towards wafer-scale monolithic cmos integrated pixel ... · vienna conference on instrumentation,...
TRANSCRIPT
![Page 1: Towards wafer-scale monolithic CMOS integrated pixel ... · Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL –Jorge Neves 21. Outlook: Ongoing developments](https://reader036.vdocument.in/reader036/viewer/2022070922/5fba7290cdba126e1d2b33a1/html5/thumbnails/1.jpg)
Towards wafer-scale monolithic CMOS integrated pixel detectors for X-ray photon counting
G-ray Medical, Switzerland
Jorge Neves
![Page 2: Towards wafer-scale monolithic CMOS integrated pixel ... · Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL –Jorge Neves 21. Outlook: Ongoing developments](https://reader036.vdocument.in/reader036/viewer/2022070922/5fba7290cdba126e1d2b33a1/html5/thumbnails/2.jpg)
Outlook
• New semiconductor process technology for monolithic CMOS pixel detectors
• Low-temperature covalent wafer bonding
• Detector development
• Specifications
• Pixel architecture/ block diagram
• Readout system
• Detector commissioning
• Detector characterization: preliminary results
• Ongoing developments
Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL – Jorge Neves 2
![Page 3: Towards wafer-scale monolithic CMOS integrated pixel ... · Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL –Jorge Neves 21. Outlook: Ongoing developments](https://reader036.vdocument.in/reader036/viewer/2022070922/5fba7290cdba126e1d2b33a1/html5/thumbnails/3.jpg)
• Low-temperature covalent wafer bonding
• Realized at a 200 mm wafer scale
• Absorber materials• Si, GaAs, CdTe, epitaxial SiGe
• Advantages• CMOS compatible
• X-ray direct conversion
• Photon counting capability
• Large-area detectors
• No bump bonding
• Applications• Scientific, industrial, medical
New semiconductor process technology for monolithic CMOS pixel detectors
Concept of a backside illuminated detector with p-njunction at bonded interface between thinned CMOSreadout wafer and absorber wafer.
PCT Application number: IB2015/002385 | Inventor: Hans von KänelApplicant: G-ray Switzerland SATitle: Monolithic CMOS integrated pixel detector, and systems and methods for particle detection and imaging including various applications
hν
Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL – Jorge Neves 3
![Page 4: Towards wafer-scale monolithic CMOS integrated pixel ... · Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL –Jorge Neves 21. Outlook: Ongoing developments](https://reader036.vdocument.in/reader036/viewer/2022070922/5fba7290cdba126e1d2b33a1/html5/thumbnails/4.jpg)
Low-temperature covalent wafer bonding
Standard surface activation involves dry etching for oxide removal. Consequences: Surface amorphization Poor electrical properties
G-ray modified processSputtering for surface cleaning replaced by HF-dip and soft ion bombardment for hydrogen removal
G-Ray
Hydrogen
removal
G-Ray
Hydrogen
removal
Wet chemical pre-
treatment
Post annealing &
post-Bond Metrology
• IR-and C-SAM measurements
• HRTEM-Analysis• EDX-analysis• I-V characterization
high vacuum (1x10-8mbar)
Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL – Jorge Neves 4
![Page 5: Towards wafer-scale monolithic CMOS integrated pixel ... · Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL –Jorge Neves 21. Outlook: Ongoing developments](https://reader036.vdocument.in/reader036/viewer/2022070922/5fba7290cdba126e1d2b33a1/html5/thumbnails/5.jpg)
Covalent wafer bonding
• Unique modified EVG 580 ComBond® system
• Enhanced plasma module for atomic-scale wafer surface cleaning
Top wafer - Si
Bottom wafer - Si
Electrical conductivity across bonded Si-Si interfaces:Evolution towards ohmic behaviour through mild annealing at CMOS compatible temperatures
Bo
nd
ing
stre
ngt
h >
1.3
J/m
2
Oxi
de-
free
bo
nd
ing
inte
rfac
e
Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL – Jorge Neves 5
![Page 6: Towards wafer-scale monolithic CMOS integrated pixel ... · Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL –Jorge Neves 21. Outlook: Ongoing developments](https://reader036.vdocument.in/reader036/viewer/2022070922/5fba7290cdba126e1d2b33a1/html5/thumbnails/6.jpg)
Detector development
Date CMOS chip Active area Pixel size # Pixels Purpose Detector series
Q3-2017 Novipix 1.6 x 1.6 mm2 100 µm2 256 Proof-of-concept: CMOS pixel architecture
-
Q4-2018 BigNovipix 2.4 x 3.0 cm2 100 µm2 72‘000 Proof-of-concept: Large-area wafer bonded detector
latenium™ Evaluation kit (L & H)
Q4-2019 XENIA 5.0 x 5.0 cm2 50 µm2 1‘000‘000 Commercial product latenium™ L1 & H1 series
Novipix CMOS: 16 x 16 pixels, 100 µm pitch BigNovipix CMOS: 240 x 300 pixels, 100 µm pitch
Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL – Jorge Neves 6
![Page 7: Towards wafer-scale monolithic CMOS integrated pixel ... · Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL –Jorge Neves 21. Outlook: Ongoing developments](https://reader036.vdocument.in/reader036/viewer/2022070922/5fba7290cdba126e1d2b33a1/html5/thumbnails/7.jpg)
Detector specifications
• 2.4 x 3.0 cm2 active area
• 100 µm pixel pitch
• 240 x 300 pixel array: 72’000 pixels
• Dark current compensation: up to 1µA / pixel
• 2 discriminators with 12-bit counters per pixel
• Parallel 12-bit interface for data readout
• Programmable region-of-interest for readout
• Sequential acquisition/ readout with 2 thresholds
or continuous mode with 1 threshold
• 1.8V single power supply
• 587 wire bond pads
Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL – Jorge Neves 7
![Page 8: Towards wafer-scale monolithic CMOS integrated pixel ... · Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL –Jorge Neves 21. Outlook: Ongoing developments](https://reader036.vdocument.in/reader036/viewer/2022070922/5fba7290cdba126e1d2b33a1/html5/thumbnails/8.jpg)
• LFoundry 150 nm CMOS process
• Starting material: n-type wafer, 1 kΩcm
• Retrograde p-well to emulate standard wafer doping at surface
• Deep N-WELL implant for charge collection
• X,Y = 22 µm, gap = 2.5 µm
• Reticle size chip 2.6 x 3.2 cm2
• Dedicated 8 inch full mask
• CMOS chip tape-out: Q1 2018
Detector specifications
Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL – Jorge Neves 8
![Page 9: Towards wafer-scale monolithic CMOS integrated pixel ... · Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL –Jorge Neves 21. Outlook: Ongoing developments](https://reader036.vdocument.in/reader036/viewer/2022070922/5fba7290cdba126e1d2b33a1/html5/thumbnails/9.jpg)
Pixel architecture/ block diagram
• Programmable charge amplifier sensitivity : 8/13 µV/e-
• Leakage current compensation up to 1 µA
• Programmable shaping time: 40/70 ns
• 6-bit in-pixel DAC for threshold calibration
• Binary counter instead of grey counter
Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL – Jorge Neves 9
![Page 10: Towards wafer-scale monolithic CMOS integrated pixel ... · Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL –Jorge Neves 21. Outlook: Ongoing developments](https://reader036.vdocument.in/reader036/viewer/2022070922/5fba7290cdba126e1d2b33a1/html5/thumbnails/10.jpg)
Readout systemFunctional overview
Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL – Jorge Neves 10
TE-0
72
0
![Page 11: Towards wafer-scale monolithic CMOS integrated pixel ... · Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL –Jorge Neves 21. Outlook: Ongoing developments](https://reader036.vdocument.in/reader036/viewer/2022070922/5fba7290cdba126e1d2b33a1/html5/thumbnails/11.jpg)
Readout systemSoftware/ hardware partitioning
Xilinx Zynq®-7000 SoC
Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL – Jorge Neves 11
![Page 12: Towards wafer-scale monolithic CMOS integrated pixel ... · Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL –Jorge Neves 21. Outlook: Ongoing developments](https://reader036.vdocument.in/reader036/viewer/2022070922/5fba7290cdba126e1d2b33a1/html5/thumbnails/12.jpg)
Readout system Experimental test setup at G-ray
Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL – Jorge Neves 12
![Page 13: Towards wafer-scale monolithic CMOS integrated pixel ... · Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL –Jorge Neves 21. Outlook: Ongoing developments](https://reader036.vdocument.in/reader036/viewer/2022070922/5fba7290cdba126e1d2b33a1/html5/thumbnails/13.jpg)
CMOS wafer pre/ post-processing
• Planarization of CMOS stack
• Oxide-to-oxide bonding of CMOS stack to a carrier wafer
• Back thinning CMOS wafer
• Clean surface preparation and low-temperature covalent bonding of CMOS wafer to sensor wafer
• Removal of carrier wafer
• Pad access on front side
• Backside metallization: central pads/ guard rings
• Wafer dicing
• PCB die attach, wire bonding, encapsulation
Detector Commissioning
In real life, it's not that easy !
Al backside metallization
1 mm
450 µm
100 µm
Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL – Jorge Neves 13
![Page 14: Towards wafer-scale monolithic CMOS integrated pixel ... · Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL –Jorge Neves 21. Outlook: Ongoing developments](https://reader036.vdocument.in/reader036/viewer/2022070922/5fba7290cdba126e1d2b33a1/html5/thumbnails/14.jpg)
Detector CommissioningWire bonding
Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL – Jorge Neves 14
![Page 15: Towards wafer-scale monolithic CMOS integrated pixel ... · Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL –Jorge Neves 21. Outlook: Ongoing developments](https://reader036.vdocument.in/reader036/viewer/2022070922/5fba7290cdba126e1d2b33a1/html5/thumbnails/15.jpg)
Detector characterization
Analog/ digital output with injected test pulses
• Programmable charge amplifier sensitivity : 8 / 13 µV/e-
• Programmable Shaping time: 40 / 70 ns
Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL – Jorge Neves 15
![Page 16: Towards wafer-scale monolithic CMOS integrated pixel ... · Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL –Jorge Neves 21. Outlook: Ongoing developments](https://reader036.vdocument.in/reader036/viewer/2022070922/5fba7290cdba126e1d2b33a1/html5/thumbnails/16.jpg)
Detector characterizationu
nca
libra
ted
ca
libra
ted
odd columns stimulated no stimulation
Discriminators threshold calibration• Calibration done row by row or for all the pixel array in simultaneous• 6-bit in-pixel DAC
Row 1 Threshold scan: S-curves
3000 injected pulses
Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL – Jorge Neves 16
![Page 17: Towards wafer-scale monolithic CMOS integrated pixel ... · Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL –Jorge Neves 21. Outlook: Ongoing developments](https://reader036.vdocument.in/reader036/viewer/2022070922/5fba7290cdba126e1d2b33a1/html5/thumbnails/17.jpg)
CMOS (7.3 µm)
glued substrate
Si 16 µm 1 kΩcm
Si 400 µm > 5 kΩcm
Bonding interface
Detector characterization
Bonding interface - scanning electron microscopy (SEM) images
Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL – Jorge Neves 17
![Page 18: Towards wafer-scale monolithic CMOS integrated pixel ... · Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL –Jorge Neves 21. Outlook: Ongoing developments](https://reader036.vdocument.in/reader036/viewer/2022070922/5fba7290cdba126e1d2b33a1/html5/thumbnails/18.jpg)
X-ray Detector characterization
• Microfocus X-ray tube (from VISCOM), XT9160 TXD
@ Empa Dübendorf – Center for X-ray Analytics
• W anode, 20-140 kVp, 1µm focal spot size, cone beam
• Uniform X-ray illumination @ 40kV, 180uA
• Flood image: 20 sec exposure
595 pixels (0.83%)89 pixels (0.13%)
Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL – Jorge Neves 18
![Page 19: Towards wafer-scale monolithic CMOS integrated pixel ... · Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL –Jorge Neves 21. Outlook: Ongoing developments](https://reader036.vdocument.in/reader036/viewer/2022070922/5fba7290cdba126e1d2b33a1/html5/thumbnails/19.jpg)
X-ray Detector characterization
Pb-phantom with diverging lines: 5 lines/mm resolved
Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL – Jorge Neves 19
![Page 20: Towards wafer-scale monolithic CMOS integrated pixel ... · Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL –Jorge Neves 21. Outlook: Ongoing developments](https://reader036.vdocument.in/reader036/viewer/2022070922/5fba7290cdba126e1d2b33a1/html5/thumbnails/20.jpg)
X-ray Detector characterization
Other contrast patterns
Aluminum object with holes and variable thickness
Set of overlapping aluminum plates
?
?
Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL – Jorge Neves 20
![Page 21: Towards wafer-scale monolithic CMOS integrated pixel ... · Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL –Jorge Neves 21. Outlook: Ongoing developments](https://reader036.vdocument.in/reader036/viewer/2022070922/5fba7290cdba126e1d2b33a1/html5/thumbnails/21.jpg)
• Front-end amplifier Gain, Noise, Sensitivity, Dynamic Range, Linearity (analog output)
• Depletion voltage (absorber), High-Voltage leakage
• Quantum Efficiency (DQE)
• Energy Calibration/ Energy resolution
• Pixel Threshold Scans (S-curves)
• Threshold Calibration, fine-tuning
• Count Rate Performance: frame rate, readout dead time, minimum exposure time
• Spatial Resolution (PSF, LSF, spatial distortions)
• Contrast Tranfer Function (CTF)
• Modulation Transfer Function (MTF)
• Normalization correction (flat-field correction algoritm)
• Cross-talk, charge sharing (fluorescence)
• Temperature dependence
• etc ...
Detector characterization – ongoing !
Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL – Jorge Neves 21
![Page 22: Towards wafer-scale monolithic CMOS integrated pixel ... · Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL –Jorge Neves 21. Outlook: Ongoing developments](https://reader036.vdocument.in/reader036/viewer/2022070922/5fba7290cdba126e1d2b33a1/html5/thumbnails/22.jpg)
Outlook: Ongoing developments
Scaling Hetero-Epitaxy from Layers to Three-Dimensional CrystalsH. von Känel, et al., Science 335, 1330 (2012)
• Pixelated SiGe absorber with potential for super resolution• Epitaxial SiGe crystals on Si pillars• Space-filling but isolated SiGe crystals
Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL – Jorge Neves 22
![Page 23: Towards wafer-scale monolithic CMOS integrated pixel ... · Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL –Jorge Neves 21. Outlook: Ongoing developments](https://reader036.vdocument.in/reader036/viewer/2022070922/5fba7290cdba126e1d2b33a1/html5/thumbnails/23.jpg)
Summary
• New semiconductor process technology for low-temperature covalent wafer bonding.
• CMOS compatible process for monolithic integrated pixel detectors.
• Demonstrated for Si-Si wafer bonding, and being exploited for GaAs, epitaxial SiGe, CdTe.
• Large-area monolithic CMOS pixel detector demonstrator successfully developed .
• X-ray detector characterization ongoing.
• Epitaxial SiGe growth ongoing.
Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL – Jorge Neves 23
![Page 24: Towards wafer-scale monolithic CMOS integrated pixel ... · Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL –Jorge Neves 21. Outlook: Ongoing developments](https://reader036.vdocument.in/reader036/viewer/2022070922/5fba7290cdba126e1d2b33a1/html5/thumbnails/24.jpg)
Acknowledgements
• Pierre-François Rüedi
• Riccardo Quaglia
• Armin Klumpp
• Andreas Drost
• Philippe Pasquet
• André Rubbia
• Sebastien Murphy
• Johannes Wüthrich
• Marco Hagting
• Harry van Essen
• Robert Zboray
• Thomas Luethi
• Antonia Neels
• Yadira Arroyo
• Adolfo Fucci
• Alberto Lucci
• Abigail Vouillamoz
• Andy Roselli
• Hans von Känel
• Manolis Choumas
• Nasser Rasek
• Naomi Vouillamoz
• Patrick Scherrer
• Philippe le Corre
• Franco Bressan
• Zoltan Cziegler
Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL – Jorge Neves 24
![Page 25: Towards wafer-scale monolithic CMOS integrated pixel ... · Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL –Jorge Neves 21. Outlook: Ongoing developments](https://reader036.vdocument.in/reader036/viewer/2022070922/5fba7290cdba126e1d2b33a1/html5/thumbnails/25.jpg)
Coming soon! Order today your
Contact: [email protected]
latenium™ Evaluation kit !
Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL – Jorge Neves 25
![Page 26: Towards wafer-scale monolithic CMOS integrated pixel ... · Vienna Conference on Instrumentation, 18-22 Feb 2019 ©2019 G-RAY MEDICAL –Jorge Neves 21. Outlook: Ongoing developments](https://reader036.vdocument.in/reader036/viewer/2022070922/5fba7290cdba126e1d2b33a1/html5/thumbnails/26.jpg)
Visit us: http://www.g-ray.ch
Contact us:
G-ray Switzerland Rouges-Terres 61CH-2068 Hauterive (NE)SWITZERLAND
Thank you !