tunneling fet technology for ultra-low power logic ...atol.am.gdynia.pl/~gorecki/dla_taty_pliki/2019...

Tunneling FET technology for ultra-low power logic applications

Shincihi TakagiThe University of Tokyo

IEEE Region 8, ED Poland ChapterEDS Distinguished Lecturer Mini-Colloquium "Nanoelectronics - Technology, Design, Modeling“, June 26, 2019Grand Hotel Rzeszów, Rzeszów, Poland

Outline

• Importance and critical issues of tunneling FET

• III-V tunneling FET technology

• Ge tunneling FET technology

• Column IV/Oxide semiconductor bi-layer tunneling FET technology

• Summary

2

Importance and critical issues of tunneling FET

3

Difficulty in supply voltage (Vdd) scaling

4Y. Fukuzaki, http://semicon.jeita.or.jp/STRJ/STRJ/2015/2015_11_PIDS_v3.pdf

• Supply voltage (Vdd) scaling is quite difficult at present, because Vthreduction is suppressed by leakage current, short channel effects and random dopant fluctuation serious problem in power reduction

5

Ioff

Ion

VddVth

S factor

Ioff• In low power (low Vdd) CMOS, sub-threshold region is more important with reducing Vdd• Reduction in Vg swing over sub-threshold regions due to steep slope devices is more effective in lowering Ioff• Since S factor in CMOS has fundamental lower limitation of 60 mV/dec, a new carrier conduction mechanism is needed for realizing steep slope devices

)exp(Tk

qQIB

sID

ϕ∝∝

)1(]dec/[60)1(10lnox

D

ox

DB

CCmV

CC

qTkS +⋅=+⋅=

(at 300 K)

Importance of reduction in subthreshold slope

Category of Steep Slope Devices

S factor (S.S.) limitation in conventional MOSFET (Cins↑): 60 mV/dec. at RT (300 K)

Sensitivity increase in ϕs• Negative gate capacitance MOSFET• positive feedback FET

New carrier conduction • Tunnel FET (TFET)• Impact ionization

MOSFET (I-MOS)

• Transistor-based devices

• Non-transistor-based devices - MEM Relay

Qs ∝ exp(-ϕs/kT)ID

6

Transistors with such new carrier conduction mechanisms might not respond to high frequency operation acceptable for IoT application with low operation frequency

TFET operation and importance of pristine source junction

GateS D

P+ N+i

Oxide

• Tunneling distance and density-of-state (DOS) overlap are directly controlled by gate voltage (energy filtering effect due to DOS overlap) Reduce S.S. down to less than ~ 60 mV/dec. of MOSFET limitation• Steep source impurity profile and less-defect junction formation are key technologies for superior TFET performance

7

EC

EV e

OFF

DOS

DOS

ON

Vg

W (tunneling width)

DOS overlap

p+

i

EC

EV e

OFF conditionDOS

DOS

tail states, interface states

pn-junction based TFET

High source doping and steep impurity profile needed

defects

S. Takagi et al. IEDM (2016) 516

Key factors for enhancing Ion of TFET

A. C. Seabaugh et al., Proc. IEEE 98, 2095 (2010)

ＶG>0EC

EV ∆Ec

∆Ev

• Low tunneling probability of Si due to higher and indirect Eg• III-V or Ge TFET is promising for increasing on current, because of lower and direct Eg

• Type-II hetero-structure source junction is effective in reducing effective bandgap (∆Eg) and resulting tunneling distance, leading to increase in Ionwithout reduction of bandgap in drain junction, leading to the increase in leakage current (Ioff)

∆Ev

∆EcEg1

Eg2

∆Eg

Type-II hetero-structure

8

band lineup of main semiconductors

C. G. V. de Walle et al., Nature 423 (2003) 626

• Lower Ec (channel of n-TFET or source of p-TFET) In-based materialsand ZnO

• Higher Ev (source of n-TFET or channel of p-TFET) Antimonide (Sb) and Ge 9

Gate OxideN+P+

Gate• Source junction

engineering- steep impurity profile- optimized impurity

concentration- defect-less junction- control of gate

overlap length- alignment of junction and hetero interface

• Drain junctionengineering

- low GIDL current- optimized impurity profile

• Channel engineering- low (direct) bandgap materials- type-II hetero-interface- thin-body or nano-wire structure- multi-gate structure

• Gate stack engineering- thin EOT- low interface defect density

Device Engineering for TFET

10S. Takagi et al. IEDM (2016)

Si substrate

Gate OxideN+P+

GateS D

w or w/o buried oxide

• Source pn junction engineering defect-less junction with steep impurity profile- Solid phase diffusion Zn in InGaAs, P in Ge

- in-situ doping during epi C in GaAsSb, B in Ge

Channel material engineering- Ge/GOI - Ge/strained-Si- InGaAs, InGaAs quantum well- GaAsSb/InGaAs- (Si or Ge)/Zn(Sn)O bi-layer tunneling FET

i

Our present approach to advanced TFET

11

Key issues:(1) Source junctions with high/ steep source impurity profile (narrow tunneling distance) and low defect density (low Ioff) (2) Optimal source/channel materials

III-V tunneling FET- InGaAs nTFET

12

• Zn diffuses in InGaAs as interstitials (Znint)• Balance equation [Znsub]- + 2h

[Znint]+ + [III vacancy](Znsub: substitutional Zn; h: hole concentration)

Diffusion constant ∝ [Zn]2

(B. Tuck: Atomic diffusion in III-V semiconductors (1988))

Simulation

1017

1018

1019

1020

1021

0 5 10 15 20 25 30 35Zn

con

cent

ratio

n (a

tom

s/cm

-3)

Depth (nm)

= D D∝[Zn]2

D∝[Zn]1

D∝[Zn]0(constant)

D∝[Zn]0(constant)

M. Noguchi et al., IEDM (2013) 683; JAP (2015)

Spin on glassSiO2

InGaAs InGaAs InGaAs

Zn doped InGaAs

Zn doped InGaAs

●coat Zn dopedspin on glass

●diffuse Zn intoInGaAs by RTA

●remove Zn doped spin on glass by HF

Spin on glassSiO2

Zn diffusion

• Diffusion constant ∝ [Zn]2BOX-type steep profile Zn profile becomes automatically steep in InGaAswith smaller defect density

Doping from SOG

Steep profile source engineering in InGaAs

13

Steep profile InGaAs p+n junction by Zn diffusion

10-6

10-3

100

103

-1 -0.5 0 0.5 1Bias voltage (V)

Cur

rent

per

are

a (A

/cm

2 )

negative positive

Be I/I 600oC

n=1.2

Zn 500oC

n=1.2

n=1.7Zn I/I 650oC

• Steep Zn profile with 3.5nm/dec. and peak Zn concentration of 5x1019 cm-3

• Zn diffusion realizes better ideal factor and lower reverse current than Zn implantation

1017

1018

1019

1020

1021

0 30 60 90 120 150Depth (nm)

Zn 500 oC 1 min

Be I/I 10 keV

N A (a

tom

s/cm

-3)

calculation

3.5 nm/dec

36 nm/dec

simulation

SIMS junction

14

less-defect junctions with steep p+ impurity profiles formed

M. Noguchi et al., IEDM (2013) 683; JAP 118 (2015) 045712

Electrical Characteristics

• 64 mV/dec, low S factor as a planar III-V TFET• Good Ion saturation, Ion/Ioff~2x106, Ion ~10 µA/µm

10-1310-1210-1110-1010-910-810-710-610-5

-0.25 0 0.25 0.5 0.75 1V

G (V)

I D (A

/μm

)

0

2 10-6

4 10-6

6 10-6

8 10-6

1 10-5

0 0.25 0.5 0.75 1V

D (V)

I D (A

/μm

)

VG =1.0V

VG =0.75V

VG =0.5V

VG =0.25V

Tdiffusion=500oC

TAl2O3

~ 3 nm

Ion/Ioff ~2x106

64 mV/dec

Vd = 0. 15 V

15M. Noguchi et al., IEDM (2013) 683; JAP 118 (2015) 045712

Al2O3: 3nm (EOT=1.4 nm)

S factor and Temperature dependence of ID

16

• Minimum SS (64 mV/dec.) is less dependent on Vd• Leakage current in drain junctions is well suppressed• Smaller temperature dependence of ID-VG and S.S. (1) dominance of direct tunneling current (2) suppression of GR and trap-assisted tunneling due to defect-less junction formation by Zn diffusion

Quantum-Well TFET structures with high In channel

Substrate

Gate

N+

Low junction leakage

Oxide

High tunneling current

High In contentLow in content

P+ N+i

Carrier density

X X X

高In組成TFET

Quantum-well channel

10-1310-1210-1110-1010-910-810-710-610-5

-0.5 -0.25 0 0.25 0.5 0.75V

G (V)

I D (A

/μm

)

VD = 150 mV

In0.7Ga0.3As

In0.53Ga0.47As

In0.6Ga0.4As

In0.65Ga0.35As

High-In single channel

M. Noguchi, JAP 118(2015)045712

• Ultrathin high-In quantum well layer Increase in tunneling probability at source junction edge suppressed junction leakage current• Electron confinement into high-In ultrathin quantum well layer Higher ION and smaller S.S.

expected

D. Ahn et al., VL symp (2016) 224; JAP 122, 135704 (2017)

• While reduced Eg in high-In channels increases tunneling current, leakage current also increases and, as a result, S.S. degrades 17

In0.53Ga0.47As

High In InGaAs

In0.53Ga0.47As

InGaAsQW

Quantum-Well TFET structures with high In channel

105

106

107

2 4 6 8 10 12

On/

Off

ratio

Well Thickness

In0.7

Ga0.3

As

In0.8

Ga0.2

AsInAs

In0.9

Ga0.1

As

In0.53Ga0.47As 100nm nm

InxGa1-xAs QWIn0.53Ga0.47As 3 nm

S.I.-InP

In0.53Ga0.47As bulk

0

10

20

30

40

50

60

0 0.2 0.4 0.6 0.8 1

I D[uA/u

m]

VD[V]

VG=200mV

VG=600mV

VG=400mV

VG=800mV

VG=1V Improvement in

Ion/Ioff by optimizing high-In InGaAs and well thickness

High Ion in InAs QW

5 nm InAs QW

D. Ahn et al., VL symp (2016) 224; JAP 122, 135704 (2017)

0.4

0.45

0.5

0.55

0.6

0.65

0.7

0.75

0.8

1 2 3 4 5 6 7 8 9 10

Effe

ctiv

e B

and

gap(

eV)

Well thickness(nm)

Critical thickness model

Mechanical Equilibrium

In 70%

In 80%

In 90%

In 100%

In 60%

Energey balance

calculation

experiment

• Available effective band gap can be determined by In content, well thickness and lattice relaxation, dependent on crystal growth

18

quantum confinement + strain effect

Thin CET ZrO2 gate stack on InGaAs • ALD ZrO2 with a high k value (~40) introduced to InGaAs gate stacks (CET ~ 1 nm)• The direct ZrO2/InGaAs has high Dit,

while ultrathin ALD Al2O3insertion can improve Dit, leading to reduction in S.S. of TFETs

1940

50

60

70

80

90

100

1 1.2 1.4 1.6 1.8 2

S.S m

in [m

V/de

c]

CET [nm]

Rectangle : high Dit

VD=200mV

Circle : low Dit

60mV/dec

ZrO2/In0.53Ga0.47As

ZrO2/Al

2O

3 IL/In0.53Ga0.47As

InGaAs QW10-14

10-12

10-10

10-8

10-6

0 0.2 0.4 0.6 0.8

I S, I

G [A

/um

]

VG-Voff[V]

2-cycle1-cycle

3-cycle

IS

IG

w.o IL5-cycle

VD=200mV

pure ZrO2

Al2O3insertion

D. Ahn et al., IEEE TED 66, 1862 (2019)

PtPt ZrO2Ultra-thin Al2O3

1012

1013

0 0.05 0.1D

it [e

V-1 c

m-2

]E-E

i [eV]

w.o Al2O3

1-cycle-Al2O3

2cycle-Al2O35cycle-Al2O3

Higher than 1013 eV-1cm-2

(a)

InGaAs QW TFET with thin EOT ZrO2 gate stack

• 2.8-nm-thick In0.75Ga0.25As QW TFET with W/ZrO2/2-cy ALD Al2O3(CET:1.09 nm)

exhibits low S.Smin of 50 mV/dec at VDof 0.2 V and Ion of 1.8 µA/µm at VDof 0.5 V

20

0

1

2

0 0.2 0.4 0.6 0.8

I S [u

A/u

m]

VD

[V]

VG-V

off = 0.5 V

0.5 V

0.4 V

VG step = 0.1 V

In0.75Ga0.25As QW

In0.53Ga0.47As

0.3 V40

60

80

100

10-12 10-11 10-10 10-9 10-8

S.S

[mV/

dec]

Is[A/um]

S.Smin = 50 mV/dec60 mV/dec

In0.75Ga0.25As QW

S.Savg=54 mV/dec 2 decade

In0.75Ga0.25As (2.8 nm)

In0.53Ga0.47As < 1.9 nm

W

PtPt

Al

In0.53Ga0.47As (94 nm)

Enhanced tunneling current in In0.75Ga0.25As

D. Ahn et al., IEEE TED 66, 1862 (2019)

Ge Tunneling FET Technology- GOI n- and p-TFET- Ge/s-SOI n-TFET

21

Expectation• High Ion and steep S.S. due to the narrow bandgap and the low effective mass• Easy implementation into advanced CMOS platform in comparison with III-V materials • Expectation of realizing complementary TFETs suggested by the recent Ge CMOS operation.

22

Expectation and challenges of Ge/GOI TFET

Challenges• Lower Ion, higher Ioff and resulting higher S.S. than the theoretical prediction• Difficulty in forming defect-less source pn junctions with steep impurity profiles and appropriate impurity concentration• Few studies on pure Ge/GOI TFETs

F. Meyer et al., IEDM (2008) 163

For realizing Ge n-TFETs, formation of p+/n junctions with steep impurity profiles is a key technology• low energy (3 keV) BF2 ion implantation can realize steep B profiles with steepness of ~6 nm/dec.• NiGe snowplow effect after BF2 I/I further improves steepness

p+/n Junction formation for Ge n-TFET

23

Enhancement of steepness by NiGe snowplow effect

Steep profile by low energy BF2 I/I

T. Kato, SSDM(2017)223; JJAP 57, 04FD15 (2018)

R. Matsumura, SSDM (2017)741; JJAP 57, 04FD05 (2018)

Ge

GeB doped NiGe

B doped NiGep-Ge

annealing

1018

1019

1020

1021

0 5 10 15 20 25 30 35 40

B co

ncen

tratio

n [c

m-3

]

Depth [nm]

BF2 3 keV

5.7 nm/dec

9.3 nm/dec

BF2 6 keV

20 nm/decB 4 keV

n-GeBF2 impl.

Ni

BF2 impl.NiGe

• Confirm GOI n-TFETs with source junctions formed by BF2 I/I at 3 keV and successive NiGe snowplow effect• Improvement in Ion and SS by using steeper B profiles• At 10 K, Ion/Ioff=5x106, SSmin=130 mV/dec• In TFET with NiGe formed by 4-nm-thick Ni, Ion=0.35µA/µm, SSmin= 211 mV/dec at 300 K• Reduction in leakage current at room temperature is mandatory

Operation of GOI n-TFET

24

5×106

0 0.4 0.810-15

10-1410-1310-1210-1110-1010-910-8

Vg-Vmin [V]

Vd = 300 mV300 K

10 KDrai

n cu

rren

t [A/µm

]

tNi0 nm2 nm4 nm10 nm

10-10

10-9

10-8

10-7

10-6Vd = 500 mV

I dD

ensi

ty (A

/µm

)

Vg (V)0-0.5 0.5 1.0 1.5 2.0

300 K

T. Kato, JJAP 57, 04FD15 (2018) R. Matsumura, JJAP 57, 04FD05 (2018)

5 x 106

BF2-dopedsource BF2/NiGe

source

Graph1

-2-2-2-2

-1.96-1.96-1.96-1.96

-1.92-1.92-1.92-1.92

-1.88-1.88-1.88-1.88

-1.84-1.84-1.84-1.84

-1.8-1.8-1.8-1.8

-1.76-1.76-1.76-1.76

-1.72-1.72-1.72-1.72

-1.68-1.68-1.68-1.68

-1.64-1.64-1.64-1.64

-1.6-1.6-1.6-1.6

-1.56-1.56-1.56-1.56

-1.52-1.52-1.52-1.52

-1.48-1.48-1.48-1.48

-1.44-1.44-1.44-1.44

-1.4-1.4-1.4-1.4

-1.36-1.36-1.36-1.36

-1.32-1.32-1.32-1.32

-1.28-1.28-1.28-1.28

-1.24-1.24-1.24-1.24

-1.2-1.2-1.2-1.2

-1.16-1.16-1.16-1.16

-1.12-1.12-1.12-1.12

-1.08-1.08-1.08-1.08

-1.04-1.04-1.04-1.04

-1-1-1-1

-0.96-0.96-0.96-0.96

-0.92-0.92-0.92-0.92

-0.88-0.88-0.88-0.88

-0.84-0.84-0.84-0.84

-0.8-0.8-0.8-0.8

-0.76-0.76-0.76-0.76

-0.72-0.72-0.72-0.72

-0.68-0.68-0.68-0.68

-0.64-0.64-0.64-0.64

-0.6-0.6-0.6-0.6

-0.56-0.56-0.56-0.56

-0.52-0.52-0.52-0.52

-0.48-0.48-0.48-0.48

-0.44-0.44-0.44-0.44

-0.4-0.4-0.4-0.4

-0.36-0.36-0.36-0.36

-0.32-0.32-0.32-0.32

-0.28-0.28-0.28-0.28

-0.24-0.24-0.24-0.24

-0.2-0.2-0.2-0.2

-0.16-0.16-0.16-0.16

-0.12-0.12-0.12-0.12

-0.08-0.08-0.08-0.08

-0.04-0.04-0.04-0.04

0000

0.040.040.040.04

0.080.080.080.08

0.120.120.120.12

0.160.160.160.16

0.20.20.20.2

0.240.240.240.24

0.280.280.280.28

0.320.320.320.32

0.360.360.360.36

0.40.40.40.4

0.440.440.440.44

0.480.480.480.48

0.520.520.520.52

0.560.560.560.56

0.60.60.60.6

0.640.640.640.64

0.680.680.680.68

0.720.720.720.72

0.760.760.760.76

0.80.80.80.8

0.840.840.840.84

0.880.880.880.88

0.920.920.920.92

0.960.960.960.96

1111

1.041.041.041.04

1.081.081.081.08

1.121.121.121.12

1.161.161.161.16

1.21.21.21.2

1.241.241.241.24

1.281.281.281.28

1.321.321.321.32

1.361.361.361.36

1.41.41.41.4

1.441.441.441.44

1.481.481.481.48

1.521.521.521.52

1.561.561.561.56

1.61.61.61.6

1.641.641.641.64

1.681.681.681.68

1.721.721.721.72

1.761.761.761.76

1.81.81.81.8

1.841.841.841.84

1.881.881.881.88

1.921.921.921.92

1.961.961.961.96

2222

Ni0

tNi2

tNi=4

tNi=10

0.0000001366

0.00000026

0.000000302

0.00000032

0.0000001284

0.000000246

0.000000284

0.0000003

0.0000001206

0.000000232

0.000000266

0.00000028

0.000000113

0.000000218

0.00000025

0.00000026

0.0000001056

0.000000204

0.000000234

0.00000024

0.000000098

0.0000001896

0.000000218

0.000000222

0.000000091

0.0000001756

0.000000202

0.000000204

0.000000084

0.0000001614

0.0000001858

0.0000001864

0.000000077

0.0000001476

0.00000017

0.0000001694

0.0000000702

0.000000134

0.0000001548

0.0000001528

0.0000000638

0.0000001206

0.0000001402

0.0000001372

0.0000000574

0.0000001078

0.0000001258

0.0000001222

0.0000000516

0.0000000954

0.0000001122

0.0000001082

0.0000000458

0.0000000836

0.0000000992

0.0000000952

0.0000000406

0.0000000726

0.0000000868

0.000000083

0.0000000356

0.0000000624

0.0000000754

0.0000000716

0.000000031

0.000000053

0.0000000648

0.0000000614

0.0000000266

0.0000000446

0.000000055

0.0000000518

0.0000000228

0.0000000372

0.0000000462

0.0000000434

0.0000000192

0.0000000306

0.0000000382

0.000000036

0.000000016

0.0000000248

0.000000031

0.0000000294

0.0000000132

0.0000000199

0.000000025

0.0000000236

0.0000000108

0.0000000158

0.0000000197

0.0000000189

0.0000000088

0.0000000124

0.0000000152

0.000000015

0.0000000072

0.0000000096

0.0000000116

0.0000000118

0.0000000059

0.0000000073

0.0000000087

0.0000000094

0.0000000048

0.0000000056

0.0000000065

0.0000000075

0.0000000039

0.0000000044

0.0000000048

0.0000000061

0.0000000033

0.0000000034

0.0000000036

0.000000005

0.0000000028

0.0000000027

0.0000000028

0.0000000042

0.0000000023

0.0000000022

0.0000000022

0.0000000036

0.000000002

0.0000000019

0.0000000018

0.0000000031

0.0000000017

0.0000000016

0.0000000015

0.0000000027

0.0000000014

0.0000000014

0.0000000013

0.0000000023

0.0000000012

0.0000000012

0.0000000012

0.000000002

0.000000001

0.000000001

0.000000001

0.0000000017

0.0000000008

0.0000000009

0.0000000009

0.0000000014

0.0000000007

0.0000000008

0.0000000008

0.0000000012

0.0000000006

0.0000000007

0.0000000007

0.000000001

0.0000000005

0.0000000006

0.0000000007

0.0000000008

0.0000000004

0.0000000005

0.0000000006

0.0000000007

0.0000000004

0.0000000004

0.0000000005

0.0000000006

0.0000000003

0.0000000004

0.0000000005

0.0000000005

0.0000000003

0.0000000003

0.0000000005

0.0000000004

0.0000000003

0.0000000003

0.0000000004

0.0000000004

0.0000000003

0.0000000003

0.0000000004

0.0000000004

0.0000000003

0.0000000003

0.0000000004

0.0000000003

0.0000000003

0.0000000002

0.0000000004

0.0000000003

0.0000000003

0.0000000003

0.0000000004

0.0000000004

0.0000000003

0.0000000003

0.0000000005

0.0000000005

0.0000000003

0.0000000003

0.0000000005

0.0000000006

0.0000000004

0.0000000004

0.0000000006

0.0000000007

0.0000000005

0.0000000005

0.0000000007

0.0000000009

0.0000000006

0.0000000007

0.0000000009

0.0000000011

0.0000000008

0.0000000009

0.0000000011

0.0000000015

0.000000001

0.0000000012

0.0000000015

0.0000000019

0.0000000014

0.0000000014

0.0000000022

0.0000000023

0.0000000017

0.0000000016

0.0000000033

0.0000000029

0.0000000022

0.0000000018

0.0000000049

0.0000000034

0.0000000026

0.000000002

0.0000000071

0.0000000041

0.0000000031

0.0000000022

0.0000000098

0.0000000049

0.0000000037

0.0000000023

0.0000000132

0.000000006

0.0000000043

0.0000000025

0.0000000172

0.0000000074

0.0000000048

0.0000000027

0.0000000214

0.0000000091

0.0000000055

0.0000000029

0.0000000266

0.0000000114

0.0000000063

0.0000000032

0.0000000324

0.0000000145

0.0000000071

0.0000000035

0.000000039

0.000000018

0.000000008

0.0000000039

0.0000000458

0.000000022

0.0000000089

0.0000000045

0.0000000534

0.0000000264

0.0000000098

0.0000000051

0.0000000614

0.000000033

0.0000000113

0.0000000059

0.0000000706

0.0000000408

0.0000000127

0.000000007

0.0000000794

0.0000000494

0.0000000144

0.0000000083

0.0000000894

0.0000000588

0.0000000162

0.0000000099

0.0000000998

0.0000000698

0.000000018

0.0000000119

0.0000001098

0.0000000806

0.0000000202

0.0000000142

0.000000121

0.0000000926

0.0000000224

0.0000000171

0.0000001324

0.0000001038

0.0000000248

0.0000000204

0.0000001438

0.0000001158

0.0000000276

0.0000000242

0.000000155

0.0000001288

0.00000003

0.000000029

0.0000001658

0.0000001384

0.0000000332

0.0000000338

0.0000001764

0.0000001532

0.0000000356

0.0000000398

0.0000001878

0.0000001662

0.0000000382

0.0000000458

0.0000001976

0.0000001806

0.0000000414

0.0000000522

0.000000208

0.000000194

0.000000044

0.0000000588

0.000000216

0.000000208

0.000000047

0.0000000658

0.000000226

0.000000216

0.0000000508

0.000000073

0.000000232

0.00000023

0.000000053

0.0000000804

0.00000024

0.000000244

0.0000000568

0.0000000882

0.000000246

0.000000256

0.0000000598

0.0000000956

0.000000254

0.00000027

0.000000063

0.0000001026

0.000000264

0.00000028

0.000000066

0.0000001106

0.00000027

0.00000029

0.0000000696

0.0000001186

0.000000276

0.000000302

0.0000000724

0.0000001254

0.000000282

0.000000314

0.0000000744

0.0000001324

0.000000288

0.000000322

0.0000000768

0.0000001392

0.000000294

0.000000332

0.000000079

0.000000147

0.0000003

0.000000342

0.0000000808

0.000000154

0.000000306

0.00000035

0.0000000838

0.0000001602

0.000000314

0.00000036

0.0000000868

0.0000001666

0.000000328

0.000000368

0.0000000904

0.000000173

0.000000338

0.000000378

All data

Setup titleI/V Sweep IdVd59

Classic test nameI/V Sweep

Test date2/8/17

Test time18:12:44

Device ID

Count1

Flags

RemarksNi10-W10-R1-IdVd

Context.MainFrame4156C

Channel.UnitTypeSMUSMUSMUSMU

Channel.UnitSMU2:HRSMU3:HRSMU1:HRSMU4:HR

Channel.INameIgIsIdI4

Channel.VNameVgVsVdV4

Channel.ModeVVVCOMMON

Channel.FuncVAR2CONSTVAR1CONST

Channel.Index

Channel.Time

Measurement.Port.UnitSMU2:HRSMU3:HRSMU1:HRSMU4:HR

Measurement.Port.SeriesResistorNONENONENONENONE

Measurement.Port.FilterONONONON

Measurement.Primary.LocusSingle

Measurement.Primary.ScaleLINEAR

Measurement.Primary.Start0

Measurement.Primary.Stop1

Measurement.Primary.Step0.01

Measurement.Primary.Compliance0.1

Measurement.Primary.PowerCompliance0

Measurement.Aborting.ConditionCONTINUE AT ANY

Measurement.PostOutput.ValueSTART

Measurement.PostOutput.RetentionOFF

Measurement.Secondary.Start0.5

Measurement.Secondary.Count4

Measurement.Secondary.Step0.5

Measurement.Secondary.Compliance0.1

Measurement.Secondary.PowerCompliance0

Measurement.Bias.Source0.5000

Measurement.Bias.Compliance0.10.10.10.1

Measurement.Monitor.UnitSMU2:HRSMU3:HRSMU1:HRSMU4:HR

Measurement.Monitor.AdcHR ADCHR ADCHR ADCHR ADC

Measurement.Monitor.RangingModeLIMITEDLIMITEDLIMITEDLIMITED

Measurement.Monitor.RangeBoundary1nA1nA1nA1nA

Measurement.Monitor.RangeRatingBY FULL RANGEBY FULL RANGEBY FULL RANGEBY FULL RANGE

Measurement.Monitor.RangeRatingCoeff50505050

Measurement.Timing.Hold0

Measurement.Timing.Delay0

Measurement.Adc.HighResolution.AutoZeroOFF

Measurement.Adc.HighResolution.ModeAUTO

Measurement.Adc.HighResolution.Coeff1

Measurement.Ag16440ASelector.SemiconductorRelay.Channel1DEFAULT


Output.Graph.Enabled

Output.Graph.XAxis.DataVd

Output.Graph.XAxis.ScaleLinear

Output.Graph.XAxis.Left0

Output.Graph.XAxis.Right1

Output.Graph.YAxis.DataIdIgIs

Output.Graph.YAxis.ScaleLogLogLog

Output.Graph.YAxis.Bottom1.00E-151.00E-151.00E-15

Output.Graph.YAxis.Top0.10.10.1

Output.Graph.YAxis.Group

Output.List.DataVdIdIsIg

AutoAnalysis.Interpolation

AutoAnalysis.Line1.Enabled

AutoAnalysis.Line1.Type1

AutoAnalysis.Line1.Fix

AutoAnalysis.Line1.YAxis0

AutoAnalysis.Line1.Point1.Type0

AutoAnalysis.Line1.Point1.XY.X

AutoAnalysis.Line1.Point1.XY.Y

AutoAnalysis.Line1.Point1.Data.Var

AutoAnalysis.Line1.Point1.Data.Condition

AutoAnalysis.Line1.Point1.Data.Start

AutoAnalysis.Line1.Point1.Data.StartVar

AutoAnalysis.Line1.Point1.Data.StartCondition









AutoAnalysis.Line1.GradientExpr0






















AutoAnalysis.Marker.Enabled

AutoAnalysis.Marker.Data.Var

AutoAnalysis.Marker.Data.Condition

AutoAnalysis.Marker.Data.Start

AutoAnalysis.Marker.Data.StartVar

AutoAnalysis.Marker.Data.StartCondition

VdIdIgIs

0-6.16E-111.95E-08-1.94E-08

0.017.73E-091.96E-08-2.73E-08

0.021.44E-081.97E-08-3.40E-08

0.032.05E-081.94E-08-3.99E-08

0.042.63E-081.95E-08-4.56E-08

0.053.09E-081.95E-08-5.04E-08

0.063.51E-081.95E-08-5.44E-08

0.073.94E-081.94E-08-5.86E-08

0.084.29E-081.95E-08-6.22E-08

0.094.58E-081.94E-08-6.53E-08

0.14.86E-081.95E-08-6.81E-08

0.115.13E-081.95E-08-7.08E-08

0.125.45E-081.95E-08-7.37E-08

0.135.63E-081.94E-08-7.56E-08

0.145.90E-081.94E-08-7.80E-08

0.156.06E-081.94E-08-8.02E-08

0.166.21E-081.94E-08-8.14E-08

0.176.36E-081.95E-08-8.30E-08

0.186.50E-081.95E-08-8.42E-08

0.196.66E-081.94E-08-8.58E-08

0.26.81E-081.95E-08-8.72E-08

0.216.90E-081.94E-08-8.84E-08

0.226.97E-081.94E-08-8.89E-08

0.237.04E-081.94E-08-8.95E-08

0.247.12E-081.94E-08-8.98E-08

0.257.07E-081.95E-08-9.06E-08

0.267.21E-081.94E-08-9.12E-08

0.277.24E-081.95E-08-9.17E-08

0.287.31E-081.93E-08-9.23E-08

0.297.38E-081.93E-08-9.35E-08

0.37.37E-081.93E-08-9.32E-08

0.317.42E-081.95E-08-9.34E-08

0.327.51E-081.94E-08-9.38E-08

0.337.49E-081.94E-08-9.45E-08

0.347.43E-081.95E-08-9.37E-08

0.357.48E-081.95E-08-9.41E-08

0.367.50E-081.94E-08-9.45E-08

0.377.49E-081.95E-08-9.43E-08

0.387.56E-081.94E-08-9.50E-08

0.397.59E-081.94E-08-9.47E-08

0.47.59E-081.94E-08-9.52E-08

0.417.57E-081.96E-08-9.53E-08

0.427.67E-081.94E-08-9.57E-08

0.437.70E-081.95E-08-9.63E-08

0.447.63E-081.94E-08-9.62E-08

0.457.77E-081.93E-08-9.63E-08

0.467.74E-081.93E-08-9.59E-08

0.477.64E-081.93E-08-9.65E-08

0.487.62E-081.94E-08-9.56E-08

0.497.65E-081.93E-08-9.53E-08

0.57.63E-081.95E-08-9.58E-08

0.517.73E-081.94E-08-9.64E-08

0.527.69E-081.94E-08-9.61E-08

0.537.73E-081.94E-08-9.67E-08

0.547.71E-081.94E-08-9.68E-08

0.557.72E-081.94E-08-9.68E-08

0.567.80E-081.94E-08-9.73E-08

0.577.70E-081.95E-08-9.72E-08

0.587.71E-081.94E-08-9.62E-08

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0.67.75E-081.95E-08-9.66E-08

0.617.79E-081.96E-08-9.75E-08

0.627.77E-081.95E-08-9.72E-08

0.637.75E-081.94E-08-9.69E-08

0.647.74E-081.94E-08-9.67E-08

0.657.72E-081.94E-08-9.67E-08

0.667.73E-081.94E-08-9.68E-08

0.677.79E-081.94E-08-9.68E-08

0.687.74E-081.94E-08-9.71E-08

0.697.81E-081.94E-08-9.69E-08

0.77.77E-081.94E-08-9.74E-08

0.717.77E-081.95E-08-9.75E-08

0.727.74E-081.95E-08-9.73E-08

0.737.74E-081.95E-08-9.68E-08

0.747.75E-081.95E-08-9.70E-08

0.757.71E-081.95E-08-9.68E-08

0.767.73E-081.95E-08-9.63E-08

0.777.77E-081.95E-08-9.77E-08

0.787.78E-081.95E-08-9.73E-08

0.797.74E-081.95E-08-9.70E-08

0.87.76E-081.95E-08-9.70E-08

0.817.75E-081.94E-08-9.67E-08

0.827.77E-081.94E-08-9.74E-08

0.837.85E-081.95E-08-9.79E-08

0.847.92E-081.96E-08-9.83E-08

0.857.89E-081.95E-08-9.87E-08

0.867.89E-081.94E-08-9.83E-08

0.877.91E-081.93E-08-9.90E-08

0.887.93E-081.94E-08-9.86E-08

0.897.94E-081.94E-08-9.95E-08

0.98.02E-081.95E-08-9.95E-08

0.917.93E-081.96E-08-9.90E-08

0.927.97E-081.94E-08-9.92E-08

0.937.97E-081.95E-08-9.92E-08

0.947.98E-081.94E-08-9.88E-08

0.958.00E-081.95E-08-9.98E-08

0.967.97E-081.93E-08-9.92E-08

0.978.03E-081.94E-08-9.97E-08

0.988.09E-081.93E-08-1.00E-07

0.997.99E-081.94E-08-1.00E-07

18.07E-081.94E-08-1.00E-07

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0.182.55E-071.26E-07-3.83E-07

0.192.66E-071.26E-07-3.91E-07

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0.212.82E-071.26E-07-4.08E-07

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0.233.08E-071.26E-07-4.34E-07

0.243.18E-071.26E-07-4.42E-07

0.253.29E-071.26E-07-4.56E-07

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0.33.71E-071.26E-07-5.00E-07

0.313.79E-071.26E-07-5.02E-07

0.323.87E-071.26E-07-5.15E-07

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0.831.69E-064.07E-07-2.09E-06

0.841.69E-064.06E-07-2.09E-06

0.851.68E-064.03E-07-2.09E-06

0.861.69E-064.02E-07-2.08E-06

0.871.68E-064.03E-07-2.09E-06

0.881.69E-064.02E-07-2.10E-06

0.891.69E-064.02E-07-2.09E-06

0.91.70E-064.03E-07-2.10E-06

0.911.72E-064.04E-07-2.11E-06

0.921.70E-064.03E-07-2.11E-06

0.931.71E-064.03E-07-2.12E-06

0.941.71E-064.03E-07-2.12E-06

0.951.71E-064.02E-07-2.11E-06

0.961.71E-064.00E-07-2.10E-06

0.971.72E-063.99E-07-2.10E-06

0.981.72E-063.99E-07-2.11E-06

0.991.71E-063.99E-07-2.12E-06

11.72E-064.04E-07-2.12E-06

0-1.69E-091.04E-06-1.04E-06

0.015.84E-081.04E-06-1.10E-06

0.021.16E-071.04E-06-1.15E-06

0.031.70E-071.04E-06-1.22E-06

0.042.26E-071.05E-06-1.27E-06

0.052.77E-071.05E-06-1.32E-06

0.063.18E-071.05E-06-1.37E-06

0.073.71E-071.05E-06-1.42E-06

0.084.20E-071.05E-06-1.48E-06

0.094.73E-071.06E-06-1.53E-06

0.15.26E-071.06E-06-1.59E-06

0.115.74E-071.05E-06-1.63E-06

0.126.21E-071.05E-06-1.67E-06

0.136.63E-071.05E-06-1.71E-06

0.147.12E-071.41E-06-2.11E-06

0.157.72E-071.41E-06-1.82E-06

0.168.19E-079.88E-07-1.79E-06

0.178.69E-079.66E-07-1.84E-06

0.189.18E-079.67E-07-1.88E-06

0.199.59E-079.66E-07-1.93E-06

0.21.00E-069.65E-07-1.97E-06

0.211.06E-069.68E-07-2.02E-06

0.221.10E-069.67E-07-2.07E-06

0.231.15E-069.72E-07-2.11E-06

0.241.19E-069.72E-07-2.15E-06

0.251.25E-069.69E-07-2.21E-06

0.261.29E-069.69E-07-2.26E-06

0.271.33E-069.68E-07-2.30E-06

0.281.37E-069.68E-07-2.34E-06

0.291.41E-069.68E-07-2.37E-06

0.31.46E-069.69E-07-2.42E-06

0.311.50E-069.69E-07-2.48E-06

0.321.55E-069.69E-07-2.51E-06

0.331.59E-069.69E-07-2.56E-06

0.341.62E-069.70E-07-2.60E-06

0.351.65E-069.69E-07-2.62E-06

0.361.70E-069.71E-07-2.69E-06

0.371.74E-069.71E-07-2.72E-06

0.381.79E-069.71E-07-2.76E-06

0.391.82E-069.71E-07-2.79E-06

0.41.86E-069.75E-07-2.82E-06

0.411.90E-069.75E-07-2.87E-06

0.421.94E-069.78E-07-2.92E-06

0.431.98E-069.76E-07-2.94E-06

0.442.02E-069.77E-07-3.00E-06

0.452.05E-069.75E-07-3.03E-06

0.462.08E-069.77E-07-3.07E-06

0.472.11E-069.77E-07-3.10E-06

0.482.13E-069.76E-07-3.12E-06

0.492.18E-069.74E-07-3.15E-06

0.52.22E-069.74E-07-3.19E-06

0.512.24E-069.74E-07-3.22E-06

0.522.27E-069.73E-07-3.25E-06

0.532.29E-069.75E-07-3.27E-06

0.542.33E-069.76E-07-3.30E-06

0.552.36E-069.75E-07-3.32E-06

0.562.38E-069.74E-07-3.36E-06

0.572.41E-069.77E-07-3.37E-06

0.582.44E-069.74E-07-3.41E-06

0.592.46E-069.74E-07-3.44E-06

0.62.50E-069.75E-07-3.47E-06

0.612.52E-069.76E-07-3.50E-06

0.622.54E-069.77E-07-3.51E-06

0.632.57E-069.76E-07-3.56E-06

0.642.60E-069.75E-07-3.58E-06

0.652.62E-069.76E-07-3.60E-06

0.662.65E-069.76E-07-3.62E-06

0.672.69E-069.77E-07-3.66E-06

0.682.70E-069.76E-07-3.68E-06

0.692.72E-069.75E-07-3.70E-06

0.72.74E-069.76E-07-3.72E-06

0.712.74E-069.76E-07-3.72E-06

0.722.77E-069.75E-07-3.75E-06

0.732.80E-069.75E-07-3.76E-06

0.742.84E-069.71E-07-3.80E-06

0.752.84E-069.71E-07-3.80E-06

0.762.85E-069.73E-07-3.81E-06

0.772.86E-069.74E-07-3.82E-06

0.782.87E-069.72E-07-3.84E-06

0.792.87E-069.72E-07-3.85E-06

0.82.89E-069.72E-07-3.88E-06

0.812.92E-069.73E-07-3.86E-06

0.822.93E-069.72E-07-3.89E-06

0.832.94E-069.72E-07-3.91E-06

0.842.93E-069.72E-07-3.93E-06

0.852.96E-069.73E-07-3.94E-06

0.862.96E-069.73E-07-3.93E-06

0.872.97E-069.72E-07-3.94E-06

0.883.00E-069.74E-07-3.98E-06

0.893.00E-069.72E-07-3.98E-06

0.93.01E-069.73E-07-3.98E-06

0.913.01E-069.74E-07-3.99E-06

0.923.01E-069.73E-07-3.99E-06

0.933.02E-069.73E-07-3.99E-06

0.943.05E-069.73E-07-4.01E-06

0.953.05E-069.74E-07-4.03E-06

0.963.05E-069.74E-07-4.02E-06

0.973.06E-069.73E-07-4.04E-06

0.983.07E-069.74E-07-4.05E-06

0.993.06E-069.73E-07-4.04E-06

13.10E-069.73E-07-4.06E-06

Setup titleI/V Sweep


Test date2/8/17

Test time18:11:54

Device ID

Count1

Flags

RemarksNi10-W10-R1-IdVg








Channel.Index

Channel.Time






Measurement.Primary.Start-2













Measurement.Bias.Source-200.050
















Output.Graph.XAxis.DataVg


Output.Graph.XAxis.Left-2







Output.List.DataVgIgIdIsVdVs


















































VgIdIgIsVdVs

-26.47E-08-9.54E-078.91E-070.050

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06.22E-095.96E-12-6.24E-090.050

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0.121.39E-089.57E-10-1.49E-080.050

0.161.81E-081.52E-09-1.97E-080.050

0.22.24E-082.29E-09-2.48E-080.050

0.242.60E-083.32E-09-2.94E-080.050

0.282.90E-084.64E-09-3.38E-080.050

0.323.13E-086.26E-09-3.79E-080.050

0.363.37E-088.95E-09-4.28E-080.050

0.43.58E-081.15E-08-4.73E-080.050

0.443.90E-081.49E-08-5.39E-080.050

0.484.19E-081.84E-08-6.06E-080.050

0.524.55E-082.23E-08-6.82E-080.050

0.564.89E-082.71E-08-7.66E-080.050

0.65.26E-083.22E-08-8.54E-080.050

0.645.69E-083.82E-08-9.56E-080.050

0.686.11E-084.47E-08-1.07E-070.050

0.726.62E-085.19E-08-1.18E-070.050

0.767.27E-086.00E-08-1.33E-070.050

0.88.00E-086.89E-08-1.50E-070.050

0.848.74E-087.86E-08-1.67E-070.050

0.889.59E-088.91E-08-1.86E-070.050

0.921.03E-071.01E-07-2.05E-070.050

0.961.08E-071.13E-07-2.24E-070.050

11.16E-071.27E-07-2.45E-070.050

1.041.24E-071.42E-07-2.68E-070.050

1.081.34E-071.56E-07-2.92E-070.050

1.121.44E-071.73E-07-3.18E-070.050

1.161.54E-071.92E-07-3.48E-070.050

1.21.60E-072.10E-07-3.73E-070.050

1.241.72E-072.31E-07-4.02E-070.050

1.281.80E-072.54E-07-4.36E-070.050

1.321.92E-072.78E-07-4.68E-070.050

1.361.96E-073.02E-07-5.04E-070.050

1.42.07E-073.32E-07-5.39E-070.050

1.442.11E-073.60E-07-5.74E-070.050

1.482.22E-073.90E-07-6.14E-070.050

1.522.26E-074.23E-07-6.51E-070.050

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1.62.41E-074.93E-07-7.39E-070.050

1.642.48E-075.29E-07-7.78E-070.050

1.682.57E-075.68E-07-8.25E-070.050

1.722.68E-076.10E-07-8.77E-070.050

1.762.69E-076.54E-07-9.29E-070.050

1.82.70E-077.00E-07-9.72E-070.050

1.842.77E-077.46E-07-1.02E-060.050

1.882.83E-077.98E-07-1.08E-060.050

1.922.88E-078.53E-07-1.14E-060.050

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22.99E-079.70E-07-1.27E-060.050

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08.91E-096.48E-12-8.95E-090.50

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0.284.36E-084.66E-09-4.84E-080.50

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0.47.58E-081.09E-08-8.73E-080.50

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0.489.96E-081.73E-08-1.18E-070.50

0.521.14E-072.14E-08-1.37E-070.50

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0.641.86E-073.71E-08-2.27E-070.50

0.682.20E-074.37E-08-2.67E-070.50

0.722.64E-075.11E-08-3.18E-070.50

0.763.16E-075.94E-08-3.82E-070.50

0.83.64E-076.85E-08-4.43E-070.50

0.844.33E-077.88E-08-5.23E-070.50

0.885.15E-078.77E-08-6.06E-070.50

0.925.96E-079.91E-08-7.06E-070.50

0.966.85E-071.12E-07-8.06E-070.50

17.57E-071.26E-07-8.89E-070.50

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1.089.80E-071.55E-07-1.14E-060.50

1.121.08E-061.72E-07-1.27E-060.50

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1.21.32E-062.10E-07-1.55E-060.50

1.241.44E-062.31E-07-1.69E-060.50

1.281.56E-062.53E-07-1.84E-060.50

1.321.68E-062.77E-07-1.98E-060.50

1.361.82E-063.02E-07-2.14E-060.50

1.41.93E-063.29E-07-2.28E-060.50

1.442.04E-063.56E-07-2.44E-060.50

1.482.16E-063.86E-07-2.56E-060.50

1.522.28E-064.18E-07-2.73E-060.50

1.562.42E-064.52E-07-2.88E-060.50

1.62.51E-064.87E-07-3.03E-060.50

1.642.62E-065.25E-07-3.15E-060.50

1.682.72E-065.64E-07-3.32E-060.50

1.722.85E-066.05E-07-3.48E-060.50

1.762.95E-066.50E-07-3.65E-060.50

1.83.03E-066.97E-07-3.77E-060.50

1.843.09E-067.43E-07-3.87E-060.50

1.883.21E-067.97E-07-4.03E-060.50

1.923.32E-068.51E-07-4.21E-060.50

1.963.39E-069.13E-07-4.33E-060.50

23.49E-069.68E-07-4.50E-060.50

Setup titleI/V Sweep IdVd


Test date2/8/17

Test time18:10:35

Device ID

Count1

Flags









Channel.Index

Channel.Time



































Output.Graph.XAxis.DataVd


Output.Graph.XAxis.Left0







Output.List.DataVdIdIsIg


















































VdIdIgIs

0-9.19E-111.91E-08-1.94E-08

0.011.21E-081.94E-08-3.17E-08

0.022.28E-081.93E-08-4.20E-08

0.033.24E-081.93E-08-5.14E-08

0.044.09E-081.93E-08-6.04E-08

0.054.84E-081.94E-08-6.77E-08

0.065.52E-081.93E-08-7.43E-08

0.076.14E-081.93E-08-8.07E-08

0.086.70E-081.93E-08-8.62E-08

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0.766.24E-068.34E-07-7.06E-06

0.776.29E-068.35E-07-7.12E-06

0.786.31E-068.36E-07-7.13E-06

0.796.32E-068.34E-07-7.15E-06

0.86.35E-068.36E-07-7.20E-06

0.816.45E-068.34E-07-7.24E-06

0.826.47E-068.36E-07-7.33E-06

0.836.49E-068.37E-07-7.33E-06

0.846.47E-068.36E-07-7.31E-06

0.856.51E-068.37E-07-7.33E-06

0.866.50E-068.36E-07-7.34E-06

0.876.48E-068.37E-07-7.33E-06

0.886.54E-068.35E-07-7.37E-06

0.896.58E-068.35E-07-7.43E-06

0.96.59E-068.35E-07-7.45E-06

0.916.65E-068.36E-07-7.46E-06

0.926.66E-068.35E-07-7.50E-06

0.936.67E-068.35E-07-7.53E-06

0.946.69E-068.36E-07-7.50E-06

0.956.72E-068.37E-07-7.55E-06

0.966.74E-068.37E-07-7.55E-06

0.976.77E-068.37E-07-7.59E-06

0.986.81E-068.37E-07-7.60E-06

0.996.76E-068.37E-07-7.60E-06

16.77E-068.37E-07-7.60E-06

Setup titleI/V Sweep


Test date2/8/17

Test time18:09:36

Device ID

Count1

Flags

RemarksNi10-W20-R2-IdVg








Channel.Index

Channel.Time






Measurement.Primary.Start-2













Measurement.Bias.Source-200.050
















Output.Graph.XAxis.DataVg


Output.Graph.XAxis.Left-2







Output.List.DataVgIgIdIsVdVs


















































VgIdIgIsVdVs

-21.29E-08-8.28E-078.13E-070.050

-1.961.31E-08-7.76E-077.64E-070.050

-1.921.32E-08-7.30E-077.16E-070.050

-1.881.34E-08-6.85E-076.71E-070.050

-1.841.36E-08-6.42E-076.28E-070.050

-1.81.38E-08-5.98E-075.83E-070.050

-1.761.41E-08-5.57E-075.43E-070.050

-1.721.43E-08-5.18E-075.06E-070.050

-1.681.46E-08-4.86E-074.71E-070.050

-1.641.50E-08-4.52E-074.36E-070.050

-1.61.53E-08-4.22E-074.07E-070.050

-1.561.57E-08-3.91E-073.75E-070.050

-1.521.62E-08-3.63E-073.47E-070.050

-1.481.67E-08-3.38E-073.21E-070.050

-1.441.71E-08-3.12E-072.92E-070.050

-1.41.77E-08-2.86E-072.70E-070.050

-1.361.82E-08-2.63E-072.45E-070.050

-1.321.86E-08-2.42E-072.23E-070.050

-1.281.90E-08-2.23E-072.03E-070.050

-1.241.92E-08-2.03E-071.83E-070.050

-1.21.92E-08-1.86E-071.66E-070.050

-1.161.89E-08-1.69E-071.50E-070.050

-1.121.83E-08-1.54E-071.36E-070.050

-1.081.72E-08-1.40E-071.22E-070.050

-1.041.58E-08-1.26E-071.10E-070.050

-11.42E-08-1.14E-079.95E-080.050

-0.961.25E-08-1.02E-078.91E-080.050

-0.921.08E-08-9.06E-087.92E-080.050

-0.889.21E-09-7.98E-087.10E-080.050

-0.847.82E-09-7.08E-086.35E-080.050

-0.86.63E-09-6.24E-085.59E-080.050

-0.765.67E-09-5.45E-084.87E-080.050

-0.724.91E-09-4.72E-084.23E-080.050

-0.684.27E-09-4.05E-083.64E-080.050

-0.643.76E-09-3.45E-083.09E-080.050

-0.63.36E-09-2.90E-082.57E-080.050

-0.562.99E-09-2.44E-082.14E-080.050

-0.522.68E-09-2.01E-081.74E-080.050

-0.482.41E-09-1.64E-081.40E-080.050

-0.442.19E-09-1.33E-081.11E-080.050

-0.41.97E-09-1.05E-088.55E-090.050

-0.361.85E-09-8.26E-096.44E-090.050

-0.321.78E-09-6.33E-094.49E-090.050

-0.281.81E-09-4.68E-092.85E-090.050

-0.241.95E-09-3.36E-091.39E-090.050

-0.22.24E-09-2.31E-095.71E-110.050

-0.162.89E-09-1.54E-09-1.32E-090.050

-0.124.01E-09-9.79E-10-3.04E-090.050

-0.085.67E-09-5.41E-10-5.15E-090.050

-0.047.79E-09-2.34E-10-7.58E-090.050

01.03E-085.70E-12-1.03E-080.050

0.041.35E-082.48E-10-1.38E-080.050

0.081.75E-085.74E-10-1.81E-080.050

0.122.21E-081.02E-09-2.32E-080.050

0.162.67E-081.62E-09-2.83E-080.050

0.23.05E-082.37E-09-3.30E-080.050

0.243.41E-083.44E-09-3.77E-080.050

0.283.79E-084.73E-09-4.28E-080.050

0.324.24E-086.29E-09-4.88E-080.050

0.364.72E-088.32E-09-5.59E-080.050

0.45.33E-081.07E-08-6.40E-080.050

0.445.89E-081.36E-08-7.28E-080.050

0.486.74E-081.65E-08-8.48E-080.050

0.527.77E-082.07E-08-9.94E-080.050

0.568.72E-082.44E-08-1.12E-070.050

0.61.00E-072.91E-08-1.30E-070.050

0.641.11E-073.45E-08-1.48E-070.050

0.681.27E-074.04E-08-1.68E-070.050

0.721.41E-074.68E-08-1.91E-070.050

0.761.58E-075.41E-08-2.15E-070.050

0.81.76E-076.20E-08-2.40E-070.050

0.841.91E-077.00E-08-2.63E-070.050

0.882.08E-077.99E-08-2.92E-070.050

0.922.28E-079.00E-08-3.19E-070.050

0.962.49E-071.02E-07-3.52E-070.050

12.61E-071.13E-07-3.74E-070.050

1.042.73E-071.25E-07-4.00E-070.050

1.082.89E-071.40E-07-4.32E-070.050

1.123.06E-071.55E-07-4.66E-070.050

1.163.33E-071.71E-07-5.06E-070.050

1.23.53E-071.88E-07-5.47E-070.050

1.243.76E-072.07E-07-5.89E-070.050

1.283.94E-072.27E-07-6.23E-070.050

1.324.08E-072.48E-07-6.62E-070.050

1.364.26E-072.71E-07-7.08E-070.050

1.44.41E-072.95E-07-7.42E-070.050

1.444.59E-073.25E-07-7.85E-070.050

1.484.73E-073.51E-07-8.30E-070.050

1.524.94E-073.94E-07-8.89E-070.050

1.565.09E-074.15E-07-9.29E-070.050

1.65.26E-074.46E-07-9.82E-070.050

1.645.44E-074.81E-07-1.04E-060.050

1.685.65E-075.18E-07-1.09E-060.050

1.725.77E-075.50E-07-1.13E-060.050

1.765.92E-075.82E-07-1.18E-060.050

1.85.98E-076.39E-07-1.25E-060.050

1.846.09E-076.90E-07-1.31E-060.050

1.886.11E-077.33E-07-1.36E-060.050

1.926.24E-077.92E-07-1.42E-060.050

1.966.22E-078.40E-07-1.48E-060.050

26.39E-079.10E-07-1.55E-060.050

-26.99E-06-8.25E-07-6.22E-060.50

-1.966.57E-06-7.73E-07-5.81E-060.50

-1.926.16E-06-7.23E-07-5.44E-060.50

-1.885.76E-06-6.77E-07-5.08E-060.50

-1.845.37E-06-6.37E-07-4.73E-060.50

-1.84.98E-06-5.98E-07-4.38E-060.50

-1.764.60E-06-5.61E-07-4.03E-060.50

-1.724.23E-06-5.25E-07-3.70E-060.50

-1.683.86E-06-4.89E-07-3.37E-060.50

-1.643.51E-06-4.54E-07-3.04E-060.50

-1.63.17E-06-4.24E-07-2.73E-060.50

-1.562.84E-06-3.94E-07-2.43E-060.50

-1.522.52E-06-3.65E-07-2.15E-060.50

-1.482.23E-06-3.37E-07-1.89E-060.50

-1.441.95E-06-3.12E-07-1.63E-060.50

-1.41.69E-06-2.89E-07-1.40E-060.50

-1.361.46E-06-2.67E-07-1.19E-060.50

-1.321.24E-06-2.45E-07-9.92E-070.50

-1.281.05E-06-2.24E-07-8.21E-070.50

-1.248.77E-07-2.05E-07-6.69E-070.50

-1.27.25E-07-1.87E-07-5.37E-070.50

-1.165.96E-07-1.70E-07-4.23E-070.50

-1.124.85E-07-1.55E-07-3.29E-070.50

-1.083.92E-07-1.40E-07-2.53E-070.50

-1.043.17E-07-1.26E-07-1.90E-070.50

-12.58E-07-1.14E-07-1.44E-070.50

-0.962.12E-07-1.02E-07-1.10E-070.50

-0.921.76E-07-9.12E-08-8.51E-080.50

-0.881.48E-07-8.06E-08-6.70E-080.50

-0.841.26E-07-7.14E-08-5.51E-080.50

-0.81.10E-07-6.28E-08-4.66E-080.50

-0.769.50E-08-5.50E-08-4.05E-080.50

-0.728.30E-08-4.74E-08-3.59E-080.50

-0.687.27E-08-4.09E-08-3.23E-080.50

-0.646.27E-08-3.47E-08-2.84E-080.50

-0.65.44E-08-2.98E-08-2.48E-080.50

-0.564.67E-08-2.50E-08-2.19E-080.50

-0.523.96E-08-2.05E-08-1.95E-080.50

-0.483.32E-08-1.67E-08-1.66E-080.50

-0.442.78E-08-1.35E-08-1.44E-080.50

-0.42.34E-08-1.07E-08-1.28E-080.50

-0.361.97E-08-8.33E-09-1.15E-080.50

-0.321.67E-08-6.34E-09-1.03E-080.50

-0.281.42E-08-4.72E-09-9.60E-090.50

-0.241.25E-08-3.19E-09-9.32E-090.50

-0.21.10E-08-2.35E-09-8.67E-090.50

-0.161.02E-08-1.57E-09-8.68E-090.50

-0.129.70E-09-9.97E-10-8.91E-090.50

-0.089.81E-09-5.65E-10-9.31E-090.50

-0.041.09E-08-2.47E-10-1.06E-080.50

01.28E-085.77E-12-1.28E-080.50

0.041.58E-082.57E-10-1.61E-080.50

0.081.96E-085.57E-10-2.02E-080.50

0.122.50E-089.72E-10-2.60E-080.50

0.163.25E-081.51E-09-3.41E-080.50

0.24.16E-082.34E-09-4.42E-080.50

0.245.17E-083.27E-09-5.53E-080.50

0.286.27E-084.72E-09-6.76E-080.50

0.327.47E-086.27E-09-8.13E-080.50

0.368.65E-088.22E-09-9.52E-080.50

0.41.02E-071.06E-08-1.13E-070.50

0.441.18E-071.35E-08-1.33E-070.50

0.481.45E-071.68E-08-1.63E-070.50

0.521.80E-072.07E-08-2.02E-070.50

0.562.26E-072.49E-08-2.52E-070.50

0.62.83E-072.99E-08-3.16E-070.50

0.643.50E-073.54E-08-3.90E-070.50

0.684.39E-074.15E-08-4.85E-070.50

0.725.45E-074.83E-08-6.00E-070.50

0.766.68E-075.51E-08-7.28E-070.50

0.88.16E-076.34E-08-8.93E-070.50

0.849.67E-077.19E-08-1.07E-060.50

0.881.15E-068.18E-08-1.24E-060.50

0.921.36E-069.19E-08-1.45E-060.50

0.961.58E-061.03E-07-1.70E-060.50

11.76E-061.17E-07-1.89E-060.50

1.042.01E-061.31E-07-2.17E-060.50

1.082.24E-061.45E-07-2.43E-060.50

1.122.52E-061.60E-07-2.71E-060.50

1.162.77E-061.77E-07-2.99E-060.50

1.23.04E-061.95E-07-3.28E-060.50

1.243.30E-062.12E-07-3.58E-060.50

1.283.58E-062.31E-07-3.86E-060.50

1.323.83E-062.51E-07-4.12E-060.50

1.364.07E-062.78E-07-4.41E-060.50

1.44.34E-062.97E-07-4.68E-060.50

1.444.59E-063.19E-07-4.96E-060.50

1.484.82E-063.46E-07-5.23E-060.50

1.525.07E-063.73E-07-5.49E-060.50

1.565.32E-064.09E-07-5.81E-060.50

1.65.55E-064.42E-07-6.06E-060.50

1.645.75E-064.64E-07-6.29E-060.50

1.685.96E-064.99E-07-6.55E-060.50

1.726.18E-065.38E-07-6.78E-060.50

1.766.39E-065.77E-07-7.03E-060.50

1.86.56E-066.19E-07-7.24E-060.50

1.846.81E-066.61E-07-7.55E-060.50

1.886.98E-067.08E-07-7.76E-060.50

1.927.18E-067.58E-07-8.02E-060.50

1.967.38E-068.09E-07-8.26E-060.50

27.50E-068.62E-07-8.47E-060.50

Setup titleI/V Sweep IdVd


Test date2/8/17

Test time18:08:41

Device ID

Count1

Flags









Channel.Index

Channel.Time






















tunneling fet technology for ultra-low power logic ...atol.am.gdynia.pl/~gorecki/dla_taty_pliki/2019...

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