thermal and mechanical stress modelling of smart power switches under active loading ansys

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Thermal and mechanical stress modelling of smart power switches under active loading Bala Karunamurthy, KAI, Villach. ACUM’14. Vienna

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Smart power switches (SPS) for industrial and automotive applications have to withstand substantial power dissipation during operation. They are expected to work even under extreme temperature and electrical stresses, such as transient start up or overload. Several thousands of cyclic loading of electric pulses might cause failure to this SPS device. The reason behind this failure is that the electrical pulses induce thermal stress, which in turn leads to mechanical stress. Due to the multi-material design of SPS, the thermal stress often induces tractions at the material interfaces. These tractions might initiate cracks and delamination, which can lead to a device failure due to loss of electrical contact. If a crack is not nucleated, the device may fail due to overheating. Therefore, thermal and mechanical stress plays a crucial role to determine the device failure and thereby the lifetime modelling of the device. Finite Element simulation is used to analyse heat transfer and mechanical problems in SPS. ANSYS is the FEM simulation tool which is used to perform the electrical, thermal and mechanical simulations. Electro-Thermal simulation is initially carried out in a 3D model of the SPS for various electrical pulses and as a result, the thermal stress in the model is analysed. Thermo-Mechanical chip simulation is performed with the thermal stress as loading conditions and the mechanical stress across the model is analysed. Microscopic stress simulation of the SPS sub- model is performed to analyse the stress in power metal. The electrical, thermal and the mechanical problem are solved using the FEM method in ANSYS.

TRANSCRIPT

Page 1: Thermal and mechanical stress modelling of smart power switches under active loading ANSYS

Thermal and mechanical stress

modelling of smart power

switches under active loading

Bala Karunamurthy, KAI, Villach. ACUM’14. Vienna

Page 2: Thermal and mechanical stress modelling of smart power switches under active loading ANSYS

Infineon Technologies AG

Page 3: Thermal and mechanical stress modelling of smart power switches under active loading ANSYS

65 % of reliability issues are due to Thermo-mechanical loads

(M Glavanovics, KAI: ESSDRC 2004)

Stressed and Unstressed DMOS

Page 4: Thermal and mechanical stress modelling of smart power switches under active loading ANSYS

Thermally induced loads cause failures

Electric pulses generate temperature

Delamination, cracks, voids, excessive plastic deformation, metal crawling etc.

Metal Extrusion & Cracks(T Smorodin, Infineon: ESSDRC 2007)

(W Kanert, Infineon: Journal of Microelectronics Reliability 2012)

Metal Degradation

Page 5: Thermal and mechanical stress modelling of smart power switches under active loading ANSYS

Si Ingot Slicing Deposition/Etching

Chip Dicing Die Attach Moulding

Chris Welham, Coventor Inc.

Images: APCMag

Page 6: Thermal and mechanical stress modelling of smart power switches under active loading ANSYS

How can we test a design/product?

Testing Vs Service conditions

Fundamental understanding

A B C D0

500100015002000250030003500400045005000

Design

CTF

A B C D0

500100015002000250030003500400045005000

Design

CTF

-40 to +150 C0 to +80 C

Prof Peter Borgesen

Page 7: Thermal and mechanical stress modelling of smart power switches under active loading ANSYS

Stress induced voiding (SIV) – process of diffusion and concentration of vacancies to form

voids

Flux, in atoms per unit area per time,

Mobility ; Where,

Driving Force Flux ,

kT

DM

rF H

kT

Q

eDD

0

N

i i

Hii

kT

Q

rVeD

kTAC

J

10 .

FMCAJ

Page 8: Thermal and mechanical stress modelling of smart power switches under active loading ANSYS

Where does the stress come from?

E1, ν1, α1

E2, ν2, α2

1. INTRINSIC: Film nucleation and coalescence

2. EXTRINSIC: CTE mismatch

E2, ν2, α2

E1, ν1, α1

Heat

Page 9: Thermal and mechanical stress modelling of smart power switches under active loading ANSYS

Wafer Fabrication

Die Attach

Moulding

Temperature cycling

1 2 3 4 5 6 7 8 9 100

100200300400500600700800900

1000

Process Steps

Tem

pera

ture

(C)

1

2

3

4

Activate and deactivate element

Use ANSYS “Birth & Kill” Feature

Page 10: Thermal and mechanical stress modelling of smart power switches under active loading ANSYS

The 5 Challenges

1. Structural complexity

2. Material Matrix

3. Multi-scale & Multi-physics

4. Computational Effort

5. Experimental Validation

(B Karunamurthy, KAI: Journal of Microelectronics)

(S Eiser, KAI)

Page 11: Thermal and mechanical stress modelling of smart power switches under active loading ANSYS

Elastic, Elastic-Plastic, viscoelastic and visco-plastic behaviour

Interface strength

Temperature dependent

Strain-rate dependency

Micro tensile experiments

Nanoindendation

4-point bending

Wafer curvature measurement

Lap shear and HCF/LCF Testing

ANSYS Input: BKIN, MKIN, Chaboche, Anand, Prony series etc. or USER MAT

What we need? Methods used

Page 12: Thermal and mechanical stress modelling of smart power switches under active loading ANSYS

(V Kosel, KAI: 2011)

(G Kravchenko, 2011)

El.Therm Simulations

1 2 3 4 5 60

50

100

150

200

250

300

350

400

450

Time (s)

Pow

er

Page 13: Thermal and mechanical stress modelling of smart power switches under active loading ANSYS

σxy σyz σxz

¼ of Chip-package

Die, Die attach &

Lead frame

In-plane (σxy) and out-of-plane (σxz and σyz) on a chip

Page 14: Thermal and mechanical stress modelling of smart power switches under active loading ANSYS

70 um

Silicon

Mould Compound

Sub Model

Silicon

Silicon

Mould Compound

Lead Frame

Just one surface: Half-a-million elements!

Nested Sub-Modelling

Homogenization Technique

Micro Model

1

2

3

Page 15: Thermal and mechanical stress modelling of smart power switches under active loading ANSYS

(B Karunamurthy, KAI: Techconnect, Washington 2013)

Stress peak regions correspond to failure sites

Fracture mechanics simulations

Crack and simulated stress state

Page 16: Thermal and mechanical stress modelling of smart power switches under active loading ANSYS

Experimental validation

Stress Modelling Our ultimate goal?

Page 17: Thermal and mechanical stress modelling of smart power switches under active loading ANSYS

Acknowledgements:

Funding bodies:(FFG, Project no. 831163) and the Carinthian Economic Promotion Fund (KWF, Contract KWF-15212274134186).

KAI & Infineon Technologies AG.

Page 18: Thermal and mechanical stress modelling of smart power switches under active loading ANSYS

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