C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

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Trident SST

Advanced Spray Solvent Tools

For 50-200mm

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

Trident SST: bringing higher performance to today’s Solvent Processing needs

Metal

Lift-Off

2

Resist

Strip

Polymer

Removal

Substrate

Cleaning

Resist

Developing

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

Trident Spray Solvent Tool — Overview

One or two process chambers

2-, 4-, 6- or 8-tank models

50mm to 200mm wafer capability

Wide range of rotors

Automated recipe execution

Windows®7-based Solaris™ controller

Much more affordable than other SSTs

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C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

• Polymer Removal

• Positive or Negative Photoresist Strip

• Substrate Cleaning

• Resist Developing

• Metal Lift Off

• Dry Film Resist Stripping

• Post Plate Strip

1, 2 or 3 Chemical system configuration to accommodate solvent based process applications

Memory

III-V

WLP

Logic

DSP

ASIC

Power

MEM‘s

Opto......

Applications

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

Install Base: Trident Batch Spray Tools (selection)

44592 Laser U.S. Opto Production

Resist Strip

44512 RF Fab U.S. Compound Semi Production

Resist Strip

44513 RF Fab U.S. Compound Semi Production

Resist Strip

44514 RF Fab U.S. Compound Semi Production

Resist Strip

44515 RF Fab U.S. Compound Semi Production

Resist Strip

44516 RF Fab U.S. Compound Semi Production

Resist Strip

44517 RF Fab U.S. Compound Semi Production

Resist Strip

11488 RF Fab U.S. Compound Semi Production

Poly. Removal

11489 RF Fab U.S. Compound Semi Production

Poly. Removal

11490 Adv. Comm. India Compound Semi R&D

Resist Strip

11674 Adv. Comm. U.S. Compound Semi Production

Develop

11675 Adv. Comm. U.S. Compound Semi Production

Resist Strip

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

Stainless Steel Process Chamber

Enclosed Controlled Environment

In-Situ processing

On-Axis Design

Controlled Boundary Layer

Dry-Dry Operation

Semi-Automated Operation

Efficient Use of DIW

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C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

CPC

Chemical Manifold DI Manifold Facilities

DI

Facilities

N2 N2 Manifold

Facilities

CO2

Solvent 1

Fresh

Solvent 1

Reclaim

Solvent 2

Fresh Solvent 2

Reclaim

Fluid Flow Example

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

Major advantages over wet benches

Up to 75% less chemical usage

Up to 30% less DI water usage

Up to 30% less exhaust

Recipes up to 70% faster

Significantly smaller footprint

Purged tank, no moisture absorption

Minimal evaporation

No human exposure to chemicals/fumes

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C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

One complete, efficient process — finishing with dry wafers

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Minimal wafer handling

Maximum throughput and efficiency

No need for an external dryer

No need for frequent bath changes

Trident utilizes filters to reclaim and reuse solvents

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

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Advanced control, automation and reporting

Windows®7-based Solaris controller

Remote login

Data logging

GEM/SECSII communications

Reliability reporting

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

Quad Core Server

1 2 3 4 UI GEM

LCD Touch Screen Keyboard / mouse pad

AUX Real Time

Modular IO System

Motor Controllers

Pump Controllers

Temperature Controllers

Factory MES

Automation

Solaris Control System Windows 7 Operating System on Intel Quad Core i7 Processor High Speed EtherCAT IO and Motor Network Semiconductor Process Equipment Software Framework

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

Solaris Trident SST

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

Solaris Features Hardware

Super Micro Systems Industrial Quad Core PC: Core i7 2.6GHz Processor, 8G ram, 465G hard drive. Windows 7 operating system. Dual Hard Drives with RAID backup Storage Technology. Ethernet and USB communications networks. USB and Ethernet ports on the front panel for all manual file transfers. Dual Flat Panel LCD Touch Screens from ELO Touch Solutions. Beckhoff EtherCat real time modular PLC IO controller. Servo motion control using Copley Controls motor controller and US Digital high resolution encoder.

Software

Based on off the shelf industry proven software framework. Semi E95 complaint graphical user interface. Field configurable options and features. Advanced diagnostics and data logging. Remote control and service capability. Smooth low speed rotor rotation in both directions down to 1 rpm. Email notifications. Real time chemical consumption monitoring. Predictive maintenance functions. Single software release for all configurations.

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

Smarter engineering, easier maintenance

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Non-contact chemical heaters

Filtered chemistry

Tank designed for easy maintenance

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

Industry-proven components, easily replaced

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Trident uses component-level technology

Non-proprietary electronic components, readily available

Industry-rated diaphragm pneumatic pumps

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

A complete facility package that comes standard

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Providing all facility requirements On-board facility panel On-board DI and N2 regulation Precise control throughout

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

And operator safety is maximized throughout

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Emergency Power Off Exhaust failure sensors Liquid level leak detectors Fire suppression systems

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

Trident: A unique new class of SST that delivers…

The performance you need

At a price you can afford!

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C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

Revised 9/15/2002

Semitool Class 1 Spray Solvent Tool

39” x 65”x 66”

39” x 78”x 66”

• Stainless Steel Cabinet

• Alarm/Process Status

Light Tower

• Chemical Delivery

Methods to Match

Process Requirements