timothy j. tredwell, john yorkston greg heiler, jeff chang ...ridl.cfd.rit.edu/products/talks/qlid...

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Imaging Arrays for Medical Applications Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang, Jackson Lai Carestream Health RIT Quantum Limited Detector Workshop March 2009

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Page 1: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Imaging Arrays for Medical Applications

Timothy J. Tredwell, John YorkstonGreg Heiler, Jeff Chang, Jackson Lai

Carestream Health

RIT Quantum Limited Detector WorkshopMarch 2009

Page 2: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Outline

• Introduction to medical imaging modalities• MEV

– PET, SPECT• KEV

– CT, X-Ray• EV

– Molecular Imaging, Endoscopy, NIRS• mEV

– Ultrasound, MRI

• Radiography

• Molecular Imaging

• Applications for Quantum Limited Detectors

Page 3: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Medical Imaging Modalities

X-ray systems CT MRI SPECT/PET

Ultrasound

Endoscope

Page 4: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Imaging Sources

X-ray

PET

CTSPECT

functional NIRS

MRI

MEG

Ultrasound

Endoscope

(add THz imaging)

Page 5: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Morphology ⇔ Physiology ⇔ Metabolism ⇔ MoleculeRadiography

CT

Ultrasound

MRI

PET/SPECT

Optical

TF. Massoud et al. GENES & DEVELOPMENT 2003

10-3-10-5mol/L

10-11-10-12mol/L10-9-10-12mol/L (fluorescence)10-15-10-17mol/L (bioluminescence)

Imaging Targets

Page 6: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

CoincidenceCircuit

Nuclei

Positron

ー Electron

511keV Gamma-ray

511keV Gamma-ray

Imaging MEV PhotonsPET (Positron Emission Tomography)

Page 7: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Imaging MEV Photons PET (Positron Emission Tomography)

Detector Module

PMT

ScintillatorBismuth GermanateOxide (BGO)

Page 8: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Imaging MEV Photons SPECT (Single Photon Emission Tomography)

PHA

Digitizer

PC

Pulse Arithmetic Circuit

Gamma ray detector module

Page 9: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Imaging MEV Photons SPECT (Single Photon Emission Tomography)

Shielding

Light guide

Scintillation crystal

Photomultiplier tube

Optical grease

Al Casing

Collimator

• SPECT identifies regions of abnormal uptake or deficit of a radiotracer

• Often combined with CT for attenuation correction and registration

Page 10: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Imaging KEV Photons CT (Computer Tomography)

X-ray tube

multi-slice detector• 0.5 – 2 mm detector• ~ 32-256 detectors

First dual-energy systems coming to market

Page 11: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Imaging KEV Photons CT (Computer Tomography)

Collimator

Scintillator

Photo Diode

X-ray

• Future CT systems may move to flat-panel detectors if the noise can be sufficiently reduced

• Higher resolution (100 µm vs. 500 µm)• Larger area coverage• Allows area detection of entire organs without helical scan• Allows dynamic imaging of organs – such as dynamic

angiography• Being explored by GE and Siemens

Page 12: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Imaging KEV Photons Radiography

Generator(10 – 100 KEV)

X-Ray Filter(Al)

ScintillatorGRID

Flat panel detector

Page 13: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

(Image courtesy Dr. B. Polischuk, Anrad Corp.)

Imaging KEV Photons: Radiographya-Si:H Flat-Panel Array: Very Large Area

17 inch

Page 14: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Imaging EV (vis-IR) Photons Endoscope Imaging

objective lens

light guide

forceps hole

nozzle

connectionpart

operationpart

insert part

LCD monitor

videoscope

videoprocessorlight source

camera

printer 26 mm

11 mm

Page 15: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Imaging EV (vis-IR) Photons Endoscope Imaging

Color Image Sensors for Endoscopic Imaging• Small area• Low power• Highly integrated – few leads• High resolution• Withstand autoclave temperatures• Future - stereoscopic

Page 16: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Imaging EV (vis-IR) Photons : Molecular ImagingBiomedical Field

R&DPredictionDiagnosisTherapy

Human

DNA Life Science Fields

Medical Fields

Genome

Proteome

Metabolome

Drug DiscoveryProtein

CellCellome

Gene Diagnosis/ Therapy

IntegrationMolecular Imaging

Phisiome

Page 17: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

“MI techniques directly or indirectly monitor and record the spatiotemporal distribution of molecular or cellular processes for biochemical, biologic, diagnostic, or therapeutic applications.”

“Report of a Summit on Molecular Imaging” Radiology 2005

in vivocellular or molecular levelimaging

in vivocellular or molecular levelimaging

CellCell

Molecular ProbeReporterLigand

Molecular Target( Biomarker)

DNA Protein Cell Organ

Molecular Imaging

Imaging EV (vis-IR) Photons Molecular Imaging

Page 18: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Fluorescence light Filter

Cooled CCD

Mouse

Excitation Wavelength Filter

Excitation light Fiber

White light Source

Excitation light

Fluorescencelight

Fluorescent Probe

PC

Imaging EV (vis-IR) Photons Fluorescence Imaging

Page 19: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Wavelength (nm)

WaterHb

Opticalwindow

absorption characteristics of hemoglobin and water in human

Imaging EV (vis-IR) Photons: NIRS Optical Absorption Characteristics

Abs

orpt

ion

Rat

e in

Hum

an (

a.u.

)

0

20

40

60

80

100

400 500 600 700 800 900 1000 1100 1200 1300 1400

Page 20: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Wavelength(nm)

Absorption(cm-1)

Scattering(cm-1)

L1/10(mm)

400 47.00 18.00 0.46

450 36.00 16.00 0.55

500 12.00 13.00 1.06

550 23.00 11.00 0.84

600 9.60 8.90 1.44

650 2.70 7.60 2.93

700 1.50 6.80 4.16

750 1.30 6.50 4.57

810 0.72 5.60 6.62

1 mm↓

1/10

6 mm↓

1/10

Imaging EV (vis-IR) Photons: NIRSOptical Constants and Transparency of Living Subject

Page 21: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Imaging mEV Photons Magnetic Resonance Imaging (MRI)

X Coil

Y Coil

Z Coil

BB00

SS

NN

zz

xx

yy

SS

NN

Electromagnetic induction current

Page 22: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Ultrasound Imaging

transducer

packingmaterial acoustic

matchinglayer

Page 23: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Image FusionPET and CT

PET Only

CT Only

• Anatomy

• Construct density map for absorption correction

Fused Images

Page 24: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Outline

• Introduction to medical imaging modalities• X-ray, CT, MRI, SPECT, PET, Ultrasound, Endoscope,

NIRS

• Radiography• Introduction to digital radiography• Clinical challenges• Amorphous silicon imaging arrays• LTPS silicon imaging arrays• Silicon imaging arrays

• Molecular Imaging

• Applications for Quantum Limited Detectors

Page 25: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal
Page 26: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

DR: “Digital” Radiography

DR: 1 step acquisition with electrical “scanning”

“Flat panel” and CCD based technology (introduced ~1995)

(Courtesy Imaging Dynamics Corp.)

Page 27: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

2 Dimensional Projection Radiography

Procedural Volume Trends

-

500

1,000

1,500

2,000

2,500

2001 2002 2003 2004 2005 2006 2007 2008

Proc

edur

es (M

s)

Nuc Med

ULtrasound

MR

CT

Digital X-ray

Analog x-ray

§ Still most common exam

§ >1.5x109 exams per year

§ Chest imaging most common

Page 28: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

CCD Based Systems Fundamental issue with size of CCD

3-4cm

30-40cm

Page 29: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Multiple CCD Configuration

• SwissRay and Apelem• Reduces de-mag.

Page 30: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Multiple CMOS Configuration

• CaresBuilt & Star V-Ray• CMOS…. cheap• Stitching an issue !

Page 31: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Detector Cross-sectionFlat-Panel Detector Construction

Page 32: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Image courtesy Mr. K. Schwarz, Direct Radiography Corp.

Flat-panel Detector Construction

Page 33: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

System Configuration

X-ray GeneratorSynchronization

Control(enables “Advanced Applications”)

Control PC and PACS

Detector housingGrid and AEC

Page 34: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Flat-Panel Detector Advantages

§Highest image quality due to high collection effic.

§Inherently digital information§ Allows quantitative analysis of image information§ Allows easy distribution to remote destinations

§One step acquisition of images§ Fast delivery of image§ Improves efficiency of workflow

§Significantly reduced profile & weight

§No geometric/magnetic distortion

§Computer controlled & integrated with x-ray delivery§ Enables advanced applications

Page 35: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Current Clinical Situation

Flat-Panel Detectors

Megavoltage

MammographyGeneral Rad.

DSA/Fluoro.CardiacReal Time Imaging

Page 36: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Anatomical Noise

• 3 dim. structure projected into 2 dim.• Overlapping structures obscure clinical details• Anatomical structure noise > x10 detector noise

3-Dim 2-Dim

Page 37: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Anatomical Noise in Projection Radiography

MammographyChest Radiograph

Page 38: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

wb

IL

IH

Low-Energy Image

High-Energy Image

Bone Image

( ) ( ) ( )Lb

HBone IwII lnlnln +−=

IBone

60-90 kVp

120-150 kVp

Tissue Discrimination: Dual-Energy Imaging

Page 39: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Tissue Discrimination: Dual-Energy Imaging

IL

IH

wsLow-Energy Image

High-Energy Image

60-90 kVp

120-150 kVp Soft-Tissue Image

( ) ( ) ( )Ls

HSoft IwII lnlnln −=

ISoft

Page 40: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Dual-Energy Increases Conspicuity of Subtle lesions

(Courtesy: JM Sabol, GE Healthcare and RC Gilkeson, Dept. Radiology Case Western Univ.)

Page 41: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Spatial Discrimination: Tomosynthesis

Utilizes parallax relative motions between shots

Page 42: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

15 mm nodule

16-degree tube angle, 61 projection images, 5 mm slice spacingTotal tomo exposure ≈ Lateral image exposure (screen film)

(Courtesy: James Dobbins, PhD, Duke University Medical Center)

Chest Tomosynthesis Clinical Example15 mm hilar nodule not visible in projection image

Page 43: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Flat-panel “Cone Beam” CT

2

2

1 1

3

3

4

4

5

5

6

6

7

7

8

8

Detector

Page 44: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

CBCT Spatial Discrimination

• Isotropic resolution• Patient dose << CT• Some soft tissue vis.

Page 45: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Pre-Op.

( D. A. Jaffray and J. H. Siewerdsen, Princess Margaret Hospital , University of Toronto )

Intra-Post Op.Evaluation

Needle

PMMA

CBCT Image Guidance

Page 46: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Advanced Imaging Modality Requirements

Dual Energy Tomo-Synthesis Cone-beam CT

Number of images

2

Total dose 1XDose per image 50%Frame rate ~5 fps

Number of images

~20 -100

Total dose 1X-5XDose per image 10%Frame rate ~5-30fps

Number of images

100’s

Total dose 1X - 10X+Dose per image 1 % – 5 %

Frame rate ~30 fps

2

2

1 1

3

3

4

4

5

5

6

6

7

7

8

8

Detector

Page 47: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Key Vectors for Radiographic Detector Development

§ 2-D Projection Radiography§ Cost (on-glass electronics, digital lith. & fab-less design)§ Robustness & weight (robust plastic/metal substrates)

§ Advanced Applications (Dual energy and 3D modalities)§ Improved sensitivity (SNR) at low exposure (“smart” pixels)§ Improved spatial resolution (improved x-ray converters)§ High frame-rate readout (on-glass electronics)

Flexible Substrate

(Courtesy Dr. T.Jackson PennState)

On-glass Shift Register

1 mm

Active Pixel Design

Page 48: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Outline

• Introduction to medical imaging modalities• X-ray, CT, MRI, SPECT, PET, Ultrasound, Endoscope,

NIRS

• Radiography• Introduction to digital radiography• Clinical challenges• Amorphous silicon imaging arrays• LTPS silicon imaging arrays• Silicon Imaging arrays

• Molecular Imaging

• Applications for Quantum Limited Detectors

Page 49: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

DR X-ray detection

Indirect SystemX-ray

Light

Flat-panel Imaging

Array

Direct System

X-ray

+- ++++-

--- α-Se

Photoconductor

Scintillator

Page 50: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

• Structured phosphor improves quantum efficiency

X-Ray Converter

Powdered Phosphor Structured Phosphor (CsI)

• Structured phosphor maintains spatial resolution• Photoconductor internal field functions similarly

Page 51: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Signal and Noise: Chest Radiograph140 µm pixel dimension

GridScintillator &Detector

Patient

X-ray exposure X-rays to scintillator

Photons from scintillator

Electrons collected

Quantum Noise

Per pixel Per pixel Per pixel Per pixel Per pixel

Outside Chest 142,000 142,000 88,750,000 31,808,000 84,410Ribs 142,000 426 266,250 95,424 4,623Ribs 142,000 426 266,250 95,424 4,623Lungs 142,000 ~ 1,420 887,500 318,080 8,441Mediastinum 142,000 142 88,750 31,808 2,669Heart 142,000 < 142 < 88,750 < 31,808 2,669

Page 52: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Signal and Noise vs. ExposureProjection radiography: chest

1.E+02

1.E+03

1.E+04

1.E+05

1.E+06

1.E+07

1.E+08

0.001 0.01 0.1 1 10 100Exposure (mR)

Sign

al (e

lec)

& N

oise

(rm

s el

ec) Signal

(electrons)

Quantum Noise

Electronic NoiseMaximumExposure

30 mR

Typ. EntranceExposure

7.2 mRLungs

0.29 mRHeart

0.12 mR

Qua

ntum

Lim

ited

to 0

.02

mR

Page 53: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Photosensors for Indirect Radiographic DetectorsPIN Photodiodes

ITO

Al bias line

30 nm P+ α-Si

500 nm i α-Si

50 nm N+ α-SiMo electrode

nitride

Advantages• High quantum efficiency• Low dark current• Operated steady-state (no transient)Disadvantages• P+ not widely available – requires

special process capability

Quantum Efficiency• 85% quantum efficiency in green

• QE drops in blue due to absorption in P+

• QE in red decreases due to band edge

+-

Page 54: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

07/10/2008 Carestream Health Restricted Information 54

PIN Photodiode in DR ArraySpectral Quantum Efficiency

350 400 450 500 550 600 650 7000

0.1

0.2

0.3

0.4

0.5

0.6

0.7

0.8

Wavelength (nm)

Qua

ntum

Effi

cien

cy

Primary Array Spectral Quantum Efficiency

Page 55: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Reducing the interference, reflection lossesOptimization of layer thicknesses

Page 56: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

a-Si Detector ArraysPassive Pixel Design

139 µm pixel

Gateline (M1)

Dataline

(M2)

Bias Line (M

5)

Gateline

Dataline

Bia

s Li

ne

Page 57: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

07/10/2008 Carestream Health Restricted Information 57

Cross-section of Vertically Integrated DR Array

400 nm Nitride

M2 : Data electrode (MoW)

M3 : Mushroom electrode (MoW)

M4 : Top electrode (IZO)

2nd passi : SiNx

p-i-n

1st passivation

M1 : Gate electrode (MoW)

Gate insulator : SiNx

145 nm

388 nm

158 nm

487 nm

130 nm

125 nm

316 nm

395 nm

M5 : Bias electrode

130 nm

Active : a-Si:H

Glass

500 nitride

Gateline: 145 nm MoWDataline: 158 nm MoW

PIN: 500 nm a-Si

Bias Line: 50nm MoW, 200nm AlTop Electrode: 125 nm IZOMushroom electrode: 130 nm MoW

Page 58: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

07/10/2008 Carestream Health Restricted Information 58

ARIA 1 Performance VerificationLinearity (uncorrected)

103 104 105 106 107 108 109103

104

105

106

107

108

Photons per pixel

Ele

ctro

ns p

er P

ixel

Linearity Response, versus Exposure (-3.0V photodiode bias)

Linear over 5 decades of illuminationCharge Capacity = 60M electrons

Page 59: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Noise in Amorphous silicon passive pixel arrayDataline thermal noise dominates

• Dataline is in Metal 2, gateline in metal 1 with 500 nm inter-layer dielectric

• Dataline thermal noise ~ C*R1/2 is the largest contributor with 9,000 electrons noise

• Next largest noise source is < 2,000 electrons

Baseline

0 2000 4000 6000 8000 10000

Reset

TFT Transient

TFT Shot

PD Shot

Data Line Thermal

Total Noise

e-rms

Dataline thermal noise at 9,000 el dominates

~ C*R1/2

• High M2 dataline resistance• High M1-M2 overlap capacitance

(500 nm nitride)

Page 60: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Experimental a-Si Passive PixelReduced dataline thermal noise

• 2 µm thick BCB layer or thick nitride dielectric between TFT plane and photosensorplane

• Planarization of topography• Reduced overlap capacitance

• Dataline in metal 5• 500 nm Al for low resistance• 2,000 nm BCB + 400 nm nitride dielectric for reduced overlap capacitance

Dielectric

0.6 µm PIN diode

TFT

2 µm BCB between TFT & photosensor

Dataline in low-resistance Metal

Page 61: Timothy J. Tredwell, John Yorkston Greg Heiler, Jeff Chang ...ridl.cfd.rit.edu/products/talks/QLID workshop/presentations/Medical... · Shielding Light guide Scintillation crystal

Experimental a-Si Passive Pixel3X Noise Reduction in Passive a-Si Arrays

0 2000 4000 6000 8000 10000

Reset

TFT Shot

PD Shot

Data Line Thermal

Total Noise

e - r ms

New Design 2 um BCB

New Design500 nm Si02

Baseline

• ~40% Reduction in CDL

• ~90% Reduction in RDL

• 4X reduction in data line thermal noise

4X DL noise reduction

3X overall noise reduction

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Advanced a-Si arraysActive pixel designs

• Advantages• Noise Reduction: Dataline thermal noise reduced by charge gain of pixel amplifier (>10X)• Speed Increase: 10X or more reduction in dataline setting time due to active amplifier

• Disadvantages• Yield: 9X increase in transistor area and ~ 3 additional bias and clock lines• Linearity: Smaller linear range of output vs. exposure• Stability: TFT threshold voltage shift with aging – TFT is amplifier, not a switch

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Amorphous Silicon Shift Register for Active Pixel Array120 um pitch a-Si:H shift register

Time (ms)0.0 0.5 1.0 1.5 2.0

Out

put V

olta

ge (V

)

-5

0

5

10

15

20

25

30Input

1st output2nd output

3rd output

4th output

13th output

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Advanced a-Si arraysActive pixel designs

• Dataline thermal noise reduced 5X by charge gain of pixel amplifier

• External amplifier noise reduced 5X by charge gain of pixel amplifier

• Largest remaining noise source is reset noise of the photodiode – can be further reduced by thicker intrinsic amorphous silicon

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07/10/2008 Carestream Health Restricted Information 65

Fabrication of DR Array on Metal Foil

Laminate to Glass

BeforePlanarization

After BCBPlanarization

Planarize

Fabricate ArrayRelease

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PIN photodiodes on stainless steel substratesComparison of 280 C PIN diodes on glass and on free-standing Stainless foil

JD(-1V) = 36 pA/cm2 JD(-1V) = 47 pA/cm2

280 C PIN on Glass 280 C PIN on StainlessPIN Diodes on Stainless

125 µm stainless foil3 µm BCB planarization

8 nm rms roughness

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Outline

• Introduction to medical imaging modalities• X-ray, CT, MRI, SPECT, PET, Ultrasound, Endoscope,

NIRS

• Radiography• Introduction to digital radiography• Clinical challenges• Amorphous silicon imaging arrays• LTPS silicon imaging arrays• Silicon imaging arrays

• Molecular Imaging

• Applications for Quantum Limited Detectors

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LTPS imaging array with peripheral circuits

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LTPS imaging array with peripheral circuitsPMOS LTPS Shift Register

Start (n) CLK 3 CLK 1

Output (n+1)

4 / 4 +4 um

4 / 4+4 um

4 / 4 +4 um

4/ 4 +4 um

0.09 pF

4 / 4 um

4 / 4 um

16 / 4 um

4 / 4 um

NextInput

VDD

T1

T2

T3

T4

T5

T6

T7

T8

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Pixel of LTPS Imaging Array with a-Si PIN photodiode

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Key Challenges for LTPS Imaging ArraysReset TFT leakage current: siphons off photo-charge

Photocurrent

TFT LeakageCurrent

IDS(VDS, T)

Net ChargeVDS

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Sources of Leakage in LTPS TFT’s

• Surface topography at grain boundary edges causes gate oxide leakage

• Variable from TFT to TFT

• Generation current at grain boundaries results in TFT leakage

• Gate-to-drain field enhances leakage current, resulting in exponential increase in leakage with gate voltage, even band-band tunneling

• Variable from TFT to TFT

TFT Channel Leakage At Grain Boundaries

Gate Oxide Leakage at Grain Boundaries

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Key Challenges for LTPS Imaging ArraysThreshold voltage variability

Current Mirror Column Amplifier TFT

Pixel Amplifier TFT

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Noise in LTPS Imaging Arrays

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SummaryDirections for radiographic detector development

• 2-D Projection Radiography

• Robustness, weight Detector arrays on metal foil & plastic

• Cost Fabless model (utilize display fabs)

• Advanced Applications (Dual energy and 3D)

• Improved sensitivity Improved passive pixel designsActive pixel a-Si arraysActive pixel LTPS

• Improved resolution Structured phosphorsDirect detectionActive pixel LTPS with peripheral circuits

• High frame rate Active pixel a-Si arraysActive pixel LTPS

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Outline

• Introduction to medical imaging modalities• X-ray, CT, MRI, SPECT, PET, Ultrasound, Endoscope,

NIRS

• Radiography• Introduction to digital radiography• Clinical challenges• Amorphous silicon imaging arrays• LTPS silicon imaging arrays• Silicon Imaging arrays

• Molecular Imaging

• Applications for Quantum Limited Detectors

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Carestream Dental Array

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Typical characteristics of CMOS Imagers for Dental

5,000:1Dynamic range50 - 100 rms electronsNoise~ 500K electronsSaturation charge40%Fill factor~ 50% at 550 nmQuantum Efficiency1,440 x 1,920Pixels~ 27mm x 36mmArray size18 µmPixel dimension

Typical valuesParameter

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Noise in CMOS Image Sensors

Barbato Pain, ISSCC 2007 Imager Forum

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Photodiodes for CMOS image sensorsP-N junction and Pinned Photodiode

P-N Junction Photodiode Pinned Photodiode

Barbato Pain, ISSCC 2007 Imager Forum

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Noise in small-pixel CMOS image sensors

Barbato Pain, ISSCC 2007 Imager Forum

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Photon Counting Arrays for Medical ImagingMedipix Project

• Collaborative European program

• Goal is to develop a photon-counting CMOS-Si backplane modules

• Interconnect to a variety of sensor chips• Bump-bonded to CdTe and CdZnTe• GaAs• Si

• 4-side tiling for large-area detector arrays

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Photon Counting Arrays for Medical ImagingMedipix 2 and Medipix 3 chip

• Medipix 2• 55 µm square pixels can accept positive

or negative charge• 256x256 array for a 14mm x 14mm

image area• 3-side buttable• Adjustable upper and lower detection

thresholds• 13-bit counter in each pixel• Up to 100 kHz count rates

• Medipix 3• 4-side buttable with 55 µm pixels • 2 counters per pixel (for simultaneous

read-write)• Dual-energy mode with two threshold

levels• Can operate either in photon counting or

in integration mode

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Comparison of Medical Imaging Array Technologies

Flat PanelSilicon

Radiography

Molecular Imaging?

Dental

Molecular Imaging

Endoscopy

Molecular ImagingMedical Applications

1,000-5,000 el100-500 el5-100 el1 elNoise

70% with a-Si PIN70% 70% * gainQuantum Efficiency

40-400 µm40-400 µm2-40 µm200 µmPixel dimension

$ 0.50/in2$ 1.00/in2$ 40.00/in2> $ 200.00/in2Cost/area

14” - > 25”4” – 14”< 1” typical

~ 4” max

0.5”Imager Area

A-SiLTPSIntegratingPhoton counting

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Outline

• Introduction to medical imaging modalities• X-ray, CT, MRI, SPECT, PET, Ultrasound, Endoscope,

NIRS

• Radiography• Introduction to digital radiography• Clinical challenges• Amorphous silicon imaging arrays• LTPS silicon imaging arrays• Silicon Imaging Arrays

• Molecular Imaging

• Applications for Quantum Limited Detectors

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“MI techniques directly or indirectly monitor and record the spatiotemporal distribution of molecular or cellular processes for biochemical, biologic, diagnostic, or therapeutic applications.”

“Report of a Summit on Molecular Imaging” Radiology 2005

in vivocellular or molecular levelimaging

in vivocellular or molecular levelimaging

CellCell

Molecular ProbeReporterLigand

Molecular Target( Biomarker)

DNA Protein Cell Organ

Molecular Imaging

Molecular Imaging

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Fluorescence light Filter

Cooled CCD

Excitation Wavelength Filter

Excitation light Fiber

White light Source

Excitation light

Fluorescencelight PC

Fluorescence Imaging

Microwell Plate

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89

Typical photon flux in the range of 10³–10⁶ph/mm²/sec

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90

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Detection with cooled CCD cameras

91

Light Collection Efficiency ~ NA/(m2+1) is < 1%NA = Numerical Aperturem = demagnification

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92

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Sample amorphous silicon molecular imaging array

93

PD FF > 70%

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Comparison Between Optical and Contact Type Sensors

Cooled CCD a–Si:H Contact Sensors

Throughput• Multiple shots may be required per sample plate.

• Slower sensor, but can whole plate is imaged at once.

Cost

• Higher cost per unit area for sensor.• More complex mechanical assembly.• May require cooling equipment depending on application.

• Lower sensor cost with volume.• May be viable as disposables.• Low dark current at room temperature.• No optical lens assembly.

Efficiency

• High loss through optical assembly (over 99% loss)

• Higher optical coupling efficiency (over 80%) and lower cross talk.• Higher QE for common dye wavelength.• Charge loss through trapping in defects.

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Fluorescence light Filter

Cooled CCD

Mouse

Excitation Wavelength Filter

Excitation light Fiber

White light Source

Excitation light

Fluorescencelight

Fluorescent Probe

PC

In-Vivo Fluorescence Imaging

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Fluorescence Imaging of Tumor-bearing Mouse

A

B

C

E

D

A B C D E

ICG-labeled Nano-particle

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97

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Avalanche photodiode array for fluorescence imaging

F. Borghetti et. Al., A CMOS Single-Photon Avalanche Diode Sensor for Fluorescence Lifetime Imaging2007 International Image Sensor Workshop

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Avalanche photodiode array for fluorescence imaging

150 ps time resolution

F. Borghetti et. Al., A CMOS Single-Photon Avalanche Diode Sensor for Fluorescence Lifetime Imaging2007 International Image Sensor Workshop

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Avalanche photodiode array for fluorescence imagingPhoton detection probability and sensitivity

F. Borghetti et. Al., A CMOS Single-Photon Avalanche Diode Sensor for Fluorescence Lifetime Imaging2007 International Image Sensor Workshop

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Outline

• Introduction to medical imaging modalities• X-ray, CT, MRI, SPECT, PET, Ultrasound, Endoscope,

NIRS

• Radiography• Introduction to digital radiography• Clinical challenges• Amorphous silicon imaging arrays• LTPS silicon imaging arrays• Silicon imaging arrays

• Molecular Imaging

• Applications for Quantum Limited Detectors

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Accelerating Basic Research/Drug Development

PET CT Optical

Small Animal Imaging System for Preclinical Research

in vivo test using molecular imaging

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Outline

• Introduction to medical imaging modalities• X-ray, CT, MRI, SPECT, PET, Ultrasound, Endoscope,

NIRS

• Radiography• Introduction to digital radiography• Clinical challenges• Amorphous silicon imaging arrays• LTPS silicon imaging arrays• Silicon imaging arrays

• Molecular Imaging

• Applications for Quantum Limited Detectors

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Light Sources Description Advantages Disadvantages

Gas Laser

■ Electric current is discharged through gas to produce light

■ Helium-Neon, 635nm

■ Commonly available■ Available in specific

wavelengths

■ Large, hot, and fragile

Solid-state and Semiconductor

Laser

■ A laser that uses a solid crystal as the gain medium

■ Fixed wavelength■ Yttrium Aluminium

Garnet (YAG), 532nm

■ Small, efficient, and controllable

■ Long life

■ Wavelength choices are restricted to a limited set

White Light Source

■ Xenon arc light source■ Range of wavelengths

from 350nm to 750nm or more

■ Single source is adequate for multiple excitations

■ Large, hot and fragile

■ Needs filters to isolate wavelengths

■ Lower intensity than laser source

Excitation Sources

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Excitation Strategies

Excitation Strategy Description Advantages Disadvantages

Simultaneous Excitation

■ Light sources excite multiple dyes in the same pixel at the same time

■ Increased scanning speed

■ Increased crosstalk■ Reduced SNR

Pixel Shifting

■ Light sources excite multiple dyes at different pixels at the same time

■ Reduced crosstalk■ Increased SNR

■ Misalignment■ Require image

registration

Fiber Optics

■ Fiber optic cables direct light from external light source to scanning optics

■ Allow large lasers and alternative light sources

■ Reduced optical power delivery

■ Reduced resolution

Gated Laser

■ Light sources are toggled■ One light source excite

one pixel at a given time

■ Laser lifetime extended

■ Eliminated crosstalk

■ Reduced scanning speed