tsmc environmental management - · pdf filetsmc frequently received relevant questionnaires or...
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TSMC Property
© 2009 TSMC, Ltd.
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TSMC
Environmental Management
F. M. Hsu
Sep. 7, 2010
TSMC Property
© 2009 TSMC, Ltd.
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Content
1. Top 10 Global Environmental Issues and Impacts to
Enterprises
2. Environmental Protection in TSMC: Climate change
and Pollution, Achievement, Future Actions
Green Manufacturing
Green Production
Green Supply Chain
Green Building
3. Collaboration for Environmental Risk Management
TSMC Property
© 2009 TSMC, Ltd.
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Top 10 Global
Environmental Issues
and Impacts to Enterprises
TSMC Property
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Top 10 Global Environmental Issues
1. Climate Change
2. Energy Shortage
3. Water Shortage & Contamination
4. Bio-diversification
5. Toxic Substance, Heavy metal
6. Air Pollution
7. Waste Treatment
8. Ozon Depletion
9. Ocean & Fishing Management
10. Forest overfelling
- PFC & Energy Reduction
- Energy Saving, Renewable Energy
- Water Saving &treatment
- Impact Assessment
- RoHS PFOS Control
- Abatement Enhancement
- Waste Reduction, Recycling
- CFC-free Processes
- Waste Water Treatment
- Paperless, Reused Paper
Issue Hightech Ind. Action
RoHS: Restriction of Hazardous Substance
Heavy metal: Pb, Cd, Hg, Cr
Fire retardant additives: PBB ( ); PBDE( ) ,
PFOS: (Poly Fluorooctanyl Sulfonates)
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Our Earth is Sick
Source: Agence France-Presse (AFP) Source: nunulphotos.com
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5Source: American Council for
Voluntary International Action
US, Hurricane Katrina 2005
Climate Change
Myanmar, Cyclone
2008
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Russia, Forest FireChina, Landslide
execte.comcharlotteobserver 2010
Climate Change
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before after
doyouhike.com
2009, Our Deep Sorrow
Climate Change
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8 news.163
2010, Drought, China Southwest
pic.dbw.cn
Climate Change
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9 blog.udn.comTsengwen Dam, Taiwan2009.12
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Industries’ Consideration
Green Manufacturing:
Energy saving, Water Saving, Pollution
prevention, Waste treatment
Green Product: Low power design, Hazardous substance
restriction
Green Supply Chain
Green Codes Setting
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Environmental Protection in TSMC
PFC: per-fluorinated compounds
Green Manufacturing:
Energy saving, Water Saving, Pollution
prevention, Waste treatment
Green Product: Low power design, Hazardous substance
restriction
Green Supply Chain
Green Building
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Responses to Climate Change (1) – Carbon
Management
Reduce Carbon Emission
Low carbon manufacturing – PFC reduction, energy
saving
Low carbon products – Provide low power product
design platform
Execute Carbon Inventory and Disclosure, Establish
Product Carbon Footprints
Establish Green Supply Chain’s Carbon Management
Green Manufacturing
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Carbon Reduction – PFC
Commit to reduce PFCs emission Signed voluntary reduction MOU with the WSC.
Target : Reduce PFCs emission to 90% on the average of 1997
and 1999 by the end of 2010.
Measures taken Using lower Global Warming Potential gases (CF4, C2F6 →
C3F8)
Install local abatement.
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6
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0.00
0.50
1.00
1.50
2.00
2.50
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5.00
1997 1998 1999 2000 2001 2002 2003 2004 2005 2006 2007 2008 2009 2010
Wa
fero
ut (M
8"
EQ
pcs)
PF
C E
mis
sio
n (
M to
ns C
O2
)
Without reduction2.97 M tons CO2
With reduction0.97 M tons CO2
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Energy Saving Facility: heat recovery chillers, dual temp. design, power
frequency converter, general exhaust recycling,…
Process tools: vacuum pump, utilities reduction,…
Office: air conditioning, lighting, elevators,…
Achievement Saving 0.78B KWH per year. Can support a town of 100 K
population. 6 fabs win Taiwan’s energy saving awards.
0
0.5
1
1.5
2
0
1,000
2,000
3,000
4,000
2005 2006 2007 2008 2009
kw
h / W
afe
r a
rea
(c
m2)
Me
ga
kw
h
Power Consumption
Power Consumption
kwh/cm2
Carbon Reduction – Energy
Future focus will be
collaboration with
tool makers.
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Carbon Inventory
Inventory all direct and indirect carbon emissions of the activities in
an organization. The inventory results can be references of reduction
actions.
Carbon Disclosure
Disclose to the public the inventory results including data through the
channels accessable to public. Taiwan EPA has established a website
for this purpose.
Carbon Footprinting
The carbon emission of a specific activity is called its carbon
footprint. Total carbon emission of a product will be calculated from
very upstream raw material preparation through end product usage.
Carbon Inventory, Disclosure, Footprinting
These three have drawn high attention of governments, customers,
investors, consumers and green NGOs. The governments are leading to
build up capabilities. TSMC frequently received relevant questionnaires or
audits from customers and investors. TSMC has been building those
capabilities prior to other IC companies.
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Water Saving Measures
Process water recycling for use of process, cooling towers, ,
tools’ wet scrubbers, toilets, irrigation
Rain water collection installed at 12” fabs for irrigation
Achievement
Saving 23M tones of water per year; Can support a town with
210 K of population
0123456789
0
5,000
10,000
15,000
20,000
2005 2006 2007 2008 2009
Lite
r /
Wa
fer
are
a (
cm
2)
Km
3
Water Usage
Water Usage
Water Usage / wafer area
Response to Climate Change (2) –
Water Saving
New tools’ water
saving design will
be next focus.
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Pollution Prevention & Waste Reduction
Raw
Material
(1) Pollution Prevention: Compliant with or better than
environmental regulations
(2) Waste Reduction Principle: Reduce, Recycle, Reuse
30%
43%50%
60% 64%74%
80%85% 87%
35%
32%29%
24%22%
13%6%
5% 5%
15%
11%
16%15% 12% 12% 13% 9% 7%
20%14%
6%
0%
10%
20%
30%
40%
50%
60%
70%
80%
90%
100%
2001 2002 2003 2004 2005 2006 2007 2008 2009
TSMC Waste Recycling Rate
Landfill
Incineration
Energy Recovery
Materials Recycling
TSMC waste recycling rate:
92% in 2009
waste water
waste chemical
solid waste
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Green Product
International conventions list chemical substances hazardous to human health or environment, strictly control manufacturing processes and products. They who are against these codes will suffer product recalls and law suits. Taiwan government also takes the same actions.
EU RoHS Directive: Pd<1,000 ppm, Cd <100 ppm
Stockholm Convention: TSMC has phases out PFOS.
Low Power Design
Hazardous Substances Restriction
TSMC provides customers a low power design platform called
“Power Trim Service” with creative electronic technologies.
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Process Tool Energy-
efficient Design
Lead/PFOS Free
Green
Manufacturing
Product
Eco-design
Green
Product
TSMC Green Supply Chain
Enterprises are responsible for monitoring their supply chains’
environmental protection –
International Codes: Hazardous Substance Restriction (RoHS, PFOS,…)
Climate Change: Carbon Inventory, disclosure, reduction; Water saving
TSMC Supply Chain Management: Questionnaire survey, Audit, Forum,
Special Assistance
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Green Building
Buildings use the least natural resources
and generate the least wastes throughout
design, construction, use and dismantling.
TSMC fabs with green buildings
F14P3: World’s No. 2/Taiwan’s 1st USGBC
LEED certified IC fab Taiwan EEWH
Diamond certified.
F12P4: TSMC No.2 LEED/EEWH G. Bldg.
All TSMC future fabs will be with green
buildings.
TSMC Fabs
Energy: 20% better than ASHRAE Standard
Process Water: >85% recycled
Construction Waste: >91% recycled
Promote Green Building
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Purpose: to establish a specific green building code for
Taiwan’s high-tech companies
Host: Taiwan Building Research Center, Ministry of Interior
Program Schedule: 2009~2010
Taskforce
Academy: C.K. University, Taipei S. University
Industry: TSMC, UMC, AUO, Chimei, Delta
Authority: Tainan Science Ind. Park Administration
Reference
Taiwan EEWH green building code
USGBC LEED green building code
Japan green building code
Setting Taiwan’s H.T. Ind. Green Building Code
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EEWH-GF(for New Construction)
Green Factory Scoring System
General Rules for All Industries
Rule for Specific IndustryEEWH-RN
(for Existing Building)
Green Factory Labeling System
Government’s Stimulus
Clean ManufacturingGreen Building
Setting Taiwan’s Green Factory Code
Host: Industrial Bureau, Ministry of Economy, Taiwan
Program Schedule: 2009~2011
Taskforce
Academy: Environmental Engineering Institute
Industry: TSIA
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Climate Change Adaptation Project
Climate Change Risk Assessment on Taiwan’s Science Parks
Extreme weather
Long term drought
New industrial park development
Sea level rise
Climate Change Risk Control
Long/mid term risk control (flood, drainage, water resource, power supply, transportation, communication)
Emergency response
Host: National Science Council, Taiwan
Program Schedule: 2010~2012
Taskforce
Authorities: NSC, Water Resource Agency, Taipower, Water Co.
Industry: TSMC, Science Park Association
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Green Alliance
Taiwan Corporate Sustainability Forum (TCSF)
TSMC initiated TCSF in Oct.
2008. 20 companies joined
and share their experience
in environmental
protection.
Semiconductor
Flat Panel
Steel
Food
Computer
Communication
Paper
Energy
Chemical
Automobile
Electric
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Thank you!