vacuum pump/ leak detector catalog · a cryo-pump is a vacuum pump that creates a high vacuum by...

VACUUM PUMP/ LEAK DETECTOR CATALOG

▲

Intr

od

uc

tio

n

Mel Sattler Production Manager

Thomas Dobler VP of Sales

Chris Long

CFO

Ken Harrison

President & CEO

GNB is a company of technical experts serving other technology experts. Since our

beginning in 1968 it has been our commitment to technology that has set us apart.

During this time we have produced outstanding, innovative products that have met the

most demanding applications in areas such as temperature extremes, large sizes,

radiation levels, vacuum levels, vibration levels, and unique applications.

However GNB is more than just technology, we are passionate about building winning

relationships. It is our corporate vision that customers will be so impressed that they say,

“Wow! We want to do business with GNB again.”

Other vacuum product companies produce large catalogs and encourage customers to

design their systems around the standardized products. However, with GNB you can

have it your way. You can select a standard item or we will custom make one just the

way you want it. Consequently, GNB is no ordinary vacuum products company. This

brochure depicts a sampling of our most popular products, but it should be treated as an

idea book—not an exhaustive product catalog. No matter what your application is,

please give us a call; and we will gladly share our technical expertise.

Vacuum Pump Products

04~06Vacuum Pump Products

07~08

Dry Screw Pumps 09

Single Stage Screw Pumps 10~11

Dual Stage Pump Packages 18~20

TCDP-II Turbo Pump Controller

21~24GNB Turbo Molecular Pumps

25

GNB Turbo Molecular Pumps

GNB Rotary Vane Pumps 26~27

Leak Detecting Products 28

Leak Detecting Process 29

Helium Leak Detectors 30

Dual Stage Rotor Pumps 14~15

Single Stage Blower Packages 12~13

GNB Rotary Vane Pumps

Leak Detecting Products

Dual Stage Screw Pumps 16~17

High Vacuum Pumping Technologies

4


800-398-8470


The products in this family are: Dry Screw Pumps, Turbo Pumps, Rotary Vane Pumps,

and Dry Scroll Pumps.

Introduction to Pumps

Vacuum pumps are machines that remove gas molecules from a closed system. Rough

vacuum pumps are required to remove a large volume of gas, but they are not able to

achieve a high vacuum level. High vacuum pumps typically cannot tolerate a high gas

load, but they are able to pump down a system to a lower pressure. Ultra High Vacuum

(UHV) pumps are able to take the vacuum system down to even lower pressures.

Although there are no absolute technical definitions for the different vacuum ranges, the

gas flow properties change as the vacuum pressure decreases. In common practice

the rough vacuum range is between 7.5 Torr (10 mbar) to 7.5x10-4 Torr (1x10-3 mbar),

the high vacuum range is 7.5x10-4 Torr (1x10-3 mbar) to 7.5x10-9 Torr (1x10-8 mbar), and

the ultra-high vacuum range is a pressure less than 7.5x10-9 Torr (1x10-8 mbar).

In the rough vacuum pressure range, there are a variety of pump designs that are

available. Examples include: rotary vane pumps, diaphragm pumps, reciprocating

piston pumps, scroll pumps, screw pumps, and roots blowers.

In the high vacuum range there are diffusion pumps, turbomolecular (turbo) pumps,and

cryogenic (cryo) pumps.

To achieve UHV pressures, ion pumps and titanium sublimation pumps are used.

Some turbomolecular and cryogenic pumps can also be used when they are specifically

designed for UHV pressures.

Rough Pumping Technologies

Pumps can be categorized into pumps that use oil and dry pumps. Oil-sealed pumps

use oil to lubricate and fill in the small gaps that would allow gas molecules to escape

from higher pressures back to the low pressure areas. Advantages of the oil-sealed

pumps are that they can achieve a long operational life and they can pump all gasses

including those with a very small sized molecule. The disadvantages are that they

require regular maintenance because the oil will become contaminated and needs to be

changed, and under some conditions they can allow oil to back stream into the vacuum

system and contaminate it. Rotary vane pumps and roots blowers are examples of oil-

sealed pumps. Diffusion pumps also use oil which can backstream, although they use a

different technology for pumping.

www.gnbvac.com5


Dry pumps have the advantage that they do not use oil and therefore can be used in the

cleanest of applications with no risk of contaminating the process with oil. However,

because they do not use oil to fill in the small clearances between moving parts, they do

not perform as well when pumping the smallest atoms such as helium and hydrogen.

They also can face challenges with heat dissipation which in turn can create

interferences between closely fitting moving parts due to thermal expansion.

Rotary Vane Pumps

A rotary vane pump is an oil-lubricated rough vacuum pump. They use sliding vanes to

compress gas from a point of lower pressure, decreasing the volume of the gas until its

pressure rises above atmospheric pressure and then expels it into the exhaust line.

These are long life pumps that are economical to purchase and operate. They are used

for numerous smaller applications such as vacuum sealing/packaging, glove boxes, or

to hold a vacuum in vacuum jacketed piping. They are also commonly used as a

backing pump for a turbo pump, roots blower or cryo-pump. They have an advantage

over dry backing pumps in that they do not allow the background helium from the

atmosphere into the vacuum system and this is better for helium leak checking.

Rotary vane pumps can be made with a single stage or they can have multiple stages

where the exhaust from one stage is sent to the inlet of the next. Multistage pumps can

therefore achieve a higher vacuum level.

6800-398-8470


Dry Screw Pumps

Dry screw pumps are able to pump a much greater volume of gas than a rotary vane

pump. In this style of pump, two screw rotors turn in opposite directions in order to trap

the gas and move it to the discharge. There is a tight tolerance between the screws

and their housing in order to minimize leakage past the screws.

Roots Blowers

A roots blower is sometimes called a lobe

pump. Two symmetrically shaped lobes

rotate in opposite directions. This action

is able to move large quantities of gas

molecules. Roots blowers are typically

classified as an oil lubricated pump, but

the modern blowers, such as the pump

that GNB provides, have the oil separated

from the vacuum so that the vacuum

system is not to be contaminated.

Often roots blowers are used in

combination with another pump. GNB

offers pump packages that have a roots

blower and a dry screw pump mounted

together in one system.

The body of the pump is water-cooled or air cooled to dissipate heat, but the rotors will

run hot in order to keep contaminants from forming inside the pump. A variety of

coatings such as ceramic or nickel-Teflon® are available to coat the inside of the pump

to prevent corrosion and provide lubrication, depending on the application. GNB offers

both constant pitch and variable pitch screw pumps. The variable pitch can provide

better heat dissipation and lower power consumption, while the constant pitch has an

exceptionally short screw length which reduces the buildup of contaminants.

7www.gnbvac.com


High Vacuum Pumping Technologies

Turbo Pumps

Turbo molecular pumps move gas molecules from a low pressure area to a high

pressure area through a series of rotating blades that have different angles as the

pressure inside the pump increases. The series of blades are machined out of a single

block of aluminum.

Between the blades there are stators held by the housing of the pump. The rotor spins

at a very high velocity. Turbo pumps with larger diameters may spin at 15,000 rpm

while smaller turbo pumps will exceed 40,000 rpm.

In the past, some turbo pumps used oil to lubricate their high speed bearings, and this

oil could allow a small amount of oil to migrate into the vacuum system. Most new

pumps use ceramic bearings with grease or the rotors are magnetically levitated so that

they only use mechanical bearings (bearing surfaces) during low speeds at startup or

shutdown.

Turbo pumps should not be placed in a system where any object could ever fall into

them. They have protective screens over their inlets which will prevent solid objects

from falling in, but they also should not have moisture or any other contaminats enter

them.

Turbo pumps can only operate effectively in the high vacuum range. If the gas load is

too high, they can overheat. Some turbo pumps can be started at an atmospheric

pressure and they will slowly increase in speed (spin up) as the pressure decreases. All

turbo pumps require backing pumps. These are roughing pumps which lower the

pressure at the discharge port. The ultimate pressure for a properly configured turbo

pump is around 1x10-10 Torr (1.3 x 10-10 mbar). To achieve this pressure, the turbo

pump must be very clean. Baking out the turbo pump to drive out moisture and other

contaminants helps the cleaning process.

8


Cryo-Pumps

A cryo-pump is a vacuum pump that creates a high vacuum by freezing the gas

molecules, so they are no longer free to move about in the system. Cryo-pumps are

able to pump water vapor very well. Water vapor is typically the bulk of the gas load in

the high vacuum range. A limitation of cryo-pumps is their ability to pump gasses that

freeze at very low temperatures. For this reason they must employ other technologies

to pump smaller molecules such as helium and hydrogen.

Although GNB does not offer cryo-pumps, GNB does manufactures cryo-coils and

baffles that are used to trap water vapor and increase the pumping speed.

Diffusion Pumps

Another technology for a high vacuum pump is an oil diffusion pump. A low vapor

pressure oil (often silicon oil) is heated so that it rises rapidly through a central pipe.

Next the oil vapor is expelled from the pipe and cooled. These high velocity jets of oil

vapor carry along the gas molecules as the oil vapor now rapidly descends back down

toward the liquid oil reservoir. As the oil changes state and becomes a liquid again, the

gas molecules are released at a higher pressure than where they were first picked up.

A backing pump then removes these gas molecules from the diffusion pump. Diffusion

pumps have no moving parts and are a cost effective option; however some oil can

migrate from the pump into the vacuum system. GNB manufactures baffles which are

placed above the diffusion pump to block 99% of the oil from entering the system.

800-398-8470

9www.gnbvac.com

Dry Screw Vacuum Pumps

Dry Screw Vacuum Pumps

Energy saving designs with a very short gas path inside the pump to reduce residue

buildup path inside the pump.

Options:

· Standard screw coating is Defric, options include nickel, nickel-teflon

and nano-ceramic coating

· Standard pumps are water-cooled but air-cooled motors and air-cooled

pumps are available

· Pumps can be sold as pump blower packages

· Explosion proof motors

Advanced Microprocessor Control:

The visual graphics microprocessor control provides status monitoring. Alarm

parameters can be set to ensure operational excellence. Remote control software

provides control room monitoring of one or more pumping systems.

ScrewPumps

10800-398-8470

Single Stage Screw Pumps

Single stage rotors provide the shortest gas path for minimal conformation and heat

load.

Model A B C D E G H K L M

SWP-S 80-A 14.96 [380]

26.10 [663]

21.73 [552]

7.48 [190]

29.13 [740]

32.05 [814]

22.68 [576]

26.30 [668]

4.13 [105]

8.82 [224]

SWP-S160-A 16.14 [410]

26.69 [678]

22.32 [567]

8.58 [218]

32.95 [837]

35.24 [895]

22.91 [582]

25.39 [645]

4.13 [105]

7.91 [201]

SWP-S180-A 16.93 [430]

25.59 [650]

21.22 [539]

8.98 [228]

34.76 [883]

36.22 [920]

22.05 [560]

24.69 [627]

2.87 [73]

7.24 [184]

Dimensions in inches [mm]

ScrewPumps

in[mm] in[mm] in[mm] in[mm] in[mm] in[mm] in[mm] in[mm] in[mm] in[mm]

11www.gnbvac.com

SWP-S80,160,180

Single Stage Screw Pumps

Technical Data for Single-Stage Dry Screw Pumps

ScrewPumps

Model Unit S80-A S160-A S180-A

Pumping Speed (50Hz/60Hz)

L/min 1300/1600 2150/2500 2500/3000 m³/hr 80/96 130/156 150/180 cfm 47/57 77/92 88/106

Ultimate Pressure (50Hz/60Hz)

Torr 7.5x10-3

Mbar 1x10-2

Pa 1

Canned Motor

Frequency Hz 50/60 Voltage V 220-440

Rated Power HP 4 6 6 Kw 2.98 4.47 4.47

Connection Inlet NW50

Outlet NW40

Cooling Water

Pressure PSI 28-57

Min. Flow L/min, gal/min

3 L/min 15°C-7L/min 30°C 0.8 gal/min 59°F-1.9 gal/min 86°F

Temp. °C, °F Connection RC3/8”

N2

Pressure PSI 22-29

Dilute Flow L/min,

cfm 0-60 L/min, 0-2.11cfm 0-20 L/min, 0-0.706cfm

Sealing Flow L/min,

cfm 0-20L/min

0-0.706 cfm Connection Swagelok1/4”

Dim. LxWxH

mm 814x380x663 895x410x678 920x430x650

in. 32x15x26 35x16x27 36x17x26

Weight Kg/lb. 280 kg, 617 lbs. 300 kg, 661 lbs. 320 kg,705 lbs.

Noise Db(A) <68 <70 <70

Control SEMI E73-0299

System Max. Leak-rate Mbar.l/s 1x10-5

Operation Temp. °C, °F 5°C-40°C, 41°F- 104°F

Operation Moisture RH Below 90%

≤

≤

≤

12800-398-8470

Single Stage Blower Packages

Model A B C D E G H K L M

SWP-S302-A 14.96 [380]

34.06 [865]

29.61 [752]

7.48 [190]

25.67 [652]

32.05 [814]

28.46 [723]

26.30 [668]

4.13 [105]

8.82 [224]

SWP-S602-A 14.96 [380]

36.02 [915]

31.57 [802]

7.48 [190]

25.67 [652]

32.05 [814]

30.43 [773]

26.30 [668]

4.13 [105]

8.82 [224]

SWP-S902-A 16.14 [410]

37.13 [943]

32.76 [832]

8.58 [218]

28.46 [723]

35.24 [895]

31.77 [807]

25.39 [645]

4.13 [105]

7.91 [201]

SWP-S1302-A 16.93 [430]

37.68 [957]

33.27 [845]

8.98 [228]

29.13 [740]

36.22 [920]

32.36 [822]

24.69 [627]

2.87 [73]

7.24 [184]

SWP-S1802-A 16.93 [430]

40.55 [1030]

33.27 [845]

8.98 [228]

29.92 [760]

36.22 [920]

32.36 [822]

24.69 [627]

2.87 [73]

7.24 [184]


A Dry Screw Pump & Roots Blower Together

ScrewPumps

in[mm] in[mm] in[mm] in[mm] in[mm] in[mm] in[mm] in[mm] in[mm] in[mm]

13www.gnbvac.com

Single Stage Blower Packages

Technical Data for Single Stage Pump with Blower

Model Unit S302-A S602-A S902-A S1302-A S1802-A


L/min 4167/5000 8300/10000 12500/15000 17500/21000 25000/30000 m³/hr 250/300 500/600 750/900 1050/1260 1500/1800 Cfm 147/177 294/353 441/530 618/742 883/1060


Torr 7.5x10

-4

Mbar 1x10

-3

Pa 0.1

Canned Motor

Frequency Hz 50/60 Voltage V 220-440

Rated Power HP 4+2.2 4+4 6+4 6+6 6+6 Kw 2.98+1.86 2.98+2.98 4.47+2.98 4.47+4.47 4.47+4.47

Connection Inlet NW50 Outlet NW40

Cooling Water

Pressure PSI 28-57 Min. Flow L/min,

gal/min 3L/min 15°C-7L/min 30°C

0.8 gal/min 59 °F-1.9 gal/min 86°F Temp. °C,°F

Connection RC3/8” N2 Pressure PSI 22-29

Dilute Flow L/min, cfm 0-60 L/min, 0-2.11 cfm Sealing Flow L/min, cfm 0-20 L/min, 0-0.706 cfm Connection Swagelok1/4”

Dim. LxWxH

mm 814x380x 820

814x380x 915

895x410x 943

920x430x 957

920x430x1030

in. 32x15x32 32x15x36 35x16x37 36x17x38 36x17x41

Weight kg/lbs 350/771.6 450/992.1 520/1146.4 540/1190.5 545/1201.5

Noise Db(A) <70 <70 <70 <70 <70

Control SEMI E73-0299

System Max. Leak-rate Mbar.l/s 1x10-5

Operation Temp. °C,°F 5°C-40°C/

Operation Moisture RH Below 90%

≤≤≤

40°F-104°F

ScrewPumps

14800-398-8470

Dual Stage Rotor Pumps

Dual stage rotors with variable pitch provide high pumping speeds at higher pressures

and lower power consumption.

ScrewPumps

15www.gnbvac.com

Dual Stage Rotor Pumps

Model A in[mm]

B in[mm]

C in[mm]

D in[mm]

E in[mm]

F in[mm]

G in[mm]

H in[mm]

L in[mm]

M in[mm]

SWP-D120-

A

17.72 [450]

14.96 [380]

21.73 [552]

7.48 [190]

32.05 [814]

26.38 [670]

9.84 [250]

26.10 [663]

29.53 [750]

4.13 [105]

SWP-D300-

A

19.69 [500]

16.9] [430]

8.46 [580]

8.46 [215]

34.84 [1053]

34.84 [885]

16.54 [420]

29.33 [745]

29.53 [750]

2.87 [73]

Model A B C D E F G H J K L M

SWP-D400-

A

27.56

[700]

28.31

[719]

16.73

[425]

13.78

[350]

4.09

[104]

17.36

[441]

48.19

[1224]

16.26

[413]

18.54

[471]

64.25

[1632]

30.20

[767]

27.32

[694]



ScrewPumps

in[mm] in[mm] in[mm]in[mm] in[mm] in[mm] in[mm] in[mm] in[mm] in[mm] in[mm] in[mm]

16800-398-8470

Dual Stage Screw Pumps

Model A C D F H J K L M O P SWP-

D800-A 27.36 [695]

50.91 [1293]

41.06 [1043]

17.64 [448]

24.25 [616]

85.83 [2180]

73.94 [1878]

19.09 [485]

7.52 [191]

13.70 [348]

88.11 [2238]

Dual Stage Rotor Pumping Speed Curves


ScrewPumps

17www.gnbvac.com

Dual Stage Screw Pumps

Comparison of Power Consumption Curves for Single and Dual Stage Rotors

High

Active Power

LowPressure High

SingleDual

Model Unit SWP-D120-A SWP-D300-A SWP-D400-A SWP-D800-A


L/min 1336/2000 4500/5500 5550/6666 11100/13330 m³/hr 80/120 270/330 333/400 660/800 Cfm 47/70 160/195 199/239 393/471


Torr 7.5x10

-3

Mbar 1x10

-2

Pa 1 Water-cooled Motor

Frequency Hz 50/60 Voltage V 220/380/440±5% 220/380/440 Rated Power

HP 4 8 20 30 Kw 2.98 6 15 22

Connection Inlet -- NW50 ISO63 ISO63 ISO100 Outlet -- NW40 NW40 NW50 ISO63

Cooling Water

Min. Flow L/min gal/min

3 L/min 0.8 gal/min

3 L/min 0.8 gal/min

3 L/min 0.8 gal/min

6 L/min 1.6 gal/min

Max. Pressure

Kg/cm² PSI

4 Kg/cm² 57 PSI

Pressure Dif

Kg/cm² PSI

1 14 PSI

2 28 PSI

Temp. °C,°F 18-25°C/64-77°F Connection -- RC3/8” RC1/2” RC3/8”

N2 Pressure MPa, PSI

0.15-0.2 MPa 21-29PSI

Purge Flow SLM cfm

6-60L/min 0.21-2.1cfm

Connection -- Swagelok1/4” Swagelok3/8” Dim. LxWxH mm

inch 814x380x663 32x15x26

1055x425x560 42x17x22

1500x650x767 59x26x30

1831x610x735 72x24x29

Weight Kg/lbs 280/617 350/772 8651907 1050/2315

Noise Db(A) <70 <70 <75 <95

System Max. Leak-rate Mbar.l/s 1x10

-5

Operation Temp. °C,°F 5°C -40°C /41°F-104°F

Interface RH Below 90%

≤≤

≤

ScrewPumps

18800-398-8470

Dual Stage Pump Blower Packages

Model A B C D E F G H I J K

SWP-D702-A 14.88 [378]

37.44 [951]

31.57 [802]

32.01 [813]

9.25 [235]

26.14 [664]

30.81 [782.5]

25.91 [658]

7.44 [189]

8.35 [212]

4.13 [105]

SWP-1402-A 16.93 [430]

41.50 [1054]

33.27 [845]

41.46 [1053]

11.73 [298]

32.91 [836]

31.57 [802]

24.69 [627]

8.43 [214]

7.13 [181]

2.87 [73]

SWP-1902-A 16.93 [430]

41.50 [1054]

33.27 [845]

41.46 [1053]

10.94 [278]

33.70 [856]

31.57 [802]

24.69 [627]

8.43 [214]

7.13 [181]

2.87 [73]


ScrewPumps

19www.gnbvac.com


Model A C D F H J K L M N O P

SWP-DE3012-N 23.62 [600]

50.91 [1293]

38.94 [989]

17.68 [449]

24.25 [616]

82.68 [2100]

72.17 [1833]

19.09 [485]

7.52 [191]

53.74 [1365]

11.81 [300]

85.71 [2177]

Model A B C D F H J K L M N O P

SWP-DE3012-A 27.36 [695]

22.83 [580]

50.91 [1293]

41.06 [1043]

17.68 [449]

24.25 [616]

85.83 [2180]

74.02 [1880]

19.09 [485]

7.52 [191]

53.74 [1365]

13.07 [348]

88.11 [2238]

Dimensions shown are for an Air-cooled Package

Dimensions shown are for an Air-cooled package-minimal sheet metal

A Dry Screw Pump and Roots Blower Together

ScrewPumps



20800-398-8470


Technical Data for Dual Stage Pumps with Blower

Model*2


m3/hr 580/700 1166/1400 1580/1900 2328/3500 cfm 340/400 687/824 930/1113 1371/2096

Ultimate Pressure Torr 7.5×10-4 mbar 1×10-3 Pa 0.1

Canned Motor

Frequency Hz 50/60

Voltage V 220~380±5%（3Phase）

Rated Power

HP 4+4 8+6 8+6 30+8 kW 2.98+2.98 5.96+4.47 5.96+4.47 22+6

Connection Inlet ------ ISO100 ISO160 ISO160 ISO200

Outlet ------ NW40 NW40 NW40 ISO63

Cooling Water

Max. Pressure

kg/cm2

PSI 4 kg/cm2

57PSI Pressure

Dif. kg/cm2

PSI 1 kg/cm2

14PSI

Min. Flow l/min

gal/min 3L/min 15°C -7L/min 30°C

0.8 gal/min 59°F-1.8 gal/min 86°F 6L/min 18~20°C

Temp. °C,°F Connection RC 1/2" RC 3/4"

N2

Purge Pressure

MPa PSI

0.15-0.2 MPa 21.8-29PSI

Purge Flow slm cfm

5-60slm, 0.17-2.1cfm

0-150slm 0-5.3 cfm

Connection Swagelok

1/4" 3/8"

Dim. L×W×H*3 Inch [mm]

32.05x14.96 x36.02 [814×380×915]

41.46x16.93 x41.50 [1053×430×1054]

41.46x16.93x41.50

[1053×430×105]

88.11x27.36x53.74

[2238×695×1365] Weight Kg/lbs 450/992 450/992 560/1235 1910/4210 Noise*4 dB(A) <70 <70 <70 <95 Control SEMI E73-0299

System Max. Leak-rate mbar.l/

s 1×10-5

Operation Temp. °C,°F 5 - 40 /41°F-104°F Operation Moisture RH Below 90%

≤

≤

≤

°C°C

ScrewPumps

l/min 9717/12000 19440/23333 26333/31667 41500/50000Unit SWP-D702-A SWP-D1402-A SWP-D1902-A SWP-3012-A

21www.gnbvac.com

GNB Turbo Molecular Pumps (Manufactured by KYKY Technology Company)

Ceramic Greased Bearing Turbo Pumps

· Turbines machined from 1 piece solid aluminum billets

· Operate in any orientation

TMP-ISO63-80EG

TurboPumps

22800-398-8470

TurboPumps


TMP-ISO100-110EG

TMP-ISO160-700EG

Dimensions in mm

Dimensions in mm

23www.gnbvac.com

TurboPumps

Dimensions in mm


TMP-ISO200-1300EG

TMP-ISO-250-2000EG

Dimensions in mm

Specification

Model TMP-ISO63-

80EG TMP-ISO100-

110EG

TMP-ISO160-

700EG

TMP-ISO200-

1300EG

TMP-ISO250-

2000EG

Pumping Speed

（l/s, Air） 80 110 700 1300 2000

Inlet Flange DN63 ISO-K,

DN63CF

DN100 ISO-K,

DN100 CF

DN160 ISO-K,

DN160 CF

DN200 ISO-K,

DN200CF

DN250 ISO-K

Outlet Flange KF16 ISO-KF KF25 ISO-KF KF40 ISO-KF KF40 ISO-KF KF50 ISO-KF

Compression Ratio

N2: 106;

H2:4×103

N2:108;

N2:5×102

N2: 109;

H2:6×103

N2: 109;

H2: 6×103

N2: 109;

H2: 6×103

Ultimate Vacuum（Torr）

4.5×10-8

ISO Flange4.5×10

-8

ISO Flange4.5×10

-9

ISO Flange4.5×10

-8

ISO Flange4.5×10

-8

ISO Flange

7.5×10-9

CF Flange4.5×10

-9

CF Flange4.5×10

-10

CF Flange4.5×10

-9

CF Flange4.5×10

-9

CF Flange

Ultimate Vacuum（Pa）

6×10-5

ISO Flange6×10

-6

ISO Flange6×10

-7

ISO Flange6×10

-6

ISO Flange6×10

-6

ISO Flange

6×10-6

CF Flange6×10

-7

CF Flange6×10

-8

CF Flange6×10

-7

CF Flange6×10

-7

CF Flange

Rotation Speed（rpm）

51000 42300 36000 24000 24000

Run-Up time（min）

＜1.5 ＜2 ＜4 ＜6 <8

Bearing Type Ceramic Ceramic Ceramic Ceramic Ceramic

VIB（(mm)） 0.1 0.1 0.1 0.1 0.1

Backing Pump（l/s）

1 2 4 - 8 15 - 18 15

Cooling method, optional

Water/Air Water/Air Water Water Water

Cooling Water Temperature

25°C 75°F

25°C 75°F

25°C 75°F

25°C 75°F

25°C 75°F

Bake-out temperature

100°C212°F

100°C212°F

100°C212°F

100°C212°F

100°C212°F

Ambient Temperature

5-40 41-104

5-40 41-104

5-40 41-104

5-40 41-104

5 – 40 41-104

Lubrication Grease Grease Grease Grease Grease

Mounting or orientation

Any Any Any Any Any

Weight (lbs /kg）

4 / 2 18 / 8 42 / 19 64 / 29 71 / 32

≤

≤

≤

≤ ≤

≤

≤

≤

≤ ≤≤

≤ ≤ ≤ ≤

≤

≤

≤ ≤ ≤

°C °C °C °C °C


24

°F °F °F °F °F

TurboPumps

800-398-8470

TCDP-II Turbo Pump Controller

Matching

Turbo

Pump

Model

FF-160

/500G

/620

/620N

/620NE

/620F

FF-160

/620C

/620E

FF-160

/700

/700E

/700F

FF-200

/1200

/1200N

/FF-250/1

600B

FF-200

/1200C

/1200E

FF-200

/1300

/1300E

/1300F

/1300N

F-250

/1500

/1500N

/1500E

FF-250

/1600

/1600E

FF-250

/2000

/2000E

Input

voltage

220VAC

±10％

110VAC

±10％

220VAC

±10％

110VAC

±10％

220VAC

±10％

110VAC

±10％

220VAC±

10％

110VAC±1

0％

220VAC

±10％

110VAC±

10％

220VAC

±10％

110VAC±

10％

220VAC±1

0％

110VAC±1

0％

220VAC

±10％

110VAC±

10％

220VAC

±10％

110VAC±

10％

Input

power

supply

frequency

50/60Hz

（±5%）

50/60Hz

（±5%）

50/60Hz

（±5%）

50/60Hz

（±5%）

50/60Hz

（±5%）

50/60Hz

（±5%）

50/60Hz

（±5%）

50/60Hz

（±5%）

50/60Hz

（±5%）

The

maximum

output

power

750W 750W 750W 750W 750W 750W 750W 750W 750W

Output

frequency

450±10

Hz

600±10

Hz

600±10

Hz

400±10

Hz

450±10

Hz

400±10

Hz

350±10 Hz 450±10

Hz

400±10

Hz

Output

voltage

66VAC 66VAC 66VAC 66VAC 66VAC 66VAC 66VAC 66VAC 66VAC

Normal

working

current

4A 5A 2A 5A 5A 3A 5A 5A 3A

Maximum

starting

current

14A 12A 9A 16A 16A 10A 20A 20A 16A

Tracking

accelerati-

on time

5min 7min 5min 6min

/30sec

6min

/30sec

6min

/30sec

6min

/30sec

7min

/30sec

6min/

30sec

Shutdown

decelerati-

on time

6min 8min 11min 9min

/40sec

11min 11min 9min

/40sec

12min 10min

L×W×H 480×315×88mm/18.9x12.4x3.5 inches

Weight 8.8 Kg/19.4 lbs

≤ ≤ ≤ ≤ ≤

≤

≤

≤

≤

≤

≤

≤

≤

≤

≤

≤

≤

≤ ≤

≤

≤

≤

≤

≤ ≤

≤

Dimensions in mm.

≤

25

TurboPumps

www.gnbvac.com

RotaryVane

Pumps


≤ ≤

≤ ≤

≤ ≤ ≤

26

Specification

Model RVP-R04 RVP-R08 RVP-R012

RVP-R016

RVP-R024

RVP-R030

RVP-R048

RVP-R065

Displace- ment Speed

m3/h(L/S)

50Hz

4(1.1) 8(2.2) 12(3.2) 16(4.4) 24(6.6) 30(8.3) 48(13.3) 65(18)

60Hz

4.8(1.3) 9.6(2.6) 14(3.8) 19.2(5.2) 28.8(7.9) 36(9.9) 57.6(16) 78(21.6)

Ultimate partial pressure gas ballast close

Pa [Torr]

5x10–2

[3.75x10

-4 ]

5x10–2

[3.75x10-4

]4x10

–2

[3.0x10-4

]4x10

–2

[3.0x10-4

]4x10

–2

[3.0x10-4

]4x10

–2

[3.0x10-4

]4x10

–2

[3.0x10-4

]4x10

–2

[3.0x10-4

]

Ultimate total pressure gas ballast close

Pa [Torr]

5x10–1

[3.75x10

-3 ]

5x10–1

[3.75x10-3

] 4x10

–1

[3.0x10-3

] 4x10

–1

[3.0x10-3

] 4x10

–1

[3.0x10-3

] 4x10

–1

[3.0x10-3

]4x10

–1

[3.0x10-3

] 4x10

–1

[3.0x10-3

]

Ultimate total pressure gas ballast open

Pa [Torr]

3 [2.2x10

-2]3

[2.2x10-2]

8x10–1

[6x10-3]

8x10–1

[6x10-3

] 8x10

–1

[6x10-3

] 8x10

–1

[6x10-3

] 8x10

–1

[6x10-3

] 8x10

–1

[6x10-3

]

Power supply Single /3 Phase

Single /3Phase

Single /3 Phase

Single /3Phase

Single /3 Phase

Single /3 Phase

3-Phase 3-Phase

Power rating (kw)

0.4/0.37 0.4/0.37 0.55 0.75/0.55 1.1/0.75 1.1 1.5 2.2

Intake and exhaust DN （mm）

KF16/25 KF16/25 KF25 KF25 KF25/40 KF25/40 KF40 KF40

Oil capacity (L/qt.)

0.6-1.0 /0.63-1.06

0.6-1.0 /0.63-1.06

0.6-1.0 /0.63-1.06

0.9-1.5 /0.95-1.59

1.3-2.0 /1.37-2.11

1.3-2.0 /1.37-2.11

3.3-4.5 /3.49-4.76

3.3-4.5 /3.49-4.76

Motor speed (rpm)

50Hz 1440 1440 2100 1440 1440 1440 1440 1440

60Hz 1720 1720 2100 1720 1720 1720 1720 1720

Ambient Temperature

5-40°C

41-104°F

5-40°C

41-104°F

5-40°C

41-104°F

5-40°C

41-104°F

5-40°C

41-104°F

5-40°C

41-104°F

5-40°C

41-104°F

5-40°C

41-104°F

Noise level(Db) 56 56 57 58 58 58 62 62

Weight (kg/lbs) 19/42 21/47 16/35 30/66 35/77 43/95 62/137 65/143

≤ ≤ ≤ ≤≤ ≤

800-398-8470

27www.gnbvac.com

℃

RotaryVane

Pumps


RVP Dimensions (in / mm)

Model A in[mm]

B in[mm]

C in[mm]

D in[mm]

E in[mm]

G in[mm]

H in[mm]

I in[mm]

J in[mm]

K in[mm]

L in[mm]

DN

RVP-R04

18.1 [460]

5.67 [144]

8.15 [207]

8.27 [210]

4.33 [110]

4.96 [126]

6.06 [154]

1.77 [45]

1.77 [45]

1.34 [34]

None KF16/25

RVP-R08

18.1 [460]

5.67 [144]

8.15 [207]

8.27 [210]

4.33 [110]

4.96 [126]

6.06 [154]

1.77 [45]

1.77 [45]

1.34 [34]

None KF16/25

RVP-R012

16.14 [410]

5.67 [144]

8.15 [207]

8.27 [210]

4.33 [110]

4.96 [126]

6.06 [154]

1.77 [45]

1.77 [45]

1.34 [34]

None KF16/25

RVP-R016

20.47 [520]

7.40 [188]

10.71 [272]

12.60 [320]

5.83 [148]

6.30 [160]

6.50 [165]

2.72 [69]

2.32 [59]

1.50 [38]

11.61 [295]

KF25

RVP-R024

22.05 [560]

7.40 [188]

10.71 [272]

12.60 [320]

5.83 [148]

6.30 [160]

7.28 [185]

3.23 [82]

2.32 [59]

1.85 [47]

11.61 [295]

KF25/40

RVP-R030

22.05 [560]

7.40 [188]

10.71 [272]

12.60 [320]

5.83 [148]

6.30 [160]

7.28 [185]

3.23 [82]

2.32 [59]

1.85 [47]

11.61 295]

KF25/40

RVP-R048

28.74 [730]

9.21 [234]

14.09 [358]

15.59 [396]

7.48 [190]

7.87 [200]

8.78 [223]

6.18 [157]

2.72 [69]

2.17 [55]

15.35 [390]

KF40

RVP-R065

28.74 [730]

9.21 [234]

14.09 [358]

15.59 [396]

7.48 [190]

7.87 [200]

8.78 [223]

6.18 [157]

2.72 [69]

2.17 [55]

15.35 [390]

KF40

28800-398-8470



The products in this family are: Helium Leak Detecting Machines

A key characteristic of any vacuum system is that it prevents atmospheric air from

entering the system. In order to accomplish this, leaks must be identified and

eliminated. There are several methods of checking for leaks such as: a pressure rise

test, ultrasonic noise checking, dye penetrant testing, soap bubble testing and helium

leak testing.

Helium mass spectrometer testing,

commonly called helium leak checking, is

the most widely used and most important

of these tests. Because the atmosphere

only contains 0.0005% helium by volume, it

is possible to use helium to find system

leaks. Also because helium is a very small

molecule, it can pass through tiny openings.

These properties make it ideal for leak

checking.

A helium mass spectrometer is an

instrument that is able to detect the amount

of helium in the gases that are present

inside a vacuum system. The leak

detector ionizes the gas and then magnets separate the helium ions from the other

gasses. Next a collector is used to sense the amount of helium ions and create an

electrical output that varies with the quantity of the ions.

Leak Checking Process

The filament in a leak checker is typically made from tungsten. It will oxidize and

become contaminated if it is exposed to air. Therefore, the larger leaks must be

identified and eliminated prior to helium leak checking because the vacuum level should

be 1.0x10-3 mbar (7.5x10-4 Torr) or lower. One method to protect the filament and

check for leaks at a higher pressure is to place a liquid nitrogen cooled baffle in front of

the leak detector. At the temperature of liquid nitrogen, the baffle will allow helium to

pass; but trap water vapor. GNB manufactures baffles that can be used for this purpose.

Leak detection can be performed with a direct flow method or a counter flow method.

With the direct flow method, the leak detector is connected directly to the vacuum

system. With the counter flow method, the leak detector can be used to detect large

leaks, yet the filament will still be protected. For the counter flow method, the exhaust

ports of two turbo pumps are connected together. This port is also connected to a

backing pump. The inlet of one turbo pump is connected to the vacuum system and the

Leak DetectingProducts

29www.gnbvac.com

inlet of the other pump is connected to the leak detector. A percentage of helium is able

to flow backward through the second turbo pump whereas the heavier gasses will not.

Thus the leak detector is protected.

LEAKDETECTION

CELL

VACUUM SYSTEM

Turbo Pump 1 Turbo Pump 2

Backing Pump

Counter Flow Leak Detection Method


The most common method for helium leak detection is to evacuate the air from inside

the system and surround the outside of the system with helium. If there is a leak, the

helium on the outside will enter the vacuum system and be sensed by the helium leak

detector. In order to pinpoint the location of the leak, a small flow (approximately 2

bubbles a second) of helium can be sprayed through a wand. Because helium is lighter

than air, start at the highest point of the item to be checked and gradually work down.

Move slowly and spray the helium along every joint and seam. When the leak detector

senses a high level of helium, you will know that there is a leak near the tip of the wand.

In order to check an entire part/system at once, the part can be placed into a bag (or

other sealed container). Helium is then introduced at the bottom of the bag, and if there

are any leaks they will be picked up by the leak detector.

Vacuum systems must be designed and constructed so that there are no trapped

volumes of air. For example, if a vacuum chamber were welded on the inside and

outside then there could be air trapped between the two weld seams. If there is a leak

between the trapped volume of air and the inside of the vacuum system, this is called a

virtual leak. A virtual leak occurs when air is leaking into the system, yet there is no

entry location for the leak from the outside. For this reason, a helium leak check will not

be able to identify the presence of a leak, yet air molecules are entering the system so

there appears to be a leak.

GNB Leak Checker Options

The GNB leak detector features a turbo pump which is backed by a dry scroll pump.

Other options such as rotary vane backing pumps are also available. These leak

detectors are easy to operate and provide an outstanding value for the user.


30800-398-8470


Helium Leak Detectors

HMS-ZQJ-530

Specification

Model HMS-ZQJ-530

Smallest Detectable Leak Rate (He)

（Pa·m3/s）

5×10-11 Pa·m3/s

4.9x10-10 Std. cm3/s

Leak Rate Display（Pa·m3/s）

2 ×1 0-11-1×10-5 Pa·m3/s

2×10-10-1×10-4 Std. cm3/s

Maximum inlet pressure（Pa） 20Pa,150x10-3 Torr

Response Time（s） 3

Run-up Time（min） 8

Power Supply 110V±10%，60Hz, single-phase,10A

Ambient Temperature 5-30°C /41-86°F

relative humidity 80%

D×W×H 19.7x19.7x34.9 [inches]

500×500×1000 [mm]

Weight 92kg / 203lbs

≤

≤

≤≤

≤

≤

Copy right © 2016-06 GNB Corporation. All rights reserved.

Rev ision: October 2016

GNB Corporation3200 Dwight Rd, Suite 100

Elk Grove, CA, USA 95758

Phone: (916)395-3003

Fax: (916)395-3363

Email: [email protected]

www.gnbvac.com | www.vacuumbaffles.com

Toll- Free: 1-800-398-8470

vacuum pump/ leak detector catalog · a cryo-pump is a vacuum pump that creates a high vacuum by...

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