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Page 1: wacoh.co.jpwacoh.co.jp/research/pdf/6.pdfAx Ay LIL2L3L4 0000 L5L6L7L8 0000 charge — charge 0 : no charge (a) (b) Piezoresis. Ca acitance Piezoelectric 1 mV/VDD/G 0.05 F/G 1 0/0FS
Page 2: wacoh.co.jpwacoh.co.jp/research/pdf/6.pdfAx Ay LIL2L3L4 0000 L5L6L7L8 0000 charge — charge 0 : no charge (a) (b) Piezoresis. Ca acitance Piezoelectric 1 mV/VDD/G 0.05 F/G 1 0/0FS
Page 3: wacoh.co.jpwacoh.co.jp/research/pdf/6.pdfAx Ay LIL2L3L4 0000 L5L6L7L8 0000 charge — charge 0 : no charge (a) (b) Piezoresis. Ca acitance Piezoelectric 1 mV/VDD/G 0.05 F/G 1 0/0FS
Page 4: wacoh.co.jpwacoh.co.jp/research/pdf/6.pdfAx Ay LIL2L3L4 0000 L5L6L7L8 0000 charge — charge 0 : no charge (a) (b) Piezoresis. Ca acitance Piezoelectric 1 mV/VDD/G 0.05 F/G 1 0/0FS