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Robotic ComponentsVacuum Robotic Arms
12495 34th Street North n Suite B n St. Petersburg, FL 33716 U.S.A. n Phone: 813.749.7519 n Fax: 813.475.5940 n [email protected]
Robotic ComponentsHA-3.2 Vacuum Robotic Arms
FEATURESn High reliability of > 3 million MCBFn 2-axis motion controln Pay load up to 4.5kgn Standard and custom size arm segmentsn Standard and custom end effectors(singleordual)n Compact design including integrated controllern RS-232 / Ethernet control interfacen CE/S2 compliantn High vacuum compatiblen Class 1 cleanroom compatible
OPTIONS n Arm Segments Sizes n SingleandDualEndEffectorsn Custom payloads above 4.5kgn Custom substrate sizes
Hine Automation’s Vacuum Robotic Arms are the next generation Vacuum SCARA Robots. Designed as an entry levelproduct,theHA-3.2VacuumRoboticArmoffers“straight-line”horizontalmotioninaneconomicpackage.TheHA-3.2isaperfectfitforbudgetsensitiveprojectswherenoverticaltravelisrequired.Withitsproprietarydrive mechanism, the HA-3.2 has the appropriate accuracy and repeatability to become the central handler ofanyvacuumclustersystem.Armsegmentsandend-effectorscanbeeasilycustomizedtobecompatablewithnearlyanymaterialcassetteorprocessmoduleconfiguration.Forapplicationswhereverticalmotionisrequired,Z-travelcanbeaddedpriororpostinstallation.
12495 34th Street North n Suite B n St. Petersburg, FL 33716 U.S.A. n Phone: 813.749.7519 n Fax: 813.475.5940 n [email protected]
HA-3.2
Robotic ComponentsHA-5.0 Vacuum Robotic Arms
FEATURESn High reliability of > 3 million MCBFn 3-axis motion controln Pay load up to 4.5kgn Standard and custom size arm segmentsn Standard and custom end effectors(singleordual)n Compact design including integrated controllern RS-232 / Ethernet control interfacen CE/S2 compliantn HA-5.0 is the best replacement for the Hine Design robotic arm model 4.5n High vacuum compatiblen Class 1 cleanroom compatible
OPTIONS n Arm Segments Sizes n SingleandDualEndEffectorsn Custom payloads above 4.5kgn Custom substrate sizes
Hine Automation’s Vacuum Robotic Arms are the next generation Vacuum SCARA Robots. Designed as the centralhandlingrobotforHine’sConstellationsystems,theHA-5.0Vcanbeintegratedwithanyvacuumclustersystem.Armsegmentsandend-effectorsof theHA-5.0canbeeasily customized tomeetnearlyanyOEMrequirement.Thanks to its ferrofluidic rotaryseals,harmonicdrivebrushlessDCmotors,andhighstrengthundercarriage, the HA-5.0Vacuum RoboticArm transfers substrates with high precision and repeatabilitywithinhighvacuumenvironments.TheHA-5.0featuresidenticalcommandsetsandformfactorasthevacuumrobotic arm manufactured previously by Hine Design® and can be used as a replacement for the 4.5 model.
HA-5.0
12495 34th Street North n Suite B n St. Petersburg, FL 33716 U.S.A. n Phone: 813.749.7519 n Fax: 813.475.5940 n [email protected]
†HineAutomationoffersendeffectorforSEMIstandardsizesupto300mm. Othersizesareavailableuponrequest.*Payloaddependsonendeffector.Higherpayloadsavailableuponrequest‡Measuredasthreestandarddeviations(3σ)
HA-3.2 HA-5.0
Wafer Sizes 300mm†Maximum Payload 4.5kg*Mounting configuration TopAxes of Motion R, θ R, θ, ZWeight 30kg* 35kg*Vacuum performance
Base operating pressureLeak Rate
1x10-7 Torr1x10-9 scc He/sec
Input Power 24V DC at 10.0 AmpsMaximum Temperature 100⁰CExposed Materials 6061-T6 Aluminum, Stainless Steel 300
and 400 Series, VitonControl Interface RS-232 / EthernetMCBF >1x106
SEMI S2 CompliantCE CompliantRepeatability‡
RθZ
(3σ)0.05mm
0.01⁰0.05mm
Vertical Stroke NA 35mm
Robotic ComponentsVacuum Robotic Arms
12495 34th Street North n Suite B n St. Petersburg, FL 33716 U.S.A. n Phone: 813.749.7519 n Fax: 813.475.5940 n [email protected]
12495 34th Street North n Suite B n St. Petersburg, FL 33716 U.S.A. n Phone: 813.749.7519 n Fax: 813.475.5940 n [email protected]
Our Productsn Cluster Systems: Constellation Systems
n Automated Load Locks: Star Systems
n Robotic Components: Vacuum Robotic Arms Vacuum Elevators Vacuum Aligners Atmospheric Robotic Arms Atmospheric Elevators Atmospheric Aligners
About Hine AutomationHine Automation, LLC is a designer and manufacturer of automation systems and robotic components. We serve Original Equipment Manufacturers(OEMs) in thesemiconductor, solar,flatpaneldisplayand related industriesacrosstheglobe.Ourroboticcomponentssatisfyawiderangeofneeds;fromflexibleresearchanddevelopmentenvironmentstostringentmanufacturingenvironments.Combiningourunsurpassedqualityandreliabilitywithmodularand versatile designs to meet today’s automation challenges, our products provide functional and economical solutions.
Our MissionOur goal is to design andmanufacture themost cost effective automationsolutions and deliver unparalleled customer service and support.
Our Strengthsn Demonstrated Reliability n Lightning Speed Responsen CostEffectiveSolutions andTurn-aroundTimesn Custom Solutions n Knowledge,Experience- driven Designs