testing of hamamatsu sensors - kitekphartmann/cms/meetings/hpk-first...testing of hamamatsu sensors...

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Testing of Hamamatsu Sensors All 79 M200 senors delivered to Ka Testing takes ~2h ( 3-4 sensors a day) No discrepancy with company results! • Measured: – 1. batch all 8 – 2. batch 8 (W6A) 6 (W6B) (2missing) – 3. batch W6A (1) ======================= • 23 sensor total Optical inspection: 25 (all good)

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Testing of Hamamatsu Sensors • All 79 M200 senors delivered to Ka• Testing takes ~2h ( à 3-4 sensors a day)• No discrepancy with company results!• Measured:

– 1. batch all 8 – 2. batch 8 (W6A) 6 (W6B) (2missing)– 3. batch W6A (1)

=======================• 23 sensor total

• Optical inspection: 25 (all good)

Company results• 160 sensor delivered (total) = 81920 strips• 159 grade A; 1 grade B (more later)• # of pinholes 12• DC NG (Leaky strips) 6• Implant open 1 (this we will not even find)• AC Al open (break) 1• Al short 2 à 4 strips (checked one and did not

find it with CaC measurement or optically)• à 24 bad strips in total• The worst sensor has 4 leaky strips• Variation for Vdepletion 45V to 225V

D1 D2 D3 D4 D5 D6 D7 D8 ave rage s tand de v Dic ke Flatne s s de live ry s c ratc h padCMS-W6B-SSSD 4919

1 28 20 8 25 28 -3 28 18 10 30 26 4 25,4 4,0 18.03.97 ok2 33 20 13 30 27 3 25 21 4 29 26 3 26,4 4,1 18.03.97 ok3 34 25 9 27 25 2 28 17 11 31 32 -1 27,4 5,0 18.03.97 ok4 34 23 11 30 31 -1 26 15 11 26 28 -2 26,6 5,4 18.03.97 ok

73 34 22 12 32 26 6 25 20 5 29 33 -4 27,6 4,9 500 40 16.04.97 ok74 23 22 1 32 32 0 26 17 9 31 25 6 26,0 5,0 501 30 16.04.97 ok75 31 25 6 28 28 0 25 14 11 26 27 -1 25,5 4,7 499 51 16.04.97 ok77 29 22 7 31 32 -1 26 18 8 30 27 3 26,9 4,5 501 48 16.04.97 ok78 33 25 8 30 31 -1 20 15 5 25 32 -7 26,4 6,0 502 44 16.04.97 ok79 34 23 11 25 27 -2 22 11 11 28 27 1 24,6 6,2 501 52 16.04.97 ok

mean 31 22 29 28 25 15 29 27 26,4σ 3 2 2 2 2 3 2 3 0,9∆ 9 0 9 0

σ 3 3 3 4

CMS-W6A-SSSD 4918 4 35 25 10 33 31 2 24 14 10 28 15 13 25,6 7,3 18.03.97 ok5 38 26 12 30 30 0 22 13 9 28 18 10 25,6 7,3 18.03.97 ok6 34 27 7 29 31 -2 24 15 9 30 10 20 25,0 7,8 18.03.97 ok7 34 26 8 28 30 -2 24 15 9 32 9 23 24,8 8,1 18.03.97 ok

12 36 32 4 32 35 -3 21 17 4 27 14 13 26,8 7,9 25.03.97 ok13 41 30 11 27 35 -8 25 15 10 25 16 9 26,8 8,2 25.03.97 ok15 35 23 12 29 25 4 23 17 6 29 15 14 24,5 6,1 25.03.97 ok16 33 27 6 23 25 -2 27 16 11 29 13 16 24,1 6,2 25.03.97 ok17 36 25 11 30 27 3 25 19 6 30 17 13 26,1 5,8 25.03.97 ok18 30 23 7 32 29 3 23 24 -1 26 12 14 24,9 5,8 25.03.97 ok19 39 30 9 32 31 1 24 14 10 21 10 11 25,1 9,1 25.03.97 ok20 35 28 7 24 29 -5 19 13 6 24 17 7 23,6 6,7 25.03.97 ok

mean 36 27 29 30 23 16 27 14 25,2

σ 3 3 3 3 2 3 3 3 0,9∆ 9 -1 7 14

σ 2 3 3 4

+803 +803+1433 +1433

93

93

The worst you can have

Optical fault, no electrical defect

Probing marks

Hamamatsu

Karlsruhe

Electrical summarysensor I@300V (nA) I@450V (nA) V_break>550 V_depletion C_TOT <Rpoly> (MΩ) mean CC [pF] <Ileakage>( nA) #faults april4919-1 168,49 210,79 ok ~60 2125 1,7 521,9 *0,03 0 y4919-2 121,19 136,69 ok ~60 2125 1,71 522,51 *0,02 0 y4919-3 151 165,49 ok ~60 2126 1,71 521,09 *0,02 04919-4 174,55 254,54 ok ~60 2124 1,71 522,07 0,38 04919-10 213,92 227,74 ok 2129 1,73 522,81 0,29 04919-11 180,05 193,74 ok 2126 1,71 521,36 0,25 04919-12 205,3 213,51 ok 2124 1,72 522,42 0,38 04919-13 230,13 251,94 ok 2127 1,75 521,35 0,3 04919-14 141,18 160,94 ok 2125 1,72 522,26 0,24 0

4818-4 164,88 171,06 ok ~60 2174 1,45 532,48 *0,02 0 Rpoly at 10V y4918-5 166,06 171,94 ok ~60 2171 1,76 535,1 *0,02 0 y4818-6 151,09 169,12 ok ~60 2165 1,77 532,51 *0,04 04918-7 121,08 132,66 ok ~60 2175 1,75 534,02 *0,03 0 y

4918-12 190,04 202,04 ok 2170 1,81 532,47 *0,06 04918-13 188,1 197,17 ok 2170 1,81 531,5 *0,06 04918-15 194,43 206,14 ok 2168 1,77 533,9 0,3 04918-16 175,51 180,32 ok 2168 1,78 533,65 *0,03 04918-17 193,26 219,9 ok 2171 1,78 534,13 0,11 04918-18 ok 45,24 2169 1,77 534 0,32 04918-19 241,19 247,32 ok 2168 1,76 534,93 0,26 04918-20 217,11 222,16 ok 2169 1,74 535,94 0,3 0

4919-39 212.68 221,78 ok 201,1 1815 1,91 520,21 0,28 2 pinh

CV

IV

Electrical characterization of sensors CV & IV first 5 (see last Tracker week)

Rpoly

Strip leakage current~8nA

CaC quasi

Sensor from 3rd delivery with 2 pinholes (agreement Hamamatsu & KA)

2 pinholes

B grade à A grade

I-t at 300V22.8e-5µA to 22.3µA

KA: Vbreak at ~130 and ITOT ~ 52µACompany: Vbreak at ~450 and ITOT ~26µA

I-t at 150V

14.0e-5µA to 0.7µA

Discovery of one dirt particle at the optical inspection

In GeneralAll cut lines are loaded with debris of the cutting process.

In this particular case:

Very sticky piece was covering the edge and extending to the outer guard.

It was very hard to remove using a soft brush.

A grade‚Vbreak‘ at ~ 500V

ITOT~4µA

Nominal IVNo Vbreak

ITOT~200nA

1h at 400V later

I-t of dubious sensor

Switch off dry air flush

Switch off dry air flush

Dry air on

50nA

Packaging (Hamamatsu)

Sensor Teststructures

Sandwich packaging in

envelope

• Bad to handle• Optical inspection

à HANDLING à against specification

• Takes time• Air cushion effect while placing à gliding

Some points• Packaging !• No barcode !• Perfect cut but somehow at an angle

(very small)• What stands „TYPE“ for?• Variation of Vdep ? 45V-220V• IV before and after cutting!?!• Explanation for their numbering (batch!?!)• Data in electrical format!?!• Passivation