the mycronic path back to semiconductors and into deep learning · 2020. 2. 25. · the mycronic...
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The Mycronic path back to Semiconductors and into Deep Learning
Thomas Kurian, Feb 25th 2020
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Mycronic enabling manufacturing of products for every day life
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By producing equipment for advanced manufacturing of electrical products
Business area PGMask writers & metrology
Business area ASAssembly equipment
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Mycronic in short
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40 years of experience in
innovation
1300employees
in ten countries
50Mycronic is represented
in more than 50 countries
500patents proves the power
of innovation.
3,000customers use production
equipment from Mycronic
98%of consolidated net sales are
exports
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Aligner – copies the photomask
• ~20 seconds to copy the photomask• ~25 Terabyte data• Transfer rate ~10 Tbit/s
Display production using photomasks
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Lithography a capital intensive process but highly cost effective~ 100,000 times faster than your high speed broad band
Lithography using photomasks is the only technology used today in mass production to create high end electronics and high end display TFT back planes
Mask writer – writes the photomask
• 24-48 hours writing time• ~25 Terabyte data• Transfer rate ~1.2-2.5 Gbit/s
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Mycronic has a unique position as the sole supplier of mask writers to the display industry
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Can handle photomasks up to 1.8 x 2.0 m
”The mura (斑) challenge”
- Japanese word meaning irregularity
Photo: Courtesy of SKE Electronics
….So literally you could say that all mass produced high end displays in the world has a connection to Mycronic…
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Mycronic mask writers
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Offering nanometer precision
1 meter100 micrometer 10 cm100 nanometer 10 micrometer1 ångström 1 nanometer
ChildHandHairRed blood cellVirusAtom
Mycronic’s Prexision-800
Mycronic’s Prexision-800 delivers nanometer precision
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~160 PPI ~400 PPI~60 PPI
Display trends in favor for the photomask industry
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Higher and higher resolution
Larger and larger displays
Displays in new applications
Transition from LCD to AMOLED
Drives mask complexity Drives mask size
Drives additional demand & new requirements Drives mask complexity
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The new SLX SeriesThe laser mask writer for tomorrow’s semiconductor market
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The electronification of everything
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More devices will need processing power to keep up with the pace of change
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10
0
20
40
60
80
100
180/130nm 10/7/5nm
Typic
al #
of
mask
sper
desi
gn
>=250nm 90/65nm 40/28nm 20/14nm
Only by Laser
E-beam & Laser (2-layers)
Only by E-beam
~65% ~35% <1%
Sources: Mask maker survey 2018 and 2019 (https://www.ebeam.org), Renew, Retire, Replace by Franklin Kalk, Toppan, Photomasks (https://www.ebeam.org), Mycronic estimates
Laser writer demand on the riseAdditional demand driven by both market trends and technology trends
of IC designs of IC designs of IC designs
IoT Automotive Cloud & 5G Leading edgeGrowth driver:
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Laser writer demand on the riseAdditional demand driven by both market trends and technology trends
0
100,000
200,000
300,000
400,000
500,000
600,000
Semiconductor masks produced
Sources: Mask maker survey 2018 (https://www.ebeam.org), Mycronic estimates
Laser
E-beams
• Around 600 000 photomasks enable the semicon industry today
• 70-75% of these masks are written by laser
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Mycronic Proprietary and Confidential12
Leveraging existing display technology and customer relationships
In excellent position to capture the opportunity
Display and semiconductor requirements
1995 2000 2005 2010 2015 2020
200
0
400
800
600
1 000
1 200
Node (nm)
Display leading edge
Semicon leading edge
Mature semicon - SLX target spaceP800
Despite competition in segment our ambition is to capture a majority of the upcoming opportunity with the SLX-series and over time establish a strong presence in the mature semicon segment
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The SLX value proposition
Born to run(first shipment expected year end 2020/21)
A long term committed
supplier
“Modern platform with future
development possibilities”
Reliable and stable
operation
“Field proven technology and strong service organization”
Lowest cost per mask
“Superior writing speed and low running cost”
Best overall investment
“Attractive entry price and many
options to enable a cost efficient
production”
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The new SLX SeriesThe laser mask writer for tomorrow’s semiconductor market
• Available in different configurations
• Writing times from 20 minutes• Meets requirements down to
90 nm node
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Applying Deep Learning Methodologies to Improve Mask Shop Operation
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Logging of Writer Servo Data
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X
Y
F/Z
DOE
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Writer Servo Log Visualization
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Looking for mura in the data
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Writer Servo Log Statistical Analysis
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FFT of Strip Data
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Deep Learning
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CDLe & Deep Learning Competence
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Mycronic Täby
Royotech
Axxon
MFKK
SW engineering partner
AEI, MRSICDLe
VIT
PnPPG
Insp
JP
- Long Term Assignee
- Short Term Assignee
- Not Yet Assigned
In planning
Long term Assignee
Romain Roux
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Anomaly Detection Using Autoencoders
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Capturing Normal Behavior
Encoder DecoderCoded Input
Are these similar?
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Anomaly Detection Using Autoencoders
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Capturing Abnormal Behavior
Encoder DecoderCoded InputInput Data
Output Data
Same = Normal
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Anomaly Detection Using Autoencoders
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Capturing Abnormal Behavior
Encoder DecoderCoded InputInput Data
Output Data
Not Same = Abnormal
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Anomaly Detection Using Autoencoders
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Capturing Abnormal Behavior
Encoder DecoderCoded InputInput Data
Output Data
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Deep Learning opens up new possibilities
Using the Available Data Efficiently
Step 1: Collect data• Mask writer log data• Potentially also mask quality data
Step 2: Analyze data• Statistical methods• Deep Learning
Step 3: Turn data into valuable insights
Preventive & Predictive
maintenance
Improved Quality control
Generate ideas for improvements
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Thank You!
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