that the simulation rectangle has been defined, you may click the OK button in the Define Simulation Rectangle window. The Define Simulation Rectangle window closes, and the .tl2 file is automatically written. The status line in the main window displays:

File <your_path>/<your_file.tl2> has been written.

This confirms the path and name of the .tl2 file just written.

3-22 LO 2005.10

Draft 9/10/05


• You may now load the .tl2 file into Taurus Layout. See “Loading Polygons from a .tl2 File,” p.3-23. Alternatively, the .tl2 file may be passed to Depict for analysis.

What If You want to change the location of the simulation rectangle.

1. If you have not clicked the OK button in the Define Simulation Rectangle window, you can define a new simulation rectangle by drawing another simu-lation rectangle at the desired new location (“Saving Polygons in a .tl2 File,” p.3-21, Step 5 ). The previous simulation rectangle will disappear. Make sure all the desired polygons are highlighted (“Saving Polygons in a .tl2 File,” p.3-21, Step 6).

If you have already clicked the OK button, you have to start again from “Saving Polygons in a .tl2 File,” p.3-21, Step 3.

Loading Polygons from a .tl2 File

1. Click the Mask button in the main window to place Taurus Layout in Mask mode.

2. Execute File➔ Load TL2... from the main window Menu Bar.

3. Use the resulting file browser window to specify the directory and file name of the .tl2 file, just as you did when you loaded a GDS file in “Loading a GDS File,” p.2-10.

Note:You may not load a GDS file from the .tl2 file browser.

Similarly, you may not load a .tl2 file from the GDS file browser.

When the .tl2 file is loaded, the mask layer properties are automatically updated.

What If You want to remove the simulation rectangle.

The simulation rectangle’s size and location are contained in the .tl2 file and are automatically displayed when you load a .tl2 file.

1. To remove the simulation rectangle, click the Simulation Rectangle button in the main window.

2. Click the Cancel button in the resulting Define Simulation Rectangle win-dow.

LO 2005.10 3-23

Draft 9/10/05


3-24 LO 2005.10

Draft 9/10/05

CHAPTER 4

L

Creating Files for TCAD Simulators4

This chapter is divided into two sections to reflect the two major modes of Taurus Layout operation:

• Creating Files for TMA SUPREM-3, TSUPREM-4, and Taurus Lithography and Taurus-Topography 3D AAM

• Creating 2D and 3D structures that Raphael can use for interconnect analysis

Creating Files for TMA SUPREM-3, TSUPREM-4, and Taurus Lithography and Taurus Topography 3D AAM

When Taurus Layout is in Mask mode, you can create files that can be read by TMA SUPREM-3, TSUPREM-4, Taurus Lithography, and Taurus Topography.

Topics include:

• Defining a simulation point (and generating a .tl0 file for TMA SUPREM-3)

• Defining a simulation cut-line (and generating a .tl1 file for TSUPREM-4)

• Defining a simulation rectangle (and generating a .tl2 file for Taurus Lithogra-phy and Taurus Topography 3D)

Note:You must use Mask mode, not Structure mode, when creating files for TMA SUPREM-3, TSUPREM-4, Taurus Lithography, or Taurus Topog-raphy 3D AAM. See “Understanding Mask, Structure, and IWB Modes,” p. 2-7 for details.

O 2005.10 4-1

Draft 9/10/05

Creating Files for TCAD Simulators Taurus Layout Tutorial

• Click the Mask button to place Taurus Layout in Mask mode. Use this mode to prepare input files for:

• “Creating Files for TMA SUPREM-3, TSUPREM-4, and Taurus Lithography and Taurus Topography 3D AAM,” p. 4-1 explains the significance of .tl0, .tl1, and .tl2 files.

• When in Mask mode, the Mask Layer Properties window contains anOptical Properties panel (Figure 3-1, p. 3-3) enabling you to define the trans-mission and phase shift properties for layers and polygons. The transmission and phase shift are useful for Taurus-Lithography but are ignored by TMA SUPREM-3, TSUPREM-4, and Taurus Topography.

Files with a file name extension of .tl0, .tl1, or .tl2 are Taurus Layout files. The 0, 1, or 2 in the extension refers to the dimensionality of the data associated with the file. Because a mathematical point has no length or width, it is a zero-dimensional object. Accordingly, the extension “.tl0” is used. Similarly, a line is a one-dimen-sional object, and a rectangle is a two-dimensional object, so the extensions “.tl1” and “.tl2” are used.

Instructions explaining how to use the .tl0, .tl1, and .tl2 files with TMA SUPREM-3, TSUPREM-4, Taurus Lithography, and Taurus Topography programs are provided in the user guide for each program.

Defining Simulation Point for TMA SUPREM-3

Goals Learn how to define a simulation point and generate a corresponding .tl0 file (to be read by TMA SUPREM-3).


You have defined the appropriate mask layer properties.

1. Click the Mask button in the main window to place Taurus Layout in Mask mode.

2. Click the Sim. Point icon in the Taurus Layout main window.

File Name Program Name

.tl0 TMA SUPREM-3

.tl1 TSUPREM-4

.tl2 Taurus-Lithography, Taurus-Topography 3D

4-2 LO 2005.10

Draft 9/10/05

Taurus Layout Tutorial Creating Files for TMA SUPREM-3, TSUPREM-4, and Taurus Lithography and Taurus

3. The Define Simulation Point window opens as shown in Figure 4-1. You may move the Define Simulation Point window to a different part of your screen.

The Save to File field in the Define Simulation Point window contains the full path and file name of the file that will be generated during this task.

The Browse... button brings up a file browser for changing the path or file name.

The line with the message

Define a simulation point, then click OK.

means you must define a simulation point before you can click the OK button.

The label “OK” on the OK button at the bottom of the Define Simulation Point window initially appears grayed out. This means attempts to click OK are ignored until a simulation point has been defined.


If the full path and file name is too long to fit in the Save to File field, only the file name and the last portion of the path appears.

a. To see the beginning of the path, click the SELECT mouse button any-where in the path name to establish a text insertion point. You may now use the left ← and right → arrow keys on your keyboard to scroll the visi-ble portion of the displayed path and file name.

b. To change the path or file name, you may edit the text directly in the Save to File field.

c. To display a Choose .tl0 Filename browser (similar to the browser shown in Figure 4-7), click the Browse... button .

5. To define the simulation point, move to the desired location on the mask lay-out (displayed in the main window), then click and release the SELECT mouse button. A crosshair appears at the location you clicked.

If “snap to grid” is in effect, the crosshair snaps to the nearest grid point, even if the grid points are not currently displayed. See “Changing Taurus Layout’s Grid,” p. 2-19.

6. Now that the simulation point has been defined, click the OK button in the Define Simulation Point window.

Figure 4-1 Define Simulation Point window

LO 2005.10 4-3

Draft 9/10/05


The .tl0 file iswritten automatically. The status line in the main window dis-plays:


This confirms the path and name of the .tl0 file just written. The Define Simulation Point window automatically closes.

7. If you change your mind and do not want to create a .tl0 file, click the Cancel button.

What If You want to change the location of the simulation point.

1. If you have not clicked the OK button in the Define Simulation Point window yet, you can define a new simulation point by clicking at the desired new loca-tion (“Defining Simulation Point for TMA SUPREM-3,” p. 4-2, Step 4). The previous simulation point crosshair will disappear.

2. If you have clicked the OK button, you will have to start again from “Defining Simulation Point for TMA SUPREM-3,” p. 4-2, Step 2.

What If You want to remove the simulation point crosshair from the main window.

1. To remove the simulation point crosshair from the main window, click the Cancel button in the Define Simulation Point window.

2. If the Define Simulation Point window is not visible on screen, click the Sim. Point icon in the main window (“Defining Simulation Point for TMA SUPREM-3,” p. 4-2, Step 2).

Defining Simulation Cut-Line for TSUPREM-4

Goals Learn how to define a simulation cut-line and generate a corresponding .tl1 file (to be read by TSUPREM-4).

Context You loaded a file or have drawn polygons in the central display area.

You defined the appropriate mask layer properties.

You know how to define a simulation point.

1. Click the Mask button in the Taurus Layout main window to place Taurus Layout in Mask mode.

Note:You must use Mask mode (not Structure mode) when defining a simula-tion cut-line for TSUPREM-4. See “Understanding Mask, Structure, and IWB Modes,” p. 2-7 for details.

2. Click the Sim. Line icon in the Taurus Layout main window to open the Define Simulation Cut-Line window as shown in Figure 4-2.

4-4 LO 2005.10

Draft 9/10/05


3. Choose a file name. A default file name appears in the Save to File field.

For help in changing the path and file name, see “Defining Simulation Point for TMA SUPREM-3,” p. 4-2, Step 3.

4. To define the simulation cut-line:

a. Move to the desired location on the mask layout.

b. Press and hold the SELECT mouse button.

c. Drag the mouse vertically or horizontally to define the simulation cut-line.

d. Release the SELECT mouse button.

The start and end points of the cut-line are marked with crosshairs. You can only draw a horizontal or a vertical cutline.

Note:If “snap to grid” is in effect, the crosshairs will snap to the nearest grid point, even if the grid points are not currently displayed.

5. Now that the simulation cut-line has been defined, click the OK button in the Define Simulation Cut-Line window.

The .tl1 file automatically is written. The status line in the main window dis-plays:



6. If you plan to duplicate Example 4 from Chapter 5 of the TSUPREM-4 User Guide, you must draw the cut-line in exactly the correct place.

a. To assist you, set the grid properties as described in “Changing Taurus Layout’s Grid,” p. 2-19, Step 8.

b. Make sure you have loaded the file s4ex4m.gds.

c. Then draw a horizontal cut-line 5.0 microns long, from (5.2, 2.6) to (10.2, 2.6).

The resulting .tl1 file is compatible with the TSUPREM-4 example.

Figure 4-2 Define Simulation Cut-Line window

LO 2005.10 4-5

Draft 9/10/05


What If You want to change the location of the simulation cut-line.

1. If you have not clicked the OK button in the Define Simulation Cut-Line window, define a new simulation cut-line by drawing another cut-line at the desired new location (“Defining Simulation Cut-Line for TSUPREM-4,” p. 4-4, Step 4). The previous cut-line disappears.

2. If you have already clicked the OK button, you have to start again from “Defining Simulation Cut-Line for TSUPREM-4,” p. 4-4, Step 2.

What If You want to remove the simulation cut-line from the main window.

1. To remove the simulation cut-line from the main window, click the Cancel button in the Define Simulation Cut-Line window.

2. If the Define Simulation Cut-Line window is not visible on screen, click the Sim. Line icon in the main window (“Defining Simulation Cut-Line for TSU-PREM-4,” p. 4-4, Step 2).

What If TSUPREM-4 complains of errors in the .tl1 file, or the .tl1 file contains unex-pected box, window, or capacitance statements.

Problem: Taurus Layout was (erroneously) in Structure mode when you clicked the OK button to write the file.

Solution: To prepare a proper .tl1 file, Taurus Layout must be in Mask mode, not Structure mode. Click the Mask button in the Taurus Layout main window. See “Understanding Mask, Structure, and IWB Modes,” p. 2-7 for details.

Defining Simulation Rectangle for Taurus Lithography, Taurus Topography 3D

Goals Learn how to define a simulation rectangle and generate a corresponding .tl2 file (normally intended to be read by Taurus-Lithography or Taurus-Topography 3D).


You have defined the appropriate mask layer properties.

You are familiar with the process of defining a simulation point and simulation cut-line. See “Defining Simulation Point for TMA SUPREM-3,” p. 4-2 and “Defining Simulation Cut-Line for TSUPREM-4,” p. 4-4 for details.

1. Click the Mask button in the Taurus Layout main window to place Taurus Layout in Mask mode.

a. You must use Mask mode (not Structure mode) when defining a simula-tion rectangle for Taurus-Lithography. See “Understanding Mask, Struc-ture, and IWB Modes,” p. 2-7 for details.

4-6 LO 2005.10

Draft 9/10/05


b. Before defining the simulation rectangle, it is important to note that Tau-rus Layout allows you to optionally include a simulation cut-line in the .tl2 file. This may be useful for certain Depict simulations.

c. The simulation cut-line should be drawn (or removed) before defining the simulation rectangle. If you are not concerned about simulation cut-lines in a .tl2 file, skip to Step 3 below.

2. To include a simulation cut-line in a .tl2 file:

a. Click the Sim. Line icon in the main window.

b. Draw the desired simulation cut-line, but do not click the OK button in the Define Simulation Cut-Line window, or change the path or file name.

c. Proceed to Step 3 below.

To remove an unwanted simulation cut-line before writing a .tl2 file:

d. Click the Sim. Line icon in the main window.

e. Click the Cancel button in the Define Simulation Cut-Line window.

f. Proceed to Step 3 below.

3. Click the Sim. Rect icon in the main window to open the Define Simulation Rectangle window as shown in Figure 4-3.


For help in changing the path and file name, see “Defining Simulation Rectan-gle for Taurus Lithography, Taurus Topography 3D,” p. 4-6, Step 3.

5. Draw a simulation rectangle around the rectangular subregion of the mask layout to be saved.

a. To save all polygons in a mask layout, draw a simulation rectangle large enough to encompass all polygons in the layout.

b. To draw the simulation rectangle, move to the central display area of the main window; press and hold the SELECT mouse button; drag the mouse in any direction; and release the button. The start and end points of the simulation rectangle are marked with crosshairs.

If “snap to grid” is in effect, the crosshairs snap to the nearest grid point, even if the grid points are not currently displayed.

When you release the mouse button, any polygon with at least one vertex (corner) contained by the simulation rectangle will be highlighted for inclusion in the .tl2 file. The status line at the bottom of the main window

Figure 4-3 Define Simulation Rectangle window

LO 2005.10 4-7

Draft 9/10/05


displays the number of polygons selected, along with the individual poly-gon numbers.

Note:Only those polygons with an actual vertex contained by the simulation rectangle are selected. This means that a long thin vertical polygon with four corners would not be selected by a small simulation rectangle drawn near the middle of the polygon. Step 6 below explains how to include such a polygon.

6. To change the set of polygons selected, either:

a. Redraw the simulation rectangle,

or

b. Click the SELECT mouse button on individual polygons (even those not contained by the simulation rectangle) to toggle their selected/unselected status.

If several polygons overlap at the point you click, the selected/unselected sta-tus of all polygons at that point toggles—that is, polygons that were selected are unselected, and vice versa.

7. Now that the simulation rectangle has been defined, click the OK button in the Define Simulation Rectangle window. The Define Simulation Rectangle window closes, and the .tl2 file is written automatically.

The status line in the main window displays:



What If You want to change the location of the simulation rectangle.

If you have not clicked the OK button in the Define Simulation Rectangle win-dow, you can define a new simulation rectangle by drawing another simulation rectangle at the desired new location (“Defining Simulation Rectangle for Taurus Lithography, Taurus Topography 3D,” p. 4-6, Step 5). The previous simulation rectangle will disappear. Make sure all the desired polygons are highlighted (Step 6).

If you have clicked the OK button, you will have to start again from “Defining Simulation Rectangle for Taurus Lithography, Taurus Topography 3D,” p. 4-6, Step 3.

What If You want to remove the simulation rectangle from the main window.

1. To remove the simulation rectangle from the main window, click the Cancel button in the Define Simulation Rectangle window.

2. If the Define Simulation Rectangle window is not visible on screen, click the Sim. Rect icon in the main window (“Defining Simulation Rectangle for Taurus Lithography, Taurus Topography 3D,” p. 4-6, Step 3).

4-8 LO 2005.10

Draft 9/10/05

Taurus Layout Tutorial Creating Structures for Raphael

What If Taurus-Lithography complains of errors in the .tl2 file, or the .tl2 file contains unexpected poly3d, window3d, or capacitance statements.

Problem: Taurus Layout was (erroneously) in Structure mode when you clicked the OK button to write the file.

Solution: To prepare a proper .tl2 file, Taurus Layout must be in Mask mode, not Structure mode. Click the Mask button in the Taurus Layout main window. See “Understanding Mask, Structure, and IWB Modes,” p. 2-7 for details.

Defining Simulation Rectangle for IWB

Defining a simulation rectangle for IWB is similar to the operations described in the above section. However, to generate a .tl2 file to be read by Taurus-Lithogra-phy and Taurus-Topography 3D for use with IWB, you must be in IWB mode.

The .tl2 file generated for IWB contains additional information, e.g., the Zmin, Zmax (coordinates), dielectric constant (Eps), sheet resistivity (Rho) of the layers, and the names associated with the polygons. This information is not included in .tl2 files generated in the Mask mode.

Creating Structures for RaphaelWhen Taurus Layout is in Structure mode, you can create 2D and 3D structures that Raphael can use for interconnect analysis. You also can invoke Raphael-NES to perform capacitance extraction.

1. Click the Structure button to place Taurus Layout in Structure mode. Use this mode to create 2D and 3D structures for use with Raphael.

2. When in Structure mode, the Mask Layer Properties window contains a Layer Properties panel (Figure 4-5, p. 4-12) enabling you to define layer thickness and dielectric constant (for dielectric layers) or voltage level (for conducting layers). These properties are only useful when preparing struc-tures for simulation with Raphael.

Note:When creating structures for Raphael, you must use Structure mode, not Mask mode. See “Understanding Mask, Structure, and IWB Modes,” p. 2-7 for details.

In the following sections, you will learn how to use Taurus Layout to create two- and 3D structures that can be passed to Raphael for interconnect analysis. Topics include:

• Creating a 2D structure (and generating an .rc2 file for Raphael’s RC2 solver)

• Creating a 3D structure (and generating an .rc3 file for Raphael’s RC3 solver)

• Analyzing your structure for electrical connectivity

LO 2005.10 4-9

Draft 9/10/05


Files with a file name extension of .rc2 or .rc3 are intended for use with Raphael’s RC2 and RC3 solvers, respectively. The “r” and “c” in the extension refer to resistance and capacitance simulations. The “2” and “3” in the extension refer to 2D and 3D structures and analysis.

For instructions explaining how to use the .rc2 and .rc3 files with Raphael, see the Raphael User Guide.

Note:Taurus Layout cannot generate .ri3 files for 3D inductance analysis with Raphael’s RI3 solver.

Preparing 2D Structure for Raphael

Goals Learn how to generate an .rc2 file (to be read by Raphael’s RC2 solver).

Context The Taurus Layout main window appears on screen, as shown in Figure 1-1.

You are familiar with all basic Taurus Layout operations, especially drawing poly-gons and drawing a simulation cut-line.

1. When generating a structure, Taurus Layout performs a number of automatic operations. To fully appreciate these automatic actions, create a simple mask layout directly in Taurus Layout.

2. Execute File➔ New from the main window Menu Bar (not from the Mask Layer Properties window Menu Bar). The Taurus Layout main window should appear exactly as shown in Figure 1-1, with no polygons drawn in the central display area and all mask layers “undefined.”

What If The mask layer names are reset, but polygons remain in the central display area.

You probably executed File➔ New from the Mask Layer Properties window Menu Bar. This only resets the mask layer properties (layer name, color, pattern, and so on).

1. To completely clear a mask layout and remove all the polygons, execute File➔ New from the main window Menu Bar.

2. To place Taurus Layout in Structure mode, click the Structure button in the main window.

Note:You must use Structure mode (not Mask mode) when creating 2D and 3D structures for use with Raphael. See “Understanding Mask, Struc-ture, and IWB Modes,” p. 2-7 for details.

4-10 LO 2005.10

Draft 9/10/05


3. In this step you will draw two rectangles on GDS layer 2 and two rectangles on GDS layer 4, creating the simple mask layout shown in Figure 4-4. To do this, perform the following:

a. Click the Draw Rectangles icon in the main window.

b. Double-click the layer name “UNDEF_2” in the list of mask layers appearing on the right side of the main window. When you do this, the Mask Layer Properties window appears with a Layer Properties panel, as shown in Figure 4-5.

c. Draw a rectangle with an upper left corner at (1.4, 4.6) and a lower right corner at (1.6, -0.6).

d. Draw another rectangle from (2.8, 4.6) to (3.0, -0.6). These two rectangles appear on the “UNDEF_2” layer.

e. Click the layer name “UNDEF_4” in the list of mask layers.

f. Draw a rectangle with an upper left corner at (1.2, 4.4) and a lower right corner at (1.6, -0.4).

g. Draw another rectangle from (2.0, 4.4) to (2.4, -0.4). These two rectangles appear on the “UNDEF_4” layer.

The main window should now appear exactly as shown in Figure 4-4. In particular, no layer names have been provided, and the layers are in their default 0-63 layer sequence.

LO 2005.10 4-11

Draft 9/10/05


4. By default, the contacts/vias connected to the substrate (ground plane) are not included in the generated .rc2 file. To include the contacts/vias that connect the substrate (ground plane), execute Options➔ Raphael➔ Include Contacts to Ground.

Figure 4-4 Taurus Layout main window after four rectangles have been drawn

Figure 4-5 Mask Layer Properties window (when in Structure mode)

4-12 LO 2005.10

Draft 9/10/05


5. Each of the polygons that are loaded from the GDS II file can be associated with a name. Select the polygon of interest, using the Select Tool, and execut-ing Edit➔ Polygon Properties from the Menu Bar of the main window.

The Polygon Properties window pops up, allowing a name to be associated with the selected polygon. See “Tagging Text to a Polygon,” p. 2-22.

6. Click the Sim. Line icon in the main window.

7. Draw a cut-line from (-0.4, 1.8) to (4.4, 1.8).

When you release the mouse button after drawing the cut-line, several things automatically happen:

a. Taurus Layout automatically assigns default layer names (layer_n) and layer thicknesses (1.0 micron) for the conducting layers. Taurus Layout also automatically creates the necessary top and bottom dielectric layers, with default layer names (diel_n) and thicknesses (2.0 microns). See Figure 4-19, p. 4-28 about conductor and dielectric thicknesses.

b. The GDS File Information window automatically opens (Figure 4-7). This window explains that Taurus Layout interprets named layers that contain polygons as conducting layers. Taurus Layout automatically cre-ates dielectric layers as needed, from undefined layers that do not contain polygons.

c. The Side View window automatically opens (Figure 4-8). From the side view, you see the two conducting layers stacked directly on top of each other. The two layers can be separated by creating another dielectric layer (Step 11 below); however, leave the structure as-is for now.

Figure 4-6 Options Menu for including the contacts/vias to ground plane in the generated .rc2 file

Figure 4-7 GDS File Information window showing information about structure generated for Raphael

LO 2005.10 4-13

Draft 9/10/05


8. Add a bottom ground plane to the structure by performing the following:

a. Select an unused (“UNDEF_n”) layer name to use as a ground plane.

In this case, click the layer name “UNDEF_6” in the list of mask layers in the Mask Layer Properties window.

b. Change the layer name from “UNDEF_6” to “groundp” (case-insensitive; trailing characters permitted), and click the Apply button.

The GDS File Information window and the Side View window automati-cally update to show the bottom ground plane.

9. To save the structure to an .rc2 file, click the OK button in the DefineSimulation Cut-Line window.

a. The contents of the .rc2 file should be as shown in Figure 4-9. This file can be read into the STUDIO Command Editor for Raphael so that addi-tional simulation and control commands can be added before submitting the file to the RC2 solver.

Figure 4-8 Side View window

$ RC2 RUN OUTPUT=/home/mercury/d0/dharinis/WorkSpace/work/src/Lorenzo/checklist/four_polys.rc2$box name=diel_1; cx=2.4; cy=1; w=4.8; h=2; diel=1;box name=diel_0; cx=2.4; cy=4; w=4.8; h=4; diel=1;box name=layer_4.1; cx=1.8; cy=2.5; w=0.4; h=1; volt=0;box name=layer_4.2; cx=2.6; cy=2.5; w=0.4; h=1; volt=0;box name=layer_2.1; cx=1.9; cy=3.5; w=0.2; h=1; volt=0;box name=layer_2.2; cx=3.3; cy=3.5; w=0.2; h=1; volt=0;box name=groundp; cx=2.4; cy=-0.5; w=4.8; h=1; volt=0;window x1=0.0; x2=4.8; y1=-1; y2=6; diel=1.0;capacitance

Figure 4-9 Example of a .rc2 file

4-14 LO 2005.10

Draft 9/10/05


b. The first line in the .rc2 file tells the STUDIO Command Editor to use the RC2 solver when running a Raphael simulation, and provides a path and file name.

c. The main body of the .rc2 file consists of various Raphael commands, pri-marily a series of box statements followed by a single window statement to define the simulation window. A separate box statement is generated for each dielectric. Additionally, a separate box statement appears for each polygon/cut-line intersection.

d. The box name on the third box statement in Figure 4-9 is “layer_4.1,” while the box name on the fourth line is “layer_4.2.” Taurus Layout auto-matically appends a period and a number to the end of a conducting layer name when generating the corresponding box statement in the.rc2 file. This guarantees that each box has a unique name. The automatically-gen-erated numbers are sequential and ascending, from the left (top) of the cut-line to the right (bottom). If text (which is different than the default generated text) is tagged to a polygon, the box name is prefixed with the tagged text.

• Near the end of the .rc2 file is a window statement that gives the mini-mum and maximum X and Y coordinates of the structure. By conven-tion, Taurus Layout assigns Y=0.0 at the bottom of the bottom-most dielectric layer. This means that the bottom ground plane extends into the negative Y direction.

• The last line in the .rc2 file specifies that by default, a capacitance sim-ulation will be performed. Since there is no name list following the capacitance command, the full capacitance matrix is calculated.

• For RC2, the capacitance command prepared by Taurus Layout does not have a name list.

10. When you clicked the OK button in the Define Simulation Cut-Line window, the Define Simulation Cut-Line window closed. Click the Sim. Line icon in the main window to continue.

11. To create a top ground plane layer in addition to the existing bottom ground plane layer created in Step 5 above, change a second (undefined) layer name to “groundp.”

• The layer name “groundp” (case-insensitive) is a special reserved lay-er name. Ground plane layer names must start with the characters “groundp”; however, additional characters are permitted. Thus, “groundp_t” and “GroundP_b” are legal names.

• If there is only one layer named “groundp,” Taurus Layout always treats it as the bottom ground plane. If there are two layers named “groundp,” the top-most one in the GDS layer stack is treated as the top ground plane.

12. To create dielectric layers in addition to those automatically generated by Tau-rus Layout, select an undefined layer that does not contain any polygons, and changing its name.

LO 2005.10 4-15

Draft 9/10/05


• When you create a dielectric through this method (changing an unde-fined layer’s name), the layer thickness is left unchanged from its pre-vious value (typically 1.0 microns). In contrast, dielectric layers automatically generated by Taurus Layout (Step 6 above) have a de-fault layer thickness of 2.0 microns.

• For consistency, you may wish to start the dielectric layer’s name with the characters “diel”; however, this is not required—you may choose any name. The characters “diel” are not special or reserved.

13. If you wish to change any of the automatically-assigned mask layer properties such as layer name, color, pattern, thickness, sequence, and so on, you may do so using the Mask Layer Properties window.

a. To change structural layer properties, make sure Taurus Layout is in Structure mode, and then click on the desired layer name (appearing in the list of mask layers).

b. Move to the Layer Properties panel of the Mask Layer Properties win-dow, and edit the Thickness or Dielectric or Volts text field.

c. Click Apply.

If the layer is a conductor, the entry in the Dielectric field is disabled.

If the layer is a dielectric, the entry in the Volts field is disabled.

d. When you change the layer thickness, color, sequence, and so on, and click the Apply button in the Mask Layer Properties window, the change automatically appears in the Side View window.

14. Try drawing a cut-line in a different location. The display in the Side View window is updated automatically.

15. To undefine one of the automatically-defined conducting layers or dielectric layers, click the layer name appearing in the list in the Mask Layer Proper-ties window.

a. Execute Edit➔ Reset Layer from the Mask Layer Properties window Menu Bar.

b. You should see the layer name reset to “UNDEF_<n>”, where <n> is the 0-63 GDS layer number.

c. If this does not happen, it is because that layer name is automatically reas-signed by Taurus Layout because it is needed as part of the cut-line pro-cessing and structure generation algorithm.

d. To defeat the automatic renaming, click the Cancel button in the Define Simulation Cut-Line window before resetting the layer. See “Resetting Mask Layer Properties,” p. 3-15 for more details.

See Also “Understanding Structures Created for Raphael / Raphael-NES,” p. 4-25 provides additional details about the creation of structures for Raphael.

4-16 LO 2005.10

Draft 9/10/05


Preparing 3D Structure for Raphael

Goals Learn how to generate an .rc3 file (to be read by Raphael’s RC3 solver).

Note:If you are a Raphael-NES user, the 3D structure is similar to the one prepared for Raphael, except that the capacitance statement is followed by the nets that you chose to extract using the Ex. Net Tool. For further details, refer to the Raphael-NES User Guide.

Context The Taurus Layout main window is open, as shown in Figure 1-1.

You are familiar with preparing a 2D structure for Raphael.

You are familiar with all basic Taurus Layout operations.

1. “Preparing 2D Structure for Raphael,” p. 4-10 described how to prepare a 2D structure for Raphael’s RC2 solver. Creating a 3D structure for Raphael’s RC3 solver is similar to creating a 2D structure for RC2, except that you will draw a simulation rectangle, rather than a simulation cut-line.

The procedure is summarized in Steps 2 through 8 below; however, for brev-ity, various fine points of operation are omitted in the following summary.

2. Click the Structure button in the Taurus Layout main window to place Taurus Layout in Structure mode.

3. Create a layout by:

a. Drawing polygons directly in Taurus Layout.

b. Or by loading a GDS file or a .tl2 file.

4. By default, the contacts/vias connected to the substrate (ground plane) are not included in the generated .rc2 file. To include the contacts/vias that connect the substrate (ground plane), execute Options➔ Raphael➔ Include Contacts to Ground.

Raphael-NES

Figure 4-10 Options Menu for including the contacts/vias to ground plane in the generated .rc3 file

LO 2005.10 4-17

Draft 9/10/05


5. Each of the polygons loaded from the GDS II file can be associated with a name. To select a specific polygon, use the Select tool and execute Edit➔ Polygon Properties from the menu bar of the main window.

The Polygon Properties window pops up allowing a name to be associated with the selected polygon. See “Tagging Text to a Polygon,” p. 2-22.

6. Click the Sim. Rect icon in the main window.

7. Draw a simulation rectangle in the main window.

When you do this, a Front & Side View window automatically opens as shown in Figure 4-11. The Front & Side View window contains two separate subwindows: one labeled Front View, the other labeled Right Side View. The view provided by the Taurus Layout main window provides the top view. Thus, you have a top, front, and side view of the 3D structure.

8. Change mask layer properties as desired using the Mask Layer Properties window.

You may define ground planes, conductors, and dielectric layers as explained in “Preparing 2D Structure for Raphael,” p. 4-10.

9. Save the 3D structure to a .rc3 file by clicking the OK button in the Define Simulation Rectangle window.The resulting .rc3 file is shown in Figure 4-12.

Figure 4-11 Front & Side View window

4-18 LO 2005.10

Draft 9/10/05


10. Steps 2 through 7 above summarized the creation of 3D structures for Raphael’s RC3 solver.

ConsiderationsWhen Using theInterface to RC3

The following are miscellaneous notes and observations on using the interface to RC3:

• When creating a unique name for each poly3d statement in an .rc3 file, the absolute polygon number is appended to the layer name, with a period as a delimiter. For example, if polygon #14 on layer “metal” were included in a poly3d statement, its name would be “metal.14.” If text (which is different than the default generated text) is tagged to a polygon, the box name is prefixed with the tagged text.

• “Contact” and “via” layers are layers whose names begin with the re-served words “contact” or “via” (case-insensitive). Trailing characters are ignored, and any mix of upper and lower case is allowed. These special layer names are used when merging polygons (see below) or during connectivity analysis.

• When an .rc3 file is written, Taurus Layout automatically determines which polygons are electrically connected. merge statements are au-tomatically generated and included in the .rc3 file to merge those poly-gons which are electrically connected.

• One merge statement appears for each set of electrically connected polygons. (A single merge statement could list many polygons). The merge algorithm takes into account the overlap in the XY plane (shown in the main window), as well as the overlap in the Z plane (shown in the Front & Side View window).

$ RC3 RUN OUTPUT=/home/mercury/d0/dharinis/WorkSpace/work/src/Lorenzo/example_files/four_polys.rc3$poly3d name=diel_1; + coord=”0,0; 6,0; 6,5.6; 0,5.6;” + v1=0,0,0; height=2; diel=1;poly3d name=diel_0; + coord=”0,0; 6,0; 6,5.6; 0,5.6;” + v1=0,0,2; height=4; diel=1;poly3d name=layer_4.2; + coord=”2.2,0.4; 2.2,5.2; 2.6,5.2; 2.6,0.4;” + v1=0,0,2; height=1; volt=0;poly3d name=layer_4.3; + coord=”3,0.4; 3,5.2; 3.4,5.2; 3.4,0.4;” + v1=0,0,2; height=1; volt=0;poly3d name=layer_2.0; + coord=”2.4,0.2; 2.4,5.4; 2.6,5.4; 2.6,0.2;” + v1=0,0,3; height=1; volt=0;poly3d name=layer_2.1; + coord=”3.8,0.2; 3.8,5.4; 4,5.4; 4,0.2;” + v1=0,0,3; height=1; volt=0;window3d v1=0,0,0; v2=6,5.6,6; diel=1.0;capacitance

Figure 4-12 Example of a .rc3 file

LO 2005.10 4-19

Draft 9/10/05


• Polygons that touch or overlap on the same layer are always electrically con-nected in the XY plane and will be merged, regardless of the layer name.

• Electrical connection of polygons on different layers is more complex. Even if polygons on different layers overlap in the XY plane, polygons on different layers are not merged unless the polygons touch or overlap in the Z plane and “contact” or “via” layers are present.

• The merge algorithm assumes that only polygons that are in contact with polygons on “contact” or “via” layers are to be merged. For example, this means that polygons on “metal1” that are directly on top of (overlap in the XY plane with) polygons from “metal2” will not be merged, even if the polygons touch or overlap in the Z plane. Polygons from a layer name starting with “contact” or “via” must be between the metal1 and metal2 polygons before they are merged. This is by design, and is not intended to be changed.

Note:You may find it instructive to experiment with the file bus.tl2, included in the examples subdirectory with your Taurus Layout shipment, and shown in Figure 4-14. This file is discussed in more detail in “Perform-ing Connectivity Analysis,” p. 4-22. However, be aware that execution times for RC3 simulations involving more than a dozen polygons can be lengthy. Accordingly, you should draw simulation rectangles only around small regions of interest in the bus layout when preparing .rc3 files for use with RC3.

Note:The capacitance statement is generated without a name list.

Note:If you are a Raphael-NES user, the capacitance statement is fol-lowed by the nets that you chose to extract using the Ex. Net Tool.

• The present version of Taurus Layout does not perform automatic merging when writing an .rc2 file for RC2.

• Polygons are not clipped to the simulation rectangle by Taurus Layout. All highlighted polygons are written in their entirety to the .rc3 file; however, Raphael’s RC3 solver does automatically clip the polygons to the simulation window defined by the window3d statement. The window3d statement is automatically generated and included in the .rc3 file by Taurus Layout. Polygons completely outside the simu-lation rectangle are not written to the .rc3 file.

Raphael-NES

4-20 LO 2005.10

Draft 9/10/05


See Also “Understanding Structures Created for Raphael / Raphael-NES,” p. 4-25 provides additional details about the creation of structures for Raphael.

Text in RC2 and RC3 Files

Text present in the GDS II Stream file is attached to the polygons included in the RC2 or RC3 files generated through Taurus Layout.

1. To generate a Raphael RC2 or RC3 files, select the simulation cut-line or sim-ulation rectangle in the layout while in Structure mode.

2. Map the text layers present in the layout to the corresponding polygon layer in the Mapping Text Layers to Polygon Layers window that automatically opens when you load a GDS II file in the Structure mode.

3. As an alternative, to associate text with each polygon, use the Polygon Prop-erties window as described in “Tagging Text to a Polygon,” p. 2-22.

Figure 4-13 illustrates the window that allows you to specify the mapping of text layers to polygon layers.

4. Or evoke the Mapping Text Layers to Polygon Layers window by executing View➔ Text Map from the menu bar.

5. To save the information entered into the window to a file for future use, exe-cute the File➔ Save option.

6. To load the saved file, execute the File➔ Load option.

The text is prefixed to the polygon name in the resulting RC2 or RC3 file that is generated following the selection of the simulation cut-line or simulation rectangle. An example of a block of a RC3 file is shown below:

poly3d name=S_M1_0_layer_8.12; + coord="6.6,7.2; 12,7.2; 12,8; 6.6,8;" + v1=0,0,4; height=1; volt=0;

Figure 4-13 Mapping Text Layers to Polygon Layers window

LO 2005.10 4-21

Draft 9/10/05


In the above example, text “S_M1_0” was attached to layer_8.12.

Note:Text is tagged to a polygon in the generated RC2 file only if:

• The cut-line passes through the polygon.

• The coordinates of the text fall within the bounds of the polygon.

• The text tagged to the polygon from the Polygon Properties window is used in the RC2 file only if it is different from the default text generat-ed by Taurus Layout and if the text present in the GDS II file does not override it.

Similarly, in the generated RC3 file, text is prefixed to a polygon only if:

• The polygon is highlighted .

• The coordinates of the text fall within the bounds of the polygon.

• The text tagged to the polygon from the Polygon Properties window is used iTaurus Layout and if the text present in the GDS II file does not override it.

CAUTIONIf more than one text label is tagged to a set of electrically connected poly-gons, you may get syntax errors when running Raphael or Raphael-NES on the generated RC2 and RC3 files. This might be due to incorrect polygon mapping.

7. Also, to include the contacts/vias that connect to the substrate as part of the generated RC3 file, execute Options➔ Include Contacts to Ground from the menu bar.

Note:In earlier releases, the default was to include the contacts/vias connected to the substrate in the generated RC3 file. In Taurus Layout v1.3 and later releases, the new default is to exclude all the contacts/vias that con-nect to the substrate.

Performing Connectivity Analysis

Goals Learn how to use Taurus Layout’s connectivity analysis feature (useful when pre-paring 2D and 3D structures for Raphael).

Context The Taurus Layout main window appears on screen, as shown in Figure 1-1.

You are familiar with all basic Taurus Layout operations.

4-22 LO 2005.10

Draft 9/10/05


The example file bus.tl2 must already be installed on your system.

❖ The examples subdirectory of Taurus Layout includes a number of files, including bus.tl2, which you load in this task.

1. The connectivity analysis feature lets you click a polygon on the layout, and automatically highlights all polygons that are electrically connected to the polygon you clicked. This is useful for analyzing a large layout and breaking it into smaller structures that Raphael can effectively handle.

2. The examples subdirectory of Taurus Layout includes the file bus.tl2. You may find it instructive to load this file and experiment with it to familiarize yourself with Taurus Layout’s connectivity analysis feature.

Load the file bus.tl2 now.

❖ Related files in the examples subdirectory include bus.gds and bus.mlp; however, you will find that if you load bus.gds to define the polygons and then load bus.mlp to define the correct mask layer prop-erties, the resulting layout will be the same as if you had simply loaded bus.tl2 (which already contains the correct mask layer properties). Nevertheless, bus.gds has one tutorial advantage over bus.tl2: it is a hi-erarchical GDS II Stream file, and you may find the information pre-sented in the GDS File Information window of interest. In contrast, all .tl2 files (including bus.tl2) are flat, without hierarchy.

3. Click the Connectivity Analysis button in the main window, then click a polygon in the layout. All polygons that are electrically connected to the one you clicked will be highlighted. Depending on the size and complexity of the

LO 2005.10 4-23

Draft 9/10/05


layout, there may be a delay of several seconds. Your screen now resembles Figure 4-14.

Polygons that touch or overlap on the same layer are electrically connected and are highlighted, regardless of the layer name.

Connectivity analysis between layers is not performed unless the mask layout contains “contact” or “via” layers. See “Preparing 3D Structure for Raphael,” p. 4-17, Step 8, for a detailed discussion of automatic polygon merging.

4. As an aid to understanding connectivity analysis, place Taurus Layout in Structure mode, and then draw simulation cut-lines at various locations on the bus.tl2 layout.

See “Preparing 2D Structure for Raphael,” p. 4-10. For example, Figure 4-15 shows the Side View window resulting from the cut-line drawn in the upper left corner of Figure 4-14.

Figure 4-14 Taurus Layout main window, showing connectivity analysis for a portion of file bus.tl2

Cut-line

4-24 LO 2005.10

Draft 9/10/05


Understanding Structures Created for Raphael / Raphael-NES

Goals Gain more insight into how Taurus Layout creates 2D and 3D structures for Raphael.

Context You are familiar with preparing 2D and 3D structures for Raphael.

You are familiar with connectivity analysis.

This task will supplement your understanding of how Raphael creates structures for Raphael. If you have not performed tasks “Preparing 2D Structure for Raphael,” p. 4-10 and “Preparing 3D Structure for Raphael,” p. 4-17, do so now.

1. When creating a structure for Raphael, Taurus Layout examines the GDS layer names and the sequence in which they appear in the Mask Layer Properties window. Taurus Layout automatically performs the following steps:

a. Make sure that the top-most and bottom-most layers are dielectrics. Auto-matically create a top and/or bottom dielectric layer, as needed.

b. If there is a bottom ground plane, make sure it is below the bottom-most dielectric. Move the bottom ground plane, if necessary.

c. If there is a top ground plane, make sure it is above the top-most dielec-tric. Move the top ground plane, if necessary.

d. Create a ground plane/dielectric stack (as if vertically stacking a set of blocks on top of each other). The bottom ground plane (if present) goes on the bottom of the stack. Next, the dielectric layers are added to the stack. Finally, the top ground plane (if present) is added.

Figure 4-15 Side View window corresponding to cut-line drawn in the upper left quarter of Figure 4-14

LO 2005.10 4-25

Draft 9/10/05


For example, suppose the Mask Layer Properties window contained the following layers:

The ground plane and dielectric stack corresponding to this layer sequence is shown in Figure 4-16.

Note:During this step, conducting layers are ignored. The total thickness of this stack is the sum of the individual thicknesses of the ground plane layers and the dielectric layers. See Figure 4-19, p. 4-28.

e. Locate the bottom-most conductor in the GDS layer sequence. If the sim-ulation cut-line or simulation rectangle intersects any of the polygons on the layer, place the intersected polygons from the bottom-most conductor on top of the bottom-most dielectric in the stack.

Otherwise, leave a vertical space corresponding to the thickness of the conducting layer.

For the layers listed in Step 1d, the bottom-most conductor is cond_bott, and the bottom-most dielectric is diel_bott, so the polygons from cond_bott are placed on top of diel_bott as shown in Figure 4-17.

groundp_t [top ground plane]

diel_top [dielectric]

cond_top [conductor]

diel_up [dielectric]

diel_down [dielectric]

cond_mid [conductor]

cond_bott [conductor]

diel_bott [dielectric]

groundp_b [bottom ground plane]

Figure 4-16 Ground plane/dielectric stack corresponding to the layers in Step 1d

groundp_t

diel_top

diel_up

diel_down

diel_bottgroundp_b

4-26 LO 2005.10

Draft 9/10/05


Note:The polygons are placed on top of diel_bott, but actually overlap diel_down. See Step 2 for a discussion of Raphael’s overlapping rule.

f. Continue processing the remaining conductors, working up from the bot-tom of the layer list.

For all i conductors, if the layer below conductor i is a conductor, stack con-ductor i directly on top of that conductor.

If the layer below conductor i is a dielectric, stack conductor i directly on top of that dielectric.

g. For the layers listed in Step 1d, the completed structure appears in Figure 4-18.

2. Note from Step 1 that Taurus Layout prepares the dielectrics first, and then prepares the conductors. As Figure 4-9 on page p. 4-14 shows, the statements defining the dielectrics appear earlier in the .rc2 (or .rc3) file, and the state-ments defining the conductors appear later in the file.

This takes advantage of Raphael’s overlapping rule, which states that when geometries overlap, geometries defined later in the input file will overwrite geometries defined previously in the input file.

Thus, final structures for Raphael are formed by overwriting the dielectrics with the conductor properties. In doing this, the regions that are defined as conductors have properties of a conductor only and will not have dielectric properties. This is similar to Medici’s REGION statement. You can overwrite

Figure 4-17 Placing the bottom-most conductor (cond_bott) on top of the bottom-most dielectric (diel_bott)

groundp_t

diel_top

diel_up

diel_down

diel_bottgroundp_b

cond_bott

Figure 4-18 Completed ground plane/dielectric/conductor stack corresponding to the layers in Step 1d

groundp_t

diel_top

diel_up

diel_down

diel_bottgroundp_b

cond_midcond_bott

cond_top

LO 2005.10 4-27

Draft 9/10/05


one region with another and it will take the properties of the last defined region.

3. By default, Taurus Layout assigns a thickness of 1.0 micron to conducting layers and 2.0 microns to automatically-generated dielectric layers.

However, see “Preparing 2D Structure for Raphael,” p. 4-10, Step 10 for cases where the dielectric may initially be only 1.0-µm thick.

The dielectric thickness defined by the user (in the Mask Layers Properties dialog) is now interpreted as intermetal dielectric thickness. Therefore, for any dielectric layer, the total dielectric thickness is the sum of the intermetal dielectric thickness plus the conductor thickness, regardless of whether or not the conductor is actually present.

In Figure 4-19, the diel_2 thickness is 1.0 µm, and the poly thickness is 0.4 µm. Thus, in Figure 4-19, the total thickness of the middle dielectric layer (diel_2) is 1.0 µm + 0.4 µm = 1.4 µm, for either the left subfigure a) (poly traces not actually present) or the right subfigure b) (poly traces present).

4. When drawing a simulation cut-line (or simulation rectangle), questions sometimes arise regarding the appearance of the structure in the associated Side View window.

The algorithm operates as follows:

• If the cut-line (or rectangle) intersects the polygons on a given layer, the polygons will appear in the Side View window.

• If the cut-line (or rectangle) does not intersect the polygons on a given layer, vertical spaces corresponding to the layer thicknesses will ap-pear in the Side View window.

There are three ways to revise your structure to avoid unwanted spaces between layers:

• Ignore unwanted layers

Figure 4-19 Interpretation of conductor and dielectric thicknesses. The total dielectric thickness of a given layer is the same in Figure 4-19a as it is in Figure 4-19b

metal1metal1

diel_2

diel_3

0.5

0.4

1.0

0.8

1.5

diel_2

diel_3

poly poly

a) Structure with metal1 tracesbut without poly traces

b) Structure with poly tracesbut without metal1 traces

diel_1 diel_1

substrate

4-28 LO 2005.10

Draft 9/10/05


• Resequence the layers

• Change the thicknesses of unwanted layers to zero

5. When preparing 2D and 3Dstructures intended for analysis by Raphael, Tau-rus Layout automatically extends contacts and vias to the nearest conductive polygons, immediately above and immediately below each contact or via polygon.

Taurus Layout’s automatic extension of contacts and vias is best shown by example. Figure 4-20 shows a simple layout with three metal layers, a via layer, a contact layer, several dielectrics, and a bottom ground plane. This cor-responds to the top view of the structure.

The small squares lying directly on the cut-line are drawn on the “contact” and “via” layers. As explained in “Preparing 2D Structure for Raphael,” p. 4-10, contact and via layers are special layers whose names begin with the reserved words “contact” or “via” (case-insensitive). Contact and via layers serve to establish electrical connections between conducting layers.

For previous versions of Taurus Layout, the side view corresponding to the cut- line in Figure 4-20 is shown in Figure 4-21.

Note:The contact and via polygons were not treated in any special way when intersected by the cut-line. In particular, the contact and via polygons

Figure 4-20 Simple multi-layer mask layout

LO 2005.10 4-29

Draft 9/10/05


were not automatically extended up or down to meet the nearest conduct-ing polygon.

For Taurus Layout version 1.1 (and later), the side view corresponding to the cut-line appears in Figure 4-22.

Note:Polygons appearing on the contact and via layers are extended automati-cally in the vertical direction until a conducting polygon is encountered.

When extending a contact or via polygon, if a conducting polygon is not encountered, the contact or via polygon is extended to the top of the top dielectric (thus touching a top ground plane, if present), or down to the bottom of the bottom dielectric (thus touching a bottom ground plane, if present).

Figure 4-21 Side view of structure without automatic extension of contact and via polygons

Figure 4-22 Side view of structure with automatic extension of contact and via polygons (Taurus Layout version 1.1 and later)

4-30 LO 2005.10

Draft 9/10/05


As explained in “Preparing 2D Structure for Raphael,” p. 4-10, top and bot-tom ground planes may be defined by changing a layer name so that it starts with the reserved word “groundp” (case-insensitive).

Note:Observe the following fine points of operation.

• Automatically-extended contact and via polygons are electrically connected to the conducting polygons they meet. These contact and via polygons are included when preparing merge statements for an .rc3 file (see “Preparing 3D Structure for Raphael,” p. 4-17) and when performing connectivity analy-sis (see “Performing Connectivity Analysis,” p. 4-22).

• Automatically-extended contact and via polygons are not automatically merged with top or bottom ground planes when preparing merge statements for an .rc3 file or when performing connectivity analysis.

• To defeat the automatic extension of polygons on a contact or via layer, sim-ply change the layer name to anything other than “contact” or “via.”

• To restore the automatic extension, restore the “contact” or “via” layer name.

• Contact and via polygons are automatically extended for simulation rectan-gles (and the associated .rc3 files) as well as for simulation cut-lines (and the associated .rc2 files). However, this extension only occurs in Structure mode (not Mask mode).

LO 2005.10 4-31

Draft 9/10/05


4-32 LO 2005.10

Draft 9/10/05

CHAPTER 5

L

Batch Mode5

Batch Mode File Processing Taurus Layout can read and process a file containing commands to be executed in batch mode. Taurus Layout’s batch mode capabilities include the following:

• Load GDS, .tl2, .t2p or .mlp files

• Select subcells defined in the GDS II file

• Define simulation points, cut-lines or simulation rectangles

• Shift, shrink, or bloat polygons

• Save .tl0, .tl1, .tl2, .rc3 or .mlp files

• Enable or suppress the graphical user interface

If Taurus Layout is invoked directly from a command line, the command file name is provided as a command-line argument:

tlayout <command file>

Example:

tlayout myCommands

The file name specified on the command line may contain any of the commands summarized in Table 5-1. The command file name need not have an extension. Taurus Layout will execute the commands sequentially and terminate without dis-playing the usual Taurus Layout main window (unless the VISUAL command is present in the command file).

Figures 5-1- and 5-2 show samples and files.

Note:Taurus Layout’s ability to operate in batch mode is primarily intended for use within the TMA WorkBench environment. This section is pro-vided as background information only, and to provide an overview of the possibilities arising from the combined use of TMA WorkBench and Taurus Layout.

O 2005.10 5-1

Draft 9/10/05

Batch Mode Taurus Layout Tutorial

Table 5-1 Taurus Layout Batch Mode Commands, Parameters, and Descriptions

Command Parameters Description

COMMENT <text of comment> Used to document the command file.

$ <text of comment> Alternate form of COMMENT.

LOAD GDS NAME=<fname> orTL2 NAME=<fname> or MLP NAME=<fname> orT2P NAME=<fname>

Load a GDS, .tl2, .t2p or .mlp file. (Specify either GDS, TL2, T2P or MLP—you can load only one file with a sin-gle LOAD command).

SELECT CELL=<cellname>CELL =<cellnumber>

Select a sub cell present in the GDS file either by name or by cell number.

POINT X=<num> Y=<num> Define the X, Y coordinates of a simulation point. Both parameters must be present.

CUTLINE X1=<num> Y1=<num>X2=<num> Y2=<num>

Define the X, Y coordinates of the start and end of a simula-tion cut-line. All four parameters (X1, Y1, X2, Y2) should be present; however, assuming a horizontal or vertical cut-line, the redundant parameter may be omitted.

RECTAN-GLE

XMIN=<num> YMIN=<num>XMAX=<num> YMAX=<num>

Defines the Simulation Rectangle coordinates for selecting the polygons to be included in the .tl2 or .rc3 file generation

SHIFT MASK=<mask layer name>

DX=<num> DY=<num>

Shift all polygons on the specified mask layer. This is useful for simulating mask misalignment. The amount of the shift is given by the DX and DY parameters. At least one of the numeric parameters must be present.

SCALE MASK=<mask layer name> orALL

XSCALE=<num>YSCALE=<num>XOFFSET=<num>YOFFSET=<num>

Scale all polygons on the specified mask layer (or on all lay-ers, if ALL is present). This is useful for simulating shrink and bloat. Specify either MASK or ALL—not both. If ALL is present, scale any simulation points, cut-lines, or simulation rectangles. Simple linear scaling occurs independently in the X and Y directions, as follows:

At least one of the numeric parameters must be present.

RECTAN-GLE

XMIN=<num> YMIN=<num>XMAX=<num> YMAX=<num>

Defines the Simulation Rectangle coordinates for selecting the polygons to be included in the .tl2 or .rc3 file generation

x ′ XSCALE * x XOFFSET+=

y ′ YSCALE * x YOFFSET+=

5-2 LO 2005.10

Draft 9/10/05

Taurus Layout Tutorial Batch Mode File Processing

SHIFT MASK=<mask layer name>

DX=<num> DY=<num>

Shift all polygons on the specified mask layer. This is useful for simulating mask misalignment. The amount of the shift is given by the DX and DY parameters. At least one of the numeric parameters must be present.

SCALE MASK=<mask layer name> orALL

XSCALE=<num>YSCALE=<num>XOFFSET=<num>YOFFSET=<num>

Scale all polygons on the specified mask layer (or on all lay-ers, if ALL is present). This is useful for simulating shrink and bloat. Specify either MASK or ALL—not both. If ALL is present, scale any simulation points, cut-lines, or simulation rectangles. Simple linear scaling occurs independently in the X and Y directions, as follows:

At least one of the numeric parameters must be present.

SAVE TL0 NAME=<fname> orTL1 NAME=<fname> orTL2 NAME=<fname> or MLP NAME=<fname> orGDS NAME=<fname> orRC3 NAME= <fname>RC2 NAME= <fname>

Save a .tl0, .tl1, .tl2 ,.mlp,.gds or .rc3 file. (Specify TL0, TL1, TL2,MLP, GDS, RC2, or RC3 —you can save only one file with a single SAVE command).

VISUAL If the VISUAL command is present in a command file, Tau-rus Layout processes all commands, then displays the Tau-rus Layout main window and waits for user input.

If the VISUAL command is not present, Taurus Layout pro-cesses all commands, then terminates without displaying the Taurus Layout main window.

QUIT Immediately terminate Taurus Layout.

Table 5-1 Taurus Layout Batch Mode Commands, Parameters, and Descriptions

Command Parameters Description

x ′ XSCALE * x XOFFSET+=

y ′ YSCALE * x YOFFSET+=

LO 2005.10 5-3

Draft 9/10/05

Batch Mode Taurus Layout Tutorial

COMMENT Load a GDS file, define a simulation point & cut-line,COMMENT and save a TL0 file and a TL1 file.

$ Load a GDS fileLOAD GDS NAME=myfile.gds

$ Define a simulation point and a cut-linePOINT X=13 Y=4.0CUTLINE X1=17.2 Y1=4.2 X2=-0.2 Y2=4.2

$ Save a .tl0 and a .tl1 fileSAVE TL0 NAME=myPoint.tl0SAVE TL1 NAME=myLine.tl1

$ (Since there is no VISUAL command, TAURUS LAYOUT will now terminate)

Figure 5-1 Simple command file for Taurus Layout showing file loading and saving

COMMENT Load a TL2 file, define a simulation cut-line, and saveCOMMENT a TL1 file. Shift some polygons and save additional files.

$ Load a TL2 fileLOAD TL2 NAME=myfile.tl2

$ Define a simulation cut-lineCUTLINE X2=16 Y1=4. Y2=4.0 X1=9.00

$ Save a .tl1 fileSAVE TL1 NAME=testGold.tl1

$ Shift the Contact layer 0.2 microns to the right & write a fileSHIFT MASK=Contact DX=0.2SAVE TL1 NAME=testGolda.tl1

$ Shift the Contact layer another 0.2 microns & write a fileSHIFT MASK=Contact DX=0.2SAVE TL1 NAME=testGoldb.tl1

$ Shift the Contact layer back to the original X position, then$ shift to a new Y position, then write a fileSHIFT MASK=Contact DX = -0.4 DY = 0.3SAVE TL1 NAME=testGoldc.tl1

$ Expand all polygons on all layers by 10%SCALE ALL XSCALE=1.1 YSCALE=1.1

$ Specify the VISUAL command so that TAURUS LAYOUT’s main window will appear$ and remain onscreenVISUAL

Figure 5-2 Command file for Taurus Layout showing polygon shifting and scaling

5-4 LO 2005.10

Draft 9/10/05

INDEX

L

Index
AApply button, Color & Pattern Selection window 3-
8

Apply button, Mask Layer Properties window 3-3

Bbatch mode 5-1

box statement 4-15

unexpected 4-6bright field See Clear field 3-10

Browse button, Define Simulation Point window 4-3

browsers

Choose .t10 Filename 4-3Load MLP File 3-15Save MLP File 3-14

Fig. 3-14saving a file 3-13specifying a file name 3-14

bus.gds file 2-10, 4-23

bus.mlp file 4-23

bus.tl2 file 4-20–4-23

buttons

Apply, Color & Pattern Selection window 3-8Apply, Mask Layer Properties window 3-3Browse, Define Simulation Point window 4-3Clear, General Properties panel 3-10Connectivity Analysis, Taurus Layout main

window 4-23Edit Color & Pattern..., Mask Layer

Properties window 3-7, 3-17Expand, Cell List window 2-13Ignore Layer, Mask Layer Properties window

3-6IWB, Taurus Layout main window 3-21

Fig. 2-7

Mask, Taurus Layout main window 3-12–3-21, 4-2

Fig. 2-7Mode, Taurus Layout main window 2-5, 2-6Move Layer, Mask Layer Properties window

3-5OK, Mask Layer Properties window 3-3Opaque, General Properties panel 3-10Print, Printer Setup window 2-24Show Grid, Grid Properties window 2-19Snap to Grid, Grid Properties window 2-19, 3-

19Structure, Taurus Layout main window 2-7, 4-9

Fig. 2-7

Ccapacitance statement 4-15

unexpected 4-6, 4-9Cell List window 2-12

Fig. 2-12cells

CONT 2-12expanding selected 2-13new 2-12VIA 2-12

central display area 2-6

changing

background color 2-19Taurus Layout grid 2-19view of a mask layout 2-17

Choose .tl0 Filename browser 4-3

Clearbutton, General Properties panel 3-10field 3-10

clearing mask layer properties 3-15

Color & Pattern Selection window 3-7

Fig. 3-7

O 2005.10 Index-1

Draft 9/10/05

Index Taurus Layout Tutorial

Color squares 3-7

colors, selecting 3-6

command file for Taurus Layout showing polygon shifting and scaling Fig. 5-4

completed ground plane/dielectric/conductor stack corresponding to the layers in Step 1d Fig. 4-27

conducting layers

definition 4-13placement of, relative to dielectrics 4-25undefining 4-16

connectivity analysis 4-22

Connectivity Analysis button, Taurus Layout main window 4-23

Connectivity Analysis icon, Taurus Layout main window 2-9

CONT cell 2-12

Contact layer 3-4, 3-5, 3-8

contact layers 4-19

automatic extension of 4-29conventions

typographical 1-vicreating files

.mlp 3-13

.rc2 4-10

.rc3 4-17

.ri3 4-10

.tl1 4-4

.tl2 3-21, 4-6Cursor Location field 2-6, 2-16, 2-18

cut-line 4-4, 5-1

Ddark field See Opaque field 3-10

Define Simulation Cut-Line window 3-16, 4-4–4-16

Fig. 4-5Define Simulation Point window 4-3

Fig. 4-3Define Simulation Rectangle window 3-16, 3-21,

4-7

Fig. 4-7defining

additional mask layer properties in IWB mode 3-12field and optical properties 3-10layer properties 3-8simulation rectangle, IWB mode 4-9

deleting polygons, one at a time 3-19

Dielectric field 3-9, 4-16

dielectric layers

automatic creation 4-25automatic placement 4-25creating additional dielectrics 4-15default layer thickness 4-16definition 4-13intermetal thickness 4-28placement of, relative to conductors 4-25undefining 4-16

Draw Polygons icon, Taurus Layout main window 2-8, 3-18

Draw Rectangles icon, Taurus Layout main window 2-8, 3-17, 4-11

drawing

irregular polygons 3-18polygons 3-17rectangles 3-17

EEdit Color & Pattern... button, Mask Layer

Properties window 3-7, 3-17

editing and drawing polygons 3-16

editing polygons 3-18

electrical connection of polygons 4-20, 4-24

Eps value 3-12

erasing an entire mask layout 2-22

example

of an .rc2 file Fig. 4-14of an .rc3 file Fig. 4-19

Expand button, Cell List window 2-13

expanding selected cell 2-13

Extract Neticon, Taurus Layout main window 2-9tool 2-10tool available to Raphael NES users Fig. 2-10

FField layer 3-4, 3-5, 3-8

fields

Clear 3-10Cursor Location 2-6, 2-16, 2-18Dielectric 3-9, 4-16Grid Points per Micron 2-19Layer 3-7Layer Name 3-3, 3-11Magnification 2-6, 2-18

Index-2 LO 2005.10

Draft 9/10/05

Taurus Layout Tutorial Index

Master Cell 2-13Minimum Grid Spacing 2-19Opaque 3-10Phase Shift 3-11Save to File 3-22, 4-3Thickness 3-9, 4-16Transmission 3-11Volt 3-9, 4-16

files

.mlp 3-13, 5-1

.rc2 4-10

.rc3 4-17, 5-1

.ri3 4-10

.t2p 5-1

.tl0 4-1, 5-1

.tl1 4-1, 4-4

.tl2 4-1, 4-6, 5-1bus.gds 2-10, 4-23bus.mlp 4-23bus.tl2 4-20–4-23GDS II 5-1GDS II Stream 2-12, 2-13MLP 3-14myfile.mlp 3-14s4ex4m.gds 2-10–2-18, 3-4–3-14s4ex4m.mlp 3-14tl1 5-1

Front & Side View window 4-18

Fig. 4-18

GGDS file

GDS II Stream file format 3-2, 3-5, 3-21hierarchical 4-23loading 2-10mask layer names 3-1opening 2-11saving 3-20

GDS File Information window 2-10–2-15, 3-2, 3-4, 4-13

Fig. 2-14showing information about structure generated for

Raphael Fig. 4-13GDS II files 5-1

reading capability 2-15text attached to polygons 4-21

GDS II Stream file 2-12, 2-13, 3-16

General Properties panel, Mask Layer Properties

window 3-3, 3-10

Grid Points per Micron field 2-19

Grid Properties window 2-19, 2-20

Fig. 2-19ground plane

automatic placement 4-25bottom ground plane 4-14details of definition 4-15dielectric stack corresponding to the layers in Step

1d Fig. 4-26top ground plane 4-15

Hhierarchical GDS file 4-23

Iicons

Connectivity Analysis, Taurus Layout main window 2-9

Draw Polygons, Taurus Layout main window 2-8, 3-18

Draw Rectangles, Taurus Layout main window 2-8, 3-17, 4-11

Extract Net, Taurus Layout main window 2-9Pan Layout, Taurus Layout main window 2-8Pan, Taurus Layout main window 2-17, 3-16Select Polygons, Taurus Layout main window

2-8Select, Taurus Layout main window 3-19Sim. Line, Taurus Layout main window 2-9, 4-

4, 4-7, 4-13Sim. Point, Taurus Layout main window 2-9, 4-

2Sim. Rect, Taurus Layout main window 2-9, 4-8Tools, Taurus Layout main window 2-5, 2-6Zoom, Taurus Layout main window 2-8, 2-17,

3-16Ignore Layer button, Mask Layer Properties

window 3-6

ignoring layers 3-6

intermetal dielectric 4-28

interpretation of conductor and dielectric thicknesses Fig. 4-28

introduction 1-iii–??, 1-v–??typographical conventions 1-vi

IWB button, Taurus Layout main window 3-21

IWB mode 3-12, 4-9

LO 2005.10 Index-3

Draft 9/10/05


LLayer field 3-7

Layer Name field 3-3, 3-11

Layer Properties panel, Mask Layer Properties window 2-7, 3-9, 4-9, 4-11

layers

Contact 3-4, 3-5, 3-8Field 3-5, 3-8ignoring 3-6Metal 3-8sequence 3-4

lists, Mask Layers 2-6, 2-16, 3-2–3-17

Load GDS File browser window 2-11

Fig. 2-11Load MLP File browser 3-15

loading

examining GDS File 2-10mask layer properties 3-15polygons from .tl2 file 3-23saving polygons 3-20

MMagnification field 2-6, 2-18

Mapping Text Layers to Polygon Layers window 4-21

Fig. 4-21Mask button, Taurus Layout main window 3-12–3-

21, 4-2

mask layer

sequence 3-4thickness, automatic assignment 4-13

mask layer names

automatic renaming 3-16, 4-13default name 3-2, 4-13undefined 3-2, 3-16

Mask Layer Properties window 2-7, 2-22, 3-3–3-17, 4-2, 4-11

(when in Structure mode) Fig. 4-12changes to Contact layer Fig. 3-11IWB mode Fig. 3-13open in Mask mode Fig. 3-3open in Structure mode Fig. 3-9

mask layer properties, resetting 3-15

Mask Layers list 2-6, 2-16, 3-2–3-17

mask layout, viewing 2-15

Mask mode 3-10, 4-1

Taurus Topography 4-1Master Cell field 2-13

merge algorithm 4-20

merge statement 4-19

Metal layer 3-8

Minimum Grid Spacing field 2-19

MLP file 3-14

definition 3-13loading 3-15saving 3-13

Mode buttons, Taurus Layout main window 2-5, 2-6

modes

IWB 3-12, 4-9Fig. 2-7

Mask 3-10, 4-1Fig. 2-7

Pan 2-17Structure 2-7, 3-9, 4-9, 4-10

Fig. 2-7Zoom 2-17

Move Layerbuttons, Mask Layer Properties window 3-5panel, Mask Layer Properties window 3-5

myfile.mlp 3-14

Nnew cell 2-12

OOK button, Mask Layer Properties window 3-3

Opaquebutton, General Properties panel 3-10field 3-10

Optical Properties panel, Mask Layer Properties window 2-7, 3-11, 4-2

Options menu

including contacts/vias to ground plane in generated .rc2 file Fig. 4-13

including contacts/vias to ground plane in generated .rc3 file Fig. 4-17

outlines of polygons 2-18

overlapping rule for Raphael 4-27

Index-4 LO 2005.10

Draft 9/10/05


PPan icon, Taurus Layout main window 2-17, 3-16

Pan Layout icon, Taurus Layout main window 2-8

Pan mode 2-17

panels

General Properties, Mask Layer Properties window 3-3, 3-10

Layer Properties, Mask Layer Properties window 2-7, 3-9, 4-9, 4-11

Move Layer, Mask Layer Properties window 3-5

Optical Properties, Mask Layer Properties window 2-7, 3-11, 4-2

panning 2-17

Pattern squares 3-7, 3-8

pattern-fill 2-18

patterns, selecting 3-6

outline pattern 3-8solid pattern 3-8

Phase Shift field 3-11

placing the bottom-most conductor (cond_bott) on top of the bottom-most dielectric (diel_bott) Fig. 4-27

Poly layer 3-4–3-8

poly3d statement 4-19

unexpected 4-9Polygon Properties window 4-13, 4-18

tag text to polygons Fig. 2-23polygons 2-18, 3-11

clear field are opaque Fig. 3-10deleting one at a time 3-19drawing and editing 3-16drawing irregular 3-18editing 3-18electrically connected 4-20, 4-24loading from .tl2 file 3-23opaque layer represent clear openings Fig. 3-10outlines 2-18saving and loading 3-20saving to .tl2 file 3-21selecting 3-19undeleting 3-19

PostScript 2-23, 2-24

Print button, Printer Setup window 2-24

Printer Setup window 2-23

Fig. 2-24printing 2-23

layout to printer 2-23mask layout 2-23

QQuit confirmation window 2-25

Fig. 2-25quitting Taurus Layout 2-25

RRaphael

creation of files 4-9overlapping rule 4-27RC2 solver 4-10RC3 solver 4-17, 4-20RI3 solver 4-10

rectangles, drawing 3-17

rectangular subsetting 3-21, 4-7

related publications

TCAD Products and Utilities Installation Manual 1-vi

resetting mask layer properties

all layers 3-15automatic layer renaming 3-16selected layers 3-16

resetting the view 2-18

Rho value 3-13

Ss4ex4m.gds file 2-10–2-18, 3-4–3-14

s4ex4m.mlp file 3-14

save layout to

.tl2 file 3-21GDS file 3-20

Save MLP File browser 3-14

Fig. 3-14Save to File field 3-22, 4-3

saving

layout to PostScript file 2-24loading polygons 3-20mask layer properties 3-13polygons to .tl2 3-21

Scale All Layers window 2-21

scaling

layout through the GUI 2-21polygons in X and Y directions Fig. 2-21

select File-Save menu item Fig. 1-ix

Select icon, Taurus Layout main window 3-19

LO 2005.10 Index-5

Draft 9/10/05


Select Polygons icon, Taurus Layout main window 2-8

selecting

cell for expansion 2-12polygon 3-19

sequence of layers 3-4

Show Grid button, Grid Properties window 2-19

side view

structure with automatic extension of contact and via polygons Fig. 4-30

structure without automatic extension of contact and via polygons Fig. 4-30

Side View window 4-13

corresponding to cut-line drawn in the upper left quarter of Figure 3-14 Fig. 4-25

Fig. 4-14vertical spaces 4-28

Sim. Line icon, Taurus Layout main window 2-9, 4-4, 4-7, 4-13

Sim. Point icon, Taurus Layout main window 2-9, 4-2

Sim. Rect icon, Taurus Layout main window 2-9, 4-8

simple command file for Taurus Layout showing file loading and saving Fig. 5-4

simple multilayer mask layout Fig. 4-29

simulation cut-line

defining 4-4including in a .tl2 file 4-7removing 4-6removing from a .tl2 file 4-7

simulation point 5-1

removing 4-4simulation rectangle 5-1

creating three-dimensional structure 4-18defining 4-6removing 3-23, 4-8

Snap to Grid button, Grid Properties window 2-19, 3-19

starting Taurus Layout 2-2

status line 2-6

Structure button, Taurus Layout main window 2-7, 4-9

Structure mode 2-7, 3-9, 4-9, 4-10

STUDIO tool palette 2-2

subsetting of a mask layout 3-21

Ttagging text

to a polygon 2-22Taurus Layout icon, STUDIO Tool Palette

Fig. 2-3Taurus Layout input-output overview Fig. 1-2

Taurus Layout main window 2-3–2-17, 3-3–3-16, 4-2, 5-1

after loading file s4ex4m.gds Fig. 2-16Fig. 2-5four rectangles drawn Fig. 4-12Mask mode, Structure mode, and IWB mode buttons

Fig. 2-7showing connectivity analysis for a portion of file

bus.tl2 4-24Taurus Lithography, creation of files 4-6

Taurus Topography-Raphael interface 2-7, 2-9, 3-21, 4-1–4-9

TCAD Products and Utilities Installation Manual 1-vi

text

attached GDS II file polygons 4-21information in GDS II files 3-20RC2 and RC3 files 4-21

Thickness field 3-9, 4-16

TMA SUPREM-3, creation of files 4-2

TMA WorkBench 5-1

tools

Extract Net 2-10Fig. 2-10

STUDIO palette 2-2Tools icons, Taurus Layout main window 2-5, 2-6

Transmission field 3-11

TSUPREM-4, creation of files 4-4

typographical conventions 1-vi

UUNDEF layers 3-16

undeleting a polygon 3-19

understanding

GDS File Information window 2-13Mask, Structure, and IWB modes 2-7Taurus Layout main window 2-4Taurus Layout main window Mode buttons and

Tools icons 2-6Tools icons 2-8

Index-6 LO 2005.10

Draft 9/10/05


VVIA cell 2-12

via layers 4-19

automatic extension of 4-29view polygon outlines 2-18

viewing the mask layout 2-15

Volt field 3-9, 4-16

voltage bias, assigning 4-16

Wwindow statement 4-15

unexpected 4-6window3d statement 4-19, 4-20

unexpected 4-9windows

Cell List 2-12Fig. 2-12

Color & Pattern Selection 3-7Fig. 3-7

Define Simulation Cut-Line 3-16, 4-4–4-16Fig. 4-5

Define Simulation Point 4-3Fig. 4-3

Define Simulation Rectangle 3-16, 3-21, 4-7Fig. 4-7

Front & Side View 4-18Fig. 4-18

GDS File Information 2-10–2-15, 3-2, 3-4, 4-13Fig. 2-14

Grid Properties 2-19, 2-20Fig. 2-19

Load GDS File browser 2-11Fig. 2-11

Mapping Text Layers to Polygon Layers 4-21Fig. 4-21

Mask Layer Properties 2-7, 2-22, 3-3–3-17, 4-2, 4-11

Fig. 3-3, 3-9Polygon Properties 4-13, 4-18

Fig. 2-23Printer Setup 2-23

Fig. 2-24Quit confirmation 2-25

Fig. 2-25Scale All Layers 2-21Side View 4-13

Fig. 4-14

Taurus Layout main 2-3–2-17, 3-3–3-16, 4-2, 5-1

Fig. 2-5, 2-16

ZZmax

value 3-12Zmin

value 3-12zoom 2-17

Zoom icon, Taurus Layout main window 2-8, 2-17, 3-16

Zoom mode 2-17

LO 2005.10 Index-7

Draft 9/10/05


Index-8 LO 2005.10

Draft 9/10/05

taurus modeling environment, taurus layout tutorialjmbussat/physics290e/fall-2006/... · taurus...

Documents