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Dr. Ahmed H. Madian-VLSI 1 Very Large Scale Integration (VLSI) Dr. Ahmed H. Madian [email protected] Lecture 2

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Page 1: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

Dr. Ahmed H. Madian-VLSI 1

Very Large Scale Integration (VLSI)

Dr. Ahmed H. [email protected]

Lecture 2

Page 2: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

Dr. Ahmed H. Madian-VLSI 2

Contents

Wiring tracks Circuit characterization & performance

Resistance estimation Capacitance estimation Inductance estimation

Delay estimation Simple RC model Penfield-Rubenstein Model

Delay minimization techniques Transistor sizing Distributed drivers Large driver

Wiring techniques

Page 3: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

3

Types of Design Rules

Scalable Design Rules (e.g. SCMOS)

Based on scalable “coarse grid” - l (lambda)

Idea: reduce l value for each new process, but keep rules the same

Key advantage: portable layout

Key disadvantage: not everything scales the same

Not used in “real life”

Absolute Design Rules

Based on absolute distances (e.g. 0.75µm)

Tuned to a specific process (details usually proprietary)

Complex, especially for deep submicron

Layouts not portable

Dr. Ahmed H. Madian-VLSI

Page 4: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

4

SCMOS Design Rules

Intended to be Scalable

Original rules: SCMOS

Submicron: SCMOS-SUBM

Deep Submicron: SCMOS-DEEP

Authoritative Reference: www.mosis.org

Dr. Ahmed H. Madian-VLSI

Page 5: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

Dr. Ahmed H. Madian-VLSI 5

Contents

Wiring tracks Circuit characterization & performance

Resistance estimation Capacitance estimation Inductance estimation

Page 6: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

Dr. Ahmed H. Madian-VLSI 6

Wiring Tracks

A wiring track space required for a wire

4l width, 4l spacing from the neighbor=8 l

Transistor consumes one wiring track

4l

4l

4l

4l

Page 7: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

Dr. Ahmed H. Madian-VLSI 7

Area Estimation

Estimate Area by Counting wiring tracks

Multiply by 8 (4Width + 4Spacing) to express in l

40l

32l

Page 8: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

Dr. Ahmed H. Madian-VLSI 8

Latch up

Latch up is a condition that can occur in a circuit fabricated in a bulk CMOS technology.

N+ N+ P+ P+

VDDGND

N-well

P

N

P

N

VDD

Page 9: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

Dr. Ahmed H. Madian-VLSI 9

P-substrate

Latch up Prevention

This could be corrected by: Include an N-well contact every time a pFET is connected to VDD

Include an p-substrate contact every time a NFET is connected to GND

N+ N+ P+ P+

VDDGND

N-well

VDDGND

Page 10: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

Dr. Ahmed H. Madian-VLSI 10

Circuit characterization & performance

Resistance estimation

Capacitance estimation

Inductance estimation

Page 11: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

11

Parastic Elements

So far, we’ve concentrated on getting circuit elements that we want for digital design

Transistors

Wires

Parasitics - occur whether we want them or not

Capacitors

Resistors

Transistors (bipolar and FET)

Page 12: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

Dr. Ahmed H. Madian-VLSI 12

Resistance estimation

Resistance of uniform slab can be given as,

Where = resistivity

t= thickness

l= conductor length

w=conductor width

or,

Rs is the sheet resistance /

ohmsw

l

tR .

ohmsw

lRR s .

I

l

t

w

Page 13: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

Dr. Ahmed H. Madian-VLSI 13

Resistance estimation (cont.)

Resistance of certain layers

Rs (/)Material

0.03metal

15100Poly

80Diffusion p

35Diffusion n

24Silicide

1K 5KN-well

Page 14: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

Dr. Ahmed H. Madian-VLSI 14

Resistance estimation

For MOSFET channel resistance

Rchannel = RSheet (L/W)

where Rsheet = 1/µCOX(Vgs-Vt)

For P and n channels

Rsheet = 1000 ->30,000 /

N+ N +L

channel

L

W

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Dr. Ahmed H. Madian-VLSI 15

Resistance estimation (cont.) Resistance of non rectangular regions

W1

W2

W2

W1

W2

W1

L

Ratio = 2L/(L+2W1)

L

W

Ratio =L/W Ratio =L/W

W2

W1

L

Ratio =W1/W2

W2 W2

W1

W1

Ratio =W2/W1

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16

Resistance Depends on resistivity of material (Rho)

Sheet resistance Rs = /t

Resistance R = Rs * L / W

Corner approximation - count a corner as half a square

Corner (1/2 Square)

Corner (1/2 Square) 1/2 Square

Corner (1/2 Square)

1/2 Square

Example:

R = Rs(poly) * 13 + 2*(1/2) + 3*(1/2) squares

R = 4Ω/sq * 15.5 squares = 62Ω

Page 17: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

Resistance Layout

20Kohm(10 μm long) 2Mohm (1000μm long)

Dr. Ahmed H. Madian-VLSI 17

Page 18: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

Dr. Ahmed H. Madian-VLSI 18

Inverter resistance estimation

CMOS inverter (no static current)

Switching current

VDD

Vin

VGS

VOUT = VDSIL

IDS

MP

MN

Vin Vout

VDD

Rs,p (L/W)

Rs,n (L/W)

351025

1

,,max

,,

max

DDDD

nsps

DD

nsps

DD

total

DD

VV

RR

VI

WLfor

W

LR

W

LR

V

R

VI

35.

2

maxDD

VVIlosspowerswitching DD

Page 19: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

Dr. Ahmed H. Madian-VLSI 19

Circuit characterization & performance

Resistance estimation

Capacitance estimation

Transistor capacitance

Routing capacitance

Inductance estimation

Delay estimation

Page 20: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

Dr. Ahmed H. Madian-VLSI 20

Capacitance estimation

The dynamic response of MOS systems strongly depends on the parasitic capacitances associated with the MOS device. The total load capacitance on the output of a CMOS gate is the sum of: gate capacitance (of other inputs connected to out)

diffusion capacitance (of drain/source regions)

routing capacitances (output to other inputs)

gate

drain

source

substrate

CGD

CGS CSB

CDB

CGB

Page 21: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

21

Capacitance (1/2)

Transistors

Depends on area of transistor gate

Depends on physical materials, thickness of insulator

Given for a specific process as Cg

Diffusion to substrate

Side-wall capacitance - capacitance from periphery

bottom-wall capacitance - capacitance to substrate

Given for a specific process as Cdiff,bot, Cdiff,side

Dr. Ahmed H. Madian-VLSI

Page 22: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

22

Capacitance (2/2)

Metal to substrate

Parallel plate capacitance is dominant

Need to account for fringing, too

Poly to substrate

Parallel plate plus fringing, like metal

don’t confuse poly over substrate with gate capacitance

Also important: capacitance between conductors

Metal1-Metal1

Metal1-Metal2

Dr. Ahmed H. Madian-VLSI

Page 23: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

Dr. Ahmed H. Madian-VLSI 23

Capacitance estimation (cont.)

Gate capacitance

Diffusion capacitance

Routing capacitance

Cdiff >Cpoly>Cm1>Cm2

n+substrate

gate

insulatorCgate

Cdiff.

gate

n+substrate

Metal layer

Crouting

Page 24: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

Dr. Ahmed H. Madian-VLSI 24

Capacitance estimation

In general, capacitance could be calculated using

d

A

d

AC ro ...

oxro

areaunit Cd

C .

/ d

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Dr. Ahmed H. Madian-VLSI 25

Gate Capacitance

Cg = Cgs + Cgd + Cgb

Page 26: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

Dr. Ahmed H. Madian-VLSI 26

Capacitance estimation (cont.)

Diffusion capacitance (source/drain)Source

Diffusion

Area

Drain

Diffusion

Area

b

a

Gate

insulatorCJP

Side wall capacitance

CJa

area capacitance

PCACC sidewallsdAreaddiffs .. ,,,

Where A = area and p = perimeters

Page 27: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

Dr. Ahmed H. Madian-VLSI 27

Routing capacitance

single conductor capacitance

multiple conductor capacitance

Page 28: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

Dr. Ahmed H. Madian-VLSI 28

Capacitance estimation (cont.)

Metal 1

substrate

Fringing capacitance

2222

1ln

22

t

h

t

h

t

hh

tw

Ctotal

Routing capacitance: a) single conductor capacitance

w h

t

Half cylinders

Page 29: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

Dr. Ahmed H. Madian-VLSI 29

Capacitance estimation (cont.)

Metal 2

Metal 1

substrate

C12

C2

C1

C1C2

C12

Metal 2Metal 1Vin

Vout

122

12.CC

CVV inout

Routing capacitance: b) multiple conductor capacitance

Page 30: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

Dr. Ahmed H. Madian-VLSI 30

Multilayer capacitance calculations

Example: given the layout shown in the figure calculate the

total capacitance at source and gate given that:

Cmetal/Area = 0.025µF/µm2

Cpoly/Area = 0.045µF/µm2

CGate/A = 0.7 fF/µm2

Cd,a/A = 0.33fF/µm2

Cd,side/L = 2.6fF/µm

l = 5.1µm

100l

3l CM

4l

4l

2l

3l

2l

4l4l 2l

CMP

CP1

Cgate

CP1

Page 31: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

Dr. Ahmed H. Madian-VLSI 31

Solution

100l

3l CM

4l

4l

2l

3l

2l

4l4l 2l

CMP

CP1

Cgate

CP1

Source capacitance

CS,diff = Cd,A . A + Cd,side walls . P

A = 4l * 3l = 12 l2

P = 2*(4l + 3l)=14 l

So, CS, diff = 0.33* 12 l2+2.6* 14 l=63.51fF

Cs

S D

G

CG

CD

Page 32: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

Dr. Ahmed H. Madian-VLSI 32

Solution (cont.)100l

3l CM

4l

4l

2l

3l

2l

4l4l 2l

CMP

CP1

Cgate

CP1

Gate capacitance

CG,total = CM + CMP+CP1+CG+CP2

CM = 0.025 * 100l*3 l=7.5l2

CMP = 0.045 * 4l* 4 l = 0.72l2

CP1 = 0.045 * 2l* 2l = 0.18l2

CP2 = 0.045 * 2l* 2l = 0.18l2

CG = 0.7 * 2l* 3l = 4.2l2 CM CMP CP1 Cgate CP1

Page 33: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

33

Example Problems -Parasitic Calculation (1/10)

poly

metal1

ndiff

Rmetal1=?

Cmetal1=?

Rpoly=?

Cpoly=?

Rndiff=?

Cndiff=?

1l=0.25µm

30l

Dr. Ahmed H. Madian-VLSI

Page 34: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

34

Example Problems -Parasitic Calculation (2/10)

poly

metal1

ndiff

1l=0.25µm

30l

Rmetal1 = (30l / 3l) * 0.08Ω/o = 0.8Ω

Cmetal1 = (30l * 0.25µm/l) * (3l * 0.25µm/l) * 0.04fF/µm2 +

(30l + 3l 30l + 3l) * 0.25µm/l * 0.09fF/µm

= 0.225fF + 1.485fF

= 1.71fF

Dr. Ahmed H. Madian-VLSI

Page 35: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

35

Example Problems -Parasitic Calculation (3/10)

poly

metal1

ndiff

1l=0.25µm

30l

Rndiff = (11l / 3l) * 2Ω/o = 7.33Ω

Cndiff = (11l * 0.25µm/l) * (3l * 0.25µm/l) * 0.6fF/µm2 +

(11l + 3l 11l + 3l) * 0.25µm/l * 0.2fF/µm

= 1.24fF + 1.4fF

= 2.64fF

Dr. Ahmed H. Madian-VLSI

Page 36: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

36

Example Problems -Parasitic Calculation (4/10)

poly

metal1

ndiff

1l=0.25µm

30l

Rpoly = ((3l / 2l) + 1/2o + (8l / 2l)) * 4Ω/o = 24Ω

Cpoly = ( ((3l * 0.25µm/l) * (2l * 0.25µm/l))

((10l * 0.25µm/l) * (2l * 0.25µm/l))) * 0.09fF/µm2 +

(5l + 10l 2l + 8l + 3l + 2l) * 0.25µm/l * 0.04fF/µm

= 0.15fF + 0.3fF

= 0.45fF

Corner approx.

1/2o

Dr. Ahmed H. Madian-VLSI

Page 37: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

37

Example Problems -Parasitic Calculation (5/10)

poly

metal1

ndiff

1l=0.25µm

30l

Rmetal1=0.8Ω

Cmetal1= 1.71fF

Rndiff=7.33Ω

Cndiff= 2.64fF

Rpoly=24Ω

Cpoly= 0.45fF

Dr. Ahmed H. Madian-VLSI

Page 38: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

38

Example Problems -Parasitic Calculation (6/10)

A

1l=0.25µm

What are the parasitic capacitances visible from point “A”?

Dr. Ahmed H. Madian-VLSI

Page 39: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

39

Example Problems -Parasitic Calculation (7/10)

A

1l=0.25µm

What are the parasitic capacitances visible from point “A”?

Cpoly = (6l * 0.25µm/l) * (2l * 0.25µm/l) * 0.09fF/µm2 +

(6l + 2l 6l + 2l) * 0.25µm/l * 0.04fF/µm

= 0.675fF + 0.16fF

= 0.84fF

Dr. Ahmed H. Madian-VLSI

Page 40: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

40

Example Problems -Parasitic Calculation (8/10)

A

1l=0.25µm

What are the parasitic capacitances visible from point “A”?

Cgate = (3l * 0.25µm/l) * (2l * 0.25µm/l) * 0.9fF/µm2

= 0.34fF

Remember: use Cg, not Cpoly for transistor gates!

Dr. Ahmed H. Madian-VLSI

Page 41: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

41

Example Problems -Parasitic Calculation (9/10)

A

1l=0.25µm

What are the parasitic capacitances visible from point “A”?

Coverhang = (2l * 0.25µm/l) * (2l * 0.25µm/l) * 0.09fF/µm2 +

(2l + 2l 2l + 2l) * 0.25µm/l * 0.04fF/µm

= 0.0225fF + 0.08fF

= 0.1fF

Dr. Ahmed H. Madian-VLSI

Page 42: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

42

A

1l=0.25µm

What are the parasitic capacitances visible from point “A”?

Example Problems -Parasitic Calculation (10/10)

Dr. Ahmed H. Madian-VLSI

Page 43: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

Dr. Ahmed H. Madian-VLSI 43

Contents

Wiring tracks Latch-up Circuit characterization & performance Resistance estimation Capacitance estimation Inductance estimation Delay estimation

Simple RC model Penfield-Rubenstein Model

Delay minimization techniques Transistor sizing Distributed drivers Large driver

Wiring techniques

Page 44: Very Large Scale Integration (VLSI) Very... · 2019-09-14 · Absolute Design Rules Based on absolute distances (e.g. 0.75µm) Tuned to a specific process (details usually proprietary)

Dr. Ahmed H. Madian-VLSI 44

Inductance estimation Inductance is normally small but as the process shrink on-chip inductance must be

taken into account.

Bond-wire inductance can cause deleterious effects in large, high speed I/O buffers.

The inductance of bonding wires and the pins on packages could be calculated by,

d

h

w

hL

48ln

2

substrate

h

W

Design techniques to overcome this problem:

separate power pins for I/O pads and chip core

multiple power and ground pins

careful selection of the position of the power and

ground pins on the package

adding decoupling capacitances on the board

increase the rise and fall times

use advanced package technologies (SMD, etc)