technical data for alicat m-series mass flow meters 0 – 0 ... · 0 – 5000 slpm 0
TRANSCRIPT
DOC-SPECS-METERS Rev.26 1 August 17, 2018
Tel: 888-290-6060www.alicat.com/m
Technical Data for Alicat M-Series Mass Flow Meters0 – 0.5 sccm Full Scale through 0 – 5000 slpm Full Scale
Performance M-Series Mass Flow Meter
Accuracy at calibration conditions after tare ± (0.8% of Reading + 0.2% of Full Scale)
High Accuracy at calibration conditions after tare ± (0.4% of Reading + 0.2% of Full Scale)High Accuracy option not available for units ranged under 5 sccm or over 500 slpm.
Accuracy for Bidirectional Metersat calibration conditions after tare ± (0.8% of reading + 0.2% of total span from positive full scale to negative full scale)
Repeatability ± 0.2% Full Scale
Zero Shift and Span Shift 0.02% Full Scale / ºCelsius / Atm
Operating Range / Turndown Ratio 0.5% to 100% Full Scale / 200:1 Turndown
Maximum Measurable Flow Rate up to 128% Full Scale (Gas Dependent)
Typical Response Time 10 ms (Adjustable)
Warm-up Time < 1 Second
Standard Specifications (Contact Alicat for available options.)
Range Specific Specifications
Communications / Power M-Series Mass Flow MeterMonochrome LCD or Color TFT Display with
integrated touchpad Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature
Digital Communications Options1 RS-232 Serial / RS-485 Serial / Modbus RTU / PROFIBUS / EtherNet/IP / DeviceNet / Modbus TCP/IP / EtherCAT
Analog Signal2 Options 0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Optional Secondary Analog Output Signal2 0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Electrical Connection Options 8-Pin Mini-DIN / 9-pin D-sub (DB9) / 15-pin D-sub (DB15) / 6-pin locking / 8-pin M12
Supply Voltage 7 to 30 Vdc (15-30 Vdc for 4-20 mA outputs)
Supply Current 0.040 Amp (+ output current on 4-20 mA)
1. The Digital Output Signal communicates Mass Flow, Volumetric Flow, Pressure and Temperature 2. The Analog Output Signal and Optional Secondary Analog Output Signal communicate your choice of Mass Flow, Volumetric Flow,
Pressure or Temperature
Operating Conditions M-Series Mass Flow Meter
Mass Reference Conditions (STP) Field-selectable, defaults to 25°C & 14.696 psia unless requested otherwise
Operating Temperature −10 to +60 ºCelsius
Humidity Range (Non–Condensing) 0 to 100%
Maximum Internal Pressure (Static) 145 psig Maximum Allowable Instantaneous Differential
Pressure Across Device (Inlet to Outlet) 75 psid
Proof Pressure 175 psig
Mounting Attitude Sensitivity None
Ingress Protection IP40
Wetted Materials303 & 302 Stainless Steel, Viton®, Heat Cured Silicone Rubber, Glass Reinforced Polyphenylene Sulfide, Heat Cured Epoxy, Aluminum, Gold, Silicon, Glass.If your application demands a different material, please contact Alicat.
Features M-Series Mass Flow Meter
Gas Select™ 5.0
Gas Select™ 5.0 provides 98 Preloaded Gas Calibrations: See the following page for a complete list. If your application calls for a gas not on this list, please let us know. We can also calibrate to a wide variety of complex gas mixtures involving up to eight gas constituents. For corrosive gases and refrigerants see Alicat’s MS-Series meters (www.alicat.com/ms).
COMPOSER™ COMPOSER™ is a feature of Gas Select™ 5.0 that allows users to defines up to 20 user gas compositions with up to 5 constituent gases per mix (www.alicat.com/composer).
Full Scale Flow Mass Meter
Pressure Drop at FS Flow
(psid) venting to atmosphere1
Mechanical Dimensions2 Process Connections3
0.5 sccm to 1 sccm 1.03.9”H x 2.4”W x 1.1”D
M-5 (10-32) Female Thread (Shipped with M-5 (10-32) Male Buna-N O-ring face
seal to 1/8” Female NPT fittings.)2 sccm to 50 sccm 1.0
100 sccm to 20 slpm 1.0 4.1”H x 2.4”W x 1.1”D 1/8” NPT Female50 slpm 2.0
4.4”H x 4.0”W x 1.6”D 1/4” NPT Female100 slpm 2.5250 slpm 2.1 5.0”H x 4.0”W x 1.6”D 1/2” NPT Female500 slpm 4.0
5.0”H x 4.0”W x 1.6”D3/4” NPT Female
(A 1-1/4” NPT Female optional process connection is available for 2000 slpm meters.)
1000 slpm 6.01500 slpm 9.02000 slpm 5.0 5.3”H x 5.2”W x 2.9”D3000 slpm 7.1 5.3”H x 5.2”W x 2.9”D 1-1/4” NPT Female5000 slpm 3.4 6.3”H x 5.2”W x 3.9”D 2” NPT Female
1. Lower Pressure Drops Available, please see our WHISPER-Series mass flow controllers at www.alicat.com/whisper.2. See drawings for metric equivalents3. Compatible with Swagelok® tube, Parker®, face seal, push connect and compression adapter fittings. VCR and SAE connections upon request.
DOC-SPECS-METERS Rev.26 2 August 17, 2018
Tel: 888-290-6060www.alicat.com/m
PURE NON-CORROSIVE GASESGas
NumberShort Name Long Name
14 C2H2 Acetylene0 Air Air1 Ar Argon
16 i-C4H10 i-Butane13 n-C4H10 n-Butane4 CO2 Carbon Dioxide3 CO Carbon Monoxide
60 D2 Deuterium5 C2H6 Ethane
15 C2H4 Ethylene (Ethene)7 He Helium6 H2 Hydrogen
17 Kr Krypton2 CH4 Methane
10 Ne Neon8 N2 Nitrogen9 N2O Nitrous Oxide
11 O2 Oxygen12 C3H8 Propane19 SF6 Sulfur Hexafluoride18 Xe Xenon
REFRIGERANTS*Gas
NumberShort Name Long Name
100 R-11 Trichlorofluoromethane101 R-115 Chloropentafluoroethane102 R-116 Hexafluoroethane103 R-124 Chlorotetrafluoroethane104 R-125 Pentafluoroethane105 R-134A Tetrafluoroethane106 R-14 Tetrafluoromethane
107 R-142b Chlorodifluoroethane
108 R-143a Trifluoroethane109 R-152a Difluoroethane110 R-22 Difluoromonochloromethane111 R-23 Trifluoromethane112 R-32 Difluoromethane113 RC-318 Octafluorocyclobutane
114 R-404A 44% R-125 / 4% R-134A / 52% R-143A
115 R-407C 23% R-32 / 25% R-125 / 52% R-134A
116 R-410A 50% R-32 / 50% R-125117 R-507A 50% R-125 / 50% R-143A
*Refrigerant gases are only available on S-Series instruments that are compatible with these gases.
WELDING GASESGas
NumberShort Name Long Name
23 C-2 2% CO2 / 98% Ar22 C-8 8% CO2 / 92% Ar21 C-10 10% CO2 / 90% Ar
140 C-15 15% CO2 / 85% Ar141 C-20 20% CO2 / 80% Ar20 C-25 25% CO2 / 75% Ar
142 C-50 50% CO2 / 50% Ar24 C-75 75% CO2 / 25% Ar25 He-25 25% He / 75% Ar
143 He-50 50% He / 50% Ar26 He-75 75% He / 25% Ar
144 He-90 90% He / 10% Ar27 A1025 90% He / 7.5% Ar / 2.5% CO2
28 Star29 Stargon CS 90% Ar / 8% CO2 / 2% O2
BREATHING GASESGas
NumberShort Name Long Name
164 EAN-32 32% O2 / 68% N2165 EAN 36% O2 / 64% N2166 EAN-40 40% O2 / 60% N2167 HeOx-20 20% O2 / 80% He168 HeOx-21 21% O2 / 79% He169 HeOx-30 30% O2 / 70% He170 HeOx-40 40% O2 / 60% He171 HeOx-50 50% O2 / 50% He172 HeOx-60 60% O2 / 40% He173 HeOx-80 80% O2 / 20% He174 HeOx-99 99% O2 / 1% He175 EA-40 Enriched Air-40% O2176 EA-60 Enriched Air-60% O2177 EA-80 Enriched Air-80% O2
178 Metabol Metabolic Exhalant (16% O2/ 78.04% N2 / 5% CO2 / 0.96% Ar)
FUEL GASESGas
NumberShort Name Long Name
185 Syn Gas-1 40% H2 + 29% CO + 20% CO2 + 11% CH4
186 Syn Gas-2 64% H2 + 28% CO + 1% CO2 + 7% CH4
187 Syn Gas-3 70% H2 + 4% CO + 25% CO2 + 1% CH4
188 Syn Gas-4 83% H2 + 14% CO + 3% CH4
189 Nat Gas-1 93% CH4 / 3% C2H6 / 1% C3H8 / 2% N2 / 1% CO2
190 Nat Gas-2 95% CH4 / 3% C2H6 / 1% N2 / 1% CO2
191 Nat Gas-395.2% CH4 / 2.5% C2H6 / 0.2% C3H8 / 0.1% C4H10 / 1.3% N2 /
0.7% CO2
192 Coal Gas 50% H2 / 35% CH4 / 10% CO / 5% C2H4
193 Endo 75% H2 + 25% N2194 HHO 66.67% H2 / 33.33% O2
195 HD-5 LPG 96.1% C3H8 / 1.5% C2H6 / 0.4% C3H6 / 1.9% n-C4H10
196 HD-10 LPG 85% C3H8 / 10% C3H6 / 5% n-C4H10
STACK GASESGas
NumberShort Name Long Name
200 FG-1 2.5% O2 / 10.8% CO2 / 85.7% N2 / 1% Ar
201 FG-2 2.9% O2 / 14% CO2 / 82.1% N2 / 1% Ar
202 FG-3 3.7% O2 / 15% CO2 / 80.3% N2 / 1% Ar
203 FG-4 7% O2 / 12% CO2 / 80% N2 / 1% Ar
204 FG-5 10% O2 / 9.5% CO2 / 79.5% N2 / 1% Ar
205 FG-6 13% O2 / 7% CO2 / 79% N2 / 1% Ar
CHROMATOGRAPHY GASESGas
NumberShort Name Long Name
29 P-5 5% CH4 / 95% Ar206 P-10 10% CH4 90% Ar
Alicat Gas Select™ 5.0 Preloaded GasesPURE CORROSIVES*
Gas Number
Short Name Long Name
32 NH3 Ammonia80 1Butene Butylene (1-Butene)
81 cButene Cis-Butene (cis-2-butene)
82 iButene Iso-Butene83 tButene Trans-Butene84 COS Carbonyl Sulfide33 Cl2 Chlorine85 CH3OCH3 Dimethylether 34 H2S Hydrogen Sulfide (H2S)
31 NF3 NF3 (Nitrogen Trifluoride)
30 NO NO (Nitric Oxide)36 C3H6 Propylene (Propylene)86 SiH4 Silane (SiH4)35 SO2 Sulfur Dioxide
*Pure Corrosive gases are only available on S-Series instruments that are compatible with these gases.Gas numbers 33 and 35 are not available on controllers.
BIOREACTOR GASESGas
NumberShort Name Long Name
145 Bio-5M 5% CH4 / 95% CO2146 Bio-10M 10% CH4 / 90% CO2147 Bio-15M 15% CH4 / 85% CO2148 Bio-20M 20% CH4 / 80% CO2149 Bio-25M 25% CH4 / 75% CO2150 Bio-30M 30% CH4 / 70% CO2151 Bio-35M 35% CH4 / 65% CO2152 Bio-40M 40% CH4 / 60% CO2153 Bio-45M 45% CH4 / 55% CO2154 Bio-50M 50% CH4 / 50% CO2155 Bio-55M 55% CH4 / 45% CO2156 Bio-60M 60% CH4 /40% CO2157 Bio-65M 65% CH4 /35% CO2158 Bio-70M 70% CH4 / 30% CO2159 Bio-75M 75% CH4 / 25% CO2160 Bio-80M 80% CH4 / 20% CO2161 Bio-85M 85% CH4 / 15% CO2162 Bio-90M 90% CH4 / 10% CO2163 Bio-95M 95% CH4 / 5% CO2
LASER GASESGas
NumberShort Name Long Name
179 LG-4.5 4.5% CO2 / 13.5% N2 / 82% He180 LG-6 6% CO2 / 14% N2 / 80% He181 LG-7 7% CO2 / 14% N2 / 79% He182 LG-9 9% CO2 / 15% N2 / 76% He183 HeNe-9 9% Ne / 91% He
184 LG-9.4 9.4% CO2 / 19.25% N2 / 71.35% He
O2 CONCENTRATOR GASESGas
NumberShort Name Long Name
197 OCG-89 89% O2 / 7% N2 / 4% Ar198 OCG-93 93% O2 / 3% N2 / 4% Ar199 OCG-95 95% O2 / 1% N2 / 4% Ar
DOC-SPECS-METERS Rev.26 3 August 17, 2018
Tel: 888-290-6060www.alicat.com/m
M-Series:0 – 0.5 sccm0 – 1 sccm0 – 2 sccm0 – 5 sccm0 – 10 sccm0 – 20 sccm0 – 50 sccm
M-Series:0 – 100 sccm0 – 200 sccm0 – 500 sccm0 – 1 slpm0 – 2 slpm0 – 5 slpm0 – 10 slpm0 – 20 slpm
0.5 sccm to 50 sccm approximate shipping weight: 0.8 lb
100 sccm to 20 slpm approximate shipping weight: 1.0 lb
M-Series:0 – 50 slpm0 – 100 slpm
50 slpm to 100 slpm approximate shipping weight: 2.4 lb.
1.600in40.64mm
110.92mm4.367in
4.000in101.60mm
1M-50SLPM-D-MSPEC
1/4/2016DATE
REV.
12.70mm.500in
.800in20.32mm
12.70mm.500in
.800in20.32mm Both sides
1/4 NPT
19.05mm.750in
3.250in82.55mm
4.45mm.175in
1.425in36.20mm
4X 8-32 UNC .375in[9.53mm]
1M-20SLPM-D-MSPEC
1/4/2016DATE
REV.
.525in13.34mm
.350in8.89mm
13.34mm.525in
.350in8.89mm
Both Sides1/8 NPT
4.067in103.30mm
2.375in60.33mm
1.050in26.67mm
23.50mm.925in
.150in3.81mm
2.225in56.52mm
.125in3.18mm
2X 8-32 UNC .350in 8.89mm
2.375in60.33mm
3.897in98.98mm
DATE
M-0.5SCCM-D-MSPECREV.1
1/4/2016
[8.53mm].336in
.525in[13.34mm]
1.050in26.67mm
.925in
3.175mm
23.495mm
2.225in56.52mm
.125in.150in
3.81mm
2X 8-32 UNC .175in[4.45mm]
.525in[13.34mm]
.336in[8.53mm]
Both SidesM5X0.8 (10-32 UNF)
DOC-SPECS-METERS Rev.26 4 August 17, 2018
Tel: 888-290-6060www.alicat.com/m
M-Series:0 – 250 slpm
250 slpm approximate shipping weight: 3.2 lb.
M-Series:0 – 500 slpm0 – 1000 slpm0 – 1500 slpm
500 slpm to 1500 slpm approximate shipping weight: 3.5 lb
M-Series:0 – 2000 slpm
2000 slpm approximate shipping weight: 4.5 lb
4.45mm.175in
36.20mm
19.05mm.750in
1.425in
3.250in82.55mm
4X 8-32 UNC .375in[9.53mm]
20.32mm.800in
.800in20.32mm
Both sides3/4 NPT
1.600in40.64mm
1/4/2016DATE
1M-500SLPM-D-MSPECREV.
.800in20.320mm
.800in20.320mm
126.16mm4.967in
101.60mm4.000in
4.000in101.60mm
1.600in40.64mm
20.32mm.800in
.800in20.32mm
Both Sides1/2 NPT
36.20mm1.425in
4.45mm19.05mm
.750in.175in
3.250in82.55mm
4X 8-32 UNC .375in[9.53mm]
.800in20.32mm
.800in20.32mm
4.967in126.16mm
1M-250SLPM-D-MSPEC
1/4/2016DATE
REV.
DATE
2M-2000SLPM-D-MSPEC
8/1/2018REV.
5.200in132.08mm
5.287in134.29mm
1.450in36.83mm
1.120in28.45mm
3/4" NPT
28.45mm1.120in
1.450in36.83mm3/4" NPT
2.900in73.66mm
X 8-32 UNC .330in[8.382mm]4
34.29mm1.350in
5.08mm.200in
97.79mm3.850in
68.58mm2.700in
DOC-SPECS-METERS Rev.26 5 August 17, 2018
Tel: 888-290-6060www.alicat.com/m
M-Series:0 – 3000 slpm
3000 slpm approximate shipping weight: 4.5 lb
1/4/2016DATE
1M-3000SLPM-D-MSPECREV.
5.08mm.200in
.330in[8.382mm] 8-32 UNCX 4
1.350in34.29mm
3.850in97.79mm
68.58mm2.700in
2.900in73.66mm
36.83mm1.450in
.960in24.38mm
Both Sides1-1/4 NPT"
24.38mm.960in
1.450in36.83mm5.200in
132.08mm
5.287in134.29mm
M-Series:0 – 5000 slpm
5000 slpm approximate shipping weight:14 lb 0REV.
DATE
08/3/2018
M-5000SLPM-D-MSPEC
132.08mm 5.200in
159.18mm
6.267in
97.54mm3.840in
1.920in 48.77mm
36.83mm1.450in
2" NPT
1.920in 48.77mm
36.83mm1.450in
2" NPT
90.04mm3.545in
7.49mm.295in
1.350in 34.29mm 3.850in
97.79mm
4X .136 .4568-32 UNC .300