training smarttest hlt560

8/16/2019 Training SmartTest HLT560

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EPM, Wolfgang Flatau, 2007-08, Training SmartTest page 1© Pfeiffer Vacuum 2007

Leak Detector

SmartTestdesign and function


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The participant will be able to:

explain the design and the function

operate the unit

perform maintenance work

do troubleshooting

Course objectives


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Definition “ LEAK"

A LEAK is an untight spot in a container or line,through which gases, vapors, or even liquids flow

from an area where the pressure is higher to an area

where the pressure is lower.


4/90EPM, Wolfgang Flatau, 2007-08, Training SmartTest page 4© Pfeiffer Vacuum 2007

SI - Standard = mol/s (1mol = 6.025E23 particles)

Fluid technology = Nm/s, sccm, sccs

Vacuum technology = mbar l/s, Pa m3/s, Torr l/s,

atm cc/s

Air conditioning = g/a, oz/y

Concentration = ppm (no leak rate unit)

Leak rate units



The leak rate is 1 mbar l/s if in an evacuated container

with a volume of 1 Liter, the pressure rises by 1 mbarper second , or if in a pressurized container with the

same volume, the pressure drops by 1 mbar per

second.

Definition of the unit "mbar l/s"



A bicycle tube may have a maximum pressure

loss of 1000 mbar in 175 days.Volume = 1.5 liters

175 days = 1.5x107 seconds

Which is the maximumadmissible leak rate?

How do you test a bicycle

tube?

Example 1: Leak rate in mbar l/s



Example 1

Result:

QL=[(p

2- p

1) * V] / t

s / lmbar 101,0101,5

1,51000

s

lmbar Q

4

7 L ∗∗=

∗

∗=

∗=

−

Bubble test

The leakrate should be not higher than 1x10-04 mbarl/s.



Example 2: Leak rate in mbar l/s

A bicycle tube is pumped up to 3.0 bar.

The default leak rate is taken from example

Volume = 1.5 liters

1year = ca. 3.0 x 107 seconds

Leak rate = 1,0 E-04 mbar l/s

What is the pressure in the bicycle tube after 1

year?


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Example 2

bar mbar x p

mbar x p

lsslmbar x x p

tube

loss

loss

0.1100.1

100.2

***

5.1100.3*100.1

3

3

74

==

=

===

−

Volumen

Timerate Leak

ploss*

=

Result

The pressure in the bicycle tube is 1 bar after 1

year?


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Test object pressurized:

Pressure decay

Bubble test

He sniffing with SmartTest

Leak detection methods


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E1 E0 E-8 E-9 E-10 E-11 E-12E-3 E-4 E-5 E-6 E-7E-1 E-2

He sniffing with SmartTest

mbar l/s

Detection limits pressurized

Bubble test

Pressure decay


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Test object under vacuum:

Pressure increase

Gas type dependence ( Pirani gauge)

He leak test with SmartTest

Leak detection methods


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Detection limits vacuum

E1 E0 E-8 E-9 E-10 E-11 E-12E-3 E-4 E-5 E-6 E-7E-1 E-2

Pressure increase

Gas type dependence PiraniGas type dependence Pirani

He leak test with SmartTest

mbar l/s


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Sniffing methods

T e s t g a s

Integral

T e s t g a s

Local


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Vacuum methods integral

T e s t g a s

Test object evacuated

Test chamber pressurized

T e s t g a s

Test object pressurized

Test chamber evacuated


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T

e s t g a s

Test object evacuated

Vacuum method local


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SmartTest HLT 5xx

1 Unit HLT 5xx

2 Cart to SmartTest

3 Backing pump

1

2

3

Modular concept


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Type overview

SmartTest

SmartTest HLT 550

HLT 560

HLT 570

Rotary vane pump

without Backing pump

Diaphragm pump

SmartTest

Dry pump TS 620

SmartTest

SmartTest

HLT 565

HLT 572

HLT 575SmartTest

Rotary vane pump

UNO 5

UNO 30 M

Dry pump XtraDry 150-2


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The leak detector SmartTest

1 Test port

2 Instrument operation

3 Inlet air filter

4 Connection for

external backing pump

1 2

3

4


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Instrument operation

1 START / STOP – button

2 ZERO – button

3 Softkeys with

changeable meaning

4 Display

12

3

4


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V4

V1

V3

V6

V5

V2

P2

P1

Disign

1 Test port

2 Pressure at Test port

3 Clibrated leak

4 Vent of sniff connection

5 Backing pump

6 Fore vacuum pressure

7 Turbo drag pump

8 Mass spectrometer

1

2

3

7

4

6

8

5


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Mass spectrometer

M > 4

M < 4

M = 4

3 12

5

9

11

8

7

6

410

1 Cathode 1

2 Anode

3 Cathode 2

4 Shielding

5 Extractor

6 Shielding

7 Magnetical field

8 Suppressor

9 Shielding10 Faraday cup

11 Pre amplifier


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Ionsource

Gas inlet

Pre amplifier

Magnet

Magnetic field

+

+

+

+

+

+

Principle of measurement


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V4

V1

V3

V6

V5

V2

P2

P1

START/STOP pressedPressure value P2

1000

15

0,5

5

mbar

0


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V4

V1

V3

V6

V5

V2

P2

P1

Pump fore vacuum

P2 > 15 mbar


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V4

V1

V3

V6

V5

V2

P2

P1

Measure „ Counter flow“

P2 < 15 mbar

P2 > 5 mbar


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V4

V1

V3

V6

V5

V2

P2

P1

Measure "Twin-Flow low"

P2 < 5 mbar

P2 > 0.5 mbar


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V4

V1

V3

V6

V5

V2

P2

P1

Sniffing „ Twin-Flow low“


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V4

V1

V3

V6

V5

V2

P2

P1

Calibration


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Running Up

The run-up of the turbo pump is visualized in percentage via

bar graph.

Details Menu with selected system data

Sprache, Language Direct link to the menu Language

Idioma

Setup Settings of the operating parameters


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Details

For l ine pressure p1 Present fore-vacuum pressure

Rotation speed Present rotation of the turbo pump

TMP current Present consumption of the turbo pump

Emission „ On“ if the rotation >= 1450 Hz , p1 < 10 mbar

and the filament test was okay

Filament Active filament 1 or 2

Vent TMP The filament and the turbo pump

will switch „ off“ automatically

The menu “ Vent TMP” will displayed only if the menu

„ Maintenace enable at „ Yes“ .


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Venting TMP (1)

The turbo pump is switch „ off“ and the leak detector is waiting

unti l the rotation speed of the turbo pump < 150 Hz.

Restart Stops the automatic venting procedure of the turbopump and leads back to the run up mode of the unit.


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Venting TMP (2)

The rotation speed of the turbo pump


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Venting TMP (3)

The turbo pump is vented and the leak detector can be switched off.

Vent TMP Vents the turbo pump again

Restart Stops the automatic venting procedure of the turbo

pump and leads back to the run up mode of the unit.


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Ready to start

Display

internal test leak

Start the calibration

SettingsMode, Mass,

Last calibrationFilter

Background signal

Setup main menu

Start the regeration

Direct link to the

menu Mode & Mass


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Measured value display

Analog

anddigital

Graphic

Changedisplay mode


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Activate Zero

0

10

20

30

40

50

t1

t

ZERO

Leak rate

Displayed leak rate

Measured leak rate


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Zero at falling back ground

0

10

20

30

40

50

t2

t

t1

Leak rate

Measured leak rate

Displayed leak rate

Subrtraction value


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Deactivate Zero

0

10

20

30

40

50

t3

t

ZERO

> 3 s

Leak rate

Measured leak rate

Displayed leak rate


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Setup main menu

View Display configuration

Access control Set access control

Language Selection the language

Info Information

Calibration settings Setting for the calibration

User settings Configuration of the user parameters

Maintenance & Service Menus Maintenance & Service


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View

Contrast Settings for display contrast

Units Settings for leak rate and pressure

Time & Date Setting for time and date

Display range Configuration of the display range

Lower display limit Setting for lower display limit

Background Setting for Display background signal

at ready to start


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Contrast

Setting contrast range 0 – 99

Invert display normal / invert display


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Units

Unit Leak rate mbar*l/s, Pa*m3/s, Torr*l/s

sccm, sccs, atm*cc/s,

ppm, g/a, oz/yr (only selectable in „ Sniffing“ mode)

Unit Pressure mbar, Pa, atm, Torr


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Time & Date

Date Setting of the actual date

Time Setting of the actual time (24 hours format)


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Display range

Scale linear Display linear

logarithmic Display logarithmic

2…9 Number of decades in

log. Display

Range automatic Automatic range selection

manual Manual range selection

Time axis 16…960 Time axis, time in seconds


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Lower display limit

Lower display limit for unit mbar*l/s

1E-12 mbar*l/s

1E-11 mbar*l/s

1E-10 mbar*l/s1E-09 mbar*l/s

This setting limits the display of the leak rate downwards in

the measuring mode. It is only effective for the vacuum mode.


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Background at „ Ready to start“

yes Background displayed

at „ Ready to Start“

no Background not displayed

at „ Ready to Start“


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Maintenance enable

Yes Menu „ Maintenance & Service“

is enabled

No Menu „ Maintenance & Service“is disabled


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Calibration enabled

Yes Calibration at „ Ready to Start“ enabled

No Calibration at „ Ready to Start“ disabled


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Change device PIN

New PIN 0000 – 9999 New device PIN

New PIN (verify) 0000 – 9999 New device PIN

(repeat for confirmation)


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Change menu PIN

New PIN 0000 – 9999 New menu PIN

New PIN (verify) 0000 – 9999 New menu PIN

(repeat for confirmation)

L


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Language

The fol lowing languages are available for operation:

Language

Francais French

Deutsch German Operating language

Espanol Spanish

English English

I f ti


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Information

Settings Display menu parameters

System data Display system data

Vacuum diagram Display vacuum diagram

Error list Display the last 12 errors

Calibration history Display the last 12 calibrations

S tti


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Settings

Display of the current parameter settings in 4 pages.

S t d t


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System data

Display of the system data/components in 4 pages.

Vacuum diagram


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Vacuum diagram

Vacuum diagram with the current states of valves, turbo pump

and emission.

Leak rate and pressure values P1, P2 are displayed.

Error list


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Error list

List of the last 12 errors in following format:

Date / Time / Error no. / Remark

Calibration history


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Calibration history

List of the last 12 Calibration in following format:

Date / Time / Location / Test gas / Calibration factors


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User Settings


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User Settings

Mode & Mass Operation mode and detected mass

Filter & Zero Filter and zero settings

Alarm Alarm sett ings

Interfaces Interface settings

Parameter save / load Sets of parameter, factory settings

Monitor ing funct ions Diverse funct ions can be monitored


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Filter & Zero


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Filter & Zero

Filter without No leak rate filter static Filter with fixed time constant

dynamic Filter with dynamic adaptation of time constant

Zero with Start Zero is executed immediately after the

2s…5 min specif ied time.

enabled Manual Zero releaseddisabled Manual Zero locked

constant Manual Zero released and the zero value is retained

after pressing STOP. Automatic BG -tracing is locked.

MS-BG

sub- On Internal background is subtracted at START

traction Off Internal background is not subtracted at START

Alarm


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Alarm

Mode prop. leak rate Acoustic signal proportional to the bar displaytrigger alarm A mult i-frequency signal is generated as soon

0… 4.5 min as the leak rate exceeds the setpoint value.

An alarm delay t ime can be entered.

set point A tone with the frequency proport ional to the

0… 4,5 min leak rate is emitted as soon as the leak rate

exceeds the setpoint value. An alarm delay t ime can be entered.

pinpoint Acoustic signal proportional to the leak rate

between 0,1 and 10*setpoint value

Setpoint 1E-12…9,9E+2 Alarm setpoint value

Warn limit 1…100 % Warning limit as percentage of setpoint value

Interfaces


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Interfaces

Analog output Output of the analog signal

Compact gauge Compact gauge settings

Control location Selection of the control location

Relay Relay settings

Serial port Selection of port and protocol

Bypass option Bypass option settings

Analog output


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g p

Channel 1 off Channel is off(0V)Pressure p1 Output pressure p1

Pressure p2 Output pressure p2

LR mantissa Output leak rate mantissa, l inear from 0…10 V

LR exponent Output leak rate exponent as a step function

LR linear Output leak rate linear, linear from 0…10 V

LR log. Output leak rate logarithmic, upper limit 10VPressure p(ext) Output external pressure

Channel 2 see channel 1

Scale upper limit upper limi t(=10V) for setting „ LR log“

1E-11…1E+06 and “LR linear”

V / decade 0.5, Volt per decade for setting „ LR log“

1, 2, 2.5, 5, 10

Compact gauge


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p g g

Full scale 0.1, 1, 10,100, 1000, 2000, 5000,(only for linear gauges) 10000, 50000 mbar

Type APR, CMR, PCR, PKR, TPR

Setpoint value Setpoint value for relay output

1E-10…9,9E+02

Pressure p(ext) Current pressure value p(ext)

Press. internal Inlet pressure determined with

P2 source internal gauge

external Inlet pressure determined with

external gauge

Control location


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Local Controlled by START, STOP and ZERO keys

Local and Control led by START, STOP and ZERO keys

RS232/RS485 and via RS232/RS485 interface

RS232/RS485 Controlled via RS232/RS485 interface

PLC Controlled via digital input

ALL Controlled by START, STOP and ZERO keys,

via digi tal input and via RS232/RS485 interface

Relay


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y

Relay 1,2Off Relay is always dropped-out.

START Relay is active when V2 is open.

STOP Relay is active when V6 is open.

START/STOP Relay is active when „ START“ is pressed and

is dropped-out when „ STOP“ is pressed.

Ready Relay is active in measure.Setpoint Relay is active when leak rate exceeds setpoint.

On Relay is always active.

Warning limit Relay is active when leak rate exceeds warn limit.

Pressure setpoint Relay is active when pressure exceeds setpoint.

Serial ports


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Port RS 232 Control via RS 232RS 485 Control via RS 485

Protocol Pfeiffer Pfeiffer interface protocol

HLT 2xx HLT 2xx interface protocol

(selected commands)Binary Diagnosis interface protocol

(only for internal use)

Address 1…255 Bus-address of SmartTest

in Pfeifer protocol

Bypass option


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Mode No bypass No bypass option selected

Quick pump The optional Backing pump is ready

for the pumping down process without

being active in the measuring mode.

Partial flow The optional Backing pump is readyfor the pumping down process and the

measuring mode.

Internal on / off Delay time for the act ivat ion of the internal

evacuation Backing pump is enabled / disabled.

delay


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Load parameters


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View Displays values of parameter set

Parameter set „PARA SET“ 1,2 .(4 pages)

Load Loads the parameter set „ PARA SET“ 1 or 2.

Save parameters


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The current parameter setting will be saved after pressing

the button „ Save“ in „ PARA SET 1“ or „ PARA SET 2“ .

Load factory settings


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The factory settings will be loaded after pressing the button „ OK“ .

Monitoring functions


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Flow Settings for the flow control

(sniffing mode only)

Contamination Settings of the protection against

protection helium contamination

Min. Volume & Beep Settings of minimal volume and beep

Valves Settings valve V1, V3 and V4

Evacuation time Settings for evacuation time and vent mode

& Vent

Calibration request Enables and disables request for a cal ibration

Flow


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Flow min „ Flow too low“ appears when the current

1…40 sccm value falls below this threshold

Flow max „ Flow too high“ appears when the current

10…50 sccm value exceeds t this threshold

Current flow Current flow of the sniffer line (measure mode)

These settings only take place in “ sniff ing mode” .


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Valves


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Twin-Flow high enable Valve V4 opensdisable Valve V4 always closed

0,01… 0,5 Threshold value when

mbar V4 opens

Twin-Flow low enable Valve V3 opens

disable Valve V3 always closed

0,1… 5 mbar Threshold value whenV3 opens

Counterflow enable Valve V1 opens

disable Valve V1 always closed

0,1… 25 mbar Threshold value when

V1 opens

Evacuation time & vent


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Maximum 1 s…30min This is the threshold for maximumevacuation t ime inf ini tely pump down t ime before this process

will stopped.

Vent with Stop Inlet is vented automatically after Stop.

manual Inlet can be vented in „Ready to Start“

by pressing the „ Vent“ softkey.

no Venting of the inlet is locked.

Regeneration Start-Stop-cycles with short range intended for

the reduction of a raised helium background.

Regeneration


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Automated Start-Stop-cycle with short range intended

for the reduction of a raised helium background.

An active “ Regenerat ion” will be announced in the display

and stops after 60 minutes automatically.

This funct ion can be deactivate in general with the STOP

key or with STOP in the setting “ Venting with STOP” menu.

The “ Regeneration” can only be successful activated

in the setting “ Venting with STOP” menu!

Calibration request


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Yes The request for calibration comes up:

- 30 min after switching HLT „ On“

- temperature of HLT has changed

more than 5°C

No The request for calibration does not come up.

Maintenance & Service


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Burn- in Automatic start-stop cycle

Maintenance intervals Displays the current operating hours

components of the components fore pump,

turbo pump and ion source

View Maintenance List of maintenance intervals

intervals list

Service Access to menu Service

The maintenance menu can only be chosen when the maintenance

is enabled under Setup / Access control / Maintenance enabled.

Burn-In


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Start without Automatic start-stop cycle

Calibration without calibration

Start with Automatic start-stop cycle

Calibration with calibration

You can see in the display when the Burn–In is activated.

The Burn-In can be deactivated with the STOP key.

Burn-In activ


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Run time Time in minutes since activating

the Burn-In function

Cal factor min. Calibration factor low

Cal factor max. Calibration factor high

Anode pot . min. Anode potent ial low Anode pot . max. Anode potent ial h igh

Stop Deactivate the Burn-In

This menu is available when the Burn-In is active.

(Setup / Maintenance & Service / Burn-In)


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Maintenance interval list


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List of the last 12 Maintenance in following format:

Date / Time / Component / Operating hours

Service


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The service menu is available after entering the Service-PIN.

This menu offers more information an settings for the service

engineers.

training smarttest hlt560

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