vanguard 355-2500 vanguard 355-2500 laser features high stability beam characteristics and low cost...

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Family of Brands – Corion ® New Focus Oriel ® Instruments Richardson Gratings Spectra-Physics ® Vanguard 355-2500 QUASI-CW DPSS 2.5W UV LASER The Vanguard 2.5 W Advantage Rugged industrial platform Outstanding beam performance and power stability Closed-loop power control Near diffraction limited TEM 00 output RS 232 interface for system control and diagnostics Hands off, motorized control via RS 232 to simplify preventative maintenance On-board data log of all key functional parameters Low maintenance power supply Extreme long-life diode Dependable supply chain and local worldwide service support The Spectra-Physics ® Vanguard™ 355-2500 is a state-of-the-art DPSS laser specifically designed to produce exceptionally reliable quasi-CW UV output. This rugged OEM laser uses advanced mode-locking technology to deliver 2.5 W of picosecond pulses at 355 nm with low noise and excellent TEM 00 mode quality. The Vanguard 355-2500 laser features high stability beam characteristics and low cost of ownership necessary for a variety of OEM applications. Designed for the stringent demands of semiconductor wafer processing, the Vanguard 355-2500 is also ideal for a wide range of micro-material processing applications. The Vanguard series of lasers are field proven with over 1,000 systems in tough 24/7 operations. Every feature on the Vanguard 355-2500 laser is designed for these conditions. The system can be remotely controlled via RS 232 interface, and incorporates extensive on-board data logging of key parameters. Closed-loop power control ensures consistent UV output power to less then 2% variation from specified level. Hands-off, motorized control of the THG crystal and SESAM increases ease of use, and extends the Vanguard laser’s operational life. The diode module is a proprietary design for exceptionally long life, and is located remotely in the power supply, enabling easy replacement without laser head alignment. Newport and Spectra-Physics control the production of all key elements: SESAM, optical substrates, coatings, power supply and fiber-coupled diodes. Each component has been designed in-house and tightly controlled through our supply chain. In addition, OEMs requiring high uptime and consistent performance over a long life have the assurance of the Spectra-Physics Vanguard 355-2500. World-class field service and expert technical support come standard from the global leader in photonics. APPLICATIONS Wafer inspection Laser direct imaging Solar cell processing Polyimide cutting and drilling LED processing Glass cutting Various micro-material processing

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Page 1: Vanguard 355-2500 Vanguard 355-2500 laser features high stability beam characteristics and low cost of ownership necessary for a variety of OEM applications. Designed for the stringent

Family of Brands – Corion® • New Focus™ • Oriel® Instruments • Richardson Gratings™ • Spectra-Physics®

Vanguard™ 355-2500Q U A S I - C W D P S S 2 . 5 W U V L A S E R

The Vanguard 2.5 W Advantage

• Rugged industrial platform

• Outstanding beam performance and power stability

• Closed-loop power control

• Near diffraction limited TEM00 output

• RS 232 interface for system control and diagnostics

• Hands off, motorized control via RS 232 to simplifypreventative maintenance

• On-board data log of all key functional parameters

• Low maintenance power supply

• Extreme long-life diode

• Dependable supply chain and local worldwide servicesupport

The Spectra-Physics® Vanguard™ 355-2500 is a state-of-the-art DPSS laser specificallydesigned to produce exceptionally reliable quasi-CW UV output. This rugged OEM laseruses advanced mode-locking technology to deliver 2.5 W of picosecond pulses at 355 nmwith low noise and excellent TEM00 mode quality.

The Vanguard 355-2500 laser features high stability beam characteristics and low cost ofownership necessary for a variety of OEM applications. Designed for the stringentdemands of semiconductor wafer processing, the Vanguard 355-2500 is also ideal for awide range of micro-material processing applications.

The Vanguard series of lasers are field proven with over 1,000 systems in tough 24/7operations. Every feature on the Vanguard 355-2500 laser is designed for these conditions.The system can be remotely controlled via RS 232 interface, and incorporates extensiveon-board data logging of key parameters. Closed-loop power control ensures consistentUV output power to less then 2% variation from specified level. Hands-off, motorizedcontrol of the THG crystal and SESAM increases ease of use, and extends the Vanguardlaser’s operational life. The diode module is a proprietary design for exceptionally long life,and is located remotely in the power supply, enabling easy replacement without laserhead alignment.

Newport and Spectra-Physics control the production of all key elements: SESAM, opticalsubstrates, coatings, power supply and fiber-coupled diodes. Each component has beendesigned in-house and tightly controlled through our supply chain. In addition, OEMsrequiring high uptime and consistent performance over a long life have the assurance ofthe Spectra-Physics Vanguard 355-2500. World-class field service and expert technicalsupport come standard from the global leader in photonics.

A P P L I C A T I O N S

• Wafer inspection

• Laser direct imaging

• Solar cell processing

• Polyimide cutting and drilling

• LED processing

• Glass cutting

• Various micro-material processing

Page 2: Vanguard 355-2500 Vanguard 355-2500 laser features high stability beam characteristics and low cost of ownership necessary for a variety of OEM applications. Designed for the stringent

Family of Brands – Corion® • New Focus™ • Oriel® Instruments • Richardson Gratings™ • Spectra-Physics®

2.15(54.6)3.8

(96.5)3.0(76.2)

4.33(109.9)

1.06(26.9)

0.79(20.1)

3.01(76.5)

6.33(160.2)

29.27(743.6)

Top View24.1

(613.5)

5.75(146.1)

9.30(236.2)

34.5(867.4)

2.89(73.5)

8.05(204.5)

0.55(14)

4.95(125.7)

4.30(109.2)

Side View

Dimensions in inches (mm)Front View

PHONE EMAILBelgium +32-(0)0800-11 257 [email protected] +86-10-6267-0065 [email protected] +33-(0)1-60-91-68-68 [email protected] +81-3-3794-5511 [email protected] +886 -(0)2-2508-4977 [email protected]

PHONE EMAILIrvine, CA, USA +1-800-222-6440 [email protected] +31-(0)30 6592111 [email protected] Kingdom +44-1235-432-710 [email protected] / Austria / Switzerland

+49-(0)6151-708-0 [email protected]

3635 Peterson Way, Santa Clara, CA 95054, USA

PHONE: 1-800-775-5273 1-408-980-4300 FAX: 1-408-980-6923 EMAIL: [email protected]

www.newport.com/spectra-physics

Newport Corporation, Irvine, California and Franklin, Massachusetts; Evry andBeaune-La-Rolande, France and Wuxi, China have all been certified compliant withISO 9001 by the British Standards Institution. Santa Clara, California is DNV certified. Complete listings for all global office locations are available online at www.newport.com/contact

Newport Corporation, Global Headquarters PHONE: 1-800-222-6440 1-949-863-31441791 Deere Avenue, Irvine, CA 92606, USA EMAIL: [email protected]

Vanguard™ 355-2500Specifications

General Characteristics1

Wavelength 355 nm

Power 2.5 W

Repetition Rate 80 MHz ±2

Pulse Width2 <10 ps

Beam CharacteristicsSpatial Mode TEM00

M2 <1.2

Far Field Divergence, full angle <1 mrad

Beam Diameter (1/e2) 1.0 mm nominal

Beam Pointing Stability <25 mrad/°C

Beam Beam Ellipticity <20% far field

Average Power Stability3 <2%

Amplitude Noise <1% rms, 10 Hz to 2 MHz

Polarization Ratio >100:1 vertical

Operating ConditionsCold Turn-on Time (AC off to full power) <30 min

Cold Turn-on Time (AC off to full specs) <1 hr

Temperature Range 20–27°C

UtilitiesAC Input 100–240 VAC ±10%, 50–60 Hz

Power Consumption <1000 W (500 W typical)

Cooling Requirements Re-circulating water chiller (100 W capacity,nominally 20°C at 2.7 l/min), Additional

electrical power required.

1. Due to our continuous product improvement, all specifications are subject to changewithout notice.

2. Contact Spectra-Physics for other repetition rates. 3. Interpolated from measurements of the fundamental 1064 nm pulse. A sech2 (0.65

deconvolution factor) shape is used to determine the 1064 nm pulse width asmeasured with Spectra-Physics model 409 autocorrelator.

4. Percentage power drift in any two-hour period with less than ±2°C temperaturechange after a one-hour warm up.

5. Recirculated chiller water can tighten pulse repetition rate tolerance (contactSpectra-Physics for further guidance.)

Vanguard 355-2500 Dimensions

© 2010 Newport Corporation. All rights reserved. Spectra-Physics, the Spectra-Physics logo and the Newport logo are registered trademarks of Newport Corporation.Vanguard is a trademark of Newport Corporation. DS-041002